EP3508727B1 - Pompe à spirales et procédé de fonctionnement d'une pompe à spirales - Google Patents

Pompe à spirales et procédé de fonctionnement d'une pompe à spirales Download PDF

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Publication number
EP3508727B1
EP3508727B1 EP19158257.6A EP19158257A EP3508727B1 EP 3508727 B1 EP3508727 B1 EP 3508727B1 EP 19158257 A EP19158257 A EP 19158257A EP 3508727 B1 EP3508727 B1 EP 3508727B1
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EP
European Patent Office
Prior art keywords
rotor
pump
scroll
speed
scroll pump
Prior art date
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Application number
EP19158257.6A
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German (de)
English (en)
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EP3508727A1 (fr
Inventor
Jonas Becker
Ulrich Emrich
Stefan Kallenborn
Heiko Schäfer
Wolfgang Söhngen
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0057—Driving elements, brakes, couplings, transmission specially adapted for machines or pumps
    • F04C15/008—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F04C2270/052—Speed angular
    • F04C2270/0525—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump

Definitions

  • the present invention relates to a scroll pump, in particular a scroll vacuum pump, with at least one scroll pump stage for conveying a gas from a gas inlet through the scroll pump stage to a gas outlet, and an electric motor which has a stator and a rotor, the rotor for driving an orbiting part of the Scroll pump stage is coupled to the orbiting part of the scroll pump stage.
  • a scroll pump is a positive displacement pump that compresses against atmospheric pressure and can be used, among other things, as a compressor.
  • a scroll vacuum pump can be used to create a vacuum in a recipient connected to the gas inlet.
  • Scroll vacuum pumps are used, for example, in the EP 0 798 463 A2 and the DE 199 14 770 A1 described.
  • Scroll vacuum pumps are also referred to as spiral vacuum pumps or spiral fluid delivery devices.
  • the pump principle on which a scroll pump is based is known from the prior art and is explained below.
  • a pump stage of a scroll pump has two nested, for example Archimedean spiral cylinders, which are also referred to below as spirals.
  • Each spiral cylinder consists of an equidistant spiral wall with a base plate provided on one end face of the spiral wall.
  • the spiral cylinders are inserted into one another in such a way that the spiral cylinders partially enclose crescent-shaped volumes.
  • One spiral is fixed, while the other spiral can be moved on a circular path via an eccentric drive.
  • the movable spiral thus executes a so-called centrally symmetrical oscillation, which is also referred to as "wobble".
  • a crescent-shaped volume trapped between the spiral cylinders continues to move within the spiral walls during the wobbling of the movable spiral, whereby gas is conveyed radially inward from a radially outer gas inlet to a gas outlet in the middle of the spiral by means of the migrating volume.
  • an electric motor designed as an asynchronous drive is used to drive the movable part of the scroll pump stage which has the movable spiral.
  • a particular disadvantage of this is that asynchronous electric motors have a relatively poor efficiency and can contribute to the development of relatively high temperatures in the scroll pump.
  • the present invention is therefore based on the object of providing a scroll pump with an improved electrical drive.
  • the rotor of the electric motor is arranged according to the invention relative to the stator of the electric motor in such a way that a force directed in an axial direction is generated on the rotor during operation of the electric motor.
  • the axial direction relates to a direction along an axis of rotation of the rotor.
  • the rotor can be arranged offset in relation to its normal position to the stator along the axial direction to the stator.
  • the rotor is offset from the axial direction by an offset relative to its normal position relative to the stator.
  • the normal position means the position in which the central planes of the rotor and the stator, which are perpendicular to the axis of rotation, lie one above the other.
  • the rotor can be coupled to the movable part of the scroll pump in such a way that the axial force is transmitted to the movable part of the scroll pump stage.
  • the movable part of the scroll pump stage can thus be subjected to the axial force during the operation of the electric motor in the axial direction.
  • At least one seal can be arranged between the movable part of the scroll pump stage and an immovable part of the scroll pump stage, which is pressed or pressed together by the axial force between the movable and the immovable part of the scroll pump stage.
  • the movable part of the scroll pump stage can be pretensioned in the direction of the immovable part of the scroll pump stage and an intermediate seal, in particular a so-called tip seal, can thereby be compressed. This can improve the effectiveness of the seal.
  • the scroll pump can be further developed by using a synchronous motor as the electric motor.
  • Synchronous motors have a better efficiency than asynchronous motors. Therefore, a synchronous motor heats up less strongly than an asynchronous motor with the same output power. With the same output power, a synchronous motor therefore causes less heating of the scroll pump.
  • This has the advantage, among other things, that the life of sealing materials that are used in the pump and that are normally made of a plastic can be extended. In particular - due to the lower Heating of the scroll pump when using a synchronous motor - the service life of so-called tip seals, as will be explained in more detail below, can be extended.
  • the suction power of a scroll pump is essentially determined by the height of the spiral walls, their spacing, the outer diameter and the speed of movement of the movable spiral relative to the fixed spiral.
  • the speed of movement of the movable spiral is normally dependent on the speed of the rotor of the electric motor or - if a gear is connected between the rotor and the movable spiral - is at least correlated with the speed of the rotor.
  • the suction power of the scroll pump can thus be changed by varying the speed of the rotor.
  • the speed of the rotor and thus the suction power of the scroll pump can be set to a high value. After reaching a final pressure, the speed and accordingly the suction power can then be reduced, since the final pressure can also be maintained with a lower suction power.
  • the speed of the rotor By reducing the speed of the rotor, the power consumption of the electric motor can be reduced, whereby energy savings can be realized.
  • the synchronous motor is a permanent magnet excited synchronous motor.
  • the synchronous motor can thus be a PM synchronous motor, where PM stands for permanent magnet.
  • the permanent magnet-excited synchronous motor is particularly preferably designed such that each pole of the rotor has at least one permanent magnet embedded in the rotor.
  • each pole of the rotor has at least one permanent magnet embedded in the rotor.
  • a separate holder for the permanent magnets can be saved.
  • the permanent magnets can be protected from process gases by the rotor surrounding them.
  • the permanent magnets can also be arranged on the surface of the rotor, e.g. be stuck.
  • a controller for controlling and / or regulating the speed of the rotor is preferably provided.
  • the controller is preferably integrated in the pump.
  • the controller can be designed to control and / or regulate the speed of the rotor as a function of a pressure and / or a temperature of the scroll pump.
  • the pump can have at least one pressure sensor for measuring the pressure. For example, the pressure prevailing in the gas inlet can be detected by means of the pressure sensor.
  • At least one temperature sensor can be provided to detect a temperature of the pump. With the temperature sensor, for example, the temperature of the movable spiral or the fixed spiral or the temperature of a seal, in particular a tip seal, can be measured.
  • An advantage of a controller that controls or regulates the speed of the rotor as a function of a pressure and / or a temperature of the scroll pump is that it can reduce the speed of the rotor after the final pressure has been reached. As already explained above, this enables energy savings to be achieved.
  • the speed of the rotor can also be reduced if the temperature of the scroll pump exceeds a certain, predetermined or predeterminable threshold value. Since in a scroll pump the movable scroll moves relative to the fixed scroll, there is friction between the scrolls, which, in conjunction with the compression of the gas, causes considerable heating in the scroll pump. By reducing the speed of the rotor, the relative movement of the spirals can be slowed down, so that less waste heat is generated.
  • the control is designed to set the speed of the rotor in such a way that the operating parameter at least approximately reaches, depending on an operating parameter of the pump, preferably a user of the pump, such as a desired suction pressure or a desired pumping speed becomes.
  • a related operating parameter such as the suction pressure or the pumping speed, can be set so that the operating parameter can actually be realized by the pump.
  • the controller may allow a user of the pump to set the operating parameter.
  • the controller can then set the rotor speed so that the operating parameter is actually reached.
  • the control can also be a regulation.
  • the actual value of the operating parameter can be compared with a target value.
  • the controller can be designed to control and / or regulate the speed of the rotor as a function of a pressure in such a way that the pumping speed of the pump changes according to a predetermined or predeterminable course.
  • the speed of the rotor can be set, for example, such that the pumping speed changes linearly or is only subject to slight fluctuations, as seen in the pumping out process. This can help prevent drops in the pumping speed that can occur at certain pressures in the gas inlet.
  • control is designed to reduce the speed of the rotor when a certain pressure, in particular a final pressure, is reached, in particular by a predetermined or predeterminable, specific amount.
  • the controller is preferably designed to briefly switch off the electric motor when a certain pressure, in particular a final pressure, is reached or to operate it at a predetermined or predeterminable, in particular minimum, rotational speed of the rotor. After the final pressure has been reached, it is only necessary to keep this final pressure at least approximately. After the final pressure has been reached, the pump can therefore be operated at a lower suction power than is required to generate the final pressure. It is also possible to briefly switch off the electric motor in order to achieve a corresponding energy saving.
  • the duration of the shutdown can be selected so that - for example based on empirically obtained data - it is ensured that during the shutdown there is no or only a slight increase in the pressure in the recipient.
  • the controller briefly switches off the electric motor, it is advantageous if the controller is designed to operate the electric motor again after switching off, for example if a pressure rise is measured after switching off the electric motor.
  • a maximum permissible speed range for the rotor is specified for normal operation of the pump, and the control is designed to increase the speed of the rotor above the maximum permissible speed value.
  • the pump can thus be operated in a type of boost function in which a defined, normally maximum permissible speed value can be exceeded at least for a short time, in particular in order to realize a high pumping speed at the gas inlet of the pump for a short time.
  • the boost function can also compensate for any drops in the pumping speed.
  • control can be designed to increase the speed of the rotor above the maximum permissible speed value when a specific, predetermined pressure value and / or a specific, predetermined temperature is reached in the pump, in particular on a seal provided in the pump.
  • a method for operating a scroll pump in particular a scroll vacuum pump, is also provided.
  • the scroll pump comprises at least one scroll pump stage for conveying a gas from a gas inlet through the scroll pump to a gas outlet and an electric motor which has a stator and a rotor, the rotor for driving a movable part of the scroll pump stage with the movable part of the scroll pump stage is coupled.
  • the speed of the rotor is controlled and / or regulated depending on a pressure and / or a temperature of the scroll pump.
  • the scroll vacuum pump 11 which is not shown, has a housing 13 in which a gas inlet 15 and a gas outlet 17 are provided. An outlet of a recipient, not shown, can be connected to the gas inlet 15.
  • a scroll pump stage 19 provided in the housing 13 can evacuate gas from the recipient through the gas inlet 15 and convey it through the scroll pump stage 19 to the gas outlet 17.
  • the scroll pump stage 19 has a movable part 21 and a fixed part 23.
  • the movable part 21 comprises a first, movable spiral cylinder 25.
  • the fixed part 23 has a second, fixed spiral cylinder 27.
  • the first spiral cylinder 25 and the second spiral cylinder 27 are also referred to below as the first spiral 25 and the second spiral 27.
  • the first spiral 25 and the second spiral 27 are - as is known per se in scroll pumps - inserted into one another.
  • the first spiral cylinder 25 has a respective end face at each axial end.
  • One of the end faces of the first spiral cylinder 25 is gas-tightly connected to a first wall 29 or is formed integrally therewith.
  • the first wall 29 forms a base plate, so to speak, on which the spiral 25 is arranged.
  • one of the end faces of the second spiral cylinder 27 is connected gas-tight to a second wall 31 or is formed in one piece with the latter.
  • a first seal 33 is arranged, which is also referred to as a tip seal.
  • a tip seal is, for example, a plastic compound (PTFE) with a rectangular cross-section.
  • a second seal 35 which is also referred to as a tip seal, is likewise provided between the end face of the stationary second spiral cylinder 27, which faces the movable, first wall 29.
  • the seals 33, 35 allow the crescent-shaped volumes enclosed by the spiral cylinders 25, 27 to be sealed on the end faces of the spiral cylinders 25, 27.
  • the gas inlet 15 opens into a suction area 37 (cf. Fig. 3 ), which the first and second spirals 25, 27 form in a radially outer region.
  • the first spiral 25 moves due to an eccentric drive 36 on a circular Path and executes a so-called centrally symmetrical oscillation, which is also referred to as "wobbling" or "orbiting".
  • a so-called centrally symmetrical oscillation which is also referred to as "wobbling" or "orbiting”.
  • Completed crescent-shaped volumes or cavities thus arise between the spirals 25, 27, which increasingly reduce their volume inwards.
  • the gas is thus conveyed radially inward via the suction region 37 via the cavities formed between the spirals 25, 27 and is expelled into the gas outlet 17 in the middle of the spiral through an ejection region 39.
  • the eccentric drive 36 is used to drive the first spiral 25 or the movable part 21 of the scroll pump stage 19.
  • the eccentric drive 36 comprises an eccentric shaft 41 mounted by means of bearings 43, which has a section 45 at its axial end, the longitudinal axis L of which is offset parallel to the axis of rotation R of the eccentric shaft 41.
  • the movable part 21 comprises a bearing 47, which is attached to the shaft section 45, such as Fig. 1 shows.
  • Balance weights 49 are arranged on the eccentric shaft 41 to compensate for the eccentric movement of the movable first spiral 25.
  • a metallic corrugated bellows 51 is arranged between the inside of the housing 13 and the back 67 of the first wall 29 for hermetic sealing and rotation prevention.
  • a synchronous motor 53 is provided in the housing 13, which has a stator 55 and a rotor 57.
  • the rotor 57 is coupled to the shaft 41 and thus to the movable part 21 of the scroll pump 19.
  • the synchronous motor 53 is preferably a permanent magnet-excited synchronous motor in which the rotor 57 has a plurality of permanent magnets 59, preferably embedded in the rotor 57, such as Fig. 5 shows.
  • the permanent magnets 59 can be inserted, for example, in slots provided in the rotor 57.
  • the slots can be hermetically sealed, to protect the permanent magnets, for example from corrosive gas.
  • the scroll pump 11 can also have a controller 61, which is coupled to the synchronous motor 53 and is designed to control and / or regulate the speed of the rotor 57.
  • the controller 61 can have, in particular sensorless, position detection of the rotor and advantageously also has a wide-voltage input, for example for supply voltages from 90 to 230 volts or for example for supply voltages from 24 to 48 volts.
  • the controller 61 can change the speed of the rotor 57 and thus the speed of the first spiral 25 almost as desired.
  • the abrasion of the seals 33, 35 during pump operation depends on the sliding speed of the seals 33, 35 on the walls 29, 31 and thus on the speed of the rotor 57. Further parameters which have an influence on the abrasion of the seals 33, 35 are the contact pressure of the seals 33, 35 against the walls 29, 31 and the temperature.
  • the temperature can also be influenced at least indirectly via the speed of the rotor 57, since at a higher speed of the rotor 57, higher temperatures also occur in the pump. By adjusting the speed of the rotor 57 during pump operation, the abrasion of the seals 33, 35 can be reduced and the temperature in the pump 11 can be influenced.
  • the speed of movement of the first spiral 25 and thus the speed of the rotor 57 also have a decisive influence on the pumping speed or on the pump capacity and the achievable final pressure or the compression ratio of the pump 11.
  • the scroll pump can have at least one temperature sensor 63 in the region of the pump system, for example on the rear wall 67 of the first wall 29, and have a pressure sensor 65, for example in the region of the gas inlet 15.
  • the controller 61 can therefore be designed to control and / or regulate the speed of the rotor 57 as a function of a pressure and / or a temperature of the scroll pump 11. This makes it possible, for example, if the temperature of the scroll pump exceeds a certain, predetermined or predeterminable threshold value, to lower the speed of the rotor 57 in order not to achieve any further increase or possibly even a decrease in the temperature of the scroll pump.
  • the controller 61 can also be designed to set the speed of the rotor 57 in such a manner as a function of an operating parameter of the pump 11 that is predetermined or predeterminable, for example, for a user of the pump 11, such as a desired suction pressure or a desired suction capacity, in such a way that the Operating parameters is reached.
  • an operating parameter of the pump 11 that is predetermined or predeterminable, for example, for a user of the pump 11, such as a desired suction pressure or a desired suction capacity, in such a way that the Operating parameters is reached.
  • the controller 61 can allow a user to enter an operating parameter and then adjust the speed of the rotor 57 such that the operating parameter is actually reached.
  • the control can also be designed to control and / or regulate the speed of the rotor 57 as a function of the pressure measured by the pressure sensor 65 in such a way that the pumping speed of the pump 11 changes in accordance with a predetermined or predeterminable course.
  • the pumping speed of the pump 11 can be set, for example, via the speed of the rotor 57 in such a way that it follows the predetermined course and thus, for example, only slight fluctuations occur. In this way, in particular drops in the pumping speed, which can occur at certain pressures in scroll pumps known from the prior art, can be avoided.
  • Drops in the pumping speed, in particular due to worn tip seals, can also be avoided by leveling or adjusting the tip seals.
  • a pressure-dependent speed control of the speed of the rotor 57 can, for example, achieve an almost linear pumping speed range or curve.
  • the controller 61 can be designed to reduce the speed of the rotor 57 when a certain pressure, for example an end pressure of the pump 11, is reached.
  • a pressure-dependent speed control of the scroll pump can also be carried out by means of the control 61.
  • the user of the pump can preselect a suction pressure, for example, and the control 61 can set the speed of the rotor 57 as a function of the pending gas load or the pressure measured by means of the pressure sensor 65, insofar as this is within the permitted control range.
  • the controller 61 can be designed to switch off the electric motor 53 at least briefly when a certain pressure, in particular a final pressure of the pump 11, or to operate it at a predetermined or predeterminable, in particular minimum, speed. After the final pressure has been reached, it is only necessary to maintain this final pressure. A lower suction power is required than is required during the actual pumping-out process of the recipient. It is therefore possible to briefly switch off the synchronous motor 53 in order to achieve a corresponding energy saving. The duration of the shutdown can be selected to ensure that no or only a slight increase in the pressure in the recipient takes place during the shutdown. After the final pressure has been reached, the pump can also operate at a predetermined minimum speed to be operated, on the one hand to maintain the final pressure, but on the other hand to achieve energy savings.
  • the controller 61 can be designed to switch the motor 53 on again after it has been switched off, for example as a function of the pressure measured with the pressure sensor 65.
  • a maximum permissible speed value for the rotor 57 can be specified for the normal operation of the pump.
  • the controller 61 can be designed such that it monitors the speed of the rotor 57 and ensures that the maximum permissible speed value is not exceeded during normal operation of the pump 11.
  • the controller 11 can also be designed to increase the speed of the rotor 57 above the maximum permissible speed value.
  • the pump 11 can thus be operated in a boost mode in order to realize a high pumping speed for a short time.
  • the Fig. 1 has the scroll pump 11 'of the invention Fig. 4 a synchronous electric motor 53, in which the rotor 57 is arranged relative to the stator 55 in such a way that a force F directed towards the rotor 57 in the axial direction, ie along the axis of rotation R, is generated during operation of the electric motor 53.
  • the first wall 29 is pressed in the direction of the second wall 31 by the axial force F, as a result of which the seals 33, 35 between the movable and stationary parts 21, 23 of the scroll pump 11 are pressed together.
  • the sealing effect of the seals 33, 35 is thereby improved.
  • the rotor 57 is like a comparison between the 1 and 4 shows, based on its in Fig. 1 shown normal position to the stator 55 against the axial direction by an offset V to the stator 55 arranged.
  • a central plane running perpendicular to the axis of rotation R. M1 of the stator 55 and a central plane M2 of the rotor 57, which is also perpendicular to the axis of rotation R, thus provides the aforementioned axial offset V, on the basis of which the force F acting in the axial direction is established during the operation of the electric motor 53.
  • the axial force F can be used to compensate the compression forces at the pump stage 19 in the axial direction and / or to compensate for axial pressure forces in the pump system.
  • the double-wrap pump stage is in accordance with Figure 2A on the back 67 of the movable, first wall 29 there is also a movable spiral cylinder 69, which is inserted into one another with an immovable spiral cylinder 71, the one end face of which is connected gas-tight to a third wall 73 or is formed integrally therewith.
  • a seal 75 is again provided between an end face of the movable spiral 69 and the third wall 73
  • a seal 77 is again provided between an end face of the stationary spiral 71 and the first wall 29.
  • there are 29 spiral cylinders placed one inside the other on both sides of the first wall. The advantage of a double-wrap arrangement is that pressure compensation in the axial direction Direction is achieved and thus lower axial forces act on the seals. The power consumption of the electric motor 53 can thereby be reduced.
  • the rotor 57 can have six rotor poles 79 in the circumferential direction U, each rotor pole 79 having one of the permanent magnets 59a-59f.
  • the direction of magnetization which is directed from the south pole to the north pole, can alternately be directed radially inward or radially outward in the case of the permanent magnets 59a-59f in the peripheral direction U.
  • the magnetization direction can therefore be directed radially outwards, while in the permanent magnets 59b, 59d and 59f it is directed radially inwards.
  • the Figure 6A are the permanent magnets 59a - 59f attached to the radially outer side, for example glued, and thus not embedded.
  • the direction of magnetization can in turn be directed radially outwards, while in the permanent magnets 59b, 59d and 59f it is directed radially inwards.
  • each rotor pole has two permanent magnets, each arranged in a V-shape and embedded in the rotor 57.
  • a rotor pole comprises the permanent magnets 59a-1, 59a-2
  • a further rotor pole comprises the permanent magnets 59b-1, 59b-2
  • a further rotor pole comprises the permanent magnets 59c-1, 59c-2
  • a further rotor pole comprises the permanent magnets 59d-1 , 59d-2
  • a further rotor pole comprises the permanent magnets 59e-1, 59e-2
  • a further rotor pole comprises the permanent magnets 59f-1, 59f-2.
  • the direction of magnetization of the permanent magnets can again in the circumferential direction alternate from rotor pole to rotor pole directed radially outwards or radially inwards.
  • the longitudinal direction of the permanent magnets 59a-59f extends in the radial direction.
  • the magnetization can be directed radially outwards in all permanent magnets 59a-59f.
  • each pole has four permanent magnets arranged in a V-shape in two rows.
  • the permanent magnets 59a-1, 59a-2, 59a-3, 59a-4 are identified by reference numerals.
  • the direction of magnetization of the permanent magnets can in turn alternate in the circumferential direction from the rotor pole to the rotor pole directed radially outwards or radially inwards.
  • Each of the rotor 57 shown can be used in a synchronous motor 53 of the pump 11 or the pump 11 '.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Compressor (AREA)

Claims (4)

  1. Pompe à spirales, en particulier pompe à vide à spirales, comportant au moins un étage de pompe à spirales (19) pour convoyer un gaz depuis une entrée de gaz (15) à travers l'étage de pompe à spirales (19) jusqu'à une sortie de gaz (17), et un moteur électrique (53) comprenant un stator (55) et un rotor (57), le rotor (57) étant couplé à une partie mobile (21) de l'étage de pompe à spirales (19) pour entraîner la partie mobile (21) de l'étage de pompe à spirales (19),
    caractérisée en ce que
    le rotor (57) est agencé de telle sorte par rapport au stator (55) que pendant le fonctionnement du moteur électrique (53), une force axiale (F) agissant le long de l'axe de rotation (R) du rotor (57) est générée sur le rotor (57).
  2. Pompe selon la revendication 1,
    caractérisée en ce que
    pour générer la force axiale (F), le rotor (57) est agencé de façon décalée par rapport au stator (55) d'un décalage (V) en sens opposé à la direction axiale, par comparaison à sa position normale par rapport au stator (55).
  3. Pompe selon la revendication 1 ou 2,
    caractérisée en ce que
    le rotor (57) est couplé à la partie mobile (21) de l'étage de pompe à spirales (19) de telle sorte que la force axiale (F) est transmise à la partie mobile (21) de l'étage de pompe à spirales (19).
  4. Pompe selon l'une des revendications 1 à 3,
    caractérisée en ce que
    en vue en direction axiale, au moins un joint d'étanchéité (33, 35) est agencé entre la partie mobile (21) de l'étage de pompe à spirales (19) et une partie immobile stationnaire (23) de l'étage de pompe à spirales (19), joint qui est comprimé ou pressé entre les parties mobile et immobile (21, 23) de l'étage de pompe à spirales (11, 11') par la force axiale (F).
EP19158257.6A 2015-10-06 2015-10-06 Pompe à spirales et procédé de fonctionnement d'une pompe à spirales Active EP3508727B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19158257.6A EP3508727B1 (fr) 2015-10-06 2015-10-06 Pompe à spirales et procédé de fonctionnement d'une pompe à spirales

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19158257.6A EP3508727B1 (fr) 2015-10-06 2015-10-06 Pompe à spirales et procédé de fonctionnement d'une pompe à spirales
EP15188515.9A EP3153708B1 (fr) 2015-10-06 2015-10-06 Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP15188515.9A Division-Into EP3153708B1 (fr) 2015-10-06 2015-10-06 Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
EP15188515.9A Division EP3153708B1 (fr) 2015-10-06 2015-10-06 Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales

Publications (2)

Publication Number Publication Date
EP3508727A1 EP3508727A1 (fr) 2019-07-10
EP3508727B1 true EP3508727B1 (fr) 2020-05-13

Family

ID=54291099

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Application Number Title Priority Date Filing Date
EP19158257.6A Active EP3508727B1 (fr) 2015-10-06 2015-10-06 Pompe à spirales et procédé de fonctionnement d'une pompe à spirales
EP15188515.9A Revoked EP3153708B1 (fr) 2015-10-06 2015-10-06 Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP15188515.9A Revoked EP3153708B1 (fr) 2015-10-06 2015-10-06 Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales

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JP (1) JP6360536B2 (fr)

Families Citing this family (6)

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EP3754200B1 (fr) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Pompe à vide à spirales et procédé de montage
JP7220692B2 (ja) * 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
DE102020128369A1 (de) 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
EP4219947A3 (fr) 2023-06-15 2024-02-07 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie hélicoïdale optimisée
EP4234932A3 (fr) 2023-06-15 2024-01-17 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage
EP4253720A2 (fr) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

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Also Published As

Publication number Publication date
JP2017072137A (ja) 2017-04-13
EP3153708B1 (fr) 2019-07-17
JP6360536B2 (ja) 2018-07-18
EP3153708A1 (fr) 2017-04-12
EP3508727A1 (fr) 2019-07-10

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