FR2849182B1 - Dispositif pour la mesure de l'epaisseur de couches minces - Google Patents
Dispositif pour la mesure de l'epaisseur de couches mincesInfo
- Publication number
- FR2849182B1 FR2849182B1 FR0314170A FR0314170A FR2849182B1 FR 2849182 B1 FR2849182 B1 FR 2849182B1 FR 0314170 A FR0314170 A FR 0314170A FR 0314170 A FR0314170 A FR 0314170A FR 2849182 B1 FR2849182 B1 FR 2849182B1
- Authority
- FR
- France
- Prior art keywords
- measuring
- layer thickness
- thick layer
- thick
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10259696.4A DE10259696B4 (de) | 2002-12-18 | 2002-12-18 | Vorrichtung zum Messen der Dicke dünner Schichten |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2849182A1 FR2849182A1 (fr) | 2004-06-25 |
FR2849182B1 true FR2849182B1 (fr) | 2007-07-13 |
Family
ID=30128898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0314170A Expired - Fee Related FR2849182B1 (fr) | 2002-12-18 | 2003-12-03 | Dispositif pour la mesure de l'epaisseur de couches minces |
Country Status (6)
Country | Link |
---|---|
US (1) | US7076021B2 (fr) |
JP (1) | JP2004198416A (fr) |
CN (1) | CN100346134C (fr) |
DE (1) | DE10259696B4 (fr) |
FR (1) | FR2849182B1 (fr) |
GB (1) | GB2398632B (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004020370B4 (de) * | 2004-04-23 | 2006-11-16 | Sirona Dental Systems Gmbh | Röntgenstrahler und Verfahren zur Erzeugung und Darstellung von Röntgenbildern |
US7310410B2 (en) | 2004-07-28 | 2007-12-18 | General Electric Co. | Single-leaf X-ray collimator |
DE102005005835A1 (de) * | 2005-02-08 | 2006-08-10 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Verfahren zur Optimierung von Messzeiten einer Messvorrichtung |
CN1316229C (zh) * | 2005-09-30 | 2007-05-16 | 电子科技大学 | 无标样测量薄膜厚度和密度的方法 |
GB2495868B (en) * | 2009-03-18 | 2013-10-23 | Helmut Fischer Gmbh Inst Fur Elektronik Und Messtechnik | Measurement stand and method of its electrical control |
CN101587052B (zh) * | 2009-06-15 | 2011-03-30 | 浙江大学 | 基于x射线的密度、浓度和厚度测试装置及方法 |
JP6429787B2 (ja) * | 2013-10-11 | 2018-11-28 | 古河電気工業株式会社 | 被覆厚さ検査方法及び被覆厚さ検査装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3717768A (en) | 1970-02-09 | 1973-02-20 | Medinova Ab | X-ray filter device in combination with a positioning light converging means |
JPS54138656U (fr) | 1978-03-20 | 1979-09-26 | ||
DE3144145C2 (de) * | 1981-11-06 | 1986-06-19 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Blendenvorrichtung zum Messen dünner Schichten |
JPS5897504U (ja) * | 1981-12-24 | 1983-07-02 | セイコーインスツルメンツ株式会社 | 螢光x線膜厚計用コリメ−タ |
DE3234410A1 (de) * | 1982-09-16 | 1984-03-22 | Siemens AG, 1000 Berlin und 8000 München | Strahlenblende fuer ein roentgenuntersuchungsgeraet |
DE3239379A1 (de) * | 1982-10-23 | 1984-04-26 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Vorrichtung zum messen der dicke duenner schichten |
JPH0519839Y2 (fr) * | 1986-06-09 | 1993-05-25 | ||
DE68907924T2 (de) | 1988-01-20 | 1993-11-11 | Horiba Ltd | Röntgenstrahlvorrichtung, ausgestattet mit einem Strahlungsbereich-Monitor. |
JPH0581700U (ja) | 1992-04-07 | 1993-11-05 | セイコー電子工業株式会社 | 蛍光x線膜厚測定装置 |
DE4228082C1 (en) | 1992-08-24 | 1993-09-09 | Siemens Ag, 80333 Muenchen, De | Aperture esp. for X=ray beam - has aperture plate elastically conformable to test object shape |
DE4229320C2 (de) * | 1992-09-02 | 1995-02-02 | Siemens Ag | Einblendvorrichtung für Strahlengeräte mit wenigstens einer Blendenlamelle |
US5604353A (en) * | 1995-06-12 | 1997-02-18 | X-Ray Optical Systems, Inc. | Multiple-channel, total-reflection optic with controllable divergence |
JP3059402B2 (ja) | 1997-07-09 | 2000-07-04 | 理学電機工業株式会社 | 円筒結晶型分光装置とその製造方法 |
US6345086B1 (en) * | 1999-09-14 | 2002-02-05 | Veeco Instruments Inc. | X-ray fluorescence system and method |
-
2002
- 2002-12-18 DE DE10259696.4A patent/DE10259696B4/de not_active Expired - Fee Related
-
2003
- 2003-12-03 FR FR0314170A patent/FR2849182B1/fr not_active Expired - Fee Related
- 2003-12-10 JP JP2003411406A patent/JP2004198416A/ja active Pending
- 2003-12-11 GB GB0328815A patent/GB2398632B/en not_active Expired - Fee Related
- 2003-12-17 CN CNB200310123119XA patent/CN100346134C/zh not_active Expired - Fee Related
- 2003-12-17 US US10/739,673 patent/US7076021B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE10259696B4 (de) | 2018-07-05 |
CN1508513A (zh) | 2004-06-30 |
US20040131148A1 (en) | 2004-07-08 |
US7076021B2 (en) | 2006-07-11 |
GB2398632A (en) | 2004-08-25 |
FR2849182A1 (fr) | 2004-06-25 |
DE10259696A1 (de) | 2004-07-08 |
GB2398632B (en) | 2006-01-04 |
CN100346134C (zh) | 2007-10-31 |
GB0328815D0 (en) | 2004-01-14 |
JP2004198416A (ja) | 2004-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 13 |
|
PLFP | Fee payment |
Year of fee payment: 14 |
|
PLFP | Fee payment |
Year of fee payment: 15 |
|
PLFP | Fee payment |
Year of fee payment: 16 |
|
ST | Notification of lapse |
Effective date: 20200905 |