EP2416346B1 - Lampe à vapeur de mercure pour un rayonnement plan homogène - Google Patents

Lampe à vapeur de mercure pour un rayonnement plan homogène Download PDF

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Publication number
EP2416346B1
EP2416346B1 EP11005665.2A EP11005665A EP2416346B1 EP 2416346 B1 EP2416346 B1 EP 2416346B1 EP 11005665 A EP11005665 A EP 11005665A EP 2416346 B1 EP2416346 B1 EP 2416346B1
Authority
EP
European Patent Office
Prior art keywords
quartz glass
mercury vapour
vapour lamp
lamp according
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP11005665.2A
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German (de)
English (en)
Other versions
EP2416346A2 (fr
EP2416346A3 (fr
Inventor
Alex Voronov
Burkard Jung
Franz-Josef Schilling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Priority to PL11005665T priority Critical patent/PL2416346T3/pl
Publication of EP2416346A2 publication Critical patent/EP2416346A2/fr
Publication of EP2416346A3 publication Critical patent/EP2416346A3/fr
Application granted granted Critical
Publication of EP2416346B1 publication Critical patent/EP2416346B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H01J61/307—Flat vessels or containers with folded elongated discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury

Definitions

  • the invention relates to a mercury vapor lamp for homogeneous planar irradiation, with a lamp bulb made of quartz glass, which encloses a closed discharge space, protrude into the two electrodes, between which a non-linear gas discharge channel extends.
  • UV lamps such as mercury vapor lamps, are used, for example, for cleaning or modifying the surfaces of substrates, for disinfecting or for activating surfaces.
  • UV light is used in the wavelength range from 160 to 400 nm.
  • the smallest possible distance between the surface and the UV radiator is advantageous.
  • a small distance makes homogeneous illumination difficult, since the UV radiation intensity in the near field of the radiator is inhomogeneous.
  • a folded in meandering lamp bulb can not be readily folded without gaps, so that gaps between the legs of the meander arise that affect the homogeneity of the light distribution.
  • radiator assemblies are associated with high installation and adjustment effort and the variety of lamps and ballasts also require a lot of design effort.
  • the complete set of radiators often has to be replaced in order to avoid inhomogeneities due to different aging processes of the radiators.
  • the invention is therefore based on the object to provide a structurally simple mercury vapor lamp, which ensures the highest possible homogeneity of the UV irradiation even at a small distance from the surface to be treated.
  • the lamp envelope is formed as a quartz glass chamber limited by straight walls with bottom, top and side walls and by means of several, from the bottom to the top protruding dividers made of quartz glass is subdivided into subchambers which comprise a foremost and a rearmost subchamber and which in series form the non-linear gas discharge channel by the partitions alternately extending from one side wall to close to the opposite side wall leaving an adjacent subchambers fluidly connecting gap, the one Electrode of the foremost sub-chamber and the other electrode of the rearmost sub-chamber is assigned.
  • the separating webs are formed as flat quartz glass plates and are dotted on the underside and on the upper side of the quartz glass chamber.
  • the dividers are not continuously welded to the top and the bottom, but only spotted in a few places. This simplifies the production of the mercury vapor lamp and avoids deformations due to the welding process. Although the dividers do not separate adjacent subchambers from each other in a gastight manner; However, it has been shown that a gas-tight separation is not required. Because a discharge in a narrow gap between the divider and the top or the bottom is energetically unfavorable, so that the discharge follows the predetermined gas discharge channel.
  • the mercury vapor lamp according to the invention essentially consists of a quartz glass chamber of arbitrary cross-section, which is easily adaptable to the geometry of the surface to be irradiated, that is, for example, round, rectangular or triangular.
  • the cross-sectional geometry results from the geometry of the top and the bottom, the underside of which simultaneously forms the radiating surface.
  • top and bottom are connected by straight side walls, so that there is a closed, cylindrical quartz glass chamber.
  • the height of the side walls corresponds to the distance between top and bottom.
  • the quartz glass chamber is subdivided into at least three subchambers, which in series form a nonlinear, labyrinthine, spiral gas discharge channel.
  • at least two dividers are provided, which extend over the entire height of the quartz glass chamber and which extend alternately from one side wall to near an opposite side wall, thereby leaving a gap between the adjacent sub-chambers.
  • the gas discharge channel extends from the foremost sub-chamber to the rearmost sub-chamber, in each of which either one of the electrodes protrudes directly or wherein these are fluidically connected to another space into which the electrode protrudes.
  • the Aneinaderreihung the sub-chambers fills the quartz glass chamber completely and forms the gas discharge channel. Therefore, a homogeneous radiation intensity is established above the emission surface, apart from narrow areas around the separation webs.
  • the quartz glass chamber including the dividers is composed of simple quartz glass parts. It is easy to manufacture, requires only a single electrical connection and only a small effort for installation and adjustment.
  • the foremost and the rearmost subchamber each have an opening which is connected to a front end of a quartz glass tube, in which an electrode is arranged whose electrical connection via a gas-tight pinch on opposite end face is guided out of the quartz glass tube.
  • the electrodes are in this case not directly connected to the respective subchambers at the beginning and end of the gas discharge channel, but with separate quartz glass tubes, one end of which is provided with a pinch for gas-tight implementation of the electrical connection for the electrode.
  • the quartz glass tube thus provided with the electrode then only has to be welded to the quartz glass chamber. This facilitates the manufacture of the mercury vapor lamp according to the invention.
  • the quartz glass tube is a round tube.
  • the quartz glass tubes may be connected to a side wall of the quartz glass chamber.
  • a particularly compact design results when the quartz glass tubes are connected to the top of the quartz glass chamber.
  • the quartz glass tube consists of quartz glass which contains a dopant which causes absorption for VUV radiation of wavelength around 185 nm.
  • the quartz glass tube (or the quartz glass tubes) usually extends in the direction opposite to the emission direction and does not contribute to the UV treatment. On the contrary, the quartz glass tube can extend into areas and spaces in which the emission of high-energy UV light is undesirable, either because of ozone formation or because of UV aging of neighboring components, such as plastic seals.
  • Suitable dopants for the absorption of VUV radiation are, for example, titanium oxide or gallium oxide.
  • the top and bottom of the quartz glass chamber are polygonal and the sub-chambers are cuboid.
  • the dividers are as thin as possible and only as thick as necessary, as required by the mechanical stability. It has proven useful if the dividers have a thickness in the range of 1 to 3 mm, preferably at most 2 mm.
  • a design of the mercury vapor lamp according to the invention is preferred in which the subchambers extend along a longitudinal axis, the width dimension of which is perpendicular to the longitudinal axis in the range of 5 to 20 mm, preferably less than 15 mm.
  • the sub-chambers are elongated and extend in the simplest case of a side wall to the opposite side wall.
  • the height of the subchambers results from the distance from top and bottom and their width - the dimension perpendicular to height dimension and longitudinal axis - is in an area in which an optimal filling by the gas discharge results.
  • the gas discharge does not completely fill the subchambers, and at widths of less than 5 mm, many partitions with a correspondingly large design effort are required for a given dimension of the radiating surface.
  • the distance between the top and bottom in the range of 5 to 20 mm, preferably less than 15 mm.
  • the subchambers run meandering along their juxtaposition.
  • the upper side of the quartz glass chamber is provided with a reflector.
  • the radiation component emitted in the direction of the upper side is not lost or only to a smaller extent.
  • the reflector may be a separate reflector component.
  • the reflector is particularly preferably designed in the form of a coating of the upper side, for example in the form of a layer of opaque quartz glass, which acts as a diffuse reflector.
  • the quartz glass chamber may consist of synthetically produced quartz glass and / or quartz glass melted from naturally occurring raw material. Has proven particularly useful an embodiment in which the underside consists of synthetically produced quartz glass.
  • Synthetically produced quartz glass is characterized by a high purity and a particularly high transmission for UV radiation, in particular in the wavelength range around 185 nm.
  • a mercury vapor lamp with a nominal power of less than 100 watts is preferably used as the mercury vapor lamp.
  • Mercury low pressure lamps offer excellent efficiency. About 40% of the electrical power is converted to UVC radiation at 254 nm and about 10% to VUV radiation at 185 nm. However, sensitive surfaces can be affected at a small distance to the radiating surface of the UV lamp, which can be minimized by a low lamp power.
  • the mercury vapor lamp according to FIG. 1 is used to clean static, immobile substrates in a microscopy unit.
  • the VUV radiation causes a decomposition of organic impurities on a molecular scale.
  • the distance between the substrate surface and the mercury vapor lamp is in the range of a few millimeters, so that high demands are made on the homogeneity of the UV irradiation.
  • the device used for this purpose consists of a low-pressure mercury lamp 1, which is designed for a nominal power of 50 watts.
  • the low-pressure mercury lamp 1 comprises a cuboid quartz glass chamber 2, which is produced by gas-tight welding of a square ceiling plate 3, a square base plate 4 and four equal side walls 5. Its lateral dimension is 60 mm and its height 15 mm.
  • the bottom plate 4 which forms the radiating surface through which the working radiation exits onto the substrate, consists of synthetically produced quartz glass.
  • the ceiling plate 3 and the side walls 5 are made of quartz glass, which is melted from naturally occurring raw material.
  • the interior of the quartz glass chamber 2 is divided into four elongated parallelepipedic subchambers 7a, 7b, 7c, 7d by means of three partitions 6, which have the same height as the side walls 5.
  • the thickness of the dividers 6 is 2 mm and they are also made of quartz glass, which is melted from naturally occurring raw material.
  • the separating webs 6 extend alternately from one side wall 5a to close to the opposite side wall 5b (and vice versa, from the side wall 5b to close to the opposite side wall 5a), so that the interior as a whole represents a meandering gas discharge channel, which is formed from the juxtaposition of subchambers 7a, 7b, 7c, 7d.
  • the gas discharge channel is in FIG. 3 symbolized by the directional arrow 8.
  • the individual subchambers 7a, 7b, 7c, 7d extend along a longitudinal axis and have a length of about 56 mm and a width of about 12.5 mm.
  • the separating webs 6 are dotted at three places on the ceiling plate 3 and on the respective adjacent side wall (5a and 5b). Its length is designed so that it leaves open to the opposite side wall a gap 13 with a gap width of about 7 mm, which represents a fluidic connection between adjacent sub-chambers 7a, 7b, 7c, 7d.
  • the subchamber 7a forms the beginning of the gas discharge channel 8 and the subclamp 7d the end thereof. Start and end lie on one and the same side wall 5a.
  • the ceiling plate 3 is provided with an opening which is closed by a welded round tube 9 made of a TiO 2 -doped quartz glass having an outer diameter of 15 mm.
  • the power supply 11 is led out via pinch 12 from the round tubes 9.
  • the round tubes 9 together with the electrodes 10 inserted therein are each connected to the ceiling plate 3 in the region of the side wall 5a.
  • the gas discharge takes place over the entire distance between the electrodes 9, that is to say also within the round tube 9, but this part of the gas discharge does not contribute to the irradiation of the substrate and is not counted for the gas discharge channel 8.
  • the ceiling plate 3 and the side parts 5 are each provided on their outside with a layer 13 of opaque quartz glass, which acts as a diffuse reflector.
  • the mercury low-pressure lamp 1 according to the invention is made of simple components and allows a particularly homogeneous UV irradiation in the near field. Because with the same lateral dimension allows this construction four sub-chambers 7a, 7b, 7c, 7d, in contrast to only three legs in a meandering fold of the lamp envelope.

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  • Vessels And Coating Films For Discharge Lamps (AREA)

Claims (13)

  1. Lampe à vapeur de mercure pour une irradiation extensive homogène, comprenant un piston de lampe en verre de quartz qui entoure un espace de décharge fermé dans lequel deux électrodes (10) dépassent, entre lesquelles un canal de décharge gazeuse non linéaire (8) s'étend, dans laquelle le piston de lampe est réalisé en tant que chambre en verre de quartz (2) limitée par des parois droites avec un côté inférieur (4), un côté supérieur (3) et des parois latérales (5 ; 5a ; 5b) et est divisé en chambres secondaires (7a ; 7b ; 7c ; 7d) au moyen de plusieurs traverses de séparation (6) en verre de quartz dépassant du côté inférieur (4) jusqu'au côté supérieur (3), chambres secondaires (7a ; 7b ; 7c ; 7d) qui comprennent une chambre secondaire la plus avant (7a) et une chambre secondaire la plus arrière (7d) et qui forment le canal de décharge gazeuse non linéaire (8) par juxtaposition en ce que les traverses de séparation (6) s'étendent en alternance d'une paroi latérale (5a) jusqu'à près de la paroi latérale opposée (5b) en libérant une fente (13) reliant de manière fluidique des chambres secondaires voisines, dans laquelle une des électrodes (10) est associée à la chambre secondaire la plus avant (7a) et l'autre électrode (10) est associée à la chambre secondaire la plus arrière (7d), caractérisée en ce que les traverses de séparation (6) sont réalisées en tant que plaques en verre de quartz et sont soudées par point au côté inférieur (4) et au côté supérieur (3) de la chambre en verre de quartz.
  2. Lampe à vapeur de mercure selon la revendication 1, caractérisée en ce que la chambre secondaire la plus avant (7a) et la chambre secondaire la plus arrière (7d) présentent chacune une ouverture qui est reliée à une extrémité frontale d'un tuyau en verre de quartz (9) dans lequel une électrode (10) est disposée, dont le raccord électrique (11) est guidé hors du tuyau en verre de quartz (9) par le biais d'un pincement étanche au gaz (12) à l'extrémité frontale opposée.
  3. Lampe à vapeur de mercure selon la revendication 2, caractérisée en ce que le tuyau en verre de quartz (9) est un tuyau rond.
  4. Lampe à vapeur de mercure selon la revendication 2 ou 3, caractérisée en ce que les tuyaux en verre de quartz (9) sont reliés au côté supérieur (3) de la chambre en verre de quartz (2).
  5. Lampe à vapeur de mercure selon l'une quelconque des revendications 2 à 4, caractérisée en ce que le tuyau en verre de quartz (9) se compose de verre de quartz qui contient un dopant qui entraîne une absorption pour le rayonnement ultraviolet de vide de la longueur d'onde autour de 185 nm.
  6. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que le côté supérieur (3) et le côté inférieur (4) de la chambre en verre de quartz (2) sont réalisés de manière polygonale et les chambres secondaires (7a ; 7b ; 7c ; 7d) sont réalisées de manière parallélépipédique.
  7. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que les traverses de séparation (6) présentent une épaisseur dans la plage de 1 à 3 mm, de préférence de 2 mm maximum.
  8. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que les chambres secondaires (7a ; 7b ; 7c ; 7d) s'étendent le long d'un axe longitudinal, dans laquelle leur dimension en largeur perpendiculairement à l'axe longitudinal se situe dans la plage de 5 à 20 mm, de préférence se monte à moins de 15 mm.
  9. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que l'écart entre le côté supérieur (3) et le côté inférieur (4) se situe dans la plage de 5 à 20 mm, de préférence se monte à moins de 15 mm.
  10. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que les chambres secondaires (7a ; 7b ; 7c ; 7d) s'étendent en forme de méandre le long de leur juxtaposition.
  11. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que le côté supérieur (3) de la chambre en verre de quartz est pourvu d'un réflecteur.
  12. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que le côté inférieur se compose de verre de quartz produit de manière synthétique.
  13. Lampe à vapeur de mercure selon l'une quelconque des revendications précédentes, caractérisée en ce que la lampe à vapeur de mercure est une lampe à mercure basse pression avec une puissance nominale inférieure à 100 Watt.
EP11005665.2A 2010-08-04 2011-07-12 Lampe à vapeur de mercure pour un rayonnement plan homogène Not-in-force EP2416346B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL11005665T PL2416346T3 (pl) 2010-08-04 2011-07-12 Lampa rtęciowa do równomiernego planarnego naświetlania

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010033446A DE102010033446B4 (de) 2010-08-04 2010-08-04 Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung

Publications (3)

Publication Number Publication Date
EP2416346A2 EP2416346A2 (fr) 2012-02-08
EP2416346A3 EP2416346A3 (fr) 2013-01-02
EP2416346B1 true EP2416346B1 (fr) 2013-09-25

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EP11005665.2A Not-in-force EP2416346B1 (fr) 2010-08-04 2011-07-12 Lampe à vapeur de mercure pour un rayonnement plan homogène

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US (1) US8400059B2 (fr)
EP (1) EP2416346B1 (fr)
JP (1) JP2012038729A (fr)
CA (1) CA2745283C (fr)
DE (1) DE102010033446B4 (fr)
DK (1) DK2416346T3 (fr)
PL (1) PL2416346T3 (fr)

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Also Published As

Publication number Publication date
US20120032586A1 (en) 2012-02-09
CA2745283C (fr) 2014-04-29
DK2416346T3 (da) 2013-12-16
DE102010033446A1 (de) 2012-02-09
JP2012038729A (ja) 2012-02-23
US8400059B2 (en) 2013-03-19
EP2416346A2 (fr) 2012-02-08
CA2745283A1 (fr) 2012-02-04
DE102010033446B4 (de) 2012-03-22
PL2416346T3 (pl) 2014-03-31
EP2416346A3 (fr) 2013-01-02

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