FR2888663B1 - Procede de diminution de la rugosite d'une couche epaisse d'isolant - Google Patents

Procede de diminution de la rugosite d'une couche epaisse d'isolant

Info

Publication number
FR2888663B1
FR2888663B1 FR0507573A FR0507573A FR2888663B1 FR 2888663 B1 FR2888663 B1 FR 2888663B1 FR 0507573 A FR0507573 A FR 0507573A FR 0507573 A FR0507573 A FR 0507573A FR 2888663 B1 FR2888663 B1 FR 2888663B1
Authority
FR
France
Prior art keywords
substrate
insulator layer
less
roughness
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0507573A
Other languages
English (en)
French (fr)
Other versions
FR2888663A1 (fr
Inventor
Nicolas Daval
Sebastien Kerdiles
Cecile Aulnette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0507573A priority Critical patent/FR2888663B1/fr
Priority to US11/481,701 priority patent/US7446019B2/en
Priority to SG200901884-7A priority patent/SG151287A1/en
Priority to KR1020087001701A priority patent/KR100958467B1/ko
Priority to JP2008520879A priority patent/JP4927080B2/ja
Priority to AT06777736T priority patent/ATE524828T1/de
Priority to CN200680030390A priority patent/CN100576462C/zh
Priority to EP06777736A priority patent/EP1902463B1/fr
Priority to PCT/EP2006/064169 priority patent/WO2007006803A1/fr
Publication of FR2888663A1 publication Critical patent/FR2888663A1/fr
Application granted granted Critical
Publication of FR2888663B1 publication Critical patent/FR2888663B1/fr
Priority to US12/234,280 priority patent/US8183128B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/06—Planarisation of inorganic insulating materials
    • H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step
    • H10P95/064—Planarisation of inorganic insulating materials involving a dielectric removal step the removal being chemical etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Formation Of Insulating Films (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Magnetic Heads (AREA)
  • Element Separation (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
FR0507573A 2005-07-13 2005-07-13 Procede de diminution de la rugosite d'une couche epaisse d'isolant Expired - Fee Related FR2888663B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR0507573A FR2888663B1 (fr) 2005-07-13 2005-07-13 Procede de diminution de la rugosite d'une couche epaisse d'isolant
US11/481,701 US7446019B2 (en) 2005-07-13 2006-07-05 Method of reducing roughness of a thick insulating layer
KR1020087001701A KR100958467B1 (ko) 2005-07-13 2006-07-12 두꺼운 절연층의 거칠기도 감소 방법
JP2008520879A JP4927080B2 (ja) 2005-07-13 2006-07-12 厚い絶縁層の粗さを減少させるための方法
AT06777736T ATE524828T1 (de) 2005-07-13 2006-07-12 Verfahren zur verringerung der rauhigkeit einer dicken isolationsschicht
CN200680030390A CN100576462C (zh) 2005-07-13 2006-07-12 减小厚绝缘体层的粗糙度的方法
SG200901884-7A SG151287A1 (en) 2005-07-13 2006-07-12 Method for reducing roughness of a thick insulating layer
EP06777736A EP1902463B1 (fr) 2005-07-13 2006-07-12 Procede de diminution de la rugosite d'une couche epaisse d'isolant
PCT/EP2006/064169 WO2007006803A1 (fr) 2005-07-13 2006-07-12 Procede de diminution de la rugosite d'une couche epaisse d'isolant
US12/234,280 US8183128B2 (en) 2005-07-13 2008-09-19 Method of reducing roughness of a thick insulating layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0507573A FR2888663B1 (fr) 2005-07-13 2005-07-13 Procede de diminution de la rugosite d'une couche epaisse d'isolant

Publications (2)

Publication Number Publication Date
FR2888663A1 FR2888663A1 (fr) 2007-01-19
FR2888663B1 true FR2888663B1 (fr) 2008-04-18

Family

ID=36090950

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0507573A Expired - Fee Related FR2888663B1 (fr) 2005-07-13 2005-07-13 Procede de diminution de la rugosite d'une couche epaisse d'isolant

Country Status (9)

Country Link
US (2) US7446019B2 (https=)
EP (1) EP1902463B1 (https=)
JP (1) JP4927080B2 (https=)
KR (1) KR100958467B1 (https=)
CN (1) CN100576462C (https=)
AT (1) ATE524828T1 (https=)
FR (1) FR2888663B1 (https=)
SG (1) SG151287A1 (https=)
WO (1) WO2007006803A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8397360B2 (en) 2009-10-01 2013-03-19 Stmicroelectronics Sa Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
US8593234B2 (en) 2009-10-01 2013-11-26 Stmicroelectronics Sa Bragg mirror and BAW resonator with a high quality factor on the bragg mirror
US9647625B2 (en) 2009-10-01 2017-05-09 Stmicroelectronics Sa Method for manufacturing BAW resonators on a semiconductor wafer

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US7115530B2 (en) * 2003-12-03 2006-10-03 Texas Instruments Incorporated Top surface roughness reduction of high-k dielectric materials using plasma based processes
WO2006029651A1 (en) * 2004-09-16 2006-03-23 S.O.I.Tec Silicon On Insulator Technologies Method of manufacturing a silicon dioxide layer
FR2911598B1 (fr) * 2007-01-22 2009-04-17 Soitec Silicon On Insulator Procede de rugosification de surface.
FR2911597B1 (fr) * 2007-01-22 2009-05-01 Soitec Silicon On Insulator Procede de formation et de controle d'interfaces rugueuses.
FR2912839B1 (fr) * 2007-02-16 2009-05-15 Soitec Silicon On Insulator Amelioration de la qualite de l'interface de collage par nettoyage froid et collage a chaud
WO2008123116A1 (en) * 2007-03-26 2008-10-16 Semiconductor Energy Laboratory Co., Ltd. Soi substrate and method for manufacturing soi substrate
WO2008123117A1 (en) * 2007-03-26 2008-10-16 Semiconductor Energy Laboratory Co., Ltd. Soi substrate and method for manufacturing soi substrate
CN101281912B (zh) * 2007-04-03 2013-01-23 株式会社半导体能源研究所 Soi衬底及其制造方法以及半导体装置
CN102623400B (zh) 2007-04-13 2015-05-20 株式会社半导体能源研究所 显示器件、用于制造显示器件的方法、以及soi衬底
KR101440930B1 (ko) * 2007-04-20 2014-09-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Ｓｏｉ 기판의 제작방법
EP1993128A3 (en) * 2007-05-17 2010-03-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing soi substrate
US8513678B2 (en) 2007-05-18 2013-08-20 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US7763502B2 (en) * 2007-06-22 2010-07-27 Semiconductor Energy Laboratory Co., Ltd Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device
FR2923079B1 (fr) * 2007-10-26 2017-10-27 S O I Tec Silicon On Insulator Tech Substrats soi avec couche fine isolante enterree
WO2009057669A1 (en) * 2007-11-01 2009-05-07 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing photoelectric conversion device
JP5354900B2 (ja) * 2007-12-28 2013-11-27 株式会社半導体エネルギー研究所 半導体基板の作製方法
US8093136B2 (en) * 2007-12-28 2012-01-10 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
FR2926674B1 (fr) * 2008-01-21 2010-03-26 Soitec Silicon On Insulator Procede de fabrication d'une structure composite avec couche d'oxyde de collage stable
JP5503876B2 (ja) * 2008-01-24 2014-05-28 株式会社半導体エネルギー研究所 半導体基板の製造方法
US8119490B2 (en) * 2008-02-04 2012-02-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
US7858495B2 (en) * 2008-02-04 2010-12-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
JP4577382B2 (ja) * 2008-03-06 2010-11-10 信越半導体株式会社 貼り合わせウェーハの製造方法
KR101541940B1 (ko) * 2008-04-01 2015-08-04 신에쓰 가가꾸 고교 가부시끼가이샤 Ｓｏｉ 기판의 제조 방법
FR2931585B1 (fr) * 2008-05-26 2010-09-03 Commissariat Energie Atomique Traitement de surface par plasma d'azote dans un procede de collage direct
JP5548395B2 (ja) 2008-06-25 2014-07-16 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
JP5663150B2 (ja) * 2008-07-22 2015-02-04 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
US20100022070A1 (en) * 2008-07-22 2010-01-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing soi substrate
SG160295A1 (en) * 2008-09-29 2010-04-29 Semiconductor Energy Lab Method for manufacturing semiconductor device
US8741740B2 (en) * 2008-10-02 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
JP5496598B2 (ja) * 2008-10-31 2014-05-21 信越化学工業株式会社 シリコン薄膜転写絶縁性ウェーハの製造方法
FR2942911B1 (fr) * 2009-03-09 2011-05-13 Soitec Silicon On Insulator Procede de realisation d'une heterostructure avec adaptation locale de coefficient de dilatation thermique
JP5917036B2 (ja) 2010-08-05 2016-05-11 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
JP2012156495A (ja) 2011-01-07 2012-08-16 Semiconductor Energy Lab Co Ltd Ｓｏｉ基板の作製方法
EP3447789B1 (de) 2011-01-25 2021-04-14 EV Group E. Thallner GmbH Verfahren zum permanenten bonden von wafern
EP2695183A1 (de) 2011-04-08 2014-02-12 Ev Group E. Thallner GmbH Verfahren zum permanenten bonden von wafern
US8802534B2 (en) 2011-06-14 2014-08-12 Semiconductor Energy Laboratory Co., Ltd. Method for forming SOI substrate and apparatus for forming the same
KR102148336B1 (ko) * 2013-11-26 2020-08-27 삼성전자주식회사 표면 처리 방법, 반도체 제조 방법 및 이에 의해 제조된 반도체 장치
CN106170834B (zh) * 2014-01-29 2018-09-11 帕尔文纳纳桑·加内森 具有自冷式外壳结构和紧急热交换系统的浮动式核反应堆
US10049947B2 (en) 2014-07-08 2018-08-14 Massachusetts Institute Of Technology Method of manufacturing a substrate
FR3036200B1 (fr) * 2015-05-13 2017-05-05 Soitec Silicon On Insulator Methode de calibration pour equipements de traitement thermique
WO2017102383A1 (en) * 2015-12-18 2017-06-22 Asml Netherlands B.V. A method of manufacturing a membrane assembly for euv lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method
FR3045939B1 (fr) 2015-12-22 2018-03-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de collage direct entre deux structures
KR102509390B1 (ko) * 2017-07-24 2023-03-14 어플라이드 머티어리얼스, 인코포레이티드 산화규소 상의 초박형 비정질 규소 막의 연속성을 개선하기 위한 전처리 접근법
FR3079345B1 (fr) 2018-03-26 2020-02-21 Soitec Procede de fabrication d'un substrat pour dispositif radiofrequence
CN114203546B (zh) * 2020-09-18 2026-04-03 中芯集成电路（宁波）有限公司 半导体器件及其制造方法
JP7487659B2 (ja) * 2020-12-25 2024-05-21 株式会社Sumco Ｓｏｉウェーハの製造方法
CN114688950B (zh) * 2022-05-31 2022-08-23 陕西建工第一建设集团有限公司 一种建筑施工用铝合金板平整检测装置

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8397360B2 (en) 2009-10-01 2013-03-19 Stmicroelectronics Sa Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
US8593234B2 (en) 2009-10-01 2013-11-26 Stmicroelectronics Sa Bragg mirror and BAW resonator with a high quality factor on the bragg mirror
US9647625B2 (en) 2009-10-01 2017-05-09 Stmicroelectronics Sa Method for manufacturing BAW resonators on a semiconductor wafer

Also Published As

Publication number Publication date
SG151287A1 (en) 2009-04-30
CN100576462C (zh) 2009-12-30
US8183128B2 (en) 2012-05-22
KR100958467B1 (ko) 2010-05-17
JP4927080B2 (ja) 2012-05-09
CN101243545A (zh) 2008-08-13
EP1902463B1 (fr) 2011-09-14
US20090023267A1 (en) 2009-01-22
WO2007006803A1 (fr) 2007-01-18
FR2888663A1 (fr) 2007-01-19
KR20080031747A (ko) 2008-04-10
US7446019B2 (en) 2008-11-04
US20070020947A1 (en) 2007-01-25
EP1902463A1 (fr) 2008-03-26
JP2009501440A (ja) 2009-01-15
ATE524828T1 (de) 2011-09-15

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Legal Events

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Owner name: SOITEC, FR

Effective date: 20120423

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Effective date: 20140331