ES2934134T3 - Método mejorado de revestimiento al vacío - Google Patents

Método mejorado de revestimiento al vacío Download PDF

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Publication number
ES2934134T3
ES2934134T3 ES16159684T ES16159684T ES2934134T3 ES 2934134 T3 ES2934134 T3 ES 2934134T3 ES 16159684 T ES16159684 T ES 16159684T ES 16159684 T ES16159684 T ES 16159684T ES 2934134 T3 ES2934134 T3 ES 2934134T3
Authority
ES
Spain
Prior art keywords
strip
oxygen
metal
vacuum
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES16159684T
Other languages
English (en)
Spanish (es)
Inventor
Nicholas John Copeland
Stefan Ivan Serednycky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bobst Manchester Ltd
Original Assignee
Bobst Manchester Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bobst Manchester Ltd filed Critical Bobst Manchester Ltd
Application granted granted Critical
Publication of ES2934134T3 publication Critical patent/ES2934134T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
ES16159684T 2015-03-10 2016-03-10 Método mejorado de revestimiento al vacío Active ES2934134T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1504061.1A GB2536252B (en) 2015-03-10 2015-03-10 Method of operating a vacuum coater for coating a web
GBGB1511671.8A GB201511671D0 (en) 2015-03-10 2015-07-03 Improved Vacuum coater

Publications (1)

Publication Number Publication Date
ES2934134T3 true ES2934134T3 (es) 2023-02-17

Family

ID=52998706

Family Applications (1)

Application Number Title Priority Date Filing Date
ES16159684T Active ES2934134T3 (es) 2015-03-10 2016-03-10 Método mejorado de revestimiento al vacío

Country Status (4)

Country Link
EP (2) EP3067437B1 (fr)
ES (1) ES2934134T3 (fr)
GB (3) GB2559685B (fr)
PL (1) PL3067437T3 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL3419044T3 (pl) * 2017-06-22 2023-06-12 Bobst Manchester Limited Maszyna do pepvd
CN111041446A (zh) * 2019-12-31 2020-04-21 广东铭丰包装材料有限公司 一种镀铝机的送气装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788531A (en) * 1980-11-20 1982-06-02 Matsushita Electric Ind Co Ltd Manufacture for magnetic recording medium
JPS5927954A (ja) 1982-08-10 1984-02-14 Nippon Hodo Co Ltd 舗装用アスフアルトの改質材料
CA1235808A (fr) * 1984-03-22 1988-04-26 Tetsuo Oka Support d'enregistrement magnetique vertical et methode de fabrication de ce support
JPS6126941A (ja) * 1984-07-17 1986-02-06 Mitsubishi Electric Corp 磁気記録媒体の製造方法
JPH0699798B2 (ja) * 1985-10-29 1994-12-07 東洋メタライジング株式会社 透明ガス遮断性フイルムの製造方法
JPS62228461A (ja) * 1986-03-31 1987-10-07 Toyo Metaraijingu Kk 金属蒸着フイルムおよびその製造方法
JPH0798868B2 (ja) 1992-03-26 1995-10-25 三菱化学株式会社 繊維強化ポリプロピレン樹脂シートの製造方法
JP3331622B2 (ja) * 1992-06-05 2002-10-07 東レ株式会社 透明ガスバリア性フィルムの製造方法
JPH064862A (ja) * 1992-06-23 1994-01-14 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
JPH0798868A (ja) * 1993-09-30 1995-04-11 Kao Corp 磁気記録媒体の製造装置
JP3173549B2 (ja) * 1994-06-17 2001-06-04 松下電器産業株式会社 磁気記録媒体の製造方法
US5759710A (en) * 1994-08-18 1998-06-02 Matsushita Electric Industrial Co., Ltd. Magnetic recording medium with a magnetic layer having a specific oxygen signal strength profile in the thickness direction
JPH1053868A (ja) * 1996-08-07 1998-02-24 Kao Corp 薄膜形成装置
JPH1091958A (ja) * 1996-09-19 1998-04-10 Kao Corp 磁気記録媒体の製造方法
JP3076774B2 (ja) * 1997-05-29 2000-08-14 株式会社麗光 透明なバリアフィルムとその製造方法
US6652998B2 (en) * 2000-06-26 2003-11-25 Jvc Victor Company Of Japan, Ltd. Producing method of thin film magnetic tape and the thin film magnetic tape
EP1522606B1 (fr) * 2003-10-10 2009-12-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Procédé pour revêter d'un materiau en forme de bande avec oxyde noir d'aluminium
JP2007270251A (ja) * 2006-03-31 2007-10-18 Toray Ind Inc 多層薄膜付き積層体の製造方法および製造装置
JP2009197340A (ja) * 2008-02-19 2009-09-03 Toray Ind Inc 金銀糸用金属蒸着ポリエステルフィルムおよび金銀糸
JP5239483B2 (ja) * 2008-04-28 2013-07-17 東レ株式会社 金属酸化物薄膜付きシートの製造方法および製造装置
CN103502506B (zh) * 2011-04-29 2016-06-08 应用材料公司 用于在涂覆工艺中钝化柔性基板的装置和方法
JP2013189701A (ja) * 2012-02-14 2013-09-26 Tokyo Electron Ltd 成膜装置
JP2013234364A (ja) * 2012-05-09 2013-11-21 Mitsubishi Plastics Inc ガスバリア性フィルムの製造方法

Also Published As

Publication number Publication date
GB2536252A (en) 2016-09-14
GB2559685B (en) 2019-06-12
PL3067437T3 (pl) 2023-05-15
GB2536252B (en) 2018-10-10
GB201504061D0 (en) 2015-04-22
EP3879000A1 (fr) 2021-09-15
GB201511671D0 (en) 2015-08-19
EP3067437B1 (fr) 2022-11-23
EP3067437A1 (fr) 2016-09-14
GB201801583D0 (en) 2018-03-14
GB2559685A (en) 2018-08-15

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