HK1058090A1 - Network-based photomask data entry interface and instruction generator for manufacturing photomasks - Google Patents

Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Info

Publication number
HK1058090A1
HK1058090A1 HK04100853A HK04100853A HK1058090A1 HK 1058090 A1 HK1058090 A1 HK 1058090A1 HK 04100853 A HK04100853 A HK 04100853A HK 04100853 A HK04100853 A HK 04100853A HK 1058090 A1 HK1058090 A1 HK 1058090A1
Authority
HK
Hong Kong
Prior art keywords
network
data entry
entry interface
instruction generator
photomask data
Prior art date
Application number
HK04100853A
Other languages
English (en)
Inventor
Thomas T Cogdell
Jeffry S Schepp
Jan E Gentry
Original Assignee
Toppan Photomasks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Photomasks Inc filed Critical Toppan Photomasks Inc
Publication of HK1058090A1 publication Critical patent/HK1058090A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q30/00—Commerce
    • G06Q30/02—Marketing; Price estimation or determination; Fundraising
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q30/00—Commerce
    • G06Q30/04—Billing or invoicing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q30/00—Commerce
    • G06Q30/06—Buying, selling or leasing transactions
    • G06Q30/0601—Electronic shopping [e-shopping]
    • G06Q30/0603—Catalogue ordering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31761—Patterning strategy
    • H01J2237/31762—Computer and memory organisation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing
HK04100853A 2000-07-05 2004-02-09 Network-based photomask data entry interface and instruction generator for manufacturing photomasks HK1058090A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/610,917 US6622295B1 (en) 2000-07-05 2000-07-05 Network-based photomask data entry interface and instruction generator for manufacturing photomasks
PCT/US2001/021020 WO2002003141A2 (en) 2000-07-05 2001-06-29 Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Publications (1)

Publication Number Publication Date
HK1058090A1 true HK1058090A1 (en) 2004-04-30

Family

ID=24446917

Family Applications (1)

Application Number Title Priority Date Filing Date
HK04100853A HK1058090A1 (en) 2000-07-05 2004-02-09 Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Country Status (8)

Country Link
US (3) US6622295B1 (zh)
EP (1) EP1297455A2 (zh)
JP (1) JP4873678B2 (zh)
CN (1) CN1251119C (zh)
AU (1) AU2001273139A1 (zh)
HK (1) HK1058090A1 (zh)
TW (1) TWI226555B (zh)
WO (1) WO2002003141A2 (zh)

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Also Published As

Publication number Publication date
US6968530B2 (en) 2005-11-22
WO2002003141A2 (en) 2002-01-10
US6622295B1 (en) 2003-09-16
WO2002003141A8 (en) 2003-11-06
TWI226555B (en) 2005-01-11
WO2002003141A3 (en) 2002-08-15
US7398509B2 (en) 2008-07-08
AU2001273139A1 (en) 2002-01-14
CN1251119C (zh) 2006-04-12
US20060074510A1 (en) 2006-04-06
JP2004502972A (ja) 2004-01-29
CN1452749A (zh) 2003-10-29
EP1297455A2 (en) 2003-04-02
US20040054982A1 (en) 2004-03-18
JP4873678B2 (ja) 2012-02-08

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20120629