EP2047525A2 - Dünnfilm-halbleiterbauelement und bauelement-verbund - Google Patents
Dünnfilm-halbleiterbauelement und bauelement-verbundInfo
- Publication number
- EP2047525A2 EP2047525A2 EP07785643A EP07785643A EP2047525A2 EP 2047525 A2 EP2047525 A2 EP 2047525A2 EP 07785643 A EP07785643 A EP 07785643A EP 07785643 A EP07785643 A EP 07785643A EP 2047525 A2 EP2047525 A2 EP 2047525A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- thin
- film semiconductor
- semiconductor device
- heat dissipation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/858—Means for heat extraction or cooling
- H10H20/8582—Means for heat extraction or cooling characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/858—Means for heat extraction or cooling
- H10H20/8585—Means for heat extraction or cooling being an interconnection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8314—Electrodes characterised by their shape extending at least partially onto an outer side surface of the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/853—Encapsulations characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
Definitions
- the optical structure can be arranged on a side of the cover layer facing or facing away from the layer stack.
- a two-sided arrangement of the carrier layer and the cover layer can advantageously replace a housing body.
- a contact pad for an outcoupling-side electrical contact of the layer stacks on the carrier layer is applied between the layer stacks.
- the thin-film semiconductor devices may be electrically connected in various ways.
- the thin-film semiconductor devices are connected in series.
- the second connection region of a first thin-film semiconductor component for example by means of a bonding wire, is particularly preferably electrically connected to the heat-dissipation layer of a second thin-film semiconductor component, the heat-dissipation layer serving as an electrical contact.
- the first and the second connection region may be arranged on a side of the layer stack facing the carrier layer, wherein the first connection region is electrically connected to a first heat-dissipating layer serving as electrical contact and the second connection region is electrically connected to a second heat-dissipating layer serving as electrical contact.
- Figure 3 is a schematic sectional view of a second. ' .
- Embodiment of a thin-film semiconductor device according to the invention
- FIG. 4 shows a schematic sectional view of a third exemplary embodiment of a thin-film semiconductor component according to the invention
- FIG. 7 shows a schematic top view of a first exemplary embodiment of a component composite according to the invention
- Figure 9 is a schematic cross-sectional view of a fourth embodiment of a device composite according to the invention.
- Figure 10 is a schematic cross-sectional view of a fifth embodiment of a device composite according to the invention.
- the same or equivalent components are each provided with the same reference numerals.
- the illustrated components of the figures, in particular the sizes of layer thicknesses shown, are in principle not to be regarded as true to scale. Rather, they can be exaggerated in size for clarity.
- the cover layer 10 is suitable as electrical insulation between a heat dissipation layer 3 and a conductor 9.
- the heat dissipation layer 3 can have electrical conductivity in addition to the thermal conductivity.
- a passivation layer 7 is arranged between the conductor track 9 and the semiconductor layer sequence 5. This contains, for example, silicon oxide.
- the layer sequence 5 is provided essentially for generating radiation.
- the layer sequence 5 can have a conventional pn junction, a double heterostructure, a single quantum well structure or a multiple quantum well structure.
- the layer sequence 5 is substrateless, which means that a growth substrate used for growing the layer sequence 5 is no longer present in the finished thin-film semiconductor component 1.
- the layer stack 8 (see Figure 2) comprises a first electrical connection region 5 and a second electrical connection region 6, which is arranged radiation output side.
- the layer stack 8 is arranged on a carrier layer 2 which has a heat dissipation layer 3.
- the carrier layer 2 is a film on which the heat dissipation layer 3 is patterned before the layer stack 8 is mounted on the heat dissipation layer 3.
- the layer stack 8 is bonded to the heat dissipation layer 3.
- the thickness D w of the heat dissipation layer 3 is preferably between 5 ⁇ m and 30 ⁇ m, with a metal, for example Cu, Ni or Ag, being particularly suitable as the material.
- the thickness D 3 of the layer sequence 5 and of the first electrical connection region 4, which is approximately 7 ⁇ m, can thus be less than the thickness D w of the heat dissipation layer 3.
- the small thicknesses of the carrier layer 2, the slaughterableit ⁇ ngsSchicht 3 and the layer stack 8 allow a total of a thin-film semiconductor device • 1 low overall height. It is a height D ges achievable, which is preferably less than 100 ⁇ m.
- the combination of carrier layer 2 and cover layer 10, which replace a housing body or form a housing for the thin-film semiconductor component 1, also contributes to this.
- the low height of a single thin-film semiconductor device 1 allows stacking of a plurality of thin-film semiconductor devices, whereby the luminance can be increased.
- the heat dissipation layer 3 completely covers a base area of the layer stack 8.
- the heat dissipation layer 3 it is also possible for the heat dissipation layer 3 to be offset from the layer stack, so that the radiation emitted by the layer sequence reaches the carrier layer 2 directly.
- the conductor 9, which is provided for a second electrical connection, preferably runs in steps.
- the conductor track from the first electrical connection region 6 is guided along a radiation decoupling surface 11 over a side surface of the layer stack 8 onto the carrier layer 2.
- the heat dissipation layer 3 and the conductor 9 are opposite the backing layer 2 or the covering layer 10 in the lateral direction in such a way shows that its electrical connection to a power supply 'is possible in a simple manner.
- the carrier layer 2 has a first partial layer 2 a and a second partial layer 2 b.
- the first 'part layer 2a is a thin layer, the thickness of the Partial layer 2a is chosen such that a relatively high heat flow is possible. The heat flow is antiproportional to the layer thickness.
- the thickness of the sub-layer 2a is in the single-digit micrometer range.
- the partial layer 2 a is electrically insulating and in particular contains a plastic material.
- both the conductor track 9 and the heat dissipation layer 3 can be applied to the carrier layer 2, without these being short-circuited.
- the heat dissipation layer 3 may be formed of a system of electrodeposited layers.
- the second sub-layer 2b is a film, preferably a metal foil containing copper, for example, is provided.
- a good heat transfer is possible.
- a strong expansion of the second sub-layer 2b due to the heating can be advantageously counteracted by the first sub-layer 2a, which has a lower thermal expansion coefficient than the second sub-layer 2b.
- the carrier layer 2 is arranged on a base 15.
- the pad 15 advantageously has a good thermal conductivity.
- the pad 15 is a metal foil.
- the carrier layer 2, however, may be a plastic film.
- a carrier layer 2 made of paper is conceivable.
- a thermal compound is used for the mechanical and thermal connection of the carrier layer 2 to the substrate 15.
- the thin-film component 1 shown schematically in plan view in FIG. 5 comprises a carrier layer 2 on which the heat-dissipation layer 3 and the layer stack
- the second electrical connection region 6 and the conductor 9 expediently contain an electrically conductive material.
- This may be a metal or a TCO (Transparent Conductive Oxide).
- the carrier layer 2 may be electrically conductive, so that it makes sense to remove the carrier layer 2 in the region between the heat dissipation layer 3 and the contact pad 12 in order to avoid a short circuit during operation of the thin-film semiconductor component 1.
- the thin-film semiconductor component 1 can be soldered or glued onto a printed circuit board in accordance with an SMT component with the structured carrier layer 2.
- the component composite 13 shown in FIG. 7 has a plurality of layer stacks 8, which are preferably designed as described in more detail in connection with FIGS. 2 and 6.
- the stack of layers 8 are anuß.- on a common carrier layer 2 Further, the stack of layers 8 are connected by means of the conductor tracks 9 to a common 'contact pad 12, which is arranged on the carrier layer. 2
- the size of the device array 13 can be varied by simply dicing the device array 13.
- the component composite 13 is particularly suitable for backlighting and lighting purposes.
- component circuits 13 are shown, which have a plurality of thin-film semiconductor devices 1.
- the thin-film semiconductor components 1 each comprise a layer stack 8 and a part of the common carrier layer 2, on which the layer stacks 8 are arranged.
- a heat dissipation layer 3 which serves here except for cooling as an electrical contact.
- a bonding wire 14 leads to the rear side disposed heat dissipation layer 3 of a second thin film semiconductor device 1 adjacent to the first thin film semiconductor device 1.
- the two thin film semiconductor devices 1 are connected in series.
- the number of series-connected thin-film semiconductor components 1 can be chosen arbitrarily large due to the application.
- the layer stacks 8 are arranged in a decentralized manner on the respective heat dissipation layer 3, as a result of which an improved front-side contacting of the layer stacks 8 is possible in comparison to a central arrangement.
- the base of the heat-dissipating layer 3 is formed like a scale and has in particular a recessed side edge and a side edge thereof opposite bulged.
- the layer stack 8 is preferably arranged on the indented side edge, since the current injection is better here than in the bulged side edge.
- part of the heat dissipation layers 3 may be free of layer stacks 8.
- the unpopulated heat dissipation layers 3 are preferably integrated into the series connection, so that advantageously also a layer stack 8 surrounded by unpopulated heat dissipation layers 3 can be supplied with electrical comparatively simple.
- FIG. 8c shows a cross-sectional view of the component composite 13 already described in connection with FIG. 8a.
- the component composite 13 comprises a plurality of layer stacks 8, which are arranged on a common carrier layer 2 and are each mechanically and electrically connected to a first heat dissipation layer 3 and a second heat dissipation layer 3 adjacent to the first heat dissipation layer 3. are connected. Both electrical contacts are in this case on the .jesper heat dissipation layers 3 facing side of the layer stack 8.
- a complete connection of the layer stacks 8 can take place by means of a complete bridging of adjacent heat dissipation layers 3 by means of a plurality of layer stacks 8.
- both electrical contacts of the layer stacks 8 are arranged on the side facing the carrier layer 2.
- the carrier layer 2 contains in this case electrically insulating material, in particular a plastic material, and further comprises openings for plated-through holes.
- the carrier layer 2 is a plastic film.
- the base 15, with which the carrier layer 2 is mechanically and thermally connected, is preferably a metal foil, so that a first electrical connection of the layer stacks 8 takes place by means of the base 15.
- a second electrical connection of the layer stacks 8 is possible by means of the heat dissipation layer (not shown) applied to the carrier layer 2.
- the methods for wireless contacting used in the invention require no. adjusted bonding process. Furthermore, the arrangement of the heat dissipation layer serving as a conductor track and the further conductor track on one side of the component enables a simple contacting of the thin-film semiconductor component.
Landscapes
- Led Device Packages (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006036543 | 2006-08-04 | ||
| DE102007004303A DE102007004303A1 (de) | 2006-08-04 | 2007-01-29 | Dünnfilm-Halbleiterbauelement und Bauelement-Verbund |
| PCT/DE2007/001273 WO2008014750A2 (de) | 2006-08-04 | 2007-07-16 | Dünnfilm-halbleiterbauelement und bauelement-verbund |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2047525A2 true EP2047525A2 (de) | 2009-04-15 |
Family
ID=38596017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP07785643A Withdrawn EP2047525A2 (de) | 2006-08-04 | 2007-07-16 | Dünnfilm-halbleiterbauelement und bauelement-verbund |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8872330B2 (enExample) |
| EP (1) | EP2047525A2 (enExample) |
| JP (1) | JP5517616B2 (enExample) |
| KR (1) | KR101386303B1 (enExample) |
| CN (1) | CN101542752B (enExample) |
| DE (1) | DE102007004303A1 (enExample) |
| TW (1) | TWI378571B (enExample) |
| WO (1) | WO2008014750A2 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005055293A1 (de) | 2005-08-05 | 2007-02-15 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip |
| DE102007004303A1 (de) | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterbauelement und Bauelement-Verbund |
| DE102007004304A1 (de) | 2007-01-29 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Dünnfilm-Leuchtdioden-Chip und Verfahren zur Herstellung eines Dünnfilm-Leuchtdioden-Chips |
| DE102007017113A1 (de) | 2007-01-31 | 2008-08-07 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement mit einer optisch aktiven Schicht, Anordnung mit einer Vielzahl von optisch aktiven Schichten und Verfahren zur Herstellung eines Halbleiterbauelements |
| DE102007041896A1 (de) | 2007-09-04 | 2009-03-05 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelements |
| DE102008013030A1 (de) | 2007-12-14 | 2009-06-25 | Osram Opto Semiconductors Gmbh | Strahlungsemittierende Vorrichtung |
| DE102008026841A1 (de) * | 2008-02-22 | 2009-08-27 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauteil |
| DE102008030815A1 (de) | 2008-06-30 | 2009-12-31 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Bauelementen |
| JP6124990B2 (ja) * | 2013-02-28 | 2017-05-10 | 三菱電機株式会社 | 放熱構造及び光送受信器 |
| JP2014204029A (ja) * | 2013-04-08 | 2014-10-27 | 立山科学工業株式会社 | Led実装用基板 |
| DE102014104230A1 (de) | 2014-03-26 | 2015-10-01 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Bauteil und Verfahren zur Herstellung eines strahlungsemittierenden Bauteils |
| CN107405939A (zh) | 2015-03-23 | 2017-11-28 | 斯道拉恩索公司 | 包括酯化或醚化的淀粉和无机矿物质的喷墨油墨吸收性涂料 |
| DE102017112223A1 (de) * | 2017-06-02 | 2018-12-06 | Osram Opto Semiconductors Gmbh | Halbleiterlaser-Bauteil und Verfahren zur Herstellung eines Halbleiterlaser-Bauteils |
| DE102019106546A1 (de) * | 2019-03-14 | 2020-09-17 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur herstellung von optoelektronischen halbleiterbauteilen und optoelektronisches halbleiterbauteil |
| US10854530B1 (en) | 2019-07-31 | 2020-12-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Heat dissipation structures |
| WO2022053548A1 (de) * | 2020-09-14 | 2022-03-17 | Saint-Gobain Glass France | Verfahren und vorrichtung zum beschichten einer gebogenen scheibe mit einem photosensitiven material |
| US11887908B2 (en) | 2021-12-21 | 2024-01-30 | International Business Machines Corporation | Electronic package structure with offset stacked chips and top and bottom side cooling lid |
Family Cites Families (106)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4068572A (en) | 1972-01-31 | 1978-01-17 | Hans Vogt | Apparatus for heating food |
| DE8711105U1 (de) * | 1987-08-14 | 1987-11-26 | Siemens AG, 1000 Berlin und 8000 München | Leiterplatte für die Elektronik |
| JP2953468B2 (ja) * | 1989-06-21 | 1999-09-27 | 三菱化学株式会社 | 化合物半導体装置及びその表面処理加工方法 |
| JPH0992878A (ja) | 1995-09-25 | 1997-04-04 | Shin Etsu Handotai Co Ltd | 半導体発光素子及びその製造方法 |
| US5779924A (en) * | 1996-03-22 | 1998-07-14 | Hewlett-Packard Company | Ordered interface texturing for a light emitting device |
| EP1655633A3 (en) | 1996-08-27 | 2006-06-21 | Seiko Epson Corporation | Exfoliating method, transferring method of thin film device, thin film integrated circuit device, and liquid crystal display device |
| DE19640594B4 (de) | 1996-10-01 | 2016-08-04 | Osram Gmbh | Bauelement |
| JP4032443B2 (ja) | 1996-10-09 | 2008-01-16 | セイコーエプソン株式会社 | 薄膜トランジスタ、回路、アクティブマトリクス基板、液晶表示装置 |
| EP0932390A1 (en) * | 1996-10-11 | 1999-08-04 | Sequus Pharmaceuticals, Inc. | Therapeutic liposome composition and method |
| JP3156756B2 (ja) | 1997-01-10 | 2001-04-16 | サンケン電気株式会社 | 半導体発光素子 |
| US5833073A (en) * | 1997-06-02 | 1998-11-10 | Fluoroware, Inc. | Tacky film frame for electronic device |
| US6071795A (en) | 1998-01-23 | 2000-06-06 | The Regents Of The University Of California | Separation of thin films from transparent substrates by selective optical processing |
| JP2000049382A (ja) | 1998-07-27 | 2000-02-18 | Matsushita Electron Corp | 半導体発光装置及びその製造方法 |
| US6504180B1 (en) * | 1998-07-28 | 2003-01-07 | Imec Vzw And Vrije Universiteit | Method of manufacturing surface textured high-efficiency radiating devices and devices obtained therefrom |
| US7253445B2 (en) | 1998-07-28 | 2007-08-07 | Paul Heremans | High-efficiency radiating device |
| JP5019664B2 (ja) | 1998-07-28 | 2012-09-05 | アイメック | 高効率で光を発するデバイスおよびそのようなデバイスの製造方法 |
| EP0977277A1 (en) | 1998-07-28 | 2000-02-02 | Interuniversitair Microelektronica Centrum Vzw | Devices for emitting radiation with a high efficiency and a method for fabricating such devices |
| US6876003B1 (en) * | 1999-04-15 | 2005-04-05 | Sumitomo Electric Industries, Ltd. | Semiconductor light-emitting device, method of manufacturing transparent conductor film and method of manufacturing compound semiconductor light-emitting device |
| DE19922176C2 (de) | 1999-05-12 | 2001-11-15 | Osram Opto Semiconductors Gmbh | Oberflächenmontierte LED-Mehrfachanordnung und deren Verwendung in einer Beleuchtungseinrichtung |
| CN1218407C (zh) | 1999-07-09 | 2005-09-07 | 奥斯兰姆奥普托半导体股份有限两合公司 | 器件封装 |
| DE19947030A1 (de) | 1999-09-30 | 2001-04-19 | Osram Opto Semiconductors Gmbh | Oberflächenstrukturierte Lichtemissionsdiode mit verbesserter Stromeinkopplung |
| JP2001168344A (ja) | 1999-12-13 | 2001-06-22 | Sony Corp | 薄膜トランジスタ及びその製造方法と加熱装置並びに表示装置 |
| DE10017336C2 (de) * | 2000-04-07 | 2002-05-16 | Vishay Semiconductor Gmbh | verfahren zur Herstellung von strahlungsemittierenden Halbleiter-Wafern |
| US6878563B2 (en) | 2000-04-26 | 2005-04-12 | Osram Gmbh | Radiation-emitting semiconductor element and method for producing the same |
| DE10051465A1 (de) | 2000-10-17 | 2002-05-02 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements auf GaN-Basis |
| DE10020464A1 (de) | 2000-04-26 | 2001-11-08 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement auf GaN-Basis |
| TWI289944B (en) | 2000-05-26 | 2007-11-11 | Osram Opto Semiconductors Gmbh | Light-emitting-diode-element with a light-emitting-diode-chip |
| TW472400B (en) * | 2000-06-23 | 2002-01-11 | United Epitaxy Co Ltd | Method for roughing semiconductor device surface to increase the external quantum efficiency |
| US6906346B2 (en) * | 2000-07-24 | 2005-06-14 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device, liquid crystal display device, EL display device, method for fabricating semiconductor thin film, and method for manufacturing the semiconductor device |
| DE10040448A1 (de) * | 2000-08-18 | 2002-03-07 | Osram Opto Semiconductors Gmbh | Halbleiterchip und Verfahren zu dessen Herstellung |
| JP2002063985A (ja) * | 2000-08-22 | 2002-02-28 | Nec Corp | 有機エレクトロルミネッセンス素子 |
| US6562648B1 (en) | 2000-08-23 | 2003-05-13 | Xerox Corporation | Structure and method for separation and transfer of semiconductor thin films onto dissimilar substrate materials |
| DE10041328B4 (de) | 2000-08-23 | 2018-04-05 | Osram Opto Semiconductors Gmbh | Verpackungseinheit für Halbleiterchips |
| US6614103B1 (en) * | 2000-09-01 | 2003-09-02 | General Electric Company | Plastic packaging of LED arrays |
| DE10051159C2 (de) * | 2000-10-16 | 2002-09-19 | Osram Opto Semiconductors Gmbh | LED-Modul, z.B. Weißlichtquelle |
| JP3829245B2 (ja) | 2000-11-09 | 2006-10-04 | 日本軽金属株式会社 | ディスペンサー洗浄用アダプター |
| JP4461616B2 (ja) | 2000-12-14 | 2010-05-12 | ソニー株式会社 | 素子の転写方法、素子保持基板の形成方法、及び素子保持基板 |
| ES2301633T3 (es) | 2001-04-30 | 2008-07-01 | Glaxo Group Limited | Pirimidinas condensadas como antagonistas del factor de liberacion de corticotropina (crf). |
| JP2002339952A (ja) | 2001-05-16 | 2002-11-27 | Sankyo Seiki Mfg Co Ltd | オイル動圧軸受装置およびその製造方法 |
| JP4180576B2 (ja) * | 2001-08-09 | 2008-11-12 | 松下電器産業株式会社 | Led照明装置およびカード型led照明光源 |
| JP3989794B2 (ja) | 2001-08-09 | 2007-10-10 | 松下電器産業株式会社 | Led照明装置およびled照明光源 |
| TW567619B (en) * | 2001-08-09 | 2003-12-21 | Matsushita Electric Industrial Co Ltd | LED lighting apparatus and card-type LED light source |
| JP2003131137A (ja) | 2001-10-24 | 2003-05-08 | Tochigi Nikon Corp | テラヘルツ光供給光学系、テラヘルツ光検出光学系、及びこれを用いたテラヘルツ光装置 |
| JP3900893B2 (ja) | 2001-11-02 | 2007-04-04 | ソニー株式会社 | 操舵装置、ドライバー認証方法、自動車 |
| TWI226139B (en) | 2002-01-31 | 2005-01-01 | Osram Opto Semiconductors Gmbh | Method to manufacture a semiconductor-component |
| DE20220258U1 (de) | 2002-09-20 | 2004-02-19 | Osram Opto Semiconductors Gmbh | Halbleiterchip |
| DE10303977A1 (de) | 2002-01-31 | 2003-11-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements |
| JP3776824B2 (ja) | 2002-04-05 | 2006-05-17 | 株式会社東芝 | 半導体発光素子およびその製造方法 |
| JP2004047975A (ja) | 2002-05-17 | 2004-02-12 | Semiconductor Energy Lab Co Ltd | 積層体の転写方法及び半導体装置の作製方法 |
| EP1363319B1 (en) * | 2002-05-17 | 2009-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of transferring an object and method of manufacturing a semiconductor device |
| JP2003347524A (ja) | 2002-05-28 | 2003-12-05 | Sony Corp | 素子の転写方法、素子の配列方法及び画像表示装置の製造方法 |
| JP4046118B2 (ja) | 2002-05-28 | 2008-02-13 | 松下電工株式会社 | 発光素子、それを用いた発光装置及び面発光照明装置 |
| JP2004047691A (ja) | 2002-07-11 | 2004-02-12 | Seiko Epson Corp | 半導体装置の製造方法、電気光学装置、及び電子機器 |
| WO2004017407A1 (de) | 2002-07-31 | 2004-02-26 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares halbleiterbauelement und verfahren zu dessen herstellung |
| DE10234978A1 (de) | 2002-07-31 | 2004-02-12 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares Halbleiterbauelement und Verfahren zu dessen Herstellung |
| US7078737B2 (en) | 2002-09-02 | 2006-07-18 | Matsushita Electric Industrial Co., Ltd. | Light-emitting device |
| TWI313062B (en) * | 2002-09-13 | 2009-08-01 | Ind Tech Res Inst | Method for producing active plastic panel displayers |
| DE10245628A1 (de) | 2002-09-30 | 2004-04-15 | Osram Opto Semiconductors Gmbh | Elektromagnetische Strahlung emittierender Halbleiterchip und Verfahren zu dessen Herstellung |
| DE10245631B4 (de) | 2002-09-30 | 2022-01-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterbauelement |
| JP4097510B2 (ja) * | 2002-11-20 | 2008-06-11 | 株式会社沖データ | 半導体装置の製造方法 |
| JP4472314B2 (ja) | 2002-11-22 | 2010-06-02 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法、表示装置の作製方法、および発光装置の作製方法 |
| US20040099926A1 (en) * | 2002-11-22 | 2004-05-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and light-emitting device, and methods of manufacturing the same |
| WO2004068572A2 (de) | 2003-01-31 | 2004-08-12 | Osram Opto Semiconductors Gmbh | Verfahren zur herstellung eines halbleiterbauelements |
| US6786390B2 (en) * | 2003-02-04 | 2004-09-07 | United Epitaxy Company Ltd. | LED stack manufacturing method and its structure thereof |
| US6903381B2 (en) | 2003-04-24 | 2005-06-07 | Opto Tech Corporation | Light-emitting diode with cavity containing a filler |
| TWI330413B (en) | 2005-01-25 | 2010-09-11 | Epistar Corp | A light-emitting device |
| US20050033638A1 (en) | 2003-08-08 | 2005-02-10 | Toni-Diane Donnet | System and method for advertising compliance |
| DE10339985B4 (de) * | 2003-08-29 | 2008-12-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer transparenten Kontaktschicht und Verfahren zu dessen Herstellung |
| DE602004028029D1 (en) * | 2003-10-07 | 2010-08-19 | Ingrid Dheur | Rwendung |
| DE10353679A1 (de) | 2003-11-17 | 2005-06-02 | Siemens Ag | Kostengünstige, miniaturisierte Aufbau- und Verbindungstechnik für LEDs und andere optoelektronische Module |
| US7341882B2 (en) | 2003-11-18 | 2008-03-11 | Uni Light Technology Inc. | Method for forming an opto-electronic device |
| US20050116235A1 (en) | 2003-12-02 | 2005-06-02 | Schultz John C. | Illumination assembly |
| JP4496774B2 (ja) * | 2003-12-22 | 2010-07-07 | 日亜化学工業株式会社 | 半導体装置の製造方法 |
| JP4368225B2 (ja) | 2004-03-10 | 2009-11-18 | 三洋電機株式会社 | 窒化物系半導体発光素子の製造方法 |
| US7427782B2 (en) * | 2004-03-29 | 2008-09-23 | Articulated Technologies, Llc | Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices |
| KR100880812B1 (ko) | 2004-03-29 | 2009-01-30 | 아티큘레이티드 테크놀러지스 엘엘씨 | 롤-투-롤 제조된 광 시트 및 캡슐화된 반도체 회로디바이스들 |
| WO2005100016A2 (de) * | 2004-04-16 | 2005-10-27 | Lucea Ag | Lichtemittierendes paneel und optisch wirksame folie |
| US6956246B1 (en) * | 2004-06-03 | 2005-10-18 | Lumileds Lighting U.S., Llc | Resonant cavity III-nitride light emitting devices fabricated by growth substrate removal |
| US7781789B2 (en) | 2006-11-15 | 2010-08-24 | The Regents Of The University Of California | Transparent mirrorless light emitting diode |
| US20050274971A1 (en) * | 2004-06-10 | 2005-12-15 | Pai-Hsiang Wang | Light emitting diode and method of making the same |
| DE102005013894B4 (de) | 2004-06-30 | 2010-06-17 | Osram Opto Semiconductors Gmbh | Elektromagnetische Strahlung erzeugender Halbleiterchip und Verfahren zu dessen Herstellung |
| DE102004036962A1 (de) * | 2004-07-30 | 2006-03-23 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips in Dünnfilmtechnik und Halbleiterchip in Dünnfilmtechnik |
| WO2006012838A2 (de) | 2004-07-30 | 2006-02-09 | Osram Opto Semiconductors Gmbh | Verfahren zur herstellung von halbleiterchips in dünnfilmtechnik und halbleiterchip in dünnfilmtechnik |
| KR100616600B1 (ko) * | 2004-08-24 | 2006-08-28 | 삼성전기주식회사 | 수직구조 질화물 반도체 발광소자 |
| JP4254669B2 (ja) * | 2004-09-07 | 2009-04-15 | 豊田合成株式会社 | 発光装置 |
| US7476910B2 (en) | 2004-09-10 | 2009-01-13 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device and method for manufacturing the same |
| DE102004050371A1 (de) * | 2004-09-30 | 2006-04-13 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer drahtlosen Kontaktierung |
| US7256483B2 (en) * | 2004-10-28 | 2007-08-14 | Philips Lumileds Lighting Company, Llc | Package-integrated thin film LED |
| JP2006128512A (ja) * | 2004-10-29 | 2006-05-18 | Ngk Spark Plug Co Ltd | 発光素子用セラミック基板 |
| US7303315B2 (en) * | 2004-11-05 | 2007-12-04 | 3M Innovative Properties Company | Illumination assembly using circuitized strips |
| JP4906256B2 (ja) | 2004-11-10 | 2012-03-28 | 株式会社沖データ | 半導体複合装置の製造方法 |
| JP2006147787A (ja) | 2004-11-18 | 2006-06-08 | Sony Corp | 発光素子及びその製造方法 |
| JP2006147889A (ja) * | 2004-11-19 | 2006-06-08 | Stanley Electric Co Ltd | 表面実装型led |
| KR100638666B1 (ko) | 2005-01-03 | 2006-10-30 | 삼성전기주식회사 | 질화물 반도체 발광소자 |
| JP2008535233A (ja) * | 2005-03-30 | 2008-08-28 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | フレキシブルledアレイ |
| US20060237735A1 (en) | 2005-04-22 | 2006-10-26 | Jean-Yves Naulin | High-efficiency light extraction structures and methods for solid-state lighting |
| KR100599012B1 (ko) | 2005-06-29 | 2006-07-12 | 서울옵토디바이스주식회사 | 열전도성 기판을 갖는 발광 다이오드 및 그것을 제조하는방법 |
| DE102005055293A1 (de) * | 2005-08-05 | 2007-02-15 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip |
| US20070053179A1 (en) * | 2005-09-08 | 2007-03-08 | Pang Slew I | Low profile light source utilizing a flexible circuit carrier |
| JP2009525614A (ja) * | 2006-01-31 | 2009-07-09 | スリーエム イノベイティブ プロパティズ カンパニー | コンプライアントなフォイル構造を有するled照明アセンブリ |
| US7710045B2 (en) * | 2006-03-17 | 2010-05-04 | 3M Innovative Properties Company | Illumination assembly with enhanced thermal conductivity |
| US7806574B2 (en) * | 2006-04-16 | 2010-10-05 | Albeo Technologies, Inc. | Thermal management of LED-based lighting systems |
| JP2008028352A (ja) * | 2006-06-02 | 2008-02-07 | Nec Lighting Ltd | 電子機器および電子機器の製造方法 |
| DE102007004303A1 (de) | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterbauelement und Bauelement-Verbund |
| DE102007004301A1 (de) | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements und Dünnfilm-Halbleiterbauelement |
| DE102007004304A1 (de) | 2007-01-29 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Dünnfilm-Leuchtdioden-Chip und Verfahren zur Herstellung eines Dünnfilm-Leuchtdioden-Chips |
-
2007
- 2007-01-29 DE DE102007004303A patent/DE102007004303A1/de not_active Withdrawn
- 2007-07-16 JP JP2009522082A patent/JP5517616B2/ja not_active Expired - Fee Related
- 2007-07-16 EP EP07785643A patent/EP2047525A2/de not_active Withdrawn
- 2007-07-16 US US12/376,425 patent/US8872330B2/en not_active Expired - Fee Related
- 2007-07-16 WO PCT/DE2007/001273 patent/WO2008014750A2/de not_active Ceased
- 2007-07-16 KR KR1020097004412A patent/KR101386303B1/ko not_active Expired - Fee Related
- 2007-07-16 CN CN200780036707.6A patent/CN101542752B/zh not_active Expired - Fee Related
- 2007-08-02 TW TW096128339A patent/TWI378571B/zh not_active IP Right Cessation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2008014750A2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101386303B1 (ko) | 2014-04-17 |
| CN101542752A (zh) | 2009-09-23 |
| TW200816524A (en) | 2008-04-01 |
| US20100163915A1 (en) | 2010-07-01 |
| DE102007004303A1 (de) | 2008-02-07 |
| TWI378571B (en) | 2012-12-01 |
| US8872330B2 (en) | 2014-10-28 |
| WO2008014750A2 (de) | 2008-02-07 |
| JP5517616B2 (ja) | 2014-06-11 |
| CN101542752B (zh) | 2014-01-22 |
| WO2008014750A3 (de) | 2008-06-12 |
| JP2009545863A (ja) | 2009-12-24 |
| KR20090035040A (ko) | 2009-04-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2047525A2 (de) | Dünnfilm-halbleiterbauelement und bauelement-verbund | |
| DE102008021402B4 (de) | Oberflächenmontierbares Leuchtdioden-Modul und Verfahren zur Herstellung eines oberflächenmontierbaren Leuchtdioden-Moduls | |
| EP2281316B1 (de) | Optoelektronisches halbleiterbauteil | |
| WO2009039841A1 (de) | Optoelektronischer halbleiterchip, optoelektronisches bauelement und verfahren zum herstellen eines optoelektronischen bauelements | |
| EP1911104B1 (de) | Verfahren zur herstellung von halbleiterbauelementen und dünnfilm-halbleiterbauelement | |
| DE102004050371A1 (de) | Optoelektronisches Bauelement mit einer drahtlosen Kontaktierung | |
| EP2067178A1 (de) | Led-halbleiterkörper und verwendung eines led-halbleiterkörpers | |
| EP2223354B1 (de) | Optoelektronisches bauelement | |
| DE102010048159A1 (de) | Leuchtdiodenchip | |
| EP1528603A2 (de) | Lumineszenzdiodenchip | |
| WO2015010997A1 (de) | Oberflächenmontierbares optoelektronisches halbleiterbauteil und verfahren zur herstellung zumindest eines oberflächenmontierbaren optoelektronischen halbleiterbauteils | |
| DE102011101052A1 (de) | Substrat mit elektrisch neutralem Bereich | |
| DE112022003837T5 (de) | Halbleitervorrichtung und herstellungsverfahren | |
| DE102007004301A1 (de) | Verfahren zur Herstellung eines Halbleiterbauelements und Dünnfilm-Halbleiterbauelement | |
| WO2011080058A1 (de) | Strahlungsemittierende lichtleitervorrichtung für die beleuchtung, modul mit einer solchen vorrichtung und verfahren zur herstellung einer solchen | |
| EP2054947B1 (de) | Optoelektronisches bauelement | |
| WO2014048699A1 (de) | Optoelektronisches halbleiterbauteil und verfahren zur herstellung eines optoelektronischen halbleiterbauteils | |
| DE102021200044A1 (de) | Anschlussträger, optoelektronische vorrichtung und verfahren zum herstellen eines anschlussträgers | |
| DE102006015115A1 (de) | Elektronisches Modul und Verfahren zum Herstellen eines elektronischen Moduls | |
| DE102007006157A1 (de) | Varistor und Leuchtvorrichtung | |
| EP2619807B1 (de) | Optoelektronischer halbleiterchip und verfahren zu dessen herstellung | |
| WO2022248247A1 (de) | Optoelektronisches halbleiterbauteil und paneel | |
| DE102004047061B4 (de) | Optoelektronisches Bauelement und Verfahren zum Herstellen eines optoelektronischen Bauelements | |
| DE102008054235A1 (de) | Optoelektronisches Bauteil | |
| WO2009103285A1 (de) | Optoelektronisches bauteil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 20090114 |
|
| AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR |
|
| AX | Request for extension of the european patent |
Extension state: AL BA HR MK RS |
|
| DAX | Request for extension of the european patent (deleted) | ||
| RBV | Designated contracting states (corrected) |
Designated state(s): DE |
|
| 17Q | First examination report despatched |
Effective date: 20140730 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 20161222 |