EP4253720A2 - Pompe à vide à spirales et système de pompe à vide à spirales - Google Patents

Pompe à vide à spirales et système de pompe à vide à spirales Download PDF

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Publication number
EP4253720A2
EP4253720A2 EP23190388.1A EP23190388A EP4253720A2 EP 4253720 A2 EP4253720 A2 EP 4253720A2 EP 23190388 A EP23190388 A EP 23190388A EP 4253720 A2 EP4253720 A2 EP 4253720A2
Authority
EP
European Patent Office
Prior art keywords
spiral
drive shaft
component
scroll vacuum
spiral component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23190388.1A
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German (de)
English (en)
Inventor
Erfindernennung liegt noch nicht vor Die
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23190388.1A priority Critical patent/EP4253720A2/fr
Publication of EP4253720A2 publication Critical patent/EP4253720A2/fr
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the present disclosure relates to the improvement of scroll vacuum pumps and scroll vacuum pump systems with multiple scroll vacuum pumps of different designs.
  • the scroll vacuum pumps each include a pump system which includes a fixed spiral component and a movable spiral component which interacts with this in a pumping effect, a drive shaft which rotates during operation about an axis of rotation with an eccentric section for driving the movable spiral component, and an electric drive motor for the drive shaft.
  • Scroll vacuum pumps are basically known, for example from EP 3 153 708 A2 , EP 3 617 511 A2 and EP 3 647 599 A2 .
  • a scroll pump is a positive displacement pump that compresses against atmospheric pressure and can be used, among other things, as a compressor.
  • a scroll vacuum pump can be used to create a vacuum in a recipient connected to a gas inlet of the scroll vacuum pump.
  • Scroll vacuum pumps are also known as spiral vacuum pumps or spiral conveyors.
  • the pumping principle underlying a scroll vacuum pump is basically known from the prior art and is therefore only briefly explained below.
  • the pumping system of a scroll vacuum pump has two nested or nested, for example Archimedean, spiral cylinders also simply referred to as spirals.
  • Each spiral cylinder comprises at least one equidistant spiral wall with a, in particular plate-shaped, support provided on one end face of the spiral wall, the outer turns of the spiral cylinder, for example the two or three outermost turns of the spiral cylinder, being able to be formed by wall sections which extend from the center of the spirals each have a constant distance in the circumferential direction. Even if, strictly speaking, these wall sections do not form spiral sections but rather circular sections, in the context of the present disclosure they are attributed to the spiral and referred to as turns of the spiral.
  • spiral cylinders are inserted into one another in such a way that the two spiral cylinders enclose half-moon or crescent-shaped volumes in sections.
  • One of the two spirals is arranged immovably or stationary in the housing of the pump, whereas the other spiral together with its carrier can be moved on a circular path via the eccentric section of the drive shaft, which is why this spiral together with its carrier is also referred to as an orbiter.
  • This movable spiral component thus carries out a so-called centrally symmetrical oscillation, which is also referred to as "orbiting" or "wobbling".
  • a crescent-shaped volume enclosed between the spiral cylinders migrates increasingly inwards during the orbiting of the movable spiral component within the spirals, whereby, by means of the migrating volume, the process gas to be pumped moves radially inwards from a radially external gas inlet of the pump system to a gas outlet of the pump system located in particular in the middle of the spiral is promoted.
  • the eccentric drive i.e. the drive shaft with the eccentric section
  • the eccentric drive is located within the housing of the scroll vacuum pump on the side of the carrier facing away from the spiral of the orbiter and in practice is usually surrounded by a deformable sleeve, for example a corrugated bellows, which on the one hand Sealing the drive from the intake area and on the other hand serves as a rotation lock for the orbiter, as it could otherwise rotate around itself, i.e. without a rotation lock.
  • the deformable sleeve can be connected to the carrier at a first end, whereas the second end of the deformable sleeve opposite the first end can be screwed to the base of the housing inside the housing by means of a plurality of fastening means.
  • the assembly comprising the orbiter and the deformable sleeve (e.g. corrugated bellows) can be pre-assembled as part of the pump assembly, so that this assembly can then be inserted as a unit into the pump housing, whereupon the mentioned second end of the deformable sleeve is screwed to the base of the housing with the fastening means can be.
  • the deformable sleeve e.g. corrugated bellows
  • At least two bearing points spaced apart along the axis of rotation are provided for rotary mounting of the drive shaft, with all bearing points being located on the side of the drive motor facing the eccentric section and/or between a front balancing weight and a rear balancing weight of the drive shaft.
  • the drive motor is located behind the bearing points, ie there is no longer any bearing point behind the drive motor.
  • This concept represents a departure from a conventional arrangement in which a drive motor designed as an asynchronous motor is arranged between two bearing points spaced apart along the axis of rotation.
  • the eccentric section is connected to the front end of the drive shaft and the drive motor sits on the rear end of the drive shaft.
  • the drive motor is arranged at least partially, preferably completely, within the pump housing.
  • the drive motor is surrounded by the pump housing in the circumferential direction at least over more than half of its axial length, preferably over its entire axial length.
  • the pump housing is closed at its rear end by means of a separate motor cover. If the drive motor is not completely arranged within the pump housing, the motor cover can have a receiving space with an axial depth which is dimensioned such that this receiving space can accommodate a rear end of the drive motor which projects axially backwards out of the pump housing.
  • the electric drive motor of the scroll vacuum pump can be an asynchronous motor.
  • the electric drive motor can be a synchronous motor.
  • the drive motor is a synchronous reluctance motor.
  • a balancing weight is placed on the front side of the rear end of the drive shaft.
  • balancing weight can take on one or more additional functions in addition to balancing the rotating system.
  • the balancing weight placed on the front side can serve to clamp the rotor of the drive motor.
  • the balancing weight rotating during operation creates air turbulence in the engine compartment and can thereby have a cooling effect and at least contribute to cooling the drive motor.
  • the arrangement of cooling fins on the motor rotor can be dispensed with, so that the resulting freed-up space in the engine compartment can be used for the balancing weight.
  • balancing weight touches the drive shaft.
  • the balancing weight is located behind the drive shaft and is connected to the drive shaft in such a way that it rotates together with the drive shaft during operation.
  • the balancing weight can, for example, be screwed to the drive shaft.
  • a central screw can be provided, the shaft of which coincides with the axis of rotation. According to some exemplary embodiments, it can be provided that the positioning of the balancing weight in the circumferential direction relative to the drive shaft is predetermined by a positioning aid.
  • the positioning aid can comprise a positioning element arranged at a radial distance from the axis of rotation and a positioning receptacle for a part of the positioning element, the positioning element being arranged on the drive shaft and the positioning receptacle being formed on the balancing weight, or vice versa.
  • the positioning element can, for example, be designed in the shape of a pin and extend parallel to the axis of rotation.
  • the positioning element can be inserted into a recess in the axial direction during assembly.
  • the recess can be formed in the drive shaft.
  • the recess can be formed jointly by the drive shaft on the one hand and a motor rotor of the drive motor or a radially inner sleeve element connected in a rotationally fixed manner to the motor rotor of the drive motor on the other hand.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, the motor rotor being clamped between an abutment and the balancing weight placed on the rear end of the drive shaft.
  • the drive motor comprises a radially inner motor rotor, which is pushed onto the drive shaft directly or by means of a radially inner sleeve element which is non-rotatably connected to the motor rotor, in particular with a clearance fit, with between the motor rotor and the sleeve element on the one hand and the drive shaft, on the other hand, is provided with a positive connection that is effective in the circumferential direction.
  • the positive connection can be formed by a positioning element of a positioning aid, through which the positioning of the balancing weight in the circumferential direction relative to the drive shaft is predetermined.
  • the positioning element and/or the positioning aid can be the positioning element or the positioning aid described above.
  • the motor rotor of the drive motor is provided with a radially inner sleeve element which is connected to the motor rotor in a rotationally fixed manner and with which the motor rotor is pushed onto the drive shaft, in particular with a clearance fit.
  • the sleeve element can be the sleeve element described above.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, the motor rotor being provided with a radially inner sleeve element which is non-rotatably connected to the motor rotor and with which the motor rotor is pushed onto the drive shaft, in particular with a Clearance fit.
  • the sleeve element is in particular the sleeve element described above.
  • the inner diameter of the motor rotor can be adapted to the outer diameter of the relevant section of the drive shaft. This can be advantageous, for example, in a system with several scroll vacuum pumps of different designs, which differ from each other in terms of the inner diameter of the motor rotor. In particular, this makes it possible to use one drive shaft for different motor rotors.
  • the sleeve element can be made in one piece or in several parts.
  • the motor rotor and the sleeve element can be pressed together.
  • the sleeve element is provided with a circumferential shoulder against which the motor rotor rests.
  • This shoulder can form an abutment for the motor rotor, which can be clamped between this abutment and a clamping element.
  • the clamping element can, for example, be placed on the front side of the rear end of the drive shaft.
  • the clamping element can be a balancing weight, in particular the balancing weight described above.
  • the drive shaft is provided with a circumferential shoulder against which the sleeve element rests.
  • the shoulder of the drive shaft can form an abutment for the sleeve element when it is clamped during assembly.
  • the sleeve element can be clamped between this abutment and a clamping element placed on the front side of the rear end of the drive shaft.
  • the clamping element can be, for example, a balancing weight, in particular the balancing weight described above.
  • the drive shafts of the different scroll vacuum pumps are identical.
  • the scroll vacuum pumps can differ from one another with regard to the inner diameter of a radially inner motor rotor of the drive motor, with sleeve elements with different wall thicknesses being provided in order to adapt the drive shafts to the different inner diameters, which are each arranged between the drive shaft and the motor rotor.
  • the motor rotors are each connected to the sleeve element in a rotationally fixed manner and are pushed onto the drive shaft with the sleeve element, in particular with a clearance fit.
  • the drive shaft is provided with a front balancing weight and a rear balancing weight, the front balancing weight and the rear balancing weight being different from each other in the material from which they are made.
  • the concept of using different materials for the balancing weights creates an additional parameter that can be varied in order to adapt the balancing weights to the respective circumstances.
  • the installation space available for a balancing weight can be different, but this does not necessarily mean that a smaller balancing mass is also required with a smaller installation space, since the required balancing mass depends on the properties of the entire rotating system.
  • a scroll vacuum pump system it may be necessary to accommodate a comparatively large balancing mass in a comparatively small installation space, in order to meet the respective balancing requirements while avoiding or at least minimizing design adjustments.
  • the material of one balancing weight has a greater density than the material of the other balancing weight.
  • it can be provided that it is the front balancing weight whose material has a greater density. This means that pump systems of different sizes can be compensated for by balancing weights of different densities while the remaining rotating system has the same dimensions.
  • the front balancing weight is made of brass and the rear balancing weight is made of steel.
  • the scroll vacuum pumps differ in terms of the pumping system, the drive shaft being provided with a front balancing weight and a rear balancing weight, and the scroll vacuum pumps differing in terms of the front Differentiate between the balancing weight and/or the rear balancing weight.
  • the drive shaft is provided with at least one balancing weight, the balancing weight comprising a plurality of consecutive balancing sections along a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft, each of which has a partial ring shape have and include them with their opening pointing towards the drive shaft, and the balancing sections differ from one another in terms of the width of their openings.
  • the available installation space can be optimally utilized.
  • the balancing weight having the different balancing sections can be the front balancing weight of the drive shaft, which also has a rear balancing weight.
  • the opening widths of the balancing sections increase in the direction of the pump system.
  • a balancing section is arranged in relation to the axis of rotation of the drive shaft at the level of the eccentric section of the drive shaft.
  • each balancing section can be defined in a plane perpendicular to the longitudinal axis by a partial circle with a constant radius along the longitudinal axis, the openings of the balancing sections differing from one another in terms of the size of the radii.
  • the partial circles are not arranged concentrically.
  • the partial circles can each comprise an angle in the range of 120° to 180°, in particular in the range of 150° and 170°.
  • the balancing weight can be made in one piece. This makes it possible to produce the balancing weight from a single starting workpiece by machining.
  • the centers of all partial circles of at least two point sections, in particular of all point sections lie in a plane in which the bisectors of the angles encompassed by the partial circles also lie.
  • the drive shaft is provided with at least one balancing weight, which comprises at least one balancing section which widens radially outwardly conically in a plane perpendicular to a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft.
  • the conical shape of the balancing weight enables material and cost optimization.
  • the cone shape enables an imaginary rosette-like arrangement of several balancing sections around a central axis, which means that the circular surface and thus the material of a circular disc-shaped starting workpiece can be optimally used, so to speak a high packing density of balancing weights can be achieved in the workpiece.
  • the proportion of material unused for the production of the balancing weights can thus be minimized.
  • the longitudinal axis can coincide with the axis of rotation. It can be provided that the balancing section expands in a V-shape and thus defines an opening angle in the range of 10° to 30°, in particular in the range of 15° to 25°.
  • the outline of the balancing section can be delimited by two V-shaped straight lines diverging radially outwards, a radially inner circular section and a radially outer circular section.
  • the radially inner circle section can have a smaller radius than the radially outer circle section.
  • An imaginary circle on which the radially inner circle section lies and whose center preferably lies on the longitudinal axis can lie completely within the outline of the balancing section.
  • an imaginary circle on which the radially outer circle section lies can completely contain the outline of the balancing section.
  • Such configurations of the balancing section can further increase the material yield.
  • the balancing weight comprises a plurality of balancing sections that follow one another along a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft, wherein in a projection along the longitudinal axis, the outline of the entire balancing weight differs from the outline of the balancing weight extending radially outwards conically expanding balancing section is formed. This can ensure that the additional balancing section(s) does not affect the material yield.
  • At least one further balancing section can be provided, which is shortened in the radial direction compared to the balancing section which widens conically radially outwards and, apart from this, is designed to be congruent and overlapping.
  • the production of the balancing weight can thereby be further simplified.
  • the balancing weight can have a circular cylinder section which forms the front end of the balancing weight along the longitudinal axis and its central axis coincides with the longitudinal axis.
  • the thickness of the circular cylinder section measured along the longitudinal axis is smaller than the thickness of each balancing section.
  • the circular cylinder section can be used, for example, to center the balancing weight during assembly.
  • the balancing weight with the circular cylinder section can be inserted into a sleeve element, in particular in those exemplary embodiments in which the balancing weight is placed on the front end of the drive shaft, with a motor rotor connected in a rotationally fixed manner to the sleeve element and pushed onto the drive shaft with the sleeve element is.
  • the balancing weight can be placed on the front side with the circular cylinder section on the rear end of the drive shaft.
  • the balancing weight can have its greatest thickness measured along the longitudinal axis in the extension of the drive shaft.
  • the balancing weight is made in one piece.
  • the one-piece design allows the production of the balancing weight to be further simplified.
  • each vacuum pump comprises a pump housing and an electronics housing, the pump system, the drive shaft and the drive motor being accommodated in the pump housing and the electronics housing being a separate component from the pump housing which is connected to the pump housing, in particular releasably, the electronics housing comprising a housing part and electronic equipment, the scroll vacuum pumps differing from one another with regard to the electronic equipment, and the housing parts of the different scroll vacuum pumps are identical.
  • Different electronic equipment can result, for example, from the fact that the scroll vacuum pumps are equipped with different drive motors.
  • Different drive motors may require different electronic, electrical and/or electromechanical components and/or a different number of such components.
  • the housing parts can each be designed as a cast part.
  • the fact that the housing parts of the different scroll vacuum pumps are identical in construction does not exclude the possibility that, according to advantageous developments, the housing parts of the different scroll vacuum pumps differ from one another with regard to post-processing to adapt to the respective electronic equipment.
  • the post-processing can, for example, consist of adapting one or more openings to the geometry of plugs or cables of the electronic equipment, which are to be received on the housing part or passed through a wall of the housing part.
  • Post-processing can also consist, for example, of walls present within the housing part being completely or partially removed by milling in order to adapt the available installation space to the respective space requirements of the electronic equipment.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor has a front end face and a rear end face, and only one of the two end faces is provided with cooling projections projecting in the axial direction.
  • cooling projections are designed and arranged in such a way that they each act as a balancing weight.
  • These balancing weights can together form an effective balancing mass with respect to the axis of rotation. It was surprisingly found that both a sufficient cooling effect and a sufficient balancing effect can be achieved by arranging these projections on one side only.
  • the front end face of the motor rotor which is not provided with such projections, can therefore be arranged further inwards than in a motor rotor which is provided with such projections on its front end face.
  • the cooling projections can be rib-shaped or plate-shaped.
  • the cooling projections have at least two different sides that differ from each other in terms of their width, the cooling projections being arranged in such a way that the wider side is at least essentially in the circumferential direction and the narrower side at least essentially in the radial direction.
  • the cooling projections can generate comparatively strong air movements in the manner of blades, ie they can provide a comparatively large "whisking or stirring effect", which promotes heat dissipation and thus the cooling effect.
  • the cooling projections can be curved in such a way that they have a concavely shaped side pointing at least substantially in the circumferential direction, namely in the direction of rotation of the motor rotor. As a result, a blade effect of the cooling projections can be further increased.
  • the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a carrier for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the carrier being formed in the carrier, and wherein in the carrier additionally At least two bypass channels are formed in relation to the outlet channel, each of which leads from a bypass opening formed in the spiral base to an outlet of the carrier and in each of which at least one pressure relief valve is arranged.
  • bypass channels each lead to the outlet channel.
  • One or more additional outlets for the bypass channels are then not required.
  • bypass channels Preferably exactly two bypass channels are provided. It was found that two bypass channels are enough to achieve a particularly favorable ratio of power consumption and pumping speed.
  • each bypass channel it can be provided that exactly one pressure relief valve is arranged in each bypass channel. It was found that one pressure relief valve per bypass channel is sufficient to achieve a particularly favorable ratio of power consumption and pumping speed.
  • the fixed spiral component is preferably formed in one piece, with the side of the carrier facing the movable spiral component forming the spiral base of the spiral arrangement.
  • the two bypass openings are arranged offset from one another in the circumferential direction, in particular by an angle of less than 180°, preferably by an angle between 90° and 180°.
  • the two bypass openings are arranged at different radial positions or at least essentially the same radial position with respect to a central axis of the fixed spiral component which runs parallel to the axis of rotation of the drive shaft.
  • the inlet opening of the outlet channel is arranged radially further inward than both bypass openings with respect to a central axis of the fixed spiral component that runs parallel to the axis of rotation of the drive shaft.
  • the inlet opening of the outlet channel can be arranged at least substantially on the central axis.
  • the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a carrier for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the carrier being formed in the carrier, and wherein in the carrier additionally At least two bypass channels are formed in relation to the outlet channel, each of which leads from a bypass opening formed in the spiral base to the outlet channel.
  • bypass channels lead to the outlet channel it is not necessary to provide one or more additional outlets for the bypass channels in the carrier.
  • the outlet of the carrier comprises a radial outlet opening and the outlet channel comprises a radially extending channel section leading to the radial outlet opening.
  • both bypass channels each lead to the radial channel section.
  • one bypass channel leads to the radial channel section and the other bypass channel leads to a further channel section of the outlet channel, which leads from the inlet opening to the radial channel section.
  • the further channel section of the outlet channel runs parallel to a central axis of the fixed spiral component which runs parallel to the axis of rotation of the drive shaft and in particular lies on the central axis.
  • At least one pressure relief valve is arranged in each of the bypass channels.
  • the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a support for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the support being formed in the support, and wherein the outlet of the support includes an axial outlet opening.
  • the axial outlet opening is particularly advantageous if the outlet is to be used for another function that requires additional installation space.
  • an additional device for example a leak detector
  • this additional function would require additional radial installation space, which is often not available.
  • An axial installation space can be implemented in many cases without disadvantages.
  • An additional device for example a leak detector, can therefore be connected to the axial outlet opening of the carrier without requiring additional radial installation space.
  • the scroll vacuum pump can therefore be made slimmer.
  • a vacuum device can be connected or is connected to the axial outlet opening, wherein the vacuum device can in particular be a leak detector.
  • the outlet channel can comprise a radially extending channel section and at least one further channel section which leads from the radially extending channel section to the axial outlet opening.
  • the further channel section can run parallel to a central axis of the fixed spiral component that runs parallel to the axis of rotation.
  • the outlet of the carrier comprises a radial outlet opening in addition to the axial outlet opening, the two outlet openings being selectively closable so that the carrier can be operated with only a single outlet opening.
  • the outlet opening that is not required can be closed, for example, using a plug.
  • an opening can be formed in surrounding components, for example a hood, through which the respective outlet opening or a plug that momentarily closes it is accessible.
  • the outlet channel can comprise a radially extending channel section which leads to the radial outlet opening, with a further channel section leading to the axial outlet opening from a branch point of the radial channel section located between the inlet opening and the radial outlet opening. It can be provided that a channel section leads to a confluence point, in particular between the inlet opening and the branch point leading to the axial outlet opening, which starts from a bypass opening formed in the spiral base.
  • the axial outlet opening can be formed on a radially outer region of the carrier.
  • Ra of the axial outlet opening Ra > 0.5 * r, especially Ra > 0.7 * r, especially Ra > 0.8 * r, apply when r is the radius of the beam.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves delimited by them and the spiral base forming the bottom thereof, as well as a support for the spiral arrangement cooperating with the eccentric section of the drive shaft
  • the fixed spiral component comprises a spiral arrangement with spiral walls delimited by them Spiral grooves and the spiral base forming their bottom and a support for the spiral arrangement, the spiral grooves having a groove depth which is measured from the tip of the spiral walls to the spiral base along a central axis of the movable spiral component which runs parallel to the axis of rotation of the drive shaft, and a groove width measured perpendicular to the central axis have, and wherein in the movable spiral component and / or in the fixed spiral component the ratio of groove depth to groove width in a range from 3.7 to 4.2, in particular from 3.8 to 4.1, particularly preferably from 3.85 to 4.0 and/or where the ratio of groove depth to groove width is greater than 3.8, in particular greater than 3.85, or
  • the pump system can achieve a comparatively high pumping speed.
  • the ratio of groove depth to groove width is constant over the entire spiral arrangement.
  • the groove depth can be 50 mm, for example.
  • the groove depth can be 52 mm. This results in even higher ratios of groove depth to groove width, for example in the range of 4.0 and 4.2, with the same groove width.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves delimited by these and the bottom forming the spiral base, and a support for the spiral arrangement which cooperates with the eccentric section of the drive shaft
  • the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a Carrier for the spiral arrangement, wherein in the movable spiral component and / or in the fixed spiral component one or more radially outer spiral walls have a thickness that is greater than the thickness of radially inner spiral walls.
  • the radially outer spiral wall or the radially outer spiral walls can be given greater stability. This is particularly advantageous if the spiral wall in question is interrupted in the circumferential direction.
  • the carrier is provided with a gas inlet in a radially outer region, in the region of which the spiral wall or the spiral walls are interrupted in the circumferential direction, with at least one, preferably each, of the spiral walls interrupted in the circumferential direction having the larger one Thickness is provided.
  • the gas inlet can comprise a recess extending from the outer edge of the carrier, preferably extending radially inwards in a V-shape, or can be formed by such a recess.
  • the or each spiral wall of greater thickness lies on a circle.
  • the movable spiral component comprises a spiral arrangement with spiral walls, spiral base forming delimited by these spiral grooves and the bottom thereof, and a support for the spiral arrangement which cooperates with the eccentric section of the drive shaft
  • the fixed spiral component comprising a spiral arrangement with spiral walls and spiral base and a support for the spiral arrangement, wherein the spiral walls of the movable spiral component and / or the spiral walls of the fixed spiral component are provided with a sealing element at their end facing away from the spiral base, and at least in the case of a spiral wall, the sealing element extends to the end of the which reaches a gas inlet of the pump system Spiral wall is guided.
  • the sealing element is of elongated shape and extends continuously from a radially outer end to a radially inner end.
  • the sealing element has a length of more than 150 cm, in particular approximately 160 cm.
  • the sealing element can consist of a thermoplastic material, in particular PTFE (polytetrafluoroethylene), or include such a material.
  • PTFE polytetrafluoroethylene
  • the sealing element is preferably accommodated in a groove in the respective spiral wall.
  • the gas inlet of the pumping system may include a recess formed on the support of the movable scroll member.
  • the recess starts from the outer edge of the carrier and preferably extends radially inwards in a V-shape.
  • FIG. 1a and 1b Fig. 2a and 2 B as well as Fig. 3a and 3b Scroll vacuum pumps according to the invention shown belong to a scroll vacuum pump system with several scroll vacuum pumps of different designs.
  • the scroll vacuum pumps in this system differ from each other in several ways, but have the same basic structure, which is described below.
  • Each scroll vacuum pump comprises a pumping system with a fixed scroll component 11 and a movable scroll component 13, which work together to pump effectively during operation. Furthermore, each scroll vacuum pump comprises a drive shaft 16 which rotates during operation about an axis of rotation 15 and has an eccentric section 19 for driving the movable spiral component 13. Furthermore, each scroll vacuum pump is provided with an electric drive motor 21, 23, which serves to rotate the drive shaft 17 about the axis of rotation 15 to move.
  • the electric drive motor includes a radially inner motor rotor 21 and a radially outer motor stator 23.
  • the drive shaft 17 is rotatably mounted on the pump housing 41 at two bearing points 25, 27 spaced apart in the axial direction in each scroll vacuum pump.
  • the front rolling bearing 25 is designed as a fixed bearing, while the rear rolling bearing 27 is designed as a floating bearing.
  • a special feature provided for all scroll vacuum pumps of the system is that an arrangement also known as the cantilever concept is provided, according to which the two bearing points 25, 27 are located on the side of the drive motor 21, 23 facing the eccentric section 19 of the drive shaft 17. All bearing points 25, 27 are therefore located within the pump housing 41 in front of the drive motor 21, 23.
  • the eccentric section 19 is connected in one piece to the front end of the drive shaft 17 and the drive motor 21, 23 sits on the rear end of the drive shaft 17.
  • the drive motor 21, 23 can be pushed onto the rear end of the drive shaft 17, which simplifies the assembly and replacement of the drive motor or parts of the drive motor.
  • the balancing concept for balancing the rotating system comprising, among other things, the drive shaft 17 and the movable spiral component 13 includes, in each scroll vacuum pump disclosed here, a front balancing weight 29 fastened to the drive shaft 17 by means of a screw 38 and a rear balancing weight 31.
  • the front balancing weight 29 is in each case arranged in the area of the front end of the drive shaft 17 and the eccentric section 19.
  • the rear balancing weight 31 is located in front of the rear bearing point 27 and thus in front of the drive motor.
  • the rear balancing weight 31 is formed by a pressure element which is placed on the front end of the drive shaft 17. Also with the scroll vacuum pump Fig. 1a and 1b is placed on the front end of the drive shaft 17 Pressure element 87 ( Fig. 1b ) is provided, but is designed to be rotationally symmetrical and therefore does not serve as a balancing weight.
  • the pressure elements 87 and 31 are each connected to the drive shaft 17 with a central screw 83.
  • the motor rotor 21 is clamped between the rotationally symmetrical pressure element 87 or the pressure element 31, which is simultaneously designed as a balancing weight, on the one hand, and an abutment, this abutment being formed by a shoulder 17a formed on the drive shaft 17.
  • the drive shafts 17 of the different scroll vacuum pumps are identical. Despite different motor sizes within the system, only one drive shaft 17 is required for the system.
  • the drive motors of the scroll vacuum pumps of different designs differ, among other things, in terms of the inner diameter of the radially inner motor rotor 21. This is shown, for example, by the comparison of Fig. 2b and Fig. 3b .
  • sleeve elements 33 with different wall thicknesses are provided, which are each arranged between the drive shaft 17 and the motor rotor 21.
  • a wave spring is arranged between the sleeve element 33 and the floating bearing 27.
  • a pin-shaped positioning element 85 serves as a positioning aid for the respective pressure element 87 or 31, as an anti-rotation device when tightening the central screw 83 and as a positive connection effective in the circumferential direction between the motor rotor 21 or the sleeve element 33 on the one hand and the drive shaft 17 on the other hand.
  • This positioning pin 85 extends is parallel to the axis of rotation 15 of the drive shaft 17 and is arranged at a radial distance from the axis of rotation 15.
  • the positioning pin 85 can be inserted in the axial direction into a recess which is formed jointly by the drive shaft 17 on the one hand and the motor rotor 21 or the sleeve element 33 which is non-rotatably connected to the motor rotor 21.
  • the positioning pin 85 projects axially backwards and its rear end is accommodated in a positioning receptacle which is designed as a blind hole on the side of the pressure element 87 or 31 facing the rear end of the drive shaft 17.
  • the mentioned clamping of the motor rotor 21 by means of the pressure element 87 or 31 takes place in that the pressure element 87 or 31 is connected to the axially rear end of the sleeve element 33 (cf. Fig. 1a and 1b as well as Fig. 2a and 2 B ) or with the motor rotor 21 (cf. Fig. 3a and 3b ) interacts.
  • a radial recess 101 is provided at the front end of the motor rotor 21 in the assembled state, which serves as a mark for the fitter and thus indicates the installation orientation of the motor rotor 21.
  • the drive motor is arranged completely within the pump housing 41, ie The drive motor is surrounded over its entire axial length by the pump housing 41 in the circumferential direction. At its rear end, the pump housing 41 is closed by a separate motor cover 103.
  • a special feature of the scroll vacuum pumps Fig. 2a and 2 B as well as Fig. 3a and 3b is that the engine covers 103 are identical despite different engine sizes.
  • the drive motor is smaller than that of the scroll vacuum pump Fig. 2a and 2 B .
  • the pump housing 41 accordingly has a greater radial wall thickness in this area.
  • the identical motor cover 103 can be screwed onto the front end of the motor housing 41.
  • engine cover 103 is provided with a laser engraving (not shown). This makes variable design easier than printing.
  • the motor cover 103 has a receiving space which has an axial depth which is dimensioned such that the rear end of the drive motor, which projects axially backwards out of the pump housing 41, is accommodated in this receiving space.
  • the motor rotor 21 is provided on its rear end face with cooling projections 47 which project in the axial direction.
  • cooling projections 47 are only arranged on this rear end face of the motor rotor 21 and the front end face of the motor rotor 21 does not have any such cooling projections. This can advantageously save axial installation space.
  • the cooling projections 47 are designed in such a way that they each act as a balancing weight.
  • the fixed spiral component 11 also known as a spiral housing, is screwed onto the front end of the pump housing 41 and is surrounded by a hood 105 which is also attached to the pump housing 41 , which also houses a fan 95.
  • a special feature of the scroll vacuum pump system is that a set of fans 95 of different performance is provided, but they have the same dimensions. Not only fans 95 with a supply voltage of 24V, but also those with a supply voltage of, for example, 48V or 230V are provided. This increases the variability of the system.
  • the movable spiral component 13 is connected to the eccentric section 19 via a flange bearing 91 designed as a rolling bearing.
  • a pressure washer 93 axially between the movable spiral component 13 and the eccentric section 19.
  • a shim 94 between a circumferential shoulder of the drive shaft 17 at the transition into the eccentric section 19 and the flange bearing 91. The correct alignment in the circumferential direction between the fixed spiral component 11 and the pump housing 41 is ensured by a positioning pin 97.
  • the pump housing 41 is supported on a base which is formed by an electronics housing 43.
  • the electronics housing 43 comprises a housing part 43a, which is provided on its underside with feet 107 made of rubber, which are accommodated in recesses formed on the underside and are therefore arranged recessed.
  • the electronics housings 43 of the different scroll vacuum pumps differ, among other things, with regard to a housing cover 43b which forms the lower cover of the housing part 43a. This will be discussed in more detail elsewhere.
  • Electronic equipment 45 is housed in each electronics housing 43, which includes electronic, electrical and electromechanical components that serve, among other things, to power and control the respective scroll vacuum pump.
  • the scroll vacuum pumps of the scroll vacuum pump system according to the invention also differ from one another with regard to the electronic equipment 45.
  • a special feature of the scroll vacuum pump system according to the invention is that the housing parts 43a of the different scroll vacuum pumps are identical in construction.
  • the housing parts 43a are each designed as a cast part. Despite different electronic equipment 45 for the individual scroll vacuum pumps, only one housing part 43a is therefore required.
  • the housing parts 43a differ slightly in terms of post-processing to adapt to the respective electronic equipment 45.
  • post-processing is used, for example, to adapt openings to the geometry of plugs or lines of the electronic equipment 45, which must be accommodated on the housing part or passed through a wall of the housing part .
  • post-processing can consist of the inner walls of a respective housing part 43a being partially or completely removed by milling in order to adapt the installation space available in the housing part 43a to the respective space requirements of the electronic equipment 45.
  • the pump housing 41 is screwed to the electronics housing 43.
  • FIG. 1a , 2a and 3a The area of the scroll vacuum pump on which a gas ballast valve is arranged is shown in a section BB at the bottom center.
  • the gas ballast valves 79 are designed differently for the individual scroll vacuum pumps.
  • the gas ballast valve 79 is provided with a closure cover 81.
  • the gas ballast valve 79 each has a rotary knob 82 for making settings.
  • the gas to be pumped enters the pump system comprising the two spiral components 11, 13 via the inlet flange 77 and is expelled via the outlet flange 78.
  • the two scroll vacuum pumps Fig. 1a and 1b and 2a and 2b are each provided with a three-phase asynchronous motor 21, 23 for driving the drive shaft 17.
  • the two scroll vacuum pumps differ in terms of their size, among other things.
  • the pump system with the two spiral components 11, 13 and the asynchronous motor with rotor 21 and stator 23 have the following in the scroll vacuum pump Fig. 1a and 1b a smaller diameter than the scroll vacuum pump Fig. 2a and 2 B , whereby - as already mentioned - the two drive shafts 17 are identical in construction and therefore have the same size.
  • the diameter of the drive shaft 17 in the area of the sleeve element 33 is 24 mm in this exemplary embodiment. To adjust the diameter of the drive shaft 17 in this area on the respective inner diameter of the motor rotor 21 serves - as already mentioned - the correspondingly sized sleeve element 33 pressed with the motor rotor 21.
  • the pump system also has a diameter that is larger than the pump system of the scroll vacuum pump Fig. 1a and 1b .
  • IPM Internal Permanent Magnet
  • the scroll vacuum pump system according to the invention is not limited to these electric drive motors.
  • a synchronous reluctance motor can also be provided as a rotary drive for the drive shaft 17.
  • the modular principle provided according to the invention is of particular advantage with regard to this variability desired in practice due to its versatile adaptability.
  • the balancing system for balancing the rotating system which includes in particular the drive shaft 17 and the movable spiral component 13 of the pump system, each includes a front balancing weight 29 and a rear balancing weight 31.
  • the rear balancing weight 31 is located in front of the rear bearing point 27.
  • the pressure element 87 for clamping the motor rotor 21 is designed here to be rotationally symmetrical.
  • the front balancing weight 29 is made of a material that has a greater density than the material of the rear balancing weight 31. According to one aspect of the invention, it is accordingly provided that the front balancing weight 29 is made of brass and the rear balancing weight 31 is made of steel.
  • the two balancing weights 29, 31 are made of the same material, namely steel.
  • the eccentric drive formed by the drive shaft 17 with the eccentric section 19 is located inside the pump housing 41 and is surrounded by a deformable sleeve in the form of a corrugated bellows 89.
  • the corrugated bellows 89 serves, on the one hand, to seal the eccentric drive from the suction area of the scroll vacuum pump and, on the other hand, as a rotation lock for the movable spiral component 13.
  • the corrugated bellows 89 is attached to the side of the movable spiral component 13 facing the drive.
  • the rear end of the corrugated bellows 89 is attached within the pump housing 41 to a housing base by means of screws.
  • Fig. 3c shows in sections perpendicular to the axis of rotation 15 of the scroll vacuum pump Fig. 3a and 3b in the left representation (section BB in Fig. 3b ) a view of the rear balancing weight 31 and in the right illustration (section AA in Fig. 3b ) the arrangement of a balancing section of the front balancing weight 39 in relation to the corrugated bellows 89, the flange bearing 91 and the eccentric section 19 of the drive shaft 17.
  • FIG. 3c shows that the rear balancing weight, which is screwed to the drive shaft 17 by means of the central screw 83 and clamps the motor rotor 21 in the manner explained above, expands conically radially outwards. While maintaining the basic geometry of this rear balancing weight 31, optimal adaptation to different drive motors can be achieved comparatively easily during its production.
  • the balancing section of the front balancing weight 29 shown in section is partially ring-shaped in such a way that the inner radius is adapted to the outer radius of the flange bearing 91. This makes optimal use of the available installation space.
  • the rear balancing weight 31 is shown in a side view.
  • the holes 39a for the central screw 83 and the blind hole 39b for receiving the positioning pin 85 are shown.
  • Fig. 3d shows in the two illustrations on the left the structure of the front balancing weight 39, which is designed in one piece and - as mentioned above - can be made from different materials, in particular from materials of different densities such as brass on the one hand and steel on the other.
  • FIG. 3d shows an enlarged section of the Fig. 3b the arrangement of the front balancing weight 29 in the area of the eccentric section 19 of the drive shaft 17 and the flange bearing 91.
  • the balancing weight 29 comprises three balancing sections 35, which follow one another along the axis of rotation 15 of the drive shaft 17 when installed.
  • Each balancing section 35 has a partial ring shape, with each balancing section having its opening 37 facing the drive shaft 17 and encompassing it when installed.
  • a special feature is that the balancing sections 35 differ from one another in terms of the width of their openings 37. This is in both the perspective view at the top left Fig. 3d as well as the top view at the bottom left Fig. 3d refer to.
  • a further special feature of this front balancing weight 29 is that the opening 37 of each balancing section 35 is defined in a plane E perpendicular to the axis of rotation 15 (in the installed state) by a partial circle with a constant radius along the central axis.
  • a balancing section 35 with a radius R1 comprises a section 17b of the drive shaft 17, which lies directly behind the eccentric section 19.
  • the adjacent balancing section 35 with the radius R2 includes the flange bearing 91.
  • the third balancing section 35 is located in an axial region on which heads of fastening screws for attaching the flange bearing 91 to the movable spiral component 13 are arranged. The radius of this balancing section 35 is therefore significantly larger than the radii R1, R2 of the other two balancing sections.
  • a special feature is that the two radii R1, R2 are not the same size and, moreover, the two partial circles are not arranged concentrically, as in particular the illustration at the bottom left Fig. 3d can be removed.
  • the center of the rear balancing section 35 when installed lies on the axis of rotation 15, since this balancing section includes the central section 17b of the drive shaft 17.
  • the other center of the partial circle with the larger radius R2 is accordingly outside the openings 37 of the balancing sections 35.
  • This structure of the balancing weight 29 has the advantage that, without increasing the outer diameter, the center of gravity of the central balancing section 35 comprising the flange bearing 91 can be placed further radially outwards than would be the case if the two centers coincided. In other words, a higher eccentric mass can be realized for this central balancing section 35 without increasing the external dimensions of the balancing weight 29.
  • Fig. 3e On the left shows three views of the rear balancing weight 31, which illustrate its structure.
  • the balancing weight 31 is made in one piece.
  • the balancing weight 31 comprises two balancing sections 39 which expand conically radially outwards.
  • the balancing sections 39 each expand in a V-shape, defining an opening angle of approximately 20°.
  • the balancing weight 31 includes a circular cylinder section 40, the central axis of which coincides with the axis of rotation 15 of the drive shaft 17 when installed.
  • the thickness of this circular cylinder section 40 measured along the axis of rotation 15 is significantly smaller than the thickness of each balancing section 39.
  • the balancing weight 31 with its circular cylinder section 40 faces the rear end of the drive shaft 17 when installed.
  • the scroll vacuum pump Fig. 2a and 2 B It can be seen that the balancing weight 31 is inserted with its circular cylinder section 40 into the sleeve element 33.
  • the balancing section 39 located between the circular cylinder section 40 and the outer balancing section 39 is shortened in the radial direction compared to the outer balancing section 39, but apart from this is designed to be congruent and aligned overlappingly.
  • Both balancing sections 39 expand in a V-shape, i.e. in a projection along the axis of rotation 15, the outlines of the two balancing sections 39 are delimited by two V-shaped straight lines that diverge radially outwards.
  • the two outlines of the balancing sections 39 are delimited by a radially inner circular section which has a smaller radius than a respective radially outer circular section which forms the radially outer boundary of the respective outline.
  • the rear balancing weight 31 enables simple and cost-effective production as well as easy adaptation to the respective drive motor. However, an adjustment is not absolutely necessary in every case.
  • the rear balancing weight 31 can be designed in such a way that it can be used with the asynchronous motor of a scroll vacuum pump Fig. 2a and 2 B , in particular with the sleeve element 33, as well as with the IPM motor of a scroll vacuum pump Fig. 3a and 3b can work together.
  • a manufacturing arrangement 109 is shown, in which several balancing weights 31 are arranged in a rosette-like manner on a circle. This illustrates that a plurality of balancing weights 31 can be produced by cutting from a flat material disk and subsequent individual processing.
  • Fig. 4 shows a view of the rear end of a scroll vacuum pump Fig. 1a and 1b with the motor cover 103 removed. This allows the rear end face of the motor rotor 21 to be seen, which is surrounded by part of the motor stator 23.
  • the motor rotor 21 is only provided with cooling projections 47 projecting in the axial direction on this rear end face.
  • These cooling projections 47 are designed and arranged in such a way that they act as balancing weights.
  • the balancing concept of the scroll vacuum pump Fig. 1a and 1b not only includes the front balancing weight 91 and the rear balancing weight 31 arranged in front of the second bearing point 27, but also the balancing weights 47 arranged on the rear end face of the motor rotor 21, which also serve for cooling.
  • These balancing weights or cooling projections 47 are plate-shaped and arranged in such a way that their wider side points in the circumferential direction. As a result, the cooling projections 47 can generate comparatively strong air movements in the manner of blades during operation in order to promote heat dissipation.
  • the Fig. 5a shows the electronics housing 43 of the scroll vacuum pump Fig. 3a and 3b , whose drive motor is a single-phase IPM motor with an operating voltage of 24V/DC.
  • the electronic equipment 45 includes a Sub-D connector, a stand-by switch, an on and off switch and USB ports.
  • Fig. 5b shows the electronics housing 43 of the scroll vacuum pumps Fig. 1a and 1b as well as Fig. 2a and 2 B , each of which has a three-phase asynchronous motor as a drive motor. These asynchronous motors can be operated with an operating voltage of up to 480V/AC.
  • the three-phase asynchronous motors require a higher protection class (especially IP44) than the single-phase IPM motor, for which a lower protection class (especially IP40) is sufficient.
  • IP44 higher protection class
  • IP40 lower protection class
  • a housing cover 43b made, for example, of aluminum without its own seal is sufficient as a cover.
  • a recessed arrangement is provided for the housing cover 43b in the housing part 43a, with surfaces set back inwards relative to the underside of a circumferential outer wall serving as a support for the housing cover 43b and each being provided with a sealing material. Due to its recessed arrangement, the housing cover 43b cannot be seen from the side.
  • the housing cover 43b made for example from aluminum, is placed here on the underside of the housing part 43a.
  • the underside is - like the recessed contact surfaces in the housing part 43a Fig. 5a - provided with a sealing material, in addition the inside of the housing cover 43b is completely covered with a sealing material made of cellular rubber, for example.
  • the electronics housings 43 also differ in the respective electronics equipment 45.
  • the electronics housing 43 is according to Fig. 5a provided with a connection for a cold device plug 44, to which a power supply can be connected to supply power to the scroll vacuum pump.
  • the electronics housing 43 is in accordance Fig. 5b provided with another power plug 44, for example a Harting type power plug.
  • the electronics housing 43 differs accordingly Fig. 5b from the electronics housing 43 according to Fig. 5a due to the lack of the Sub-D plug, the stand-by switch, the on/off switch and the USB ports.
  • the openings provided for this in the housing component 43a are covered, for example with a film. This allows for the electronics housing 43 according to Fig. 5b an IP protection class can be made possible.
  • Fig. 6a shows an overview of various views of a fixed spiral component 11 of a scroll vacuum pump according to the invention, also known as a spiral housing.
  • the three top representations in Fig. 6a are enlarged in Fig. 6b shown, whereas the three lower representations of the Fig. 6a enlarged in Fig. 6c are shown.
  • FIG. 7a Shows accordingly Fig. 7a an overview with various representations of a movable spiral component 13, also known as an orbiter, for the spiral casing 11 according to Fig. 6a , 6b and 6c .
  • the fixed spiral component 11 comprises a spiral arrangement with spiral walls 49 and spiral base 51 as well as a carrier 53 for the spiral arrangement.
  • the two radially outer spiral walls 49 lie on concentric circles and are interrupted in the circumferential direction. This creates a parallel pumping structure made up of parallel pumping channels formed by the relevant spiral grooves 50, which merge into a helical pump channel which is formed by a helically extending spiral groove 50 and is delimited by a helically extending spiral wall 49.
  • the second part-circular spiral wall 49 viewed from the radial outside, has a greater thickness WD2 than the spiral spiral wall 49, which has a wall thickness WD1 in its radially inner course.
  • WD2 3.71 mm
  • WD1 3.47 mm.
  • the stability of the circumferentially interrupted circular spiral wall 49 is increased by this increased thickness WD2.
  • the spiral walls 49 are each provided at their end facing away from the spiral base 51 with an elongated sealing element 75, which is also referred to as a tip seal.
  • the sealing element 75 for the most radially outer spiral wall 49 has a comparatively long length, since it is continued to the further radially inner, spiral-shaped spiral wall 49 and to the radially inner end of this spiral wall 49, located in the area of the central axis of the spiral housing 11 suffices.
  • a special feature of this long sealing element 75 is that it is located radially on the outside in the part-circular shape Spiral wall 49 is guided to the end 76 of this spiral wall 49, which extends to a gas inlet 67 (cf. Fig. 7a and 7b ) of the pump system.
  • the gas pumped from radially outside to radially inside along the spiral grooves 50 can pass from the spiral grooves 50 via a central inlet opening 55 and via two bypass openings 61a, 63a into a channel system of the fixed spiral component 11, described in more detail below.
  • These openings 55, 61a, 63a are each formed in the spiral base 51.
  • the two bypass openings 61a, 63a are arranged offset from one another in the circumferential direction and are located on the same radius with respect to a central axis of the spiral housing 11.
  • openings 56a, 61c, 63c Aligned with these openings 55, 61a, 63a are openings 56a, 61c, 63c formed on the side of the carrier 53 facing away from the spiral arrangement. These openings 56a, 61c, 63c serve to accommodate valves, which will be discussed in more detail elsewhere.
  • an axial outlet opening 65 is formed radially further out, which can either be closed or form an axial gas outlet of the spiral housing 11 and thus of the pumping system of the scroll vacuum pump.
  • the openings mentioned communicate with a channel system of the spiral casing 11, which is shown on the left and right in the illustrations Fig. 6c is shown.
  • the central inlet opening 55 leads to an outlet channel 59 designed as a straight bore, which opens at the radial outlet 57 of the spiral housing 11.
  • the one bypass opening 63a leads directly to this outlet channel 59.
  • the channel section leading from there to the radial outlet 57 is therefore not only a section of the outlet channel 59, but also forms a bypass channel 63 for gas originating from the bypass opening 63a.
  • bypass channel 61 leads from the further bypass opening 61c to the outlet channel 59.
  • This bypass channel 61 is part of a straight bore 64, which is introduced to produce the bypass channel 61.
  • This bore 64 and the outlet channel 69 run at an angle to one another, which corresponds to the angular offset of the two bypass openings 61c, 63c in the circumferential direction.
  • the groove depth NT is comparatively large.
  • the groove depth is 50 mm.
  • the ratios are 3.93 and 3.87, respectively.
  • a groove depth of 52 mm can be provided. This then results in even larger ratios of groove depth to groove width.
  • the movable spiral component 13 also includes a spiral arrangement with spiral walls 69 and spiral base 71 as well as a plate-shaped support 73 for the spiral arrangement.
  • the two radially outer spiral walls 69 run on concentric circles and are interrupted in the circumferential direction in the area of a gas inlet 67.
  • a radially inner spiral wall 69 runs spirally.
  • the spiral walls 69 are in turn provided with a sealing element 75 (tip seal) at their end facing away from the spiral base 71.
  • these spiral walls 69 have a thickness WD2, which is greater than the thickness WD1 of the spiral spiral wall 69.
  • WD2 3.71 mm
  • WD1 3.46 mm.
  • the radially outer spiral groove 70 between the two part-circular spiral walls 69 has a groove width NB2, while the spiral-shaped spiral groove 70 delimited by the spiral spiral wall 69 has a groove width NB1.
  • NB2 12.92 mm
  • NB1 12.58 mm.
  • NT 50 mm
  • a groove depth of 52 mm can be provided. This then results in even larger ratios of groove depth to groove width.
  • Fig. 8a shows an overview of various views of the spiral casing Fig. 6a , 6b and 6c and the orbiter from Fig. 7a and 7b comprehensive pumping system of the scroll vacuum pump Fig. 3a and 3b .
  • the pumping system of the scroll vacuum pumps Fig. 1a and 1b as well as Fig. 2a and 2 B is trained accordingly.
  • Fig. 8b shows an enlarged view at the top left (section AA) of Fig. 8a .
  • Fig. 8c shows an enlarged view at the top right (section BB) of Fig. 8a .
  • Fig. 8d shows an enlarged view at the bottom right (section CC) of Fig. 8a .
  • Fig. 8b the interaction of the nested spiral walls 49, 69 can be seen, which partially enclose crescent or sickle-shaped volumes.
  • gas flows through the gas inlet 67 which is in Fig. 8b is only indicated with regard to its position (cf. for example Fig. 7b ), inflowing gas to the center of the pump system and via the inlet opening 55 into the outlet channel 59 when the outlet valve 56 (cf. e.g Fig. 8d ) opens at sufficiently high pressure.
  • the pumped gas arrives via the outlet channel 59 to the radial outlet 57 and thus to the outlet flange 78, if - as in Fig. 8d shown - the axial outlet opening 65 is closed by means of a plug 66.
  • the radial outlet 57 can be closed and the plug 66 removed, thereby creating an axial outlet from the pumping system.
  • a special feature of this arrangement is that several - here two - bypass channels 61, 63 are provided, each with exactly one pressure relief valve 61b or 63b. This ensures that the scroll vacuum pumps according to the invention have a relatively high pumping speed with a comparatively low power consumption.
  • Fig. 9 Fig. 12 shows a concept referred to as a tapered gap design that may be incorporated into the scroll vacuum pumps of the present disclosure in the region where the helical scroll wall 49 of the fixed scroll member cooperates with the helical scroll wall 69 of the movable scroll member.
  • the numerical values indicate the radial distance (in mm) between the wall surfaces facing each other, i.e. the size of the radial gap between the wall surfaces.
  • the scroll vacuum pump is not in operation, i.e. the drive shaft does not rotate and the orbiter and thus its spiral wall 69 are stationary.
  • the volute and orbiter are at ambient temperature.
  • the special feature described here is that in this initial state the movable spiral wall 69 is arranged in such a way that the gaps between the movable spiral wall 69 and the fixed spiral walls 49 each have a conical course in the pumping direction P.
  • the course of the movable spiral wall 69 is selected such that when the scroll vacuum pump is running, i.e. during operation, according to state II, the deformation of the movable spiral wall 69 reduces the conicity of the gap, as can be seen from the distance values.
  • the movable spiral wall 69 runs almost parallel to the two fixed spiral walls 49. The deformation of the movable spiral wall 69 results from the higher temperatures and the movement of the orbiter.
  • Fig. 10 shows various external views of a scroll vacuum pump Fig. 3a and 3b .
  • the pump housing 41 sits on the electronics housing 43 and is closed on the motor side by the motor cover 103 and on the opposite side by the hood 105.
  • the outlet flange 78 and the inlet flange 77 are also shown.
  • this pump housing 41 The special feature of this pump housing 41 is that the inlet flange 77, also known as the suction flange, is set back from the highest point of the pump housing 41 at this axial position. This saves overall height. This is particularly advantageous when an alternative flange, not shown, which is formed by an angle flange is used.
  • Such a recessed arrangement of the inlet flange 77 is also the case with the scroll vacuum pump Fig. 2a and 2 B intended.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP23190388.1A 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales Pending EP4253720A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720A2 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23190388.1A EP4253720A2 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Publications (1)

Publication Number Publication Date
EP4253720A2 true EP4253720A2 (fr) 2023-10-04

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EP23190388.1A Pending EP4253720A2 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3153708A1 (fr) 2015-10-06 2017-04-12 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
EP3617511A2 (fr) 2019-10-07 2020-03-04 Pfeiffer Vacuum Gmbh Pompes à spirales et procédé de fabrication pour des telles pompes
EP3647599A2 (fr) 2019-10-07 2020-05-06 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3153708A1 (fr) 2015-10-06 2017-04-12 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
EP3617511A2 (fr) 2019-10-07 2020-03-04 Pfeiffer Vacuum Gmbh Pompes à spirales et procédé de fabrication pour des telles pompes
EP3647599A2 (fr) 2019-10-07 2020-05-06 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

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