EP1918585A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP1918585A2
EP1918585A2 EP07019879A EP07019879A EP1918585A2 EP 1918585 A2 EP1918585 A2 EP 1918585A2 EP 07019879 A EP07019879 A EP 07019879A EP 07019879 A EP07019879 A EP 07019879A EP 1918585 A2 EP1918585 A2 EP 1918585A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
signal generator
pump
gas
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07019879A
Other languages
German (de)
English (en)
Other versions
EP1918585B1 (fr
EP1918585A3 (fr
Inventor
Thomas Cromm
Stefan Kallenborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1918585A2 publication Critical patent/EP1918585A2/fr
Publication of EP1918585A3 publication Critical patent/EP1918585A3/fr
Application granted granted Critical
Publication of EP1918585B1 publication Critical patent/EP1918585B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/04—Piston machines or pumps characterised by having positively-driven valving in which the valving is performed by pistons and cylinders coacting to open and close intake or outlet ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/05—Pressure after the pump outlet

Definitions

  • the invention relates to a vacuum pump with at least two pump stages, a motor, a motor drive and a drive force transmission unit.
  • the invention also relates to a method for operating a vacuum pump with two pump stages, a motor drive which can drive a motor with at least two different speeds.
  • pre-pumping usually refers to vacuum pumps that discharge from the atmosphere. This designation is due to the fact that they are often used in combination with vacuum pumps which can generate a high vacuum but do not compress to atmospheric pressure.
  • An example of such a high vacuum pump is the turbomocular pump.
  • backing pumps are rotary vane pumps, piston pumps and diaphragm pumps. Very often, the backing pumps are designed in multiple stages, since the high vacuum pumps combined with them only produce a pressure of a few millibars at their gas outlet and therefore a wide pressure range has to be bridged.
  • the fore pump must first compress large amounts of gas.
  • the common types such as diaphragm pump and piston pump this means that they must have a correspondingly large-sized suction chamber.
  • the per-unit compressible amount of gas in these examples depends on the maximum pumping chamber volume and the frequency with which the pumping chamber is changed from its maximum to the minimum size. If little gas is applied, the fore pump is oversized in terms of the pumping chamber volume and speed. Of these values, however, is also the Power consumption of the forepump dependent and it is desirable to minimize these.
  • the prior art proposes to lower the speed.
  • the object of the invention is therefore to present a compact vacuum pump, which has a technically simple solution to minimize the power consumption.
  • the pressure is here in a middle range between end and atmospheric pressure, in which pressure measuring heads and pressure switch are designed technically simple and therefore inexpensive.
  • the invention can be applied to such vacuum pumps in which at least one pumping stage is sealingly sealed. With these vacuum pumps, backflow through gaps between the rotor and stator, piston and cylinder, diaphragm and housing, etc., is particularly low, so that the theoretical pumping speed is achieved virtually almost exactly at all rotational speeds.
  • the invention is advantageously used in vacuum pumps, in which one of the pumping stages is designed as a piston vacuum pump, since they have wear-prone seals on the piston.
  • the further pump stages can be designed as piston or diaphragm pump stages.
  • the inventive method ensures that the vacuum pump runs automatically in a protective, power-saving and energy-saving operation. Another advantage is that a reduction in the speed has an advantageous effect on the noise and vibration development.
  • the speed setting is carried out in the vacuum pump itself.
  • the speed position can be carried out while sliding, ie the speed is continuously changed depending on the gas pressure.
  • a speed sensor may be provided, for example, in the engine, in the power transmission unit, or in one of the pump stages, which couples the actual speed back to the engine driver. In the simpler case, the gas-pressure-sensitive signal generator is used to feed back the pressure value.
  • FIG. 1 schematically shows the structure of a vacuum pump 1 according to the invention.
  • the vacuum pump has a first pumping stage 2, which is connected via a gas inlet 4 to, for example, a recupient or a high vacuum pump. Via a gas guide 5, the outlet of the first pumping stage is connected to the inlet of a second pumping stage 3. This ejects via a gas outlet 6.
  • a driving force transmission unit 7 Between the shaft of a motor 8 and the pump-active elements of the vacuum pump sits a driving force transmission unit 7, which ensures that the pump-active elements of the two pumping stages are driven simultaneously.
  • This drive power transmission unit can be, for example, a crank drive, on which two connecting rods are mounted, which drive either pistons or diaphragms. Depending on the pumping system may also be a gear transmission with or without translation.
  • the motor is driven by a motor drive 9, wherein this motor drive can control the motor with at least two different speeds.
  • An evaluation unit 12 is connected to the motor drive 9 via an electrical connection. This evaluates the signal which is generated and transmitted by a gas-pressure-sensitive signal transmitter 10. This transmission takes place via the connection 11.
  • This signal generator can be a pressure switch or a pressure measuring head. It converts the gas pressure in the gas guide 5 into an electrical signal. It can be designed so that its function is independent of the type of gas, whereby the advantages of each type of gas mixture can be achieved.
  • This signal can evaluate the motor control and set the appropriate speed depending on the evaluation result. For example, if the gas pressure is low, the evaluation will cause the engine speed to be lowered to a low value.
  • the signal of the signal generator may be, for example, a voltage level. It may also be a digitally processed signal, in which case the evaluation unit is set up so that it can evaluate this digital signal.
  • the piston passes over the gas inlet holes again on the way to the first reversal point and thus separates the gas inlet and the suction chamber from each other.
  • the annulus surrounds the cylinder at least partially equal to the gas inlet bores. It is connected via a gas guide with an upstream in the gas flow pumping stage.
  • the signal generator 10 is arranged. It may also be connected to a flange which is in gas communication via a bore in the housing 20 with the annular space. This simplifies the retrofitting of pumps and the replacement of defective gas pressure-sensitive signalers. Another possibility is to arrange the gas-pressure-sensitive signal transmitter in that space by the piston drive driving the crank mechanism is located.
  • a signal dependent on the gas pressure between pump stages 2 and 3 is generated by a gas-pressure-sensitive signal transmitter.
  • This step can be realized for example by a membrane pressure switch, in which the membrane depends From the gas pressure bends differently strong and closes or opens an electrical contact at a limit pressure.
  • the signal in this case is a voltage level which is changed by the closing or opening of the contact.
  • this signal is evaluated.
  • the evaluation unit is adapted to process the voltage level. It is conceivable that the switching position of a relay is changed by changing the voltage level. Similar acting electronic circuits are conceivable. Instead of a switchover, a comparison with a predetermined value, for example a voltage, can take place and the comparison result can be used to set the rotational speed.
  • the speed is now set in the motor control depending on the evaluation result.
  • This may be a switching or continuous process in which the engine control electronics changes the speed generated by it in response to a transmitted voltage value.
  • a vacuum pump it is advantageous for a vacuum pump to further develop the method such that a reduction of the rotational speed takes place when the signal of the gas-pressure-sensitive signal transmitter corresponds to a pressure below the atmospheric pressure.
  • This pressure can be a pressure near the final pressure of the vacuum pump in a further deepening the benefits of training.
  • the gas quantities to be delivered are particularly low here, so that the speed can be lowered far.
  • a touchingly sealed vacuum pump, in particular a piston vacuum pump the effect is particularly high.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP07019879.1A 2006-10-28 2007-10-11 Pompe à vide Not-in-force EP1918585B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050943.9A DE102006050943B4 (de) 2006-10-28 2006-10-28 Vakuumpumpe und Verfahren zum Betrieb derselben

Publications (3)

Publication Number Publication Date
EP1918585A2 true EP1918585A2 (fr) 2008-05-07
EP1918585A3 EP1918585A3 (fr) 2009-12-02
EP1918585B1 EP1918585B1 (fr) 2016-02-17

Family

ID=38736443

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07019879.1A Not-in-force EP1918585B1 (fr) 2006-10-28 2007-10-11 Pompe à vide

Country Status (4)

Country Link
US (1) US20080101962A1 (fr)
EP (1) EP1918585B1 (fr)
JP (1) JP5424550B2 (fr)
DE (1) DE102006050943B4 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012122977A1 (fr) * 2011-03-17 2012-09-20 Dionex Softron Gmbh Unité cylindre-piston pour pompe à piston, en particulier pour la chromatographie liquide à haute performance
EP3647599B1 (fr) * 2019-10-07 2021-12-22 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
WO2021259465A1 (fr) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Pompe à vide de véhicule à moteur et procédé de commande d'une pompe à vide de véhicule à moteur
US11773849B2 (en) 2019-10-07 2023-10-03 Pfeiffer Vacuum Gmbh Vacuum pump, scroll pump, and manufacturing method for such

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042656A1 (de) * 2008-10-07 2010-04-15 Ilmvac Gmbh Elektromotor mit gekapseltem Motorgehäuse
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
EP3067560B1 (fr) 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Pompe à vide dotée d'au moins un étage
JP6749857B2 (ja) * 2017-03-24 2020-09-02 株式会社日立ハイテク 自動分析装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003098045A1 (fr) 2002-05-17 2003-11-27 Knf Neuberger Gmbh Procede pour produire un vide et pompe a vide pour mettre ledit procede en oeuvre
DE10354205A1 (de) 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe

Family Cites Families (19)

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JPS61192871A (ja) * 1985-02-20 1986-08-27 Tokico Ltd 真空ポンプの圧力制御装置
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
JPS631772A (ja) * 1986-06-20 1988-01-06 Kobe Steel Ltd 真空ポンプとその運転方法
JPH0726625B2 (ja) * 1990-12-12 1995-03-29 株式会社荏原製作所 ２段スクリュー真空ポンプ
JPH06213160A (ja) * 1993-01-22 1994-08-02 Mitsubishi Heavy Ind Ltd 往復動型冷凍圧縮機
US5520517A (en) * 1993-06-01 1996-05-28 Sipin; Anatole J. Motor control system for a constant flow vacuum pump
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
US5921755A (en) * 1997-04-21 1999-07-13 Dry Vacuum Technologies, Inc. Dry vacuum pump
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
DE19826610A1 (de) * 1998-06-16 1999-12-23 Bran & Luebbe Membranpumpe und Vorrichtung zur Steuerung derselben
JP4038646B2 (ja) * 2001-05-29 2008-01-30 株式会社日立産機システム 回転速度可変形オイルフリースクリュー圧縮機
JP2003129961A (ja) * 2001-10-25 2003-05-08 Hitachi Ltd 燃料電池用圧縮機
SE521349C2 (sv) * 2001-12-14 2003-10-21 Atlas Copco Tools Ab Kompressorenhet med styrsystem
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
US20070177985A1 (en) * 2005-07-21 2007-08-02 Walls James C Integral sensor and control for dry run and flow fault protection of a pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003098045A1 (fr) 2002-05-17 2003-11-27 Knf Neuberger Gmbh Procede pour produire un vide et pompe a vide pour mettre ledit procede en oeuvre
DE10354205A1 (de) 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012122977A1 (fr) * 2011-03-17 2012-09-20 Dionex Softron Gmbh Unité cylindre-piston pour pompe à piston, en particulier pour la chromatographie liquide à haute performance
EP3647599B1 (fr) * 2019-10-07 2021-12-22 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
US11773849B2 (en) 2019-10-07 2023-10-03 Pfeiffer Vacuum Gmbh Vacuum pump, scroll pump, and manufacturing method for such
WO2021259465A1 (fr) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Pompe à vide de véhicule à moteur et procédé de commande d'une pompe à vide de véhicule à moteur

Also Published As

Publication number Publication date
EP1918585B1 (fr) 2016-02-17
EP1918585A3 (fr) 2009-12-02
US20080101962A1 (en) 2008-05-01
DE102006050943B4 (de) 2020-04-16
JP5424550B2 (ja) 2014-02-26
JP2008111432A (ja) 2008-05-15
DE102006050943A1 (de) 2008-04-30

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