ES2739885T3 - Oxido de estaño dopado con indio conductor transparente - Google Patents

Oxido de estaño dopado con indio conductor transparente Download PDF

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Publication number
ES2739885T3
ES2739885T3 ES15712491T ES15712491T ES2739885T3 ES 2739885 T3 ES2739885 T3 ES 2739885T3 ES 15712491 T ES15712491 T ES 15712491T ES 15712491 T ES15712491 T ES 15712491T ES 2739885 T3 ES2739885 T3 ES 2739885T3
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ES
Spain
Prior art keywords
indium
tin oxide
substrate
target
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES15712491T
Other languages
English (en)
Spanish (es)
Inventor
Krishna K Uprety
Khushroo H Lakdawala
Russell Shellenberger
Mahmood Ahmad Ali
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Ohio Inc
Original Assignee
PPG Industries Ohio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Ohio Inc filed Critical PPG Industries Ohio Inc
Application granted granted Critical
Publication of ES2739885T3 publication Critical patent/ES2739885T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Surface Treatment Of Glass (AREA)
ES15712491T 2014-05-30 2015-03-12 Oxido de estaño dopado con indio conductor transparente Active ES2739885T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/292,200 US9988707B2 (en) 2014-05-30 2014-05-30 Transparent conducting indium doped tin oxide
PCT/US2015/020151 WO2015183374A1 (en) 2014-05-30 2015-03-12 Transparent conducting indium doped tin oxide

Publications (1)

Publication Number Publication Date
ES2739885T3 true ES2739885T3 (es) 2020-02-04

Family

ID=52811205

Family Applications (1)

Application Number Title Priority Date Filing Date
ES15712491T Active ES2739885T3 (es) 2014-05-30 2015-03-12 Oxido de estaño dopado con indio conductor transparente

Country Status (8)

Country Link
US (2) US9988707B2 (enExample)
EP (1) EP3149220B1 (enExample)
JP (1) JP2017518441A (enExample)
CN (1) CN106460154A (enExample)
CA (1) CA2948259C (enExample)
ES (1) ES2739885T3 (enExample)
RU (1) RU2693982C2 (enExample)
WO (1) WO2015183374A1 (enExample)

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US10457148B2 (en) 2017-02-24 2019-10-29 Epic Battery Inc. Solar car
WO2018187384A1 (en) 2017-04-03 2018-10-11 Epic Battery Inc. Modular solar battery
US11337311B2 (en) 2018-07-06 2022-05-17 Ppg Industries Ohio, Inc. Aircraft window with variable power density heater film
CN109811308A (zh) * 2019-01-29 2019-05-28 晟光科技股份有限公司 一种ito导电膜制作工艺
US11489082B2 (en) 2019-07-30 2022-11-01 Epic Battery Inc. Durable solar panels
IT202300016008A1 (it) * 2023-07-28 2025-01-28 3Sun S R L Celle fotovoltaiche multigiunzione

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Also Published As

Publication number Publication date
JP2017518441A (ja) 2017-07-06
CN106460154A (zh) 2017-02-22
RU2016151659A (ru) 2018-07-04
US9988707B2 (en) 2018-06-05
WO2015183374A1 (en) 2015-12-03
US20150345006A1 (en) 2015-12-03
EP3149220A1 (en) 2017-04-05
RU2693982C2 (ru) 2019-07-08
RU2016151659A3 (enExample) 2018-07-05
US12338525B2 (en) 2025-06-24
EP3149220B1 (en) 2019-05-08
US20180291497A1 (en) 2018-10-11
CA2948259A1 (en) 2015-12-03
CA2948259C (en) 2024-02-20

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