EP3754200A3 - Pompe à vide, pompe à spirales et procédé de fabrication de telles pompes - Google Patents

Pompe à vide, pompe à spirales et procédé de fabrication de telles pompes Download PDF

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Publication number
EP3754200A3
EP3754200A3 EP20200624.3A EP20200624A EP3754200A3 EP 3754200 A3 EP3754200 A3 EP 3754200A3 EP 20200624 A EP20200624 A EP 20200624A EP 3754200 A3 EP3754200 A3 EP 3754200A3
Authority
EP
European Patent Office
Prior art keywords
pump
scroll
housing element
scroll pump
eccentric shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20200624.3A
Other languages
German (de)
English (en)
Other versions
EP3754200B1 (fr
EP3754200A2 (fr
Inventor
Michael Willig
Jan Hofmann
Jonas Becker
Gernot Bernhardt
Verena Wangorsch
Stefan Kallenborn
Wolfgang Söhngen
Heiko Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=68210710&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3754200(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP20200624.3A priority Critical patent/EP3754200B1/fr
Publication of EP3754200A2 publication Critical patent/EP3754200A2/fr
Publication of EP3754200A3 publication Critical patent/EP3754200A3/fr
Application granted granted Critical
Publication of EP3754200B1 publication Critical patent/EP3754200B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/605—Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP20200624.3A 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage Active EP3754200B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP19201749.9A Division-Into EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP19201749.9A Division EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

Publications (3)

Publication Number Publication Date
EP3754200A2 EP3754200A2 (fr) 2020-12-23
EP3754200A3 true EP3754200A3 (fr) 2021-02-17
EP3754200B1 EP3754200B1 (fr) 2021-12-08

Family

ID=68210710

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20200624.3A Active EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP19201749.9A Active EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP19201749.9A Active EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

Country Status (1)

Country Link
EP (2) EP3754200B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708840A3 (fr) * 2020-07-22 2021-03-10 Pfeiffer Vacuum Technology AG Clapet antiretour, appareil à vide et pompe à vide
DE102020128369A1 (de) * 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
EP4219947A3 (fr) 2023-06-15 2024-02-07 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie hélicoïdale optimisée
EP4234932A3 (fr) 2023-06-15 2024-01-17 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage
EP4253720A3 (fr) 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102316A (en) * 1986-08-22 1992-04-07 Copeland Corporation Non-orbiting scroll mounting arrangements for a scroll machine
US20170211390A1 (en) * 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine

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US5209653A (en) * 1992-01-17 1993-05-11 Spx Corporation Vacuum pump
JP3388657B2 (ja) * 1995-07-21 2003-03-24 アネスト岩田株式会社 オイルフリースクロール真空ポンプ
EP0798463A3 (fr) * 1996-03-29 1998-02-25 Anest Iwata Corporation Pompe à vide à spirales sans lubrification
IT1288737B1 (it) 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
DE19913593B4 (de) 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
JP2002070743A (ja) * 2000-08-29 2002-03-08 Sanden Corp 冷媒圧縮用電動式圧縮機
JP2003021060A (ja) 2001-07-10 2003-01-24 Toyota Industries Corp 圧縮機、圧縮機のバランス取り方法及び治具
JP2003120529A (ja) * 2001-10-17 2003-04-23 Toyota Industries Corp 真空ポンプにおけるガス供給装置
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
DE102005042451B4 (de) 2005-09-06 2007-07-26 Vacuubrand Gmbh + Co Kg Vakuumpumpvorrichtung
JP2007198341A (ja) * 2006-01-30 2007-08-09 Sanden Corp 電動圧縮機及び該電動圧縮機を用いた車両用空調システム
US8523544B2 (en) 2010-04-16 2013-09-03 Air Squared, Inc. Three stage scroll vacuum pump
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
JP5380013B2 (ja) * 2008-07-31 2014-01-08 株式会社日立産機システム スクロール式流体機械
EP2631487A4 (fr) * 2010-10-19 2014-06-18 Edwards Japan Ltd Pompe à vide
JP5673497B2 (ja) 2011-11-08 2015-02-18 株式会社島津製作所 一体型ターボ分子ポンプ
FR2985557B1 (fr) * 2012-01-11 2014-11-28 Valeo Japan Co Ltd Excentrique balance comprenant une bague et un contrepoids bloques en rotation
DE102012220442A1 (de) 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
CN105026764B (zh) * 2013-02-06 2018-06-12 艾默生环境优化技术有限公司 容量可调节的涡旋式压缩机
US9341187B2 (en) * 2013-08-30 2016-05-17 Emerson Climate Technologies, Inc. Compressor assembly with liquid sensor
JP6449551B2 (ja) 2014-03-12 2019-01-09 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
EP3067560B1 (fr) * 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Pompe à vide dotée d'au moins un étage
CN204941844U (zh) * 2015-09-10 2016-01-06 北京北仪优成真空技术有限公司 真空泵气镇阀装置及真空泵
EP3508727B1 (fr) 2015-10-06 2020-05-13 Pfeiffer Vacuum Gmbh Pompe à spirales et procédé de fonctionnement d'une pompe à spirales
FR3053090B1 (fr) * 2016-06-23 2018-07-13 Valeo Japan Co., Ltd. Masse d'equilibrage d'un compresseur a spirales pour un vehicule automobile, et compresseur a spirales muni d'une telle masse d'equilibrage.
KR101869386B1 (ko) * 2016-10-14 2018-06-20 주식회사 벡스코 냉각식 진공펌프
JP6750549B2 (ja) * 2017-03-31 2020-09-02 株式会社豊田自動織機 電動圧縮機
CN107420301A (zh) * 2017-06-28 2017-12-01 湖北维斯曼新能源科技有限公司 新型无油涡旋真空泵
JP7022265B2 (ja) * 2017-10-25 2022-02-18 株式会社島津製作所 真空ポンプ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102316A (en) * 1986-08-22 1992-04-07 Copeland Corporation Non-orbiting scroll mounting arrangements for a scroll machine
US20170211390A1 (en) * 2014-07-23 2017-07-27 Sanden Holdings Corporation Scroll type fluid machine

Also Published As

Publication number Publication date
EP3647599A2 (fr) 2020-05-06
EP3647599B1 (fr) 2021-12-22
EP3754200B1 (fr) 2021-12-08
EP3647599A3 (fr) 2020-07-22
EP3754200A2 (fr) 2020-12-23

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