FR2847036B1 - Dispositif pour la mesure non destructive de l'epaisseur de couches minces - Google Patents
Dispositif pour la mesure non destructive de l'epaisseur de couches mincesInfo
- Publication number
- FR2847036B1 FR2847036B1 FR0313040A FR0313040A FR2847036B1 FR 2847036 B1 FR2847036 B1 FR 2847036B1 FR 0313040 A FR0313040 A FR 0313040A FR 0313040 A FR0313040 A FR 0313040A FR 2847036 B1 FR2847036 B1 FR 2847036B1
- Authority
- FR
- France
- Prior art keywords
- layer thickness
- thin layer
- destructive measurement
- destructive
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Indicating Measured Values (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10252541.2A DE10252541B4 (de) | 2002-11-08 | 2002-11-08 | Vorrichtung zur zerstörungsfreien Messung der Dicke dünner Schichten |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2847036A1 FR2847036A1 (fr) | 2004-05-14 |
FR2847036B1 true FR2847036B1 (fr) | 2005-11-11 |
Family
ID=29723942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0313040A Expired - Fee Related FR2847036B1 (fr) | 2002-11-08 | 2003-11-06 | Dispositif pour la mesure non destructive de l'epaisseur de couches minces |
Country Status (6)
Country | Link |
---|---|
US (1) | US7180286B2 (fr) |
JP (1) | JP2004163430A (fr) |
CN (1) | CN100429473C (fr) |
DE (1) | DE10252541B4 (fr) |
FR (1) | FR2847036B1 (fr) |
GB (1) | GB2396700B (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2383810B1 (es) * | 2009-12-22 | 2013-05-08 | Asociación De Investigación Metalúrgica Del Noroeste Aimen | Equipo móvil de inspección del espesor de recubrimientos de película seca, sistema de inspección del espesor de recubrimientos de película seca y procedimiento de inspección del espesor de recubrimientos de película seca. |
DE202010006061U1 (de) * | 2010-04-23 | 2010-07-22 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten |
WO2013089705A1 (fr) * | 2011-12-14 | 2013-06-20 | Intel Corporation | Intégration matérielle de micro-affichage dynamique |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2311623A1 (de) * | 1973-03-09 | 1974-09-12 | Fischer Gmbh & Co Helmut | Vorrichtung zum messen der dicke von schichten mit einem die schicht bestrahlenden radionuklid |
JPS49146970U (fr) * | 1973-04-16 | 1974-12-18 | ||
JPS5181684U (fr) * | 1974-12-23 | 1976-06-30 | ||
DE3432511A1 (de) * | 1983-09-05 | 1985-03-21 | Mitutoyo Mfg Co Ltd | Messgeraet mit digitalanzeige und einem speicher fuer die messwerte |
JPS6138503A (ja) * | 1984-07-31 | 1986-02-24 | Ketsuto Kagaku Kenkyusho:Kk | 膜厚計 |
US4745809A (en) * | 1986-08-12 | 1988-05-24 | Grumman Aerospace Corporation | Composite analyzer tester |
US5241280A (en) * | 1990-06-05 | 1993-08-31 | Defelsko Corporation | Coating thickness measurement gauge |
EP0576714B1 (fr) * | 1992-07-03 | 1995-03-15 | Norbert Dr. Nix | Dispositif pour mesurer une épaisseur de couche |
US5583830A (en) * | 1993-06-30 | 1996-12-10 | Casio Computer Co., Ltd. | Electronic appliance equipped with sensor capable of visually displaying sensed data |
FI115160B (fi) * | 1994-06-22 | 2005-03-15 | Suunto Oy | Optisesti luettava suuntimakompassi |
DE19511397C1 (de) * | 1995-03-28 | 1996-09-12 | Norbert Nix | Gerät zur Feststellung eines Lackschadens |
GB9520414D0 (en) * | 1995-10-06 | 1995-12-06 | Car Light & Sound Sys Ltd | Thickness measurement |
US5959451A (en) * | 1997-08-18 | 1999-09-28 | Torfino Enterprises, Inc. | Metal detector with vibrating tactile indicator mounted within a compact housing |
GB2347220B (en) * | 1999-02-23 | 2003-12-31 | Rynhart Res Ltd | A moisture meter |
DE19918064C2 (de) * | 1999-04-21 | 2003-09-18 | Norbert Nix | Schichtdickenmeßgerät mit automatisierter Nulleinstellung und/oder Kalibrierung |
GB2356050B (en) * | 1999-11-05 | 2001-10-24 | Elcometer Instr Ltd | Apparatus and method for measuring thickness |
DE20206657U1 (de) * | 2002-04-26 | 2002-09-19 | Gimex Dr Gao Imp U Exp Gmbh | Multianzeige für Digital-Meßmittel |
-
2002
- 2002-11-08 DE DE10252541.2A patent/DE10252541B4/de not_active Expired - Fee Related
-
2003
- 2003-11-04 GB GB0325704A patent/GB2396700B/en not_active Expired - Fee Related
- 2003-11-06 FR FR0313040A patent/FR2847036B1/fr not_active Expired - Fee Related
- 2003-11-07 CN CNB2003101148991A patent/CN100429473C/zh not_active Expired - Fee Related
- 2003-11-10 JP JP2003379634A patent/JP2004163430A/ja active Pending
- 2003-11-10 US US10/705,107 patent/US7180286B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR2847036A1 (fr) | 2004-05-14 |
JP2004163430A (ja) | 2004-06-10 |
US20040165198A1 (en) | 2004-08-26 |
GB2396700B (en) | 2005-11-16 |
CN1501048A (zh) | 2004-06-02 |
DE10252541B4 (de) | 2016-08-11 |
GB2396700A (en) | 2004-06-30 |
GB0325704D0 (en) | 2003-12-10 |
US7180286B2 (en) | 2007-02-20 |
CN100429473C (zh) | 2008-10-29 |
DE10252541A1 (de) | 2004-05-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 13 |
|
PLFP | Fee payment |
Year of fee payment: 14 |
|
PLFP | Fee payment |
Year of fee payment: 15 |
|
PLFP | Fee payment |
Year of fee payment: 16 |
|
ST | Notification of lapse |
Effective date: 20200910 |