EP2463012B1 - Verfahren und Ausrüstung zum selektiven Auffangen von Prozessabgasen - Google Patents

Verfahren und Ausrüstung zum selektiven Auffangen von Prozessabgasen Download PDF

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Publication number
EP2463012B1
EP2463012B1 EP12158815.6A EP12158815A EP2463012B1 EP 2463012 B1 EP2463012 B1 EP 2463012B1 EP 12158815 A EP12158815 A EP 12158815A EP 2463012 B1 EP2463012 B1 EP 2463012B1
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Prior art keywords
gas
effluent
line
chemical process
desired gas
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English (en)
French (fr)
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EP2463012A1 (de
Inventor
David Charles Winchester
Matthew John Bosco
Gerald W. Klein
Issac Patrick West
Richard Linton Samsal
Douglas Paul Dee
Andrew David Johnson
Jr. Eugene Joseph Karwacki
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Versum Materials US LLC
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Versum Materials US LLC
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/73—After-treatment of removed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]

Definitions

  • Etchant gases from semiconductor processing are known to be recovered because of global warming potential. See US7,258,725 .
  • Xenon sensors are known. See US2006/00211421 .
  • US2009/0185969 discloses a system for the recovery of rare gas from a mixed gas stream, for example recovery of helium from cluster tools used in semiconductor fabrication.
  • Rare gas is recovered when a predetermined amount of rare gas is known to be present in the waste gas, or when the amount of gas determined by analysing means warrants recovery.
  • Exhaust gas can be directed through two separate paths using exhaust gas separation valves which are manually or automatically controlled. Automatic control may be based on opening and closing of a processing chamber door.
  • EP983791 discloses a process and an apparatus for recovering a noble gas from a process exhaust gas. Switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system under reduced pressure is carried out depending on the impurity content of the exhaust gas or on the running state of the process. Selector valves are used as line switching means.
  • the present invention is an apparatus for recovering a desired gas from the effluent of a chemical process reactor that utilizes two or more separate gas compositions in sequence, the apparatus comprising;
  • the present invention is a process for recovering a desired gas from the effluent of a chemical process reactor that utilizes two or more gas compositions in sequence, the process comprising;
  • the apparatus may include a recycle line in flow communication with the recovery line and in flow communication with the effluent line downstream of the connection of the recovery line to the effluent line capable of returning at least a part of the gas compositions to the effluent line.
  • the recovery line may include a sorptive guard bed to remove corrosive or reactive gases from the effluents.
  • the apparatus may include at least one sorptive separation bed capable of selectively separating the desired gas from the effluent gas and connected to the recovery line.
  • the sorptive separation bed may be connected to a line in flow communication with at least one storage container capable of storing the desired gas.
  • An additional compressor may be connected to the storage container to compress the desired gas.
  • the sorptive separation beds may comprise two sorptive separation beds connected in parallel by flow lines and valves capable of being operated in phased connection to the recovery line.
  • the apparatus may include a buffer tank downstream of the compressor in the recovery line and upstream of the sorptive separation bed.
  • the chemical process reactor may be a semiconductor fabrication process reactor.
  • the desired gas may be a noble gas.
  • the desired gas may, for example, be selected from the group consisting of helium, argon, xenon difluoride and xenon.
  • a portion of the effluent containing a substantial portion of the desired gas may be separated in at least one sorptive separation bed to recover a concentrated desired gas and a further effluent gas.
  • the concentrated desired gas is preferably captured in at least one storage container.
  • Actuation of the automatic valve is controlled by logic based on measurement of key process parameters.
  • the system includes process equipment that provides vacuum and capacity needed to collect and store the desired gas. Such equipment creates an appropriate level of capacity, such that a steady flow of desired gas contained in an effluent gas can be metered into an enrichment system, such as a vacuum swing adsorption system (VSA), temperature swing adsorption system (TSA), or pressure swing adsorption system (PSA).
  • VSA vacuum swing adsorption system
  • TSA temperature swing adsorption system
  • PSA pressure swing adsorption system
  • the method comprises a system for monitoring/measuring the process parameters, logic for control, an automatic valve to divert the gas when selected, a check valve, a vacuum system, and storage volume.
  • the interface operates by utilizing a pressure difference between the recovery gas manifold or recovery line and the normal waste gas manifold or effluent line after the process pumps/compressors.
  • an automatic valve such as a solenoid valve, is opened. This now diverts the effluent gas toward the recovery line.
  • the system also contains process logic to selectively signal when the species of interest or desired gas is present, as well as to shut-off flow, if the species of interest or desired gas is not present, or another species is present that could cause disruptions to the downstream recovery system.
  • the process logic can also compensate for the time required for the species of interest or desired gas, such as xenon, to travel from the chemical process reactor to the recovery line or automatic valve. This is accomplished by an adjustable delay in the opening and closing of the automatic valve.
  • the interface with the chemical process reactor may comprise a tee to tap into the effluent line, a shutoff valve, an analytical port (optional), a flex line to reduce vibrational coupling and stresses, a pressure gauge (optional), solenoid valve, and a manual shutoff valve to enable isolation of the chemical process reactor from the recovery system.
  • Effluent gas from a semiconductor or chemical process reactor typically is diluted at the process pump and then transferred through a gas manifold or effluent line after the pump into a common effluent gas manifold that eventually goes to an abatement or scrubbing system.
  • This comingling of effluent gases eventually dilutes the process effluent compositions and the desired gas of interest, making it very difficult to efficiently process to remove the species of interest or desired gas for recovery.
  • the desired gas of interest be segregated from the other effluent streams prior to arrival in the common header. For this to be accomplished the desired gas of interest is diverted towards the recovery system between the process chambers and entrance to the common header.
  • this diversion must be performed in a manner that prevents any interference with the flow of process gases through the chemical process reactor. Such disruptions could cause failures in the manufacturing process that could lead to yield losses.
  • the waste gas collection system should be transparent to the chemical process reactor. This invention enables efficient and timely transfer of effluent gas, which contains the species of interest or desired gas for recovery. Furthermore, it performs this transfer in a manner that essentially does not interfere with the processing within the chemical process reactor.
  • Another problem this collection apparatus solves is that it enables collection of gas streams or desired gas simultaneously from many process chambers that may only be processing with the desired gas of interest in an intermittent manner.
  • the interface performs this function by receiving signals from any chemical process reactor or its effluent line and determining when the desired gas of interest for recovery is present in the effluent gas stream. Furthermore, if there happens to be species which the recovery system does not want to accept during intervals of the process, it is possible to program it via additional signals from the chemical process reactor and pre-determined timing to discriminate against these portions of the effluent stream from being diverted to the recovery system.
  • the normal flow of process gas is through the chemical process reactor to a process pump located on the effluent line of the chemical process reactor.
  • These pumps can be many types, including: turbomolecular, cryogenic, and diffusion type pumps to achieve high vacuums.
  • These pumps are then backed up using mechanical pumps, which compress the effluent gas for exhausting.
  • nitrogen dilution is typically performed to lower the flammability limits of the effluent gas, to dilute the effluent gas below lethal dose levels (LDLs), to help cool the process pump as it operates, as well as to seal the pumps to prevent leaks. There may be other reasons for adding nitrogen dilution.
  • LDLs lethal dose levels
  • the effluent gas then traverses through a gas manifold to a larger exhaust gas manifold, where effluent gases from many processes comingle.
  • a gas manifold In order to efficiently recover high valued species, such as desired gases exemplified by xenon, from an effluent gas, it is desirable to divert the effluent gas containing the species of interest or desired gas away from this collection manifold and towards the recovery system.
  • the reasons for performing this diversion include: presence of species of interest (desired gas) at high enough concentrations to enable efficient recovery, reduction of contaminants from other processes that could poison or reduce collection efficiency, and reduction of the overall volume of effluent gas to the recovery system to a volume more manageable for the size of the recovery system.
  • the challenge to placing a diversion system onto the effluent line of a chemical process reactor is that the diversion system should not compromise the process underway within the chemical process reactor(s). Any interference with gas flow has the potential to disrupt pressures, gas flow, and pumping efficiencies. These could lead to process disruptions, which could result in loss of product yield. Thus, it is desirable that the reactor interface perform in a transparent manner to the chemical process reactor.
  • Another challenge is that oftentimes chemical process reactors perform many types of duties. Some of these may include the species (desired gas) desired for recovery, and at other times the species of interest (desired gas) may not be part of the effluent gas stream. During these times, it is not desirable to collect and process the effluent gas, because it can lead to inefficiencies.
  • This reactor interface invention addresses each of the aforementioned challenges for enabling efficient recovery of desired gas from a process effluent gas stream.
  • the method pursued in this invention attached the interface via a three-way valve located on the atmospheric side of the exhaust effluent pump. In normal operation, the effluent gas flows from the pump at a pressure slightly above atmospheric pressure (0.04 psig (101 kPa)).
  • the interface consists of pressure gauge (optional), an automatic (solenoid or pneumatically actuated) valve, and a shut-off valve to enable safe closure of the line from the recovery system, when maintenance is required.
  • An electrical reactor interface controller is attached to the automatic (solenoid, etc.) valve to open/close the valve, when effluent gas containing the species (desired gas) to be recovered is present within the effluent stream.
  • a shutoff valve, analytical port, and flex hosing may be attached to the tee to facilitate servicing and to reduce vibrational coupling between the chemical process reactor and the recovery system.
  • a compressor is present on the recovery gas line.
  • the pressure within the recovery line is held at a pressure below the normal discharge pressure of the exhaust effluent pump, typically the recovery line is at less that 1 atmosphere (101 kPa).
  • the automatic (solenoid, etc.) valve is activated open to begin gas diversion to the recovery system, process effluent gas flows out of the exhaust effluent pump and towards the recovery system for processing.
  • the process signal is given to stop flow of gas to the recovery system, this enables flow of gas again from the chemical process reactors to the effluent gas manifold.
  • the materials of construction of the reactor interface should able to withstand process temperatures up to 100°C. This is preferable, because the temperature of the effluent gas as it departs the vacuum pump may be close to this temperature.
  • the electronic controller is equipped with process logic capability that enables shut-off of the gas diversion, when these species are present. This can be done in a number of ways, including; the use of process sensors and on-line process analyzers. Another methodology adopted is the use of process signals from the chemical process reactor and comparison against a threshold to determine when these species are present. Using a combination of signals from the chemical process reactor and analytical is another approach to addressing this issue. Signals from the effluent line are also possible.
  • two or more gas compositions are introduced in a prescribed sequence through an inlet 11 into a semiconductor chemical process reactor 10 to assist in the performance of various steps of semiconductor fabrication, including etching of a semiconductor substrate 14 mounted on a platen 12 and/or cleaning of the inside surface of the reactor 10 of by-product inadvertent depositions.
  • the substrate 14 may be one or more semiconductor wafers such as a "boat" or carrier of a series of wafers stacked on their edge.
  • the substrate 14 is introduced into the reactor 10 through a load lock 15 from a load chamber 16.
  • the reactor 10 and the inlet 11 can be controlled and or monitored by signal connections 99 and 98 to a process controller 94.
  • the process controller can monitor the reactor 10 through signal connection 99, adjust its temperature, control plasma conditions and maintain pressures to set parameters.
  • the flow of various gas compositions can be monitored and/or controlled by signal connection 98 to the process controller 94, such that a sequence of gas compositions are introduced into the reactor 10 through the inlet 11, including at least one gas composition containing a desired gas in elemental form or molecular form.
  • a sequence of gas compositions are introduced into the reactor 10 through the inlet 11, including at least one gas composition containing a desired gas in elemental form or molecular form.
  • An example would be the introduction of xenon difluoride, as an etch gas, where the xenon difluoride is decomposed under the conditions in the reactor 10, and the xenon is desired to be recovered, for reuse and recycling, as a desired gas in the effluent of the reactor 10.
  • Effluent from the reactor 10 can pass through an optional second load lock 17 into a exhaust effluent pump/compressor 19 and an effluent line 18.
  • the effluent continues through a three-way valve 20A, shown in FIG. 2 , that prevents backflow of effluent towards the reactor 10.
  • This method for diverting the waste gas is appropriate for processes that are not highly sensitive to changes in pressure and flow.
  • the use of a three-way valve may not be preferred to an alternative check valve approach, because there exists the possibility that pressure spikes could occur in the effluent line, which could impact the pressure within the process reactor.
  • Effluent that passes through the three-way valve 20A is sent in line 22 to an abatement, scrubbing and vent system 23 to decompose, burn or sorb toxic, hazardous, corrosive or global warming gases, before the residual effluent gases are vented.
  • a recovery line 24 is connected to the effluent line 18 at the three-way valve 20A.
  • the recovery line 24 is controlled by an automatic valve 26, which may be a pneumatic actuated valve or an electric solenoid valve or similar automatic valve capable of operating upon a pneumatic, electrical or other signal sent by a recovery system process controller 104, which may not necessarily be connected to the process controller 94, such recovery system process controller communicating with the automatic valve 26 through signal connection 95.
  • Process controller 94 and recovery process controller 104 can be discrete or their functionality may be combined in one controller for various embodiments of the present invention.
  • the recovery line can be vibration isolated from the effluent line 18 by a flexible line section 21 that prevents vibrations from being transmitted either from the effluent line to the recovery line 24 or from the recovery line 24 to the effluent line 18.
  • the recovery line can also be manually closed off from the effluent line, for instance for service, by manual shutoff valve 25.
  • a compressor 28 is situated in the recovery line 24 to remove effluent from the effluent line 18 when automatic valve 26 is open.
  • the compressor 28 is capable of reducing the pressure of the recovery line 24 and thus the effluent line 18. In this manner the entire effluent gas flow in effluent line 18 may be diverted into recovery line 24. This occurs when the desired gas is in the gas composition of the effluent in the effluent line at a phase time delayed from introduction of gas compositions into the reactor 10 when the desired gas is being exhausted from the reactor 10 in the effluent line 18.
  • This timing, sequence and delayed, phased time to discretely remove and recover the desired gas from the effluent's overall substantially continuous flow is monitored and/or controlled by the process controller 94 through its signal connections 96, 98 and 99 and the recovery system process controller 104 and its signal connection 95 to the automatic valve 26.
  • these controllers may be discrete or their functions combined in one controller. Monitoring the composition of the effluent stream is also possible.
  • a buffer tank 31 is situated downstream of compressor 28 and upstream of guard bed 30.
  • the buffer tank 31 moderates any pressure variances as different reactors 10 feed the desired gas to line 24, so that the beds 40 and 42 see feed gas of a substantially constant pressure.
  • the desired gas then passes through a check valve 32 in line 34 and is alternately subjected to selective sorptive separation in parallel switching sorptive separation beds 40 and 42, alternatively on feed sorption and countercurrent depressurization and purge by alternate passage through one of either valve 36 or 38.
  • xenon being the desired gas in a carrier gas of nitrogen
  • the nitrogen is typically least strongly adsorbed on adsorbents, such as: activated carbon, zeolites and aluminas, and passes through the beds 40 or 42 unadsorbed, while the xenon is adsorbed on the adsorbent in the beds 40 and 42.
  • xenon is further compressed in additional compressor 78 and can be recycled to the reactor 10, taken to further processing or stored in one or more storage containers 90 and 92 through check valve 84 and, alternately and respectively, valves 86 and 88.
  • additional compressor 78 can be recycled to the reactor 10, taken to further processing or stored in one or more storage containers 90 and 92 through check valve 84 and, alternately and respectively, valves 86 and 88.
  • the other container is being removed for remote processing and an empty container is being connected to line 82 to be filled when the remaining container is full.
  • desired gas such as xenon
  • desired gas can be desorbed from the beds 40 and 42 by a carrier gas, such as inert gases, exemplified by nitrogen introduced through line 58 and alternatively valves 60 or 62, depending on which bed 40 or 42 is on depressurization mode to purge the desired gas from the sorbent in the beds 40 and 42.
  • carrier gas such as inert gases
  • the unrecovered and unsorbed gas constituents of the gas mixture are removed through valves 48 and 50, respectively, to be returned in line 52, valve 54 and line 56 to the effluent line 22 to be treated in the abatement and vent system 23 to decompose, burn or sorb toxic, hazardous, corrosive or global warming gases, before the residual effluent gases are vented.

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  • Oil, Petroleum & Natural Gas (AREA)
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  • Inorganic Chemistry (AREA)
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  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
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  • Separation Of Gases By Adsorption (AREA)
  • Drying Of Semiconductors (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Claims (12)

  1. Vorrichtung zur Rückgewinnung eines gewünschten Gases aus dem Abfluss eines chemischen Prozessreaktors (10), der zwei oder mehr separate Gaszusammensetzungen der Reihe nach verwendet, wobei die Vorrichtung Folgendes umfasst:
    (a) den chemischen Prozessreaktor (10), der mit zumindest einem Einlass (11) und einer oder mehreren Leitungen zum Einführen von zwei oder mehr separaten Gaszusammensetzungen in den chemischen Prozessreaktor (10) bereitgestellt wird;
    (b) eine Abflussleitung (18) von dem chemischen Prozessreaktor (10), die dazu in der Lage ist, Abfluss der zwei oder mehr in den chemischen Prozessreaktor (10) eingeführten, separaten Gaszusammensetzungen zu entfernen;
    (c) ein Dreiwegeventil (20A) in der Abflussleitung (18), das die Entfernung des Abflusses aus dem chemischen Prozessreaktor (10) ermöglicht;
    (d) eine Rückgewinnungsleitung (24), die eine Verbindung zu der Abflussleitung (18) an dem Dreiwegeventil (20A) in der Abflussleitung (18) aufweist, die dazu in der Lage ist, ein gewünschtes Gas aus der Abflussleitung (18) zu entfernen;
    (e) ein automatisches Ventil (26) in der Rückgewinnungsleitung (24);
    (f) eine Prozesssteuerung oder -steuerungen (94,104), die dazu in der Lage sind, die Einführung von zwei oder mehr Gaszusammensetzungen der Reihe nach in den chemischen Prozessreaktor (10) zu steuern und dazu in der Lage sind, den Betrieb des automatischen Ventils (26) in der Rückgewinnungsleitung (24) zu steuern, sodass das automatische Ventil (26) zumindest während eines Teils der Zeit offen ist, in der sich das gewünschte Gas als ein Teil einer Gaszusammensetzung in der Abflussleitung (18) befindet, wobei die Prozesssteuerung oder -steuerungen (94, 104) dazu in der Lage sind, Prozesssignale von Signalverbindungen (95, 96, 98, 99) mit dem automatischen Ventil (26) und mit einem oder mehreren von dem chemischen Prozessreaktor (10) und dem Einlass/den Einlässen (11) und/oder der/den Leitung(en) zum Einführen der Gaszusammensetzungen in den chemischen Prozessreaktor (10) zu erzeugen und zu empfangen, sodass das automatische Ventil (26) in der Rückgewinnungsleitung (24) durch ein Signal von der/den Prozesssteuerung(en) (94, 104) zu einem Zeitpunkt im Anschluss an die Einführung des gewünschten Gases in den chemischen Prozessreaktor (10) geöffnet wird, wobei der anschließende Zeitpunkt einen Zeitpunkt umfasst, der für den Durchfluss des gewünschten Gases durch den chemischen Prozessreaktor (10) und in die Abflussleitung (18) erforderlich ist; und,
    (g) einen Kompressor (28) in der Rückgewinnungsleitung (24), der dazu in der Lage ist, das gewünschte Gas aus der Abflussleitung zu entfernen.
  2. Vorrichtung nach Anspruch 1, beinhaltend eine Recyclingleitung in Flusskommunikation mit der Rückgewinnungsleitung (24) und in Flusskommunikation mit der Abflussleitung (18) stromabwärts der Verbindung der Rückgewinnungsleitung (24) mit der Abflussleitung (18), die dazu in der Lage ist, zumindest einen Teil der Gaszusammensetzungen an die Abflussleitung (18) zurückzugeben.
  3. Vorrichtung nach einem vorhergehenden Anspruch, wobei die Rückgewinnungsleitung (24) ein sorptives Schutzbett (30) beinhaltet, um korrosive oder reaktive Gase aus den Abflüssen zu entfernen.
  4. Vorrichtung nach einem vorhergehenden Anspruch, beinhaltend zumindest ein sorptives Trennbett (40, 42), das dazu in der Lage ist, das gewünschte Gas selektiv von dem Abflussgas zu trennen und mit der Rückgewinnungsleitung (24) verbunden ist.
  5. Vorrichtung nach Anspruch 4, wobei das sorptive Trennbett (40, 42) mit einer Leitung in Flusskommunikation (82) mit zumindest einem Speicherbehälter (90, 92), der dazu in der Lage ist, das gewünschte Gas zu speichern, verbunden ist.
  6. Vorrichtung nach Anspruch 5, wobei ein zusätzlicher Kompressor (72) mit dem Speicherbehälter (90, 92) verbunden ist, um das gewünschte Gas zu komprimieren.
  7. Vorrichtung nach einem der Ansprüche 4 bis 6, wobei die sorptiven Trennbetten zwei sorptive Trennbetten (40, 42) umfassen, die parallel durch Flussleitungen und Ventile (36, 38), die dazu in der Lage sind, in Phasenverbindung mit der Rückgewinnungsleitung (24) betrieben zu werden, verbunden sind.
  8. Vorrichtung nach einem der Ansprüche 4 bis 7, wobei sich ein Puffertank (31) stromabwärts des Kompressors (28) in der Rückgewinnungsleitung (24) und stromaufwärts des sorptiven Trennbetts (40, 42) befindet.
  9. Prozess zur Rückgewinnung eines gewünschten Gases aus dem Abfluss eines chemischen Prozessreaktors (10), der zwei oder mehr Gaszusammensetzungen der Reihe nach verwendet, wobei der Prozess Folgendes umfasst:
    (a) Einführen von zwei oder mehr Gaszusammensetzungen, wobei zumindest eine das gewünschte Gas enthält, der Reihe nach in den chemischen Prozessreaktor (10) durch einen Einlass (11) in den chemischen Prozessreaktor (10);
    (b) Entfernen eines Abflusses aus dem chemischen Prozessreaktor (10), der die zwei oder mehr Gaszusammensetzungen und das gewünschte Gas der Reihe nach in einer Abflussleitung (18) enthält;
    (c) Durchgeben des Abflusses durch ein Dreiwegeventil (20A);
    (d) Entfernen eines Teils des Abflusses aus der Abflussleitung (18) durch das Dreiwegeventil (20A), wobei der Teil des Abflusses einen wesentlichen Teil des gewünschten Gases enthält, wobei ein solches Entfernen durch eine Rückgewinnungsleitung (24) durchgeführt wird, die durch ein automatisches Ventil (26) gesteuert wird;
    (e) Steuern des Betriebs des automatischen Ventils (26) durch eine Prozesssteuerung oder -steuerungen (94, 104) in Signalkommunikation mit dem automatischen Ventil (26), wobei die Prozesssteuerung(en) (94,104) die Einführung der zwei oder mehr Gaszusammensetzungen in den chemischen Prozessreaktor (10) oder seinen Einlass (11) durch Signalkommunikation mit einem oder mehreren von den chemischen Prozessreaktoren (10) oder ihren Einlässen (11) verfolgen; und,
    (f) Öffnen des automatischen Ventils (26) durch eine Signalkommunikation von der/den Prozesssteuerung(en) (94,104) zu einem Zeitpunkt im Anschluss an die Einführung des gewünschten Gases in den chemischen Prozessreaktor (10), wobei der anschließende Zeitpunkt einen Zeitpunkt umfasst, der für den Durchfluss des gewünschten Gases durch den chemischen Prozessreaktor (10) und in die Abflussleitung (18) erforderlich ist, um die Gaszusammensetzung, die das gewünschte Gas enthält, aus der Abflussleitung (18) während zumindest eines Teils der Zeit, in der sich das gewünschte Gas als ein Teil der Gaszusammensetzung in der Abflussleitung (18) befindet, zurückzugewinnen.
  10. Prozess nach Anspruch 9, wobei der chemische Prozessreaktor (10) ein Halbleiterfertigungsprozessreaktor ist.
  11. Verfahren nach Anspruch 9 oder 10, wobei das gewünschte Gas ein Edelgas ist.
  12. Verfahren nach Anspruch 11, wobei das gewünschte Gas aus der Gruppe ausgewählt ist, die aus Helium, Argon, Xenondifluorid und Xenon besteht.
EP12158815.6A 2010-01-28 2011-01-28 Verfahren und Ausrüstung zum selektiven Auffangen von Prozessabgasen Active EP2463012B1 (de)

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EP2353698A1 (de) 2011-08-10
MY173411A (en) 2020-01-22
CN104147892A (zh) 2014-11-19
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EP2353698B1 (de) 2017-04-26
IL210911A (en) 2014-09-30
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JP5209745B2 (ja) 2013-06-12
KR101284728B1 (ko) 2013-07-17
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JP2013128120A (ja) 2013-06-27
TWI426953B (zh) 2014-02-21
IL210911A0 (en) 2011-06-30
KR101630724B1 (ko) 2016-06-16
KR20110088465A (ko) 2011-08-03
EP2353698A8 (de) 2011-10-19
CN104147892B (zh) 2017-04-12
CN102139181B (zh) 2014-09-17
US8591634B2 (en) 2013-11-26
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