EP1918585A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP1918585A3
EP1918585A3 EP07019879A EP07019879A EP1918585A3 EP 1918585 A3 EP1918585 A3 EP 1918585A3 EP 07019879 A EP07019879 A EP 07019879A EP 07019879 A EP07019879 A EP 07019879A EP 1918585 A3 EP1918585 A3 EP 1918585A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
signal generator
evaluation unit
pump
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07019879A
Other languages
German (de)
English (en)
Other versions
EP1918585B1 (fr
EP1918585A2 (fr
Inventor
Thomas Cromm
Stefan Kallenborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1918585A2 publication Critical patent/EP1918585A2/fr
Publication of EP1918585A3 publication Critical patent/EP1918585A3/fr
Application granted granted Critical
Publication of EP1918585B1 publication Critical patent/EP1918585B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/04—Piston machines or pumps characterised by having positively-driven valving in which the valving is performed by pistons and cylinders coacting to open and close intake or outlet ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/05—Pressure after the pump outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP07019879.1A 2006-10-28 2007-10-11 Pompe à vide Not-in-force EP1918585B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050943.9A DE102006050943B4 (de) 2006-10-28 2006-10-28 Vakuumpumpe und Verfahren zum Betrieb derselben

Publications (3)

Publication Number Publication Date
EP1918585A2 EP1918585A2 (fr) 2008-05-07
EP1918585A3 true EP1918585A3 (fr) 2009-12-02
EP1918585B1 EP1918585B1 (fr) 2016-02-17

Family

ID=38736443

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07019879.1A Not-in-force EP1918585B1 (fr) 2006-10-28 2007-10-11 Pompe à vide

Country Status (4)

Country Link
US (1) US20080101962A1 (fr)
EP (1) EP1918585B1 (fr)
JP (1) JP5424550B2 (fr)
DE (1) DE102006050943B4 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042656A1 (de) * 2008-10-07 2010-04-15 Ilmvac Gmbh Elektromotor mit gekapseltem Motorgehäuse
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
DE102011001378A1 (de) * 2011-03-17 2012-09-20 Dionex Softron Gmbh Kolben-Zylinder-Einheit für eine Kolbenpumpe, insbesondere für die Hochleistungsflüssigkeitschromatographie
EP3067560B1 (fr) 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Pompe à vide dotée d'au moins un étage
JP6749857B2 (ja) * 2017-03-24 2020-09-02 株式会社日立ハイテク 自動分析装置
JP7220692B2 (ja) 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
EP3647599B1 (fr) * 2019-10-07 2021-12-22 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP4172015B1 (fr) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Pompe à vide de véhicule à moteur et procédé de commande d'une pompe à vide de véhicule à moteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
WO2003098045A1 (fr) * 2002-05-17 2003-11-27 Knf Neuberger Gmbh Procede pour produire un vide et pompe a vide pour mettre ledit procede en oeuvre
DE10354205A1 (de) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61192871A (ja) * 1985-02-20 1986-08-27 Tokico Ltd 真空ポンプの圧力制御装置
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
JPS631772A (ja) * 1986-06-20 1988-01-06 Kobe Steel Ltd 真空ポンプとその運転方法
JPH0726625B2 (ja) * 1990-12-12 1995-03-29 株式会社荏原製作所 ２段スクリュー真空ポンプ
JPH06213160A (ja) * 1993-01-22 1994-08-02 Mitsubishi Heavy Ind Ltd 往復動型冷凍圧縮機
US5520517A (en) * 1993-06-01 1996-05-28 Sipin; Anatole J. Motor control system for a constant flow vacuum pump
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
US5921755A (en) * 1997-04-21 1999-07-13 Dry Vacuum Technologies, Inc. Dry vacuum pump
DE19826610A1 (de) * 1998-06-16 1999-12-23 Bran & Luebbe Membranpumpe und Vorrichtung zur Steuerung derselben
JP4038646B2 (ja) * 2001-05-29 2008-01-30 株式会社日立産機システム 回転速度可変形オイルフリースクリュー圧縮機
JP2003129961A (ja) * 2001-10-25 2003-05-08 Hitachi Ltd 燃料電池用圧縮機
SE521349C2 (sv) * 2001-12-14 2003-10-21 Atlas Copco Tools Ab Kompressorenhet med styrsystem
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
US20070177985A1 (en) * 2005-07-21 2007-08-02 Walls James C Integral sensor and control for dry run and flow fault protection of a pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
WO2003098045A1 (fr) * 2002-05-17 2003-11-27 Knf Neuberger Gmbh Procede pour produire un vide et pompe a vide pour mettre ledit procede en oeuvre
DE10354205A1 (de) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe

Also Published As

Publication number Publication date
EP1918585B1 (fr) 2016-02-17
US20080101962A1 (en) 2008-05-01
DE102006050943B4 (de) 2020-04-16
EP1918585A2 (fr) 2008-05-07
JP5424550B2 (ja) 2014-02-26
JP2008111432A (ja) 2008-05-15
DE102006050943A1 (de) 2008-04-30

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