FR2893406B1 - Sonde de mesure,en particulier pour un dispositif de mesure de l'epaisseur de couches minces. - Google Patents

Sonde de mesure,en particulier pour un dispositif de mesure de l'epaisseur de couches minces.

Info

Publication number
FR2893406B1
FR2893406B1 FR0609779A FR0609779A FR2893406B1 FR 2893406 B1 FR2893406 B1 FR 2893406B1 FR 0609779 A FR0609779 A FR 0609779A FR 0609779 A FR0609779 A FR 0609779A FR 2893406 B1 FR2893406 B1 FR 2893406B1
Authority
FR
France
Prior art keywords
measuring
layer thickness
thick layer
probe
measuring probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0609779A
Other languages
English (en)
Other versions
FR2893406A1 (fr
Inventor
Helmut Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Publication of FR2893406A1 publication Critical patent/FR2893406A1/fr
Application granted granted Critical
Publication of FR2893406B1 publication Critical patent/FR2893406B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
FR0609779A 2005-11-14 2006-11-09 Sonde de mesure,en particulier pour un dispositif de mesure de l'epaisseur de couches minces. Expired - Fee Related FR2893406B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005054593.9A DE102005054593B4 (de) 2005-11-14 2005-11-14 Messonde zur Messung der Dicke dünner Schichten

Publications (2)

Publication Number Publication Date
FR2893406A1 FR2893406A1 (fr) 2007-05-18
FR2893406B1 true FR2893406B1 (fr) 2014-02-14

Family

ID=37547247

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0609779A Expired - Fee Related FR2893406B1 (fr) 2005-11-14 2006-11-09 Sonde de mesure,en particulier pour un dispositif de mesure de l'epaisseur de couches minces.

Country Status (6)

Country Link
US (1) US7472491B2 (fr)
JP (1) JP5603532B2 (fr)
CN (1) CN1975319B (fr)
DE (1) DE102005054593B4 (fr)
FR (1) FR2893406B1 (fr)
GB (1) GB2432216B (fr)

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US11291443B2 (en) * 2005-06-03 2022-04-05 Covidien Lp Surgical stapler with timer and feedback display
JP5179760B2 (ja) * 2007-02-05 2013-04-10 株式会社ミツトヨ 座標測定用補助具、座標測定用プローブ及び座標測定機
DE202010006062U1 (de) 2010-04-23 2010-07-22 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten
DE202010006061U1 (de) 2010-04-23 2010-07-22 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten
DE102010020116A1 (de) 2010-05-10 2011-11-10 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten an großflächigen Messoberflächen
DE102010034482A1 (de) 2010-08-10 2012-04-19 Carl Zeiss Industrielle Messtechnik Gmbh Sensoranordnung und Verfahren zum Bestimmen einer räumlichen Position eines ersten Teils relativ zu einem zweiten Teil
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CN103703362B (zh) * 2011-05-25 2017-02-15 赫尔穆特费希尔有限责任公司电子及测量技术研究所 用于测量薄层的厚度的测量探头及用于制造用于测量探头的传感器元件的方法
DE102011103123A1 (de) 2011-05-25 2012-11-29 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur Messung der Dicke dünner Schichten sowie ein Sensorelement für die Messsonde und ein Verfahren zu deren Herstellung
DE102011103122A1 (de) 2011-05-25 2012-11-29 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Aufsetzkalotte für eine Messsonde sowie Messsonde zur Messung der Dicke dünner Schichten
US9182212B2 (en) * 2012-11-07 2015-11-10 Olympus Ndt, Inc. Hall effect probe with exchangeable wear tips
DE102013104251A1 (de) 2013-04-26 2014-10-30 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur Messung der Dicke dünner Schichten
CN103616008B (zh) * 2013-11-28 2016-01-20 厦门大学 一种表面粗糙度仪探针保护装置
US9671421B2 (en) * 2015-04-24 2017-06-06 Horiba Stec, Co., Ltd. Micro-position gap sensor assembly
CN105547234A (zh) * 2015-12-30 2016-05-04 广西玉柴机器股份有限公司 发动机缸孔变形测量的辅助工装
DE102016007940A1 (de) * 2016-06-29 2018-01-04 Cab Produkttechnik Gesellschaft für Computer- und Automations-Bausteine mbH & Co. KG Etikettensensor zum Abtasten von Etiketten auf einem Trägerband
DE102017129150B4 (de) 2017-12-07 2020-03-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke von nicht magnetisierbaren Schichten auf einem magnetisierbaren Grundwerkstoff
GB201806830D0 (en) * 2018-04-26 2018-06-13 Renishaw Plc Surface finish stylus
KR101970241B1 (ko) * 2018-09-27 2019-04-18 인더스트뷰(주) 자석을 이용한 두께 측정장치
CN111922764B (zh) * 2020-09-22 2021-01-12 维嘉数控科技（苏州）有限公司 控深铣补偿深度探测机构及电路板控深铣装置
CN113418485B (zh) * 2021-06-08 2023-10-13 深圳市大族数控科技股份有限公司 测厚装置以及测厚方法

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Also Published As

Publication number Publication date
JP2007139769A (ja) 2007-06-07
DE102005054593B4 (de) 2018-04-26
GB2432216B (en) 2010-09-15
GB0621891D0 (en) 2006-12-13
JP5603532B2 (ja) 2014-10-08
CN1975319A (zh) 2007-06-06
CN1975319B (zh) 2012-11-07
GB2432216A (en) 2007-05-16
DE102005054593A1 (de) 2007-05-16
FR2893406A1 (fr) 2007-05-18
US7472491B2 (en) 2009-01-06
US20070186434A1 (en) 2007-08-16

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