EP3262675A1 - Raumtemperatur-verfahren zur herstellung elektrotechnischer dünnschichten und verfahrensgemäss erhaltene dünnschichtfolge - Google Patents
Raumtemperatur-verfahren zur herstellung elektrotechnischer dünnschichten und verfahrensgemäss erhaltene dünnschichtfolgeInfo
- Publication number
- EP3262675A1 EP3262675A1 EP16723636.3A EP16723636A EP3262675A1 EP 3262675 A1 EP3262675 A1 EP 3262675A1 EP 16723636 A EP16723636 A EP 16723636A EP 3262675 A1 EP3262675 A1 EP 3262675A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- matrix
- aluminum
- metal
- agglomerates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000011159 matrix material Substances 0.000 claims abstract description 28
- 239000004033 plastic Substances 0.000 claims abstract description 17
- 229920003023 plastic Polymers 0.000 claims abstract description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 150000002736 metal compounds Chemical class 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 150000002739 metals Chemical class 0.000 claims description 10
- 229910052709 silver Inorganic materials 0.000 claims description 10
- 239000004332 silver Substances 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 8
- 229910052725 zinc Inorganic materials 0.000 claims description 8
- 239000011701 zinc Substances 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 6
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052785 arsenic Inorganic materials 0.000 claims description 6
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 229910052711 selenium Inorganic materials 0.000 claims description 6
- 239000011669 selenium Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052714 tellurium Inorganic materials 0.000 claims description 6
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 230000002378 acidificating effect Effects 0.000 claims description 4
- 229910052790 beryllium Inorganic materials 0.000 claims description 4
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000011135 tin Substances 0.000 claims description 4
- 239000003153 chemical reaction reagent Substances 0.000 claims description 3
- 239000004575 stone Substances 0.000 claims description 3
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052684 Cerium Inorganic materials 0.000 claims description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052776 Thorium Inorganic materials 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052794 bromium Inorganic materials 0.000 claims description 2
- 239000011575 calcium Substances 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 239000002041 carbon nanotube Substances 0.000 claims description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 239000004927 clay Substances 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910003472 fullerene Inorganic materials 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910052740 iodine Inorganic materials 0.000 claims description 2
- 239000011630 iodine Substances 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- 239000011133 lead Substances 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000004579 marble Substances 0.000 claims description 2
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 238000012986 modification Methods 0.000 claims description 2
- 230000004048 modification Effects 0.000 claims description 2
- 239000002048 multi walled nanotube Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- 239000002985 plastic film Substances 0.000 claims description 2
- 229920006255 plastic film Polymers 0.000 claims description 2
- 239000004417 polycarbonate Substances 0.000 claims description 2
- 229920000515 polycarbonate Polymers 0.000 claims description 2
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- 239000011591 potassium Substances 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000011734 sodium Substances 0.000 claims description 2
- 229910000679 solder Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 239000011593 sulfur Substances 0.000 claims description 2
- 239000002023 wood Substances 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
- 239000002440 industrial waste Substances 0.000 abstract description 7
- 230000005855 radiation Effects 0.000 abstract description 6
- 238000005245 sintering Methods 0.000 abstract description 5
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 abstract description 4
- 239000002923 metal particle Substances 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 82
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 235000013550 pizza Nutrition 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000002082 metal nanoparticle Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2004—Light-sensitive devices characterised by the electrolyte, e.g. comprising an organic electrolyte
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2004—Light-sensitive devices characterised by the electrolyte, e.g. comprising an organic electrolyte
- H01G9/2009—Solid electrolytes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2095—Light-sensitive devices comprising a flexible sustrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02601—Nanoparticles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention can be generally arranged in the field of electrotechnical thin films.
- the technical field is meaningfully outlined in DE 10 2015 102 801, in which the inventors participated.
- Known measures, features and methods can be found in this application and in the cited prior art.
- Generic layers which have thicknesses on the micrometer scale and can be supported flexibly on movable, foldable and bendable carriers, are generally known.
- AT 36002 E Publication No. 0 119 051 B2, BASF Corp., discloses suitable acrylate-based coatings which can be used to coat flexible substrates. Conventional ingredients, properties and measures for making such layers can be found in this document.
- the present invention relates to methods for producing electrotechnical thin films, in particular electrotechnical PV layer sequences.
- PV layer sequences have long been the subject of research and development.
- Monocrystalline and polycrystalline Si cells which are suitably welded and contacted in the outdoor area in solar parks for large-scale power generation are established product examples in the relevant technical area.
- the problem is that these classic cells are rigid and quite inflexible.
- the flatly extended panels must always be aligned in a horizontal plane to the position of the sun to ensure optimum yields.
- flexible thin-film systems are used, which make the support of thin-film electrotechnical layers, starting with conductor and circuit layers, through PV layers, to cover and protective layers, accessible.
- the Applicant is active in this particular sector and claims with the present application a process for the preparation of such layers and Layer composites and a layer sequence obtained according to the method.
- Protective and conductive layers of generic layers and PV layer sequences are naturally conductive and / or flexible. Suitable conductive and protective layers are disclosed, for example, in DE 198 15 291 B4 and the prior art cited therein.
- the object of the present invention was therefore to overcome the disadvantages of the prior art and to provide a method and a procedural, electrotechnical thin film which, despite industrial process control and large-scale fabrication without heating to a sintering temperature can offer thin films that are strong, stable and in their electrotechnical properties are almost 100% reversible.
- a room-temperature method for producing electrotechnical thin layers in which electroconductive and / or semiconducting, inorganic agglomerates are presented in a dispersion in a flat surface and cured to form a layer, provides that the curing is carried out at room temperature and the curing by applying at least a reagent is accelerated.
- An electrochemical thin-film sequence obtained in accordance with the method, obtained as a PV layer sequence is characterized in that the thin-film sequence has a glass carrier, has an electrode layer applied to the glass carrier, has a first layer applied to the electrode layer and which is coated in a plastic matrix.
- Particles comprising a second layer applied to the first layer, which has at least partially basic, glassy layer at least silicon oxygen bridges in a glassy network and further at least partially basic solubilized aluminum particles as inorganic agglomerates, a deposited on the second layer, transparent top electrode having contact electrodes, in turn, the thus created PV layer sequence has a phtotvoltaischen effect in the long-wave and extremely long-wave infrared range.
- a room temperature method for producing electrotechnical thin layers wherein electrically conductive and / or semiconducting, inorganic agglomerates are presented in a dispersion surface and cured to form a layer, characterized in that the curing is carried out at room temperature and the curing by applying at least a reagent is accelerated.
- the method is characterized in that a PV layer sequence is formed.
- the method is characterized in that as at least one A base layer is applied, comprising at least one metal or a metal compound, wherein the at least one metal or its compound is selected from the group consisting of steel, zinc, tin, silver, copper, aluminum, nickel, lead, iron.
- the method is preferably characterized in that at least one metallically conductive and / or semiconducting layer is applied and at least partially cured as the conductive base layer.
- the method is characterized in that a flat material web is used as the carrier, the material web consisting of at least one material which is selected from the material group consisting of glass, plastic, polycarbonate, plastic film, metal alloy, engine block Alloy, heat exchanger tube alloy, heat exchanger alloy, heat exchanger solder alloy, ceramics, industrial ceramics, natural stone, marble, clay ceramics, roof tile ceramics, laminate wood material, plank material, aluminum, staircase aluminum - Alloy, board assemblies, IC package material, processor package compounds.
- the process is preferably characterized in that the inorganic agglomerates of a first layer are metals or metal compounds distributed in a plastic matrix, the metal type of the metals or metal compounds selected from the group consisting of beryllium, boron, aluminum, gallium, indium, silicon, germanium, Tin, lead, arsenic, antimony, selenium, tellurium, copper, silver, gold, zinc, iron, chromium, manganese, titanium, zirconium.
- the method is preferably characterized in that the inorganic agglomerates of a second layer are metals or metal compounds which are distributed in an at least partially inorganic matrix, the metal type of the metals or metal compounds being selected from the group consisting of beryllium, boron, aluminum, Gallium, indium, silicon, germanium, tin, lead, arsenic, antimony, selenium, tellurium, copper, silver, gold, zinc, iron, chromium, manganese, titanium, zirconium.
- the method is characterized in that a matrix is used in a layer as the inorganic matrix, which is a glassy, oxidic matrix at least one chain-forming or modifying element, the element selected from the group consisting of boron, phosphorus, silicon, arsenic, sulfur, selenium, tellurium, carbon in amorphous form, carbon in the modification graphite, carbon in the form of carbon nanotubes, Carbon in the form of multi-walled carbon nanotubes, carbon in the form of Buckminster fullerenes, calcium, sodium, aluminum, lead, magnesium, barium, potassium, manganese, zinc, tin, antimony, cerium, zirconium, titanium, strontium, lanthanum, thorium , Yttrium, fluorine, chlorine, bromine, iodine.
- a matrix is used in a layer as the inorganic matrix, which is a glassy, oxidic matrix at least one chain-forming or modifying element, the element selected from the group consist
- the method is characterized in that
- an electrically conductive electrode layer is applied to a support
- the electrode layer on the electrode layer are applied as inorganic agglomerates in a first layer in a plastic matrix distributed metals or metal compounds,
- the metallic agglomerates react during application and curing with the strongly acidic or basic matrix, the matrix reacting with metallic agglomerates of the first layer,
- a photovoltaically active junction is formed during hardening and reacting
- the second layer with a transparent cover electrode and / or a contact electrode and
- the photovoltaically active layer sequence is contacted as a PV layer sequence in a suitable manner and welded.
- FIG. 1 SEM top view of a PV double layer, comprising a top-side plastic matrix with siloxane component and Al flakes supported therein and partially dissolved, which are deposited on a pure, pre-cured plastic matrix applied and cured with the same Al flakes;
- FIG. 2 shows an enlarged detail of the SEM image according to FIG. 1;
- FIG. 3 shows an SEM image of the rear side of a PV double layer according to FIGS. 1 and 2;
- FIG. 4b shows light absorption maxima of H 2 O in air as a function of the wavelength according to the prior art, illustrating the behavior illustrated in FIG. 4.
- FIG. 4b shows light absorption maxima of H 2 O in air as a function of the wavelength according to the prior art, illustrating the behavior illustrated in FIG. 4.
- an electro-technical thin-film sequence obtained as a PV layer sequence according to the inventive method, characterized in that the thin-film sequence
- an electrode layer applied to the glass carrier comprising silver
- a second layer applied on the first layer and having at least partially basic, glassy layer at least silicon-oxygen bridges in a vitreous network and furthermore having at least proportionally basicly dissolved aluminum particles as inorganic agglomerates,
- PV layer sequence has a phtotvoltaischen effect in the long-wave and extremely long-wave infrared range.
- an acrylate-based paint for outdoor use with aluminum flakes (pigment addition of the paint industry for paints with silver optics) is added, homogenized and a first layer on a glass slide with an area of about 10 cm to 10 cm, which had previously been preliminarily coated with a semitransparent, electrically conductive metal layer.
- the acrylate-based layer of aluminum flakes is precured in air at room temperature for 5 minutes.
- a second mixture of the borrowed, acrylate-based varnish is prepared with aluminum flakes, mixed with silica sol and adjusted in a cooled stirrer with sodium hydroxide solution to basic pH and homogenized.
- the still-reacting mixture is applied as a second layer to the first, precured layer and distributed uniformly and opaque.
- the parallel reaction in which aluminum is at least partly dissolved, accelerates the final curing of both layers.
- the composite layer thus obtained is provided on the upper side with a finger electrode made of room temperature Leitsilber Fa. Busch.
- the layer thus obtained is characterized on the upper side by a plastic matrix in which the basic dissolved water glass provides a siloxane component.
- the Al flakes carried in the matrix are dissolved and firmly integrated into the plastic matrix.
- FIG. 2 teaches the Al flakes through the plastic layer through to the surface and allow direct electrical contact of a scaffold made of interconnected via Kontakwan and short electrolyte bridges Al flakes. Peeling a flexible segment of the plastic bilayer with a scalpel showed that the bilayer is a flexible, strong, peelable composite; the withdrawn segment was back tested using REM. As FIG. 3 shows in an SEM image, Al flakes are also provided on the back, which rest flat against the phase boundary with the semitransparent electrode and allow electrical contact.
- the upper side of the double layer was provided with a finger electrode made of room temperature Leitsilber from Busch and contacted with a transparent adhesive ITO film in addition flat. Subsequently, the cover electrode and the backside electrode were contacted and the cell was examined for PV properties.
- the bilayer was first examined for PV activity using cold light LED light source with visible light. There were weak to no photovoltaic currents. When irradiated with a halogen lamp, clear photovoltaic potential differences beyond 100 mV could be measured after a short start-up phase of 1 to 4 seconds. It was possible to tap a constant load to operate an LED bicycle light. The question was whether this was due to a Peltier effect.
- thermocouples were front and back with Thermocouples fitted, sealed in a waterproof Vakkum bag with running contact lines and completely sunk in 10 liters of heated water. After about 5 minutes tempering the temperature of all thermocouples was the same.
- the photovoltaic potential difference between the cover electrode and the backside electrode was significantly and proportionally dependent on the cell temperature, which is now slowly decreasing with the temperature of the water.
- Initial value, end value and measured value fluctuations occurring therebetween were stored digitally and are reproduced in a graph according to FIG. As shown in FIG. 4a, the measurement of the photovoltaic, tapped potential of the PV double layer shows a proportional dependence on the temperature of the water falling from 46 ° C.
- Verification of the removed and unpacked cell in a pizza oven showed surprisingly that up to 50 ° C at a distance of the cell from the hot wall of the pizza oven no sufficient heat radiation reaches the cell.
- the known light absorption maxima of H 2 O in air are significant as a function of the wavelength in the range 5 to 10 microns wavelength.
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Applications Claiming Priority (4)
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DE102015102801 | 2015-02-26 | ||
DE102015015435 | 2015-12-02 | ||
DE102015015600 | 2015-12-06 | ||
PCT/DE2016/100083 WO2016134703A1 (de) | 2015-02-26 | 2016-02-26 | Raumtemperatur-verfahren zur herstellung elektrotechnischer dünnschichten und verfahrensgemäss erhaltene dünnschichtfolge |
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EP3262675A1 true EP3262675A1 (de) | 2018-01-03 |
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EP16715440.0A Pending EP3262673A1 (de) | 2015-02-26 | 2016-02-26 | Pv-schichtfolge erhalten durch ein raumtemperatur-verfahren und raumtemperatur-verfahren zur herstellung einer pv-schichtfolge |
EP16723636.3A Pending EP3262675A1 (de) | 2015-02-26 | 2016-02-26 | Raumtemperatur-verfahren zur herstellung elektrotechnischer dünnschichten und verfahrensgemäss erhaltene dünnschichtfolge |
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US (3) | US20180040751A1 (ru) |
EP (2) | EP3262673A1 (ru) |
JP (5) | JP2018509762A (ru) |
CN (2) | CN107533950B (ru) |
BR (1) | BR112017018306B1 (ru) |
DE (1) | DE102016002213A1 (ru) |
RU (2) | RU2732867C2 (ru) |
WO (2) | WO2016134704A1 (ru) |
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WO2016134704A1 (de) | 2015-02-26 | 2016-09-01 | Dynamic Solar Systems Ag | Pv-schichtfolge erhalten durch ein raumtemperatur-verfahren und raumtemperatur-verfahren zur herstellung einer pv-schichtfolge |
EP3523829B1 (de) | 2016-07-12 | 2023-09-06 | Dynamic Solar Systems AG | Raumtemperatur-druckverfahren zur herstellung einer pv-schichtfolge und verfahrensgemäss erhaltene pv-schichtfolge |
DE202017001454U1 (de) | 2017-03-19 | 2017-06-22 | Dynamic Solar Systems Ag | Geregelte, gedruckte Heizung |
DE102017002623A1 (de) | 2017-03-20 | 2018-09-20 | Reinhold Gregarek | Verbessertes tribostatisches I-I-P-Verfahren, tribostatische Pulverdüse und Verwendung zur Herstellung elektrotechnischer Mehrschichtverbunde |
DE202017002209U1 (de) | 2017-04-27 | 2017-06-21 | Dynamic Solar Systems Ag | Gedruckte Elektrode mit arrangierbaren LED-Komponenten |
DE202017002725U1 (de) | 2017-05-23 | 2017-06-13 | Dynamic Solar Systems Ag | Heizpanel mit gedruckter Heizung |
DE102020003811A1 (de) | 2020-06-25 | 2021-12-30 | Dynamic Solar Systems Ag | Fußbodenheizungs-System mit verbessertem Schichtaufbau |
DE102022114036A1 (de) | 2022-06-02 | 2023-12-07 | Glasfabrik Lamberts GmbH + Co. KG. | Multifunktionale Profilbauglasbahn und diese enthaltende Profilbauglasanordnung |
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- 2016-02-26 DE DE102016002213.2A patent/DE102016002213A1/de not_active Withdrawn
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RU2017131197A (ru) | 2019-03-28 |
BR112017018306A2 (pt) | 2018-04-17 |
JP2021177549A (ja) | 2021-11-11 |
EP3262673A1 (de) | 2018-01-03 |
US20180040751A1 (en) | 2018-02-08 |
DE102016002213A1 (de) | 2016-11-03 |
US20180040432A1 (en) | 2018-02-08 |
CN107466422A (zh) | 2017-12-12 |
BR112017018306B1 (pt) | 2023-01-10 |
US20220052214A1 (en) | 2022-02-17 |
CN107533950B (zh) | 2022-02-11 |
CN107466422B (zh) | 2021-03-19 |
WO2016134704A1 (de) | 2016-09-01 |
JP2018521443A (ja) | 2018-08-02 |
WO2016134703A1 (de) | 2016-09-01 |
JP2023067932A (ja) | 2023-05-16 |
RU2017131189A3 (ru) | 2019-07-17 |
CN107533950A (zh) | 2018-01-02 |
JP2018509762A (ja) | 2018-04-05 |
RU2017131189A (ru) | 2019-03-28 |
JP2021177552A (ja) | 2021-11-11 |
RU2732867C2 (ru) | 2020-09-24 |
US11935976B2 (en) | 2024-03-19 |
RU2698739C2 (ru) | 2019-08-29 |
RU2017131197A3 (ru) | 2019-06-20 |
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