FR2404302B3 - - Google Patents

Info

Publication number
FR2404302B3
FR2404302B3 FR7827058A FR7827058A FR2404302B3 FR 2404302 B3 FR2404302 B3 FR 2404302B3 FR 7827058 A FR7827058 A FR 7827058A FR 7827058 A FR7827058 A FR 7827058A FR 2404302 B3 FR2404302 B3 FR 2404302B3
Authority
FR
France
Prior art keywords
aluminum
palladium
electroless plating
etchant
attacks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7827058A
Other languages
English (en)
French (fr)
Other versions
FR2404302A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of FR2404302A1 publication Critical patent/FR2404302A1/fr
Application granted granted Critical
Publication of FR2404302B3 publication Critical patent/FR2404302B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H10W72/012—
    • H10W72/019—
    • H10W72/251—
    • H10W72/252—
    • H10W72/255—
    • H10W72/923—
    • H10W72/952—

Landscapes

  • Chemically Coating (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR7827058A 1977-09-21 1978-09-21 Procede pour fabriquer des contacts en relief sur des circuits micro-electroniques Granted FR2404302A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/835,385 US4182781A (en) 1977-09-21 1977-09-21 Low cost method for forming elevated metal bumps on integrated circuit bodies employing an aluminum/palladium metallization base for electroless plating

Publications (2)

Publication Number Publication Date
FR2404302A1 FR2404302A1 (fr) 1979-04-20
FR2404302B3 true FR2404302B3 (esLanguage) 1981-07-03

Family

ID=25269380

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7827058A Granted FR2404302A1 (fr) 1977-09-21 1978-09-21 Procede pour fabriquer des contacts en relief sur des circuits micro-electroniques

Country Status (8)

Country Link
US (1) US4182781A (esLanguage)
JP (1) JPS5456764A (esLanguage)
DE (1) DE2839234A1 (esLanguage)
FR (1) FR2404302A1 (esLanguage)
GB (1) GB2004686B (esLanguage)
IT (1) IT1157176B (esLanguage)
MX (1) MX144954A (esLanguage)
NL (1) NL7809294A (esLanguage)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4293637A (en) * 1977-05-31 1981-10-06 Matsushita Electric Industrial Co., Ltd. Method of making metal electrode of semiconductor device
US4427715A (en) 1978-07-03 1984-01-24 National Semiconductor Corporation Method of forming expanded pad structure
US4273859A (en) * 1979-12-31 1981-06-16 Honeywell Information Systems Inc. Method of forming solder bump terminals on semiconductor elements
FI61588C (fi) * 1980-08-01 1982-08-10 Lohja Ab Oy Foerfarande foer utfoerande av elektriskt ledande genomfoeringar i tunnfilmer
US4420504A (en) * 1980-12-22 1983-12-13 Raytheon Company Programmable read only memory
DE3280233D1 (de) * 1981-09-11 1990-10-04 Toshiba Kawasaki Kk Verfahren zum herstellen eines substrats fuer multischichtschaltung.
DE3143995A1 (de) * 1981-11-05 1983-05-19 Preh, Elektrofeinmechanische Werke, Jakob Preh, Nachf. Gmbh & Co, 8740 Bad Neustadt Dickschichtkondensator in druckschaltungstechnik
US4481263A (en) * 1982-05-17 1984-11-06 Raytheon Company Programmable read only memory
US4461071A (en) * 1982-08-23 1984-07-24 Xerox Corporation Photolithographic process for fabricating thin film transistors
US4601939A (en) * 1983-09-20 1986-07-22 International Business Machines Corporation Composite insulator structure
US4600624A (en) * 1983-09-20 1986-07-15 International Business Machines Corporation Composite insulator structure
JPS6112094A (ja) * 1984-06-27 1986-01-20 日本メクトロン株式会社 フレキシブル回路基板の製造法
US5310699A (en) * 1984-08-28 1994-05-10 Sharp Kabushiki Kaisha Method of manufacturing a bump electrode
GB2176938A (en) * 1985-06-24 1987-01-07 Nat Semiconductor Corp Pad metallization structure
US4687552A (en) * 1985-12-02 1987-08-18 Tektronix, Inc. Rhodium capped gold IC metallization
US4692349A (en) * 1986-03-03 1987-09-08 American Telephone And Telegraph Company, At&T Bell Laboratories Selective electroless plating of vias in VLSI devices
US5169680A (en) * 1987-05-07 1992-12-08 Intel Corporation Electroless deposition for IC fabrication
JPS63305532A (ja) * 1987-06-05 1988-12-13 Toshiba Corp バンプの形成方法
JPS6418246A (en) * 1987-07-14 1989-01-23 Shinko Electric Ind Co Lead frame for semiconductor device
DE3885834T2 (de) * 1987-09-24 1994-04-28 Toshiba Kawasaki Kk Lötstelle und Verfahren zu ihrer Bewerkstelligung.
DE58908114D1 (de) * 1989-05-13 1994-09-01 Itt Ind Gmbh Deutsche Bipolarer Bump-Transistor und Verfahren zur Herstellung.
US5075259A (en) * 1989-08-22 1991-12-24 Motorola, Inc. Method for forming semiconductor contacts by electroless plating
JP3271272B2 (ja) * 1991-11-12 2002-04-02 日本電気株式会社 半導体装置の製造方法
US5461202A (en) * 1992-10-05 1995-10-24 Matsushita Electric Industrial Co., Ltd. Flexible wiring board and its fabrication method
US5515604A (en) * 1992-10-07 1996-05-14 Fujitsu Limited Methods for making high-density/long-via laminated connectors
WO1995002900A1 (en) * 1993-07-15 1995-01-26 Astarix, Inc. Aluminum-palladium alloy for initiation of electroless plating
US5478779A (en) * 1994-03-07 1995-12-26 Micron Technology, Inc. Electrically conductive projections and semiconductor processing method of forming same
US5326428A (en) * 1993-09-03 1994-07-05 Micron Semiconductor, Inc. Method for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability
FI946015L (fi) * 1994-07-08 1996-01-09 Picopak Oy Electroless-kontaktinystynmuodostusmenetelmä
US5559056A (en) * 1995-01-13 1996-09-24 National Semiconductor Corporation Method and apparatus for capping metallization layer
KR100438256B1 (ko) * 1995-12-18 2004-08-25 마츠시타 덴끼 산교 가부시키가이샤 반도체장치 및 그 제조방법
US5989993A (en) * 1996-02-09 1999-11-23 Elke Zakel Method for galvanic forming of bonding pads
US6558979B2 (en) * 1996-05-21 2003-05-06 Micron Technology, Inc. Use of palladium in IC manufacturing with conductive polymer bump
US5925930A (en) * 1996-05-21 1999-07-20 Micron Technology, Inc. IC contacts with palladium layer and flexible conductive epoxy bumps
US5957370A (en) * 1997-01-10 1999-09-28 Integrated Device Technology, Inc. Plating process for fine pitch die in wafer form
US6245594B1 (en) 1997-08-05 2001-06-12 Micron Technology, Inc. Methods for forming conductive micro-bumps and recessed contacts for flip-chip technology and method of flip-chip assembly
US6436816B1 (en) 1998-07-31 2002-08-20 Industrial Technology Research Institute Method of electroless plating copper on nitride barrier
US6544880B1 (en) * 1999-06-14 2003-04-08 Micron Technology, Inc. Method of improving copper interconnects of semiconductor devices for bonding
US6300250B1 (en) 1999-08-09 2001-10-09 Taiwan Semiconductor Manufacturing Company Method of forming bumps for flip chip applications
US6130149A (en) * 1999-08-16 2000-10-10 Taiwan Semiconductor Manufacturing Company Approach for aluminum bump process
JP3568869B2 (ja) * 2000-02-28 2004-09-22 シャープ株式会社 半導体集積回路装置及びその製造方法
US6858941B2 (en) * 2000-12-07 2005-02-22 International Business Machines Corporation Multi-chip stack and method of fabrication utilizing self-aligning electrical contact array
US7088004B2 (en) * 2002-11-27 2006-08-08 International Rectifier Corporation Flip-chip device having conductive connectors
US6823585B2 (en) * 2003-03-28 2004-11-30 International Business Machines Corporation Method of selective plating on a substrate
US20080001288A1 (en) * 2004-11-25 2008-01-03 Yoshimichi Sogawa Semiconductor Device and Manufacturing Method Thereof, Semiconductor Package, and Electronic Apparatus
JP4499752B2 (ja) * 2006-03-03 2010-07-07 日本エレクトロプレイテイング・エンジニヤース株式会社 電子部品
US10427277B2 (en) 2011-04-05 2019-10-01 Ingersoll-Rand Company Impact wrench having dynamically tuned drive components and method thereof
US9627335B2 (en) * 2014-05-08 2017-04-18 Infineon Technologies Ag Method for processing a semiconductor workpiece and semiconductor workpiece
CN106575555B (zh) * 2014-08-18 2018-11-23 株式会社村田制作所 电子部件以及电子部件的制造方法
CN111742395A (zh) * 2018-02-22 2020-10-02 三菱电机株式会社 半导体元件及其制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3239376A (en) * 1962-06-29 1966-03-08 Bell Telephone Labor Inc Electrodes to semiconductor wafers
US3453501A (en) * 1966-08-10 1969-07-01 Philco Ford Corp Metallization of silicon semiconductor devices for making ohmic connections thereto
US3623961A (en) * 1968-01-12 1971-11-30 Philips Corp Method of providing an electric connection to a surface of an electronic device and device obtained by said method
US3597834A (en) * 1968-02-14 1971-08-10 Texas Instruments Inc Method in forming electrically continuous circuit through insulating layer
US3579375A (en) * 1968-10-18 1971-05-18 Rca Corp Method of making ohmic contact to semiconductor devices
US3663184A (en) * 1970-01-23 1972-05-16 Fairchild Camera Instr Co Solder bump metallization system using a titanium-nickel barrier layer
US3669734A (en) * 1970-08-05 1972-06-13 Rca Corp Method of making electrical connections to a glass-encapsulated semiconductor device
NL163370C (nl) * 1972-04-28 1980-08-15 Philips Nv Werkwijze voor het vervaardigen van een halfgeleider- inrichting met een geleiderpatroon.
CA954635A (en) * 1972-06-06 1974-09-10 Microsystems International Limited Mounting leads and method of fabrication
US4005472A (en) * 1975-05-19 1977-01-25 National Semiconductor Corporation Method for gold plating of metallic layers on semiconductive devices
US4122215A (en) * 1976-12-27 1978-10-24 Bell Telephone Laboratories, Incorporated Electroless deposition of nickel on a masked aluminum surface

Also Published As

Publication number Publication date
JPS5456764A (en) 1979-05-08
IT1157176B (it) 1987-02-11
IT7851045A0 (it) 1978-09-11
DE2839234C2 (esLanguage) 1988-07-28
FR2404302A1 (fr) 1979-04-20
MX144954A (es) 1981-12-04
GB2004686B (en) 1982-03-10
GB2004686A (en) 1979-04-04
JPS6161258B2 (esLanguage) 1986-12-24
NL7809294A (nl) 1979-03-23
US4182781A (en) 1980-01-08
DE2839234A1 (de) 1979-03-29

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Legal Events

Date Code Title Description
ST Notification of lapse