EP3647599A2 - Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes - Google Patents

Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes Download PDF

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Publication number
EP3647599A2
EP3647599A2 EP19201749.9A EP19201749A EP3647599A2 EP 3647599 A2 EP3647599 A2 EP 3647599A2 EP 19201749 A EP19201749 A EP 19201749A EP 3647599 A2 EP3647599 A2 EP 3647599A2
Authority
EP
European Patent Office
Prior art keywords
pump
scroll
component
scroll pump
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19201749.9A
Other languages
German (de)
English (en)
Other versions
EP3647599A3 (fr
EP3647599B1 (fr
Inventor
Michael Willig
Jan Hofmann
Jonas Becker
Gernot Bernhardt
Verena Wangorsch
Stefan Kallenborn
Wolfgang Söhngen
Heiko Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=68210710&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3647599(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to EP19201749.9A priority Critical patent/EP3647599B1/fr
Priority to EP20200624.3A priority patent/EP3754200B1/fr
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3647599A2 publication Critical patent/EP3647599A2/fr
Publication of EP3647599A3 publication Critical patent/EP3647599A3/fr
Priority to JP2020160698A priority patent/JP7220692B2/ja
Priority to EP22156933.8A priority patent/EP3974655B1/fr
Priority to EP22199874.3A priority patent/EP4095387A3/fr
Priority to EP20198997.7A priority patent/EP3739166B1/fr
Priority to US17/063,912 priority patent/US11773849B2/en
Publication of EP3647599B1 publication Critical patent/EP3647599B1/fr
Application granted granted Critical
Priority to JP2022178824A priority patent/JP2023025010A/ja
Priority to US18/449,111 priority patent/US20230383750A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/605—Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Definitions

  • the present application relates to the improvement of vacuum pumps, in particular scroll pumps, and manufacturing processes for such.
  • a vacuum pump in particular a scroll pump, is assumed with an electronics housing in which one or more electronics components are arranged. It is an object of the invention to provide good heat dissipation from the electronic components or good cooling. This object is achieved by a vacuum pump according to claim 1, and in particular in that a separate chamber is provided in the electronics housing for at least one electronics component, in which the electronics component is cast.
  • the chamber also shields the electronic component, in particular against heat radiation and electromagnetic influences.
  • the separate chamber allows the use of relatively little potting material, which is often expensive.
  • the electronics housing can preferably be formed from metal.
  • the potting material used for potting is particularly heat-conducting and / or electrically insulating.
  • several separate chambers can also be provided.
  • At least one electronic component is cast in each of the several chambers.
  • various Reliably separate electronic components especially shield them from one another.
  • advantageous heat dissipation is made possible.
  • an electronics housing can, for example, be designed identically for different pumps, in particular a series, separate chambers being provided for different electronics components which are or are not installed in the chambers depending on the type of pump.
  • at least one separate chamber ready in which an electronic component can be installed, in particular cast, which is used in another type of pump.
  • a scroll pump is assumed. It is a task to simplify the use of the scroll pump in a vacuum system. This object is achieved by a scroll pump according to claim 3 and in particular in that the pump comprises an integrated pressure sensor.
  • a vacuum system usually already includes a pressure sensor, for example in a vacuum chamber.
  • a pressure sensor for example in a vacuum chamber.
  • the integrated pressure sensor enables the scroll pump to monitor itself and does not have to be carried out by a process control system.
  • a state of wear of the pump can be monitored depending on a measured pressure.
  • the integrated pressure sensor can also ensure increased operational safety. For example, if the pressure in the scroll pump is too high, the high vacuum pump can be switched off and / or intermediate valves can be closed or similar measures can be taken. The high-pressure vacuum pump can thus be reliably protected against operation when the pressure is too high.
  • the pressure sensor can preferably be integrated in a control of the scroll pump and / or a vacuum system.
  • the scroll pump or the vacuum system can thus be better controlled or regulated on the basis of the now known pressure in the scroll pump.
  • the pressure sensor is provided for measuring a suction pressure of the pump or a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section. Both enable an even more precise monitoring of the pumping process and a state of wear of the pump, in particular a sealing element, such as a tip seal, or the spiral walls.
  • the pressure sensor is screwed into a component of the scroll pump.
  • a component of the scroll pump instead of the integrated pressure sensor, for example, a blind plug can simply be provided if an integrated pressure sensor is not absolutely necessary for the process of the user. Nevertheless, an integrated pressure sensor can be easily retrofitted in this case.
  • the component into which the pressure sensor is screwed can be, for example, a housing element and / or a fixed spiral component. In particular, the pressure sensor can be screwed axially into a fixed spiral component.
  • the pressure sensor is arranged in a cooling air flow of a cooling device, for example a fan, of the pump.
  • the pressure sensor can thus be cooled directly in an advantageous manner, which improves its service life and measuring accuracy.
  • the pressure sensor can preferably be arranged at least essentially at the beginning of the cooling air flow, namely adjacent to a fan and / or within an air guiding hood.
  • pressure sensors can also be provided, which are integrated in the scroll pump. In this way, control and wear monitoring in particular can be further improved.
  • a method for assembling a scroll pump which comprises an eccentric shaft for eccentrically exciting a movable spiral component of the pump, in which a plurality of counterweights of different types are each provided for attachment to an eccentric shaft of a scroll pump of a specific type . It is a task to be able to carry out the assembly particularly reliably.
  • This object is achieved by a method according to claim 5, and in particular in that the eccentric shaft, the counterweights and / or a further component of the pump, for example a pump housing, are dimensioned such that only a certain type of counterweight at a certain fastening position can be mounted on the eccentric shaft.
  • not mountable encompasses that a balance weight can be attached, but a further assembly, for example inserting the shaft into a pump housing, is not completely possible.
  • the fitter notices that something is wrong because he cannot complete the assembly. This ensures correct assembly in a particularly simple manner.
  • “Not mountable” can also mean that the counterweight cannot lie flat on the eccentric shaft with a contact surface provided on the counterweight, for example because this is prevented by a shoulder on the shaft.
  • a counterweight of the wrong type cannot be fully brought into contact with the eccentric shaft.
  • an eccentric shaft with a counterweight of the wrong type installed cannot be fully inserted into a pump housing of the pump.
  • the eccentric shaft and / or the further component collide with balance weights of at least one first type during an attempted assembly.
  • the first type is a wrong type for the eccentric shaft in question.
  • the eccentric shaft and / or the further component has a projection and / or shoulder that collides with balance weights of at least one first type during an attempted assembly. This prevents incorrect assembly in a particularly simple manner.
  • a fourth aspect of the invention is based on a vacuum pump, in particular a scroll pump, with a pump body, the inside of which delimits a pump chamber and on the outside of which a valve for controlling the supply of ballast gas into the pump chamber is arranged, the valve having an actuating handle which is rotatably connected to at least one fastening screw with a static element of the valve and / or with a rotatable element of the valve, the fastening screw being connected by a hole in the operating handle is screwed into the static element or the rotatable element. It is an object of the invention to extend the service life and / or a maintenance interval of the valve and / or at least one of its components. This object is achieved by a vacuum pump according to claim 7, and in particular in that a cover is provided which closes the bore.
  • the cover prevents or at least reduces the penetration of dirt into the bore and ultimately into function-sensitive areas.
  • the valve can have, for example, an, in particular axially, pressed O-ring as a sealant.
  • O-ring As a sealant.
  • the pump body can be, for example, a static spiral component and / or a housing component.
  • the cover can be inserted into the operating handle.
  • the cover can be inserted into the or a bore.
  • the cover can also be held by an interference fit on the actuating handle, in particular in the bore.
  • the cover can have, for example, one or more projections, for example in the form of a pin.
  • the cover is inserted in at least two bores and / or that the cover closes at least one bore into which it is not inserted.
  • the actuating handle has a base element made of metal and, at least in a region that can be touched for manual actuation, a plastic section. This ensures good corrosion resistance with low manufacturing costs. Furthermore, the plastic section remains cooler due to the limited heat conduction compared to metal or is easier to operate.
  • the base element can be made of stainless steel, for example. This can be overmoulded with plastic, for example.
  • the base element can e.g. include a check valve and / or a connecting thread.
  • a check valve can be arranged integrated.
  • the gas ballast valve can be designed in particular in two stages.
  • an inlet and / or a connection for the ballast gas can be provided in the actuating handle.
  • a fifth aspect of the invention is based on a vacuum pump, in particular a scroll pump, with a fan which can be controlled in terms of its speed for cooling the pump. It is a task to make the cooling particularly needs-based and / or to reduce the noise emission of the fan.
  • a vacuum pump according to claim 9 and in particular in that it has a temperature sensor and a control device which is designed to regulate the speed of the fan as a function of a power consumption of a drive of the pump and a temperature measured by the temperature sensor .
  • the measured temperature can preferably be a temperature in the pump, for example a pump component and / or a space in the pump, for example a suction or pumping space.
  • the control is dependent on a temperature of a motor, a motor winding, measured by the temperature sensor, a drive or power electronics, a pump body and / or a housing of the pump.
  • these temperature values can be measured, for example, by a plurality of temperature sensors, or a number of temperature sensors can generally be provided.
  • a first threshold value of the temperature is defined, the regulation taking place only at a measured temperature above the first threshold value and / or below the first threshold value the speed of the fan is kept constant at zero or a minimum speed.
  • the noise emission of the fan can be kept low when the cooling requirement is low, namely when the measured temperature is low. It also allows the pump to warm up quickly to a desired operating temperature after being switched on. This is advantageous, for example, because the gap dimensions between the spirals are dependent on the thermal expansion of the components and are therefore only optimal within certain operating temperature ranges.
  • the embodiment thus enables an advantageous pump performance to be achieved quickly.
  • a rapid increase in temperature improves compatibility with condensing media.
  • the first threshold value can preferably be at least 40 ° C. and / or at most 60 ° C., in particular approximately 50 ° C.
  • the minimum speed is generally lower than a maximum speed, in particular significantly lower, is in particular less than 30%, in particular less than 20%, in particular less than 10% of the maximum speed.
  • a second threshold value of the temperature is defined, the fan speed being kept constant at a maximum speed at a measured temperature above the second threshold value. This ensures in a simple manner at high temperatures that that the maximum cooling capacity is reached. The cooling can thus be carried out in a simple manner as required.
  • the embodiment with the second threshold value is independent of the embodiment with the first threshold value and vice versa. However, these can advantageously be combined.
  • the term "second" threshold value is only chosen for ease of reference and does not require that a "first" threshold value is also defined.
  • the threshold values described above can be different in the event that a plurality of temperature sensors are provided, for example for the plurality of temperature sensors.
  • the control device can be designed, for example, to reduce a drive power of the pump as a function of a temperature of the vacuum pump measured by a temperature sensor. This function can also be called "derating”. It can be provided, for example, that the fan is set to its maximum speed when a derating condition is met and / or when the pump is in a derating state, ie when the drive power is reduced.
  • the speed of the fan can preferably be controlled by means of pulse width modulation (PWM).
  • PWM pulse width modulation
  • a maximum speed of the fan can be adjustable, for example. For example, for increased water vapor compatibility, it may be advantageous to reduce the maximum speed of the fan.
  • a sixth aspect of the invention is based on a vacuum pump, preferably a scroll pump, comprising an electrically driven fan and an air guide hood. It is an object of the invention to provide an especially reliable electrical connection of the fan to a supply connection, in particular for reliable to manufacture for a long time.
  • This object is achieved by a vacuum pump according to claim 12, and in particular in that a conductor, preferably a cable, leads from the fan, preferably through the air guide hood, to a supply connection for the fan, the conductor via a, preferably detachable, electrical connector , preferably a plug, is connected to the supply connection, the connector being separated from an air flow path defined by the air guide hood by means of a partition.
  • the connector can preferably be arranged at least partially within the air guide hood.
  • the partition can be connected, for example, in one piece to the air guide hood.
  • Ambient air which can also include dirt and dusts, is sucked in via the fan and directed along a defined air flow path.
  • the partition wall prevents the sucked-in impurities or dusts from being able to penetrate into the connector and, in particular, subsequently into an electronics housing of the pump. Rather, the partition wall has the effect that the sucked-in air is only guided past the connector at a distance.
  • the fan can preferably be arranged on the air guide hood, in particular attached to it.
  • the connector can preferably be designed to be detachable.
  • the conductor in particular the cable, is guided by the connector through a recess in the partition.
  • the recess can be, for example, a notch, which can preferably be V-shaped.
  • the recess is arranged offset to the connector in the circumferential direction. This extends a path from the recess to the connector, so that those passing through the recess Contaminants have to travel a long way to the connector, reducing the likelihood that they will reach the connector. This creates a labyrinth effect in a simple manner.
  • a seventh aspect of the invention is based on a scroll pump comprising a spiral component which is stationary during operation and which is detachably connected to a housing element of the pump. It is an object of the invention to simplify the detachment of the spiral component from the housing element. This object is achieved by a scroll pump according to claim 14, and in particular in that at least one forcing thread is provided on the spiral component and / or on the housing element for detaching the spiral component from the housing element, preferably with two radially opposing arranged forcing threads.
  • the spiral component can be pressed off the housing element in a simple and defined manner and thus released.
  • a flat surface or a counterbore of the other component can preferably rest on or be assigned to the pull-off thread.
  • forcing threads can also be provided, which can preferably be uniformly distributed over the circumference and / or arranged radially opposite one another. This allows the spiral component to be released particularly evenly. For example, tilting can be avoided, as it could occur, for example, without a pull-off thread when loosening a spiral component which rests on the housing element with a transition fit. Any existing sealants could also tilt or block. Due to the, especially several, extraction threads, these can Problems of uneven loading can be avoided or at least reduced.
  • a component adjacent to the spiral component and / or to the housing element is designed such that it would collide with a screw head of a forcing screw screwed into the forcing thread, so that the component would not be completely mountable. In this way, incorrect assembly can be avoided in a simple manner, since it is ensured that no screw is screwed into the forcing thread, which could prevent, for example, correct positioning of the spiral component on the housing element.
  • the component can in particular be an air guide hood.
  • a projection and / or a dome can be provided for the collision with the screw head.
  • the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
  • This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
  • the second housing element 24 therefore forms a fixed spiral component of the scroll pump 20.
  • the spiral wall 26 acts with a spiral wall 28 a movable spiral component 30 together, the movable spiral component 30 being eccentrically excited to generate a pumping action via an eccentric shaft 32.
  • a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • On the movable scroll member 30 is also in for sealing Fig. 1 attached to the left-hand end of a corrugated bellows 42, the right-hand end of which is attached to the first housing element 22.
  • the left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
  • the scroll pump 20 comprises a fan 44 for generating a cooling air flow.
  • An air guide hood 46 is provided for this cooling air flow, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped such that the cooling air flow essentially flows around the entire pump housing and thus achieves good cooling performance.
  • the scroll pump 20 further comprises an electronics housing 48, in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base of the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible, through which an air flow generated by the fan 44 is guided along the first housing element 22 and also along the electronics housing 48, so that both are effectively cooled will.
  • the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be cast in these chambers 52 and are therefore advantageously shielded. When potting the electronic components, it is preferred to use the least possible amount of potting material. For example, the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
  • the chambers 52 can preferably be designed such that different variants of the electronic components, in particular different assembly variants of a circuit board, can be arranged and / or cast in the electronics housing 48. For certain variants, individual chambers 52 can also remain empty, that is to say have no electronic components. So a so-called modular system for different pump types can be easily realized.
  • the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
  • a plurality of walls or ribs 54 are formed at the rear of the electronics housing 48, which define a plurality of channels 50 for guiding a cooling air flow.
  • the chambers 52 also enable particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • FIG. 3 The scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden, so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the fixed spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
  • the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus cools the fixed spiral component 24 particularly effective.
  • the cooling air flow first flows around the fixed spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the pump-active area of the pump 20 generates a lot of heat due to the compression during operation and is therefore cooled here primarily .
  • the pump 20 comprises a pressure sensor 60 integrated in it. This is arranged inside the air guide hood 46 and screwed into the fixed spiral component 24.
  • the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection which is only partially shown.
  • the pressure sensor 60 is integrated in the control of the scroll pump 20.
  • the motor 34 shown in Fig. 1 visible can be controlled as a function of a pressure measured by the pressure sensor 60.
  • the high vacuum pump can only be switched on, for example, if the pressure sensor 60 measures a sufficiently low pressure. In this way, the high vacuum pump can be protected from damage.
  • Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional representation.
  • a channel 62 is provided for the pressure sensor 60, which here opens into a non-pump-active outer area between the spiral walls 26 and 28 of the fixed or movable spiral components 24 and 30.
  • the pressure sensor thus measures a suction pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in a pump-active area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 allows, for example, the determination of a compression, in particular a detection of a state of wear of the pump-active components, in particular a sealing element 64, also referred to as a tip seal.
  • the measured suction pressure can also be used to regulate the pump (including pump speed).
  • an intake pressure can be specified by the software and an intake pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, a wear-related pressure increase can be compensated for by increasing the speed. A Tip Seal change can thus be postponed or longer change intervals can be realized.
  • the data of the pressure sensor 60 can therefore generally e.g. for wear determination, for situational control of the pump, for process control, etc.
  • pressure sensor 60 may optionally be provided.
  • a blind plug can be provided to close the channel 62.
  • a pressure sensor 60 can then be retrofitted if necessary.
  • the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44. This also advantageously cools it. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently an inexpensive sensor can be used.
  • the pressure sensor 60 is in particular arranged such that the outer dimensions of the pump 20 are not enlarged by it and the pump 20 consequently remains compact.
  • the movable scroll member 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly well visible.
  • the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
  • FIG Fig. 6 One side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
  • the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in FIG Fig. 1 are visible.
  • three holding projections 68 are provided which are spaced apart over the circumference of the base plate 66 and distributed evenly over the circumference.
  • the holding projections 68 extend radially outwards.
  • the holding projections 68 in particular all have the same radial height.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the holding projections 68.
  • This first intermediate section 70 has a greater radial height than a second intermediate section 72 and as a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the spiral wall 28 are preferably produced from a solid material together in an exciting manner, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly onto the holding projections 68.
  • the in Fig. 6 shown side of the base plate 66 are processed, in particular the mounting recesses will.
  • the machining of the spiral wall 28 from the solid material can also take place within the scope of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three holding projections 68.
  • the clamping device 76 has a continuous recess 80 through which a tool access to the spiral component 30, in particular to that in FIG Fig. 6 shown side of the same is enabled. Machining operations can thus take place from both sides during a clamping, in particular at least one finishing of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected such that no critical deformations of the spiral component 30 take place.
  • the three holding projections 68 are preferably selected such that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not enlarged. Thus, on the one hand material and on the other machining volume can be saved.
  • the holding projections 68 are in particular designed and / or arranged at such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the bellows 42 is preferably not equal to the number of retaining projections 68 on the movable spiral component 30.
  • Fig. 1 On the eccentric shaft 32 Fig. 1 two balance weights 82 are attached to compensate for an unbalance of the excited system.
  • the area of in Fig. 1 right-hand counterweight 82 is in Fig. 8 shown enlarged.
  • the balance weight 82 is screwed onto the eccentric shaft 32.
  • FIG. 9 A similar image section is in Fig. 9 shown for another scroll pump, which is preferably the same series of the pump 20 of the Fig. 1 listened to.
  • the the Fig. 9 the underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
  • the eccentric shafts 32, the counterweights 82 and the housing elements 22 are dimensioned such that only a certain type of the two types of counterweights 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown in each case.
  • the balance weights 82 are in the 8 and 9 dimensioned together with certain dimensions of the space provided for them to illustrate that the counterweight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the dimensions given are given purely by way of example.
  • Fig. 8 So in Fig. 8 a distance between a mounting hole 84 and a shaft shoulder 86 9.7 mm.
  • the balance weight 82 of the Fig. 8 is shorter in the corresponding direction, namely 9 mm long, so it can be easily installed.
  • the balance weight 82 of the Fig. 9 has a longitudinal extension of 11 mm measured from the mounting hole.
  • the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted assembly or because the balance weight 82 thus Fig. 9 not fully in contact with the eccentric shaft 82 Fig. 8 can be brought. Because the counterweight 82 of the Fig.
  • Fig. 9 is a distance in the longitudinal direction between the mounting hole 84 and a housing shoulder 88 17.5 mm.
  • the balance weight 82 of the Fig. 8 with its extension of 21.3 mm would 32 when inserting the eccentric shaft Fig. 9 collide with the housing shoulder 88 so that a complete assembly would not be possible. Incorrect assembly is possible at first, but is reliably recognized.
  • the balance weight 82 is mounted rotated about the axis of the fastening bore 84 Fig. 8 on the eccentric shaft 32 Fig. 9 the 21.3 mm extension would collide with the shaft shoulder 86, which is only 13.7 mm from the mounting hole 84.
  • the counterweights 82 are generally designed in such a way that a confusion of the counterweight with those of other sizes is avoided during assembly and / or service.
  • the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed in particular in such a way that due to the adjacent paragraphs on the shaft, the positions of the thread and through hole of the counterweight as well as paragraphs within the housing, an assembly of the wrong counterweight is prevented.
  • a gas ballast valve 90 of the scroll pump 20 is shown. This is also in the overall representation of the pump 20 in Fig. 3 visible and arranged on the fixed spiral component 24.
  • the gas ballast valve 90 comprises an actuating handle 92. This comprises a plastic body 94 and a base element 96, which is preferably made of stainless steel is made.
  • the base element 96 comprises a through bore 98 which is provided on the one hand for the connection and introduction of a ballast gas and on the other hand comprises a check valve 100.
  • the bore 98 is also closed in the illustrations by means of a plug 102.
  • a filter can also be provided, for example, the ballast gas preferably being air and in particular entering the valve 90 directly via the filter.
  • the actuating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 by means of a fastening screw (not shown) extending through a bore 110.
  • valve 90 To actuate the valve 90, a torque manually applied to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated.
  • bore 98 communicates with an interior of the housing.
  • Three switching positions are provided for the valve 90, namely that in FIG Fig. 10 shown, which is a locking position, and a position rotated to the right and to the left, in which the bore 98 is in communication with different areas of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112.
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, reaches the surface of an O-ring, there is a risk of early failure.
  • the cover 112 prevents dirt and the like from entering the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin (not shown) for each bore 108, with which the cover 112 is held in the bores 108.
  • the bores 108 and 110 and the fastening screws arranged therein are thus protected from contamination.
  • the fastening screw (not shown) arranged in the bore 110 and which permits a rotary movement the entry of dirt into the valve mechanism can be effectively minimized and the service life of the valve can be improved.
  • the plastic handle with overmolded stainless steel base ensures good corrosion resistance with low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • the fan 44 such as in the Fig. 1 and 3rd speed control is preferably provided.
  • the fan is controlled by means of PWM depending on the power consumption and temperature of the power module, which is accommodated in the electronics housing 48, for example.
  • the speed is set in the same way as the power consumption. However, the control is only permitted from a module temperature of 50 ° C. If the pump gets into the temperature range of a possible derating (temperature-related performance reduction), the max. Fan speed controlled. This regulation enables a minimum noise level to be achieved when the pump is cold, a low noise level at the end pressure or at low load - corresponding to the pump noise - to ensure that the pump is optimally cooled while the noise level is low, and before a temperature-related power reduction the max. Cooling performance is ensured.
  • the maximum fan speed can be adjustable, in particular depending on the situation. For example, it can be useful to reduce the maximum fan speed for high water vapor tolerance.
  • FIG. 12 is the movable scroll member 30 partially and opposite Fig. 5 shown enlarged.
  • the spiral wall 28 has, at its end facing away from the base plate 66 and toward a base plate of the solid spiral component 24 (not shown here), a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is, for example, in Fig. 4 clearly visible.
  • the groove 114 is delimited outwards and inwards by two opposite side walls, namely by an inner side wall 116 and an outer side wall 118.
  • the outer side wall 118 is made thicker than the inner side wall 116 in the first spiral section 120 and thicker than both side walls 116 and 118 in another, second spiral section 122.
  • the first spiral section 120 extends from FIG Fig. 12 indicated location up to the outer end of the spiral wall 28, as it is also for example in Fig. 5 is indicated.
  • the first spiral section 120 extends here by way of example over approximately 163 °.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is at least partially, in particular completely, arranged in a non-pumping region of the spiral wall 28.
  • the first spiral section 120 can at least substantially completely fill the non-pumping region of the spiral wall 28.
  • the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70.
  • the movable spiral component should generally preferably have a low weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, there are smaller pump dimensions (significant outside diameter). As a result, the side walls of the Tip Seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is, for example, at most 0.17. Due to the tip seal groove, however, the spiral wall tip is very sensitive to bumps during handling, such as when installing or changing the tip seal. By light impacts, e.g. B. also during transport, the side wall of the groove can be pressed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular a thickening of the spiral wall that is local to the outside.
  • This area is preferably not pump-active and can therefore be manufactured with a greater tolerance. Damage is significantly reduced by the one-sided thickening of the, in particular the last half, turn.
  • a thickening of the spiral wall is preferably not necessary, since the wall is protected by protruding elements of the component.
  • Air guide hood 46 shown defines an air flow as indicated by a dashed arrow 124.
  • the fan 44 is connected to a control device in the electronics housing 48 via a cable, not shown, which runs through the air guiding hood 46 and via a plug connection.
  • This comprises a socket 126 and a plug 128.
  • the socket 126 is mounted on the electronics housing 48 and / or is fastened to a circuit board arranged in the electronics housing 48.
  • the socket 126 is, for example, also in the Fig. 2 and 3rd visible.
  • the plug 128 is connected to the fan 44 via the cable, not shown.
  • the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
  • the air flow 124 which can contain dusts or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
  • the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the dirt gets into the electronics housing 48 through the opening provided for the socket 126 and into the control device and / or power electronics.
  • the air dome 46 is in Fig. 14 shown separately and in perspective. Among other things, the partition 130 with the space defined behind it and intended for the plug 128 is visible.
  • the dividing wall 130 comprises a recess 132 designed here as a V-shaped notch for the passage of a cable from the plug 128 to the fan 44.
  • the partition 130 ensures that the air drawn in does not reach the electronics via the opening of the connector 126, 128.
  • the cable of the fan is led laterally through the partition 130 through the V-shaped notch 132.
  • the notch 132 has a lateral offset to the connector 126, 128, which creates a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 can be achieved.
  • the air duct into the channel 50 between the electronics housing 48 and the pump housing 22 is also improved by a partition 130 within the air guide hood 46. There is less turbulence and back pressure for the fan 44.
  • the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional view.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134.
  • a seal by means of an O-ring 136 is provided.
  • the transition fit 134 also serves, for example, to center the second housing element 24 relative to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It may happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can also preferably be provided at least substantially radially opposite. In order to release the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of it and comes into contact with the first housing element 22. The housing elements 22 and 24 are pushed apart from one another by further screwing in.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing, as is shown, for example, in FIGS Fig. 1 and 3rd are designated.
  • the pull-off thread 138 preferably has the same thread type on, as for the mounting screws 142 provided mounting threads.
  • a depression 140 is provided on the second housing element 22 and is associated with the pull-off thread 138. If, when the screw is screwed into the pull-off thread 138, abrasion particles are discharged, they collect in the depression 140. This prevents such abrasion particles, for example, from preventing the housing elements 22 and 24 from fully abutting one another.
  • the air guide hood 46 has at least one, in particular additional, in Fig. 14 shown dome 144, which allows mounting of the air guide hood 46 only when the screws used for pressing, in particular the fastening screws 142, have been removed again. This is because the air-guiding hood 46 with the dome 144 is designed such that it would collide with a screw head of a jack-off screw possibly screwed into the forcing thread 138, so that the air-guiding hood 46 would not be completely mountable. In particular, the air guide hood 46 can only be installed when the jack screws are completely removed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP19201749.9A 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes Active EP3647599B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
JP2020160698A JP7220692B2 (ja) 2019-10-07 2020-09-25 真空ポンプ、スクロールポンプ及びその製造方法
EP20198997.7A EP3739166B1 (fr) 2019-10-07 2020-09-29 Pompe à vide, pompe d'extraction et procédé de fabrication de telles pompes et clapet anti-retour
EP22199874.3A EP4095387A3 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales avec capteur de pression intégré
EP22156933.8A EP3974655B1 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales et son procédé de fabrication
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP2023025010A (ja) 2019-10-07 2022-11-08 真空ポンプ、スクロールポンプ及びその製造方法
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such

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EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

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EP20200624.3A Division EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP20200624.3A Division-Into EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage
EP20184951.0 Division-Into 2020-07-09

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EP3708840A3 (fr) * 2020-07-22 2021-03-10 Pfeiffer Vacuum Technology AG Clapet antiretour, appareil à vide et pompe à vide
WO2022090191A1 (fr) * 2020-10-28 2022-05-05 Leybold Gmbh Procédé de fonctionnement d'une pompe à vide à spirales
EP4253720A2 (fr) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

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EP4219947A3 (fr) 2023-06-15 2024-02-07 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie hélicoïdale optimisée
EP4234932A3 (fr) 2023-06-15 2024-01-17 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage

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EP3708840A3 (fr) * 2020-07-22 2021-03-10 Pfeiffer Vacuum Technology AG Clapet antiretour, appareil à vide et pompe à vide
WO2022090191A1 (fr) * 2020-10-28 2022-05-05 Leybold Gmbh Procédé de fonctionnement d'une pompe à vide à spirales
EP4253720A2 (fr) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4253720A3 (fr) * 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

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EP3647599A3 (fr) 2020-07-22
EP3754200B1 (fr) 2021-12-08
EP3754200A3 (fr) 2021-02-17
EP3647599B1 (fr) 2021-12-22

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