EP3647599B1 - Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes - Google Patents

Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes Download PDF

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Publication number
EP3647599B1
EP3647599B1 EP19201749.9A EP19201749A EP3647599B1 EP 3647599 B1 EP3647599 B1 EP 3647599B1 EP 19201749 A EP19201749 A EP 19201749A EP 3647599 B1 EP3647599 B1 EP 3647599B1
Authority
EP
European Patent Office
Prior art keywords
pump
pressure sensor
spiral
scroll
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19201749.9A
Other languages
German (de)
English (en)
Other versions
EP3647599A3 (fr
EP3647599A2 (fr
Inventor
Michael Willig
Jan Hofmann
Jonas Becker
Gernot Bernhardt
Verena Wangorsch
Stefan Kallenborn
Wolfgang Söhngen
Heiko Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=68210710&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3647599(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to EP20200624.3A priority Critical patent/EP3754200B1/fr
Priority to EP19201749.9A priority patent/EP3647599B1/fr
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3647599A2 publication Critical patent/EP3647599A2/fr
Publication of EP3647599A3 publication Critical patent/EP3647599A3/fr
Priority to JP2020160698A priority patent/JP7220692B2/ja
Priority to EP20198997.7A priority patent/EP3739166B1/fr
Priority to EP22199874.3A priority patent/EP4095387A3/fr
Priority to EP22156933.8A priority patent/EP3974655B1/fr
Priority to US17/063,912 priority patent/US11773849B2/en
Publication of EP3647599B1 publication Critical patent/EP3647599B1/fr
Application granted granted Critical
Priority to JP2022178824A priority patent/JP7549634B2/ja
Priority to US18/449,111 priority patent/US20230383750A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/605—Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Definitions

  • a vacuum system with a high vacuum pump and a backing pump is in the EP 3 067 560 A1 disclosed.
  • the further state of the art US 9 341 187 B2 , the US 2014/219846 A1 , the EP 1 918 585 A2 and the JP 2003 120529 A .
  • a vacuum system usually already includes a pressure sensor, for example in a vacuum chamber.
  • a pressure sensor for example in a vacuum chamber.
  • the integrated pressure sensor enables the scroll pump to monitor itself and this does not have to be carried out using a complex process control system.
  • a state of wear of the pump can be monitored as a function of a measured pressure.
  • the pressure sensor is integrated into a control of the vacuum system.
  • the pressure sensor can preferably also be integrated into a control of the scroll pump.
  • the scroll pump can thus be better controlled or regulated, on the basis of the now known pressure in the scroll pump.
  • the pressure sensor is provided for measuring a suction pressure of the pump or a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section. Both allow an even more precise monitoring of the pumping process and a wear condition of the pump, in particular a sealing element such as a tip seal, or the spiral walls.
  • the pressure sensor is screwed into a component of the scroll pump.
  • a blind plug can simply be provided, for example, if an integrated pressure sensor is not absolutely necessary for the user's process.
  • an integrated pressure sensor can easily be retrofitted in this case.
  • the component into which the pressure sensor is screwed can be, for example, a housing element and / or a fixed spiral component.
  • the pressure sensor can be screwed axially into a fixed spiral component.
  • the pressure sensor is arranged in a cooling air flow of a cooling device, for example a fan, of the pump.
  • the pressure sensor can thus be cooled directly in an advantageous manner, which improves its service life and measurement accuracy.
  • the pressure sensor can preferably be arranged at least essentially at the beginning of the cooling air flow, namely adjacent to a fan and / or within an air guide hood.
  • the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
  • This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
  • the second housing element 24 thus forms a stationary spiral component of the scroll pump 20.
  • the spiral wall 26 acts with a spiral wall 28 of a movable one Spiral component 30 together, wherein the movable spiral component 30 is excited eccentrically to generate a pumping effect via an eccentric shaft 32.
  • a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • an in Fig. 1 The left-hand end of a corrugated bellows 42 is fastened, the right-hand end of which is fastened to the first housing element 22. The left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
  • the scroll pump 20 comprises a fan 44 for generating a flow of cooling air.
  • an air guide hood 46 is provided, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped in such a way that the cooling air flow essentially flows around the entire pump housing and thus achieves a good cooling performance.
  • the scroll pump 20 further comprises an electronics housing 48 in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base for the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible through which an air flow generated by the fan 44 is guided along the first housing element 22 and also the electronics housing 48, so that both are effectively cooled will.
  • the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be encapsulated in these chambers 52 and are therefore advantageously shielded.
  • the smallest possible amount of the potting material can be used when potting the electronic components.
  • the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
  • the chambers 52 can so be designed so that different variants of the electronic components, in particular different assembly variants of a circuit board, can be arranged in the electronics housing 48 and / or can be encapsulated.
  • individual chambers 52 can also remain empty, that is to say have no electronic components. In this way, a so-called modular system for different types of pumps can be implemented in a simple manner.
  • the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
  • a plurality of walls or ribs 54 are formed which define a plurality of channels 50 for guiding a flow of cooling air.
  • the chambers 52 also allow particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • FIG. 3 the scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the fixed spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
  • the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus cools the stationary spiral component 24 particularly effectively.
  • the cooling air flow first flows around the stationary spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the active pumping area of the pump 20 generates a lot of heat due to the compression during operation and is therefore primarily cooled here .
  • Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional view.
  • a channel 62 is provided for the pressure sensor 60, which in this case opens into a non-pumping external area between the spiral walls 26 and 28 of the stationary or movable spiral components 24 and 30.
  • the pressure sensor thus measures a suction pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in an active pumping area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 allows, for example by determining a compression, in particular a recognition of a wear condition of the pump-active components, in particular a sealing element 64 also referred to as a tip seal.
  • the measured suction pressure can also be used to regulate the pump (including pump speed).
  • a suction pressure can be specified by the software and a suction pressure can be set by varying the pump speed. It is also conceivable that depending on measured pressure, a wear-related pressure increase can be compensated by increasing the speed. This means that a tip seal change can be postponed or longer change intervals can be implemented.
  • the data from the pressure sensor 60 can therefore generally be used, for example, to determine wear, for situational control of the pump, for process control, etc.
  • the pressure sensor 60 can be optionally provided, for example. Instead of the pressure sensor 60, a blind plug for closing the channel 62 can be provided, for example. A pressure sensor 60 can then be retrofitted, for example, if necessary. Particularly with regard to retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44. As a result, it is also advantageously cooled. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently a cost-effective sensor can be used.
  • the pressure sensor 60 is arranged in particular in such a way that the external dimensions of the pump 20 are not increased by it and the pump 20 consequently remains compact.
  • the movable spiral component 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly clearly visible.
  • the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
  • FIG Fig. 6 A side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
  • the base plate includes several, among other things
  • Fastening recesses for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in Fig. 1 are visible.
  • the holding projections 68 are provided on the outside of the base plate 66.
  • the holding projections 68 extend radially outward.
  • the holding projections 68 all have the same radial height.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the retaining projections 68.
  • This first intermediate section 70 has a greater radial height than a second intermediate section 72 and than a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the spiral wall 28 are preferably manufactured from a solid material so as to be tensioned together, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly on the holding projections 68.
  • the in Fig. 6 The side of the base plate 66 shown can be machined, in particular the fastening recesses are introduced.
  • the spiral wall 28 can also be produced from the solid material by cutting within the framework of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three retaining projections 68.
  • the clamping device 76 has a continuous recess 80, through which a tool access to the spiral component 30, in particular to the in Fig. 6 shown side of the same, is enabled. Machining operations can thus be carried out from both sides during a clamping, in particular at least one finishing machining of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected so that no critical deformations of the spiral component 30 take place.
  • the three holding projections 68 are preferably selected in such a way that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not increased. Thus, on the one hand, material and, on the other hand, machining volume can be saved.
  • the holding projections 68 are in particular designed and / or arranged in such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the corrugated bellows 42 is preferably not the same as the number of retaining projections 68 on the movable spiral component 30.
  • FIG. 9 A similar section of the image is shown in Fig. 9 shown for another scroll pump, which is preferably the same series of pump 20 of the Fig. 1 listened to.
  • the the Fig. 9 The underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
  • the eccentric shafts 32, the counterweights 82 and the housing elements 22 are dimensioned such that only one certain type of the two types of balance weights 82 shown can be mounted on the eccentric shaft 32.
  • the balance weights 82 are in the Figures 8 and 9 dimensioned together with certain dimensions of the installation space provided for them in order to make it clear that the balance weight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the dimensions given are given purely by way of example.
  • the balance weight 82 of the Fig. 8 is made shorter in the corresponding direction, namely 9 mm long, so it can be installed without any problems.
  • the balance weight 82 of the Fig. 9 each measured from the mounting hole has a longitudinal extension of 11 mm.
  • the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 of the Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted installation or since the balance weight 82 of the Fig. 9 not completely in contact with the eccentric shaft 82 of the Fig. 8 can be brought. Because the balance weight 82 of the Fig.
  • the balance weights 82 are generally designed in such a way that confusion of the balance weight with those of other sizes is avoided during assembly and / or during servicing.
  • the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed in such a way that the wrong counterweight is prevented from being installed due to adjacent shoulders on the shaft, the positions of the thread and through-hole of the counterweight and shoulders within the housing.
  • the operating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 with a fastening screw (not shown) that extends through a bore 110.
  • valve 90 To actuate the valve 90, a torque applied manually to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated. Thus, the bore 98 comes into communication with an interior of the housing.
  • Three switching positions are provided for the valve 90, namely those in Fig. 10 shown, which is a locking position, and each a right and left rotated position in which the bore 98 is in communication with different areas of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112.
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When the valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, gets to the surface of an O-ring, this harbors the risk of premature failure.
  • the cover 112 prevents dirt and the like from penetrating the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin, not shown, for each bore 108, with which the cover 112 is held in the bores 108.
  • the bores 108 and 110 and the fastening screws arranged therein are thus protected from contamination.
  • contamination can enter the Valve mechanics are effectively minimized and so the service life of the valve can be improved.
  • the plastic handle with an overmolded stainless steel base part ensures good corrosion resistance and low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • This control enables a minimum noise level to be achieved when the pump is cold, that there is a lower noise level - corresponding to the pump noise - in the final pressure or at low load, that optimal cooling of the pump is achieved with a simultaneously low noise level, and that before a temperature-related reduction in output, the maximum cooling output is ensured.
  • the maximum fan speed can be adaptable, in particular depending on the situation. For example, to achieve a high level of water vapor tolerance, it can be expedient to reduce the maximum fan speed.
  • FIG. 12 the movable scroll member 30 is partial and opposite Fig. 5 shown enlarged.
  • the spiral wall 28 At its end facing away from the base plate 66 and facing a base plate of the fixed spiral component 24, not shown here, the spiral wall 28 has a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
  • a sealing element 64 also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is, for example, in Fig. 4 clearly visible.
  • the first spiral portion 120 extends from in Fig. 12 indicated location to the outer end of the spiral wall 28, as it is for example also in Fig. 5 is indicated.
  • the first spiral section 120 extends here, for example, over approximately 163 °.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is at least partially, in particular completely, arranged in a non-pumping area of the spiral wall 28.
  • the first spiral section 120 can at least substantially completely fill the non-pumping area of the spiral wall 28.
  • the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120.
  • One introduced through the thicker side wall 118 The imbalance can thus be compensated for by the greater weight of the first intermediate section 70.
  • the movable spiral component should generally preferably have a low dead weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is e.g. 0.17 at the most. Due to the tip seal groove, however, the spiral wall tip is very sensitive to impacts during handling, such as during assembly or when changing the tip seal. Light bumps, e.g. B. Also during transport, the side wall of the groove can be pushed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular an outwardly local thickening of the spiral wall.
  • This area is preferably not pump-active and can therefore be manufactured with a greater tolerance.
  • a thickening of the spiral wall is preferably not necessary at other points of the component, since the wall is protected by protruding elements of the component.
  • the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
  • the air flow 124 which may contain dust or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
  • the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the dirt gets through the opening provided for the socket 126 in the electronics housing 48 into the latter and to the control device and / or power electronics.
  • the partition 130 ensures that the air that is sucked in does not reach the electronics via the opening in the plug-in connector 126, 128.
  • the fan cable is led through the V-shaped notch 132 laterally through the partition wall 130.
  • the notch 132 has a lateral offset to the plug connector 126, 128, as a result of which a labyrinth effect and thus a further reduction in the leakage of cooling air to the plug connector 126, 128 can be achieved.
  • a partition 130 within the air guide hood 46 also improves the air guidance in the channel 50 between the electronics housing 48 and the pump housing 22. There is less turbulence and back pressure for the fan 44.
  • the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional illustration.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134. Sealing by means of an O-ring 136 is provided here.
  • the transition fit 134 is also used, for example, to center the second housing element 24 with respect to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It can happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can preferably also be provided at least essentially radially opposite. To loosen the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of this and comes into contact with the first housing element 22. By screwing in further, the housing elements 22 and 24 are pressed away from one another.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing off, as they are, for example, in FIGS Fig. 1 and 3 are designated.
  • the forcing thread 138 preferably has the same thread type as the fastening thread provided for the fastening screws 142.
  • a countersink 140 is provided on the second housing element 22, which is assigned to the forcing thread 138. If abrasion particles are carried out when the screw is screwed into the forcing thread 138, these will collect in the depression 140. This prevents such abrasion particles from preventing, for example, the housing elements 22 and 24 from completely resting against one another.
  • the air guide hood 46 has at least one, in particular additional, in Fig. 14 The dome 144 shown, which allows the air guide hood 46 to be mounted only when the screws used for pressing, in particular the fastening screws 142, have been removed again.
  • the air guide hood 46 with the dome 144 is designed in such a way that it would collide with a screw head of a jack screw possibly screwed into the forcing thread 138, so that the air guide hood 46 could not be fully assembled.
  • the air guide hood 46 can only be installed with the jackscrews completely dismantled.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (6)

  1. Système sous vide comprenant
    une pompe à vide poussé,
    une pompe à vide, à savoir une pompe à spirales (20), qui est prévue comme pompe primaire pour la pompe à vide poussé, et
    une commande ;
    dans lequel la pompe à spirales comprend un capteur de pression (60) intégré dans la pompe à spirales (20),
    caractérisé en ce que
    le capteur de pression (60) est intégré dans la commande du système sous vide, et en ce que
    la commande est configurée pour arrêter la pompe à vide poussé et/ou fermer des vannes interconnectées si la pression dans la pompe à spirales est trop élevée.
  2. Système sous vide selon la revendication 1,
    dans lequel le capteur de pression (60) est également intégré dans une commande de la pompe à spirales (20).
  3. Système sous vide selon l'une au moins des revendications précédentes,
    dans lequel le capteur de pression (60) est agencé pour mesurer une pression d'aspiration de la pompe à spirales (20).
  4. Système sous vide selon l'une au moins des revendications précédentes,
    dans lequel le capteur de pression (60) est agencé pour mesurer une pression entre deux parois spiralées (26, 28) actives en pompage.
  5. Système sous vide selon l'une des revendications précédentes,
    dans lequel le capteur de pression (60) est vissé dans un composant (24) de la pompe à spirales (20).
  6. Système sous vide selon l'une des revendications précédentes,
    dans lequel le capteur de pression (60) est agencé dans un flux d'air de refroidissement d'un dispositif de refroidissement (44) de la pompe à spirales (20).
EP19201749.9A 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes Active EP3647599B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
JP2020160698A JP7220692B2 (ja) 2019-10-07 2020-09-25 真空ポンプ、スクロールポンプ及びその製造方法
EP22156933.8A EP3974655B1 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales et son procédé de fabrication
EP22199874.3A EP4095387A3 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales avec capteur de pression intégré
EP20198997.7A EP3739166B1 (fr) 2019-10-07 2020-09-29 Pompe à vide, pompe d'extraction et procédé de fabrication de telles pompes et clapet anti-retour
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP7549634B2 (ja) 2019-10-07 2022-11-08 真空ポンプ、スクロールポンプ及びその製造方法
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP20200624.3A Division EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP20200624.3A Division-Into EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP20184951.0 Division-Into 2020-07-09

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EP3647599A2 EP3647599A2 (fr) 2020-05-06
EP3647599A3 EP3647599A3 (fr) 2020-07-22
EP3647599B1 true EP3647599B1 (fr) 2021-12-22

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EP19201749.9A Active EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4219947A2 (fr) 2023-06-15 2023-08-02 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie optimisée
EP4234932A2 (fr) 2023-06-15 2023-08-30 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708840A3 (fr) * 2020-07-22 2021-03-10 Pfeiffer Vacuum Technology AG Clapet antiretour, appareil à vide et pompe à vide
DE102020128369A1 (de) * 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
EP4253720A3 (fr) 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre

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EP3067560A1 (fr) * 2015-03-12 2016-09-14 Pfeiffer Vacuum GmbH Pompe à vide et procédé de fonctionnement d'une pompe à spirales ou d'une pompe à vide dotée d'au moins deux étages
US9541084B2 (en) 2013-02-06 2017-01-10 Emerson Climate Technologies, Inc. Capacity modulated scroll compressor
US20170211390A1 (en) 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine
CN107420301A (zh) 2017-06-28 2017-12-01 湖北维斯曼新能源科技有限公司 新型无油涡旋真空泵
FR3053090A1 (fr) 2016-06-23 2017-12-29 Valeo Japan Co Ltd Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage.
KR20180041475A (ko) 2016-10-14 2018-04-24 주식회사 벡스코 냉각식 진공펌프
DE102018107276A1 (de) 2017-03-31 2018-10-04 Kabushiki Kaisha Toyota Jidoshokki Elektrischer Kompressor
US20190120237A1 (en) 2017-10-25 2019-04-25 Shimadzu Corporation Vacuum pump
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales

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US5102316A (en) 1986-08-22 1992-04-07 Copeland Corporation Non-orbiting scroll mounting arrangements for a scroll machine
US5209653A (en) 1992-01-17 1993-05-11 Spx Corporation Vacuum pump
EP0754860B1 (fr) 1995-07-21 2002-04-10 Anest Iwata Corporation Pompe à vide à spirales sans huile
EP0798463A2 (fr) 1996-03-29 1997-10-01 Anest Iwata Corporation Pompe à vide à spirales sans lubrification
EP0836008B1 (fr) 1996-10-08 2002-11-20 VARIAN S.p.A. Appareil de pompe à vide
DE19913593A1 (de) 1999-03-24 2000-10-05 Ilmvac Gmbh Gesteuerter Pumpstand
US20020025265A1 (en) 2000-08-29 2002-02-28 Hideo Ikeda Motor-driven compressors
EP1275849A2 (fr) 2001-07-10 2003-01-15 Kabushiki Kaisha Toyota Jidoshokki Compresseur avec équilibrage des forces
JP2003120529A (ja) * 2001-10-17 2003-04-23 Toyota Industries Corp 真空ポンプにおけるガス供給装置
WO2003042542A1 (fr) 2001-11-15 2003-05-22 Leybold Vakuum Gmbh Procede de maintien a la temperature voulue d'une pompe a vide a vis
DE102005042451B4 (de) 2005-09-06 2007-07-26 Vacuubrand Gmbh + Co Kg Vakuumpumpvorrichtung
EP1980749B1 (fr) 2006-01-30 2015-08-26 Sanden Corporation Compresseur electrique, et climatisation pour vehicule utilisant le compresseur electrique
EP1918585A2 (fr) * 2006-10-28 2008-05-07 Pfeiffer Vacuum Gmbh Pompe à vide
US20100028185A1 (en) 2008-07-31 2010-02-04 Hitachi Industrial Equipment Systems Co., Ltd. Scroll Fluid Machine
US20110256007A1 (en) 2010-04-16 2011-10-20 Shaffer Robert W Three stage scroll vacuum pump
US20130189090A1 (en) 2010-10-19 2013-07-25 Satoshi Okudera Vacuum pump
CN103089668B (zh) 2011-11-08 2015-09-02 株式会社岛津制作所 一体型涡轮分子泵
FR2985557B1 (fr) 2012-01-11 2014-11-28 Valeo Japan Co Ltd Excentrique balance comprenant une bague et un contrepoids bloques en rotation
WO2014072276A1 (fr) 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Système de pompe à vide pour faire le vide dans une chambre ainsi que procédé de commande d'un système de pompe à vide
US9541084B2 (en) 2013-02-06 2017-01-10 Emerson Climate Technologies, Inc. Capacity modulated scroll compressor
US9341187B2 (en) 2013-08-30 2016-05-17 Emerson Climate Technologies, Inc. Compressor assembly with liquid sensor
CN104912829A (zh) 2014-03-12 2015-09-16 埃地沃兹日本有限公司 真空泵的控制装置和具备它的真空泵
US20170211390A1 (en) 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine
EP3067560A1 (fr) * 2015-03-12 2016-09-14 Pfeiffer Vacuum GmbH Pompe à vide et procédé de fonctionnement d'une pompe à spirales ou d'une pompe à vide dotée d'au moins deux étages
CN204941844U (zh) 2015-09-10 2016-01-06 北京北仪优成真空技术有限公司 真空泵气镇阀装置及真空泵
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
FR3053090A1 (fr) 2016-06-23 2017-12-29 Valeo Japan Co Ltd Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage.
KR20180041475A (ko) 2016-10-14 2018-04-24 주식회사 벡스코 냉각식 진공펌프
DE102018107276A1 (de) 2017-03-31 2018-10-04 Kabushiki Kaisha Toyota Jidoshokki Elektrischer Kompressor
CN107420301A (zh) 2017-06-28 2017-12-01 湖北维斯曼新能源科技有限公司 新型无油涡旋真空泵
US20190120237A1 (en) 2017-10-25 2019-04-25 Shimadzu Corporation Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4219947A2 (fr) 2023-06-15 2023-08-02 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie optimisée
EP4234932A2 (fr) 2023-06-15 2023-08-30 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage

Also Published As

Publication number Publication date
EP3647599A3 (fr) 2020-07-22
EP3754200A3 (fr) 2021-02-17
EP3754200B1 (fr) 2021-12-08
EP3647599A2 (fr) 2020-05-06
EP3754200A2 (fr) 2020-12-23

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