EP3617511B1 - Pompes à spirales et procédé de fabrication pour des telles pompes - Google Patents

Pompes à spirales et procédé de fabrication pour des telles pompes Download PDF

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Publication number
EP3617511B1
EP3617511B1 EP19201745.7A EP19201745A EP3617511B1 EP 3617511 B1 EP3617511 B1 EP 3617511B1 EP 19201745 A EP19201745 A EP 19201745A EP 3617511 B1 EP3617511 B1 EP 3617511B1
Authority
EP
European Patent Office
Prior art keywords
spiral
pump
wall
section
scroll pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19201745.7A
Other languages
German (de)
English (en)
Other versions
EP3617511A2 (fr
EP3617511A3 (fr
Inventor
Erhard Harapat
Lars Pauli
Wolfgang Söhngen
Jan Hofmann
Becker Jonas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19201745.7A priority Critical patent/EP3617511B1/fr
Publication of EP3617511A2 publication Critical patent/EP3617511A2/fr
Publication of EP3617511A3 publication Critical patent/EP3617511A3/fr
Priority to JP2020160698A priority patent/JP7220692B2/ja
Priority to EP22156933.8A priority patent/EP3974655B1/fr
Priority to EP20198997.7A priority patent/EP3739166B1/fr
Priority to EP22199874.3A priority patent/EP4095387A3/fr
Priority to US17/063,912 priority patent/US11773849B2/en
Application granted granted Critical
Publication of EP3617511B1 publication Critical patent/EP3617511B1/fr
Priority to JP2022178824A priority patent/JP7549634B2/ja
Priority to US18/449,111 priority patent/US20230383750A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F04C18/0284—Details of the wrap tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material

Definitions

  • the present invention relates to scroll pumps.
  • a scroll pump according to the preamble of claim 1 is in the EP 0 597 804 A1 disclosed.
  • the US 6 074 185 A , the US 2012/134862 A1 and the JP H02 9975 A are also state of the art.
  • the invention is based on a scroll pump comprising a spiral component which has a base plate and a spiral wall extending from the base plate, the spiral wall having a groove at its end facing away from the base plate in which a sealing element is received, the groove being divided by two opposite side walls is limited. It is an object to simplify the handling of the spiral component during the assembly of the scroll pump and / or to reduce the risk of damage to the spiral component during handling. This object is achieved by a scroll pump with the features of claim 1, and in particular in that a first of the side walls in a first spiral section is thicker than a second of the side walls in the first spiral section and / or than one or both side walls in a second spiral section.
  • the first spiral section is an outer end section of the spiral wall. This one is for damage particularly vulnerable. Spiral sections lying further inside are protected in particular by spiral sections lying outside, so that no “thickening” is necessary on the inside. In the sense of an overall preferably low mass, therefore, only the outer end section of the spiral wall preferably has a thickening.
  • the first spiral section can preferably be arranged at least essentially within the last half turn of the spiral wall. This is particularly at risk of damage.
  • the fact that a penultimate half of the turn is also basically arranged on the outside is advantageously used, but already has a certain protection due to a larger protrusion of the base plate. The mass of the spiral component can thus be kept relatively small.
  • the invention provides that the first spiral section extends at least over 100 °, preferably at least over 140 °.
  • the first spiral section can preferably extend over a maximum of 200 °, preferably over a maximum of 180 °.
  • the advantages according to the invention unfold to a particularly large extent in the specified ranges.
  • the first spiral section is arranged in a non-pumping area of the spiral wall. This makes advantageous use of the fact that generally less strict manufacturing tolerances are required in such a non-pumping area. The thickening can thus be produced particularly easily.
  • the first side wall can be a radially outer side wall. This enables a particularly strong reduction in the risk of damage.
  • the first side wall can for example be at least 0.2 mm and / or at most 1 mm, in particular at most 0.7 mm, in particular at most 0.4 mm thicker. This enables particularly good stabilization, in particular with a relatively low additional mass.
  • spiral component is movable and can be excited eccentrically in order to generate a pumping effect.
  • the advantages according to the invention unfold to a particular extent on the movable spiral component.
  • the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
  • This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
  • the second housing element 24 thus forms a stationary spiral component of the scroll pump 20.
  • the spiral wall 26 acts with a spiral wall 28 of a movable one Spiral component 30 together, wherein the movable spiral component 30 is excited eccentrically to generate a pumping effect via an eccentric shaft 32.
  • a gas to be pumped is supplied from an inlet 31, which is in the first housing element 22 is defined, conveyed to an outlet 33 which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • an in Fig. 1 The left-hand end of a corrugated bellows 42 is fastened, the right-hand end of which is fastened to the first housing element 22. The left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
  • the scroll pump 20 comprises a fan 44 for generating a flow of cooling air.
  • an air guide hood 46 is provided, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped in such a way that the cooling air flow essentially flows around the entire pump housing and thus achieves a good cooling performance.
  • the scroll pump 20 further comprises an electronics housing 48 in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base for the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible through which an air flow generated by the fan 44 is guided along the first housing element 22 and also the electronics housing 48, so that both are effectively cooled will.
  • the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be encapsulated in these chambers 52 and are therefore advantageously shielded. When potting the electronic components, a minimal amount of the can preferably be used Potting material are used. For example, the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
  • the chambers 52 can preferably be designed in such a way that different variants of the electronic components, in particular different equipping variants of a circuit board, can be arranged in the electronics housing 48 and / or can be encapsulated. For certain variants, individual chambers 52 can also remain empty, that is to say have no electronic components. In this way, a so-called modular system for different types of pumps can be implemented in a simple manner.
  • the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
  • a plurality of walls or ribs 54 are formed which define a plurality of channels 50 for guiding a flow of cooling air.
  • the chambers 52 also allow particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • FIG. 3 the scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden, so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the fixed spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
  • the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus cools the stationary spiral component 24 particularly effectively.
  • the cooling air flow first flows around the stationary spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous because the The pump-active area of the pump 20 has a high level of heat development due to the compression during operation and is therefore primarily cooled here.
  • the pump 20 comprises a pressure sensor 60 integrated into it. This is arranged within the air guide hood 46 and screwed into the stationary spiral component 24.
  • the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection, which is only partially shown.
  • the pressure sensor 60 is integrated into the control of the scroll pump 20.
  • the motor 34 shown in Fig. 1 is visible, can be controlled as a function of a pressure measured by the pressure sensor 60.
  • the fine vacuum pump can only be switched on if the pressure sensor 60 measures a sufficiently low pressure. In this way, the fine vacuum pump can be protected from damage.
  • Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional view.
  • a channel 62 is provided for the pressure sensor 60, which in this case opens into a non-pumping external area between the spiral walls 26 and 28 of the stationary or movable spiral components 24 and 30.
  • the pressure sensor thus measures a suction pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in an active pumping area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 allows, for example by determining a compression, in particular a recognition of a wear condition of the pump-active components, in particular a sealing element 64 also referred to as a tip seal.
  • the measured suction pressure can also be used to regulate the pump can be used (including pump speed).
  • a suction pressure can be specified by the software and a suction pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, an increase in pressure caused by wear can be compensated for by increasing the speed. This means that a tip seal change can be postponed or longer change intervals can be implemented.
  • the data from the pressure sensor 60 can therefore generally be used, for example, to determine wear, for situational control of the pump, for process control, etc.
  • the pressure sensor 60 can, for example, be provided optionally. Instead of the pressure sensor 60, a blind plug for closing the channel 62 can be provided, for example. A pressure sensor 60 can then be retrofitted, for example, if necessary. Particularly with regard to retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44. As a result, it is also advantageously cooled. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently a cost-effective sensor can be used.
  • the pressure sensor 60 is arranged in particular in such a way that the external dimensions of the pump 20 are not increased by it and the pump 20 consequently remains compact.
  • the movable spiral component 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly clearly visible.
  • the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
  • FIG Fig. 6 A side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
  • the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in FIG Fig. 1 are visible.
  • the holding projections 68 are provided on the outside of the base plate 66.
  • the holding projections 68 extend radially outward.
  • the holding projections 68 all have the same radial height.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the retaining projections 68.
  • This first intermediate section 70 has a greater radial height than a second intermediate section 72 and than a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the spiral wall 28 are preferably manufactured from a solid material so as to be tensioned together, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly on the holding projections 68.
  • the in Fig. 6 The side of the base plate 66 shown can be machined, in particular the fastening recesses are introduced.
  • the spiral wall 28 can also be produced from the solid material by cutting within the framework of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three retaining projections 68.
  • the clamping device 76 has a continuous recess 80 through which a tool access to the spiral component 30, in particular to the in Fig. 6 shown side of the same, is enabled. Machining operations can thus be carried out from both sides during a clamping, in particular at least one finishing machining of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected so that no critical deformations of the spiral component 30 take place.
  • the three holding projections 68 are preferably selected in such a way that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not increased. Thus, on the one hand, material and, on the other hand, machining volume can be saved.
  • the holding projections 68 are in particular designed and / or arranged in such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the corrugated bellows 42 is preferably not the same as the number of retaining projections 68 on the movable spiral component 30.
  • FIG. 9 A similar section of the image is shown in Fig. 9 shown for another scroll pump, which is preferably the same series of pump 20 of the Fig. 1 listened to.
  • the the Fig. 9 The underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
  • the eccentric shafts 32, the balance weights 82 and the housing elements 22 are dimensioned in such a way that only one particular type of the two types of balance weights 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown.
  • the balance weights 82 are in the Figures 8 and 9 dimensioned together with certain dimensions of the installation space provided for them in order to make it clear that the balance weight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the dimensions given are given purely by way of example.
  • the balance weight 82 of the Fig. 8 is made shorter in the corresponding direction, namely 9 mm long, so it can be installed without any problems.
  • the balance weight 82 of the Fig. 9 each measured from the mounting hole has a longitudinal extension of 11 mm.
  • the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 of the Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted installation or since the balance weight 82 of the Fig. 9 not completely in contact with the eccentric shaft 82 of the Fig. 8 can be brought. Because the balance weight 82 of the Fig.
  • a distance in the longitudinal direction between the fastening bore 84 and a housing shoulder 88 is 17.5 mm.
  • the balance weight 82 of the Fig. 8 with its extension of 21.3 mm when the eccentric shaft 32 is inserted, the Fig. 9 collide with the housing shoulder 88 so that complete assembly would not be possible. Incorrect assembly is initially possible, but is reliably detected.
  • the extension of 21.3 mm would collide with the shaft shoulder 86, which is only arranged at a distance of 13.7 mm from the fastening bore 84.
  • the balance weights 82 are generally designed in such a way that confusion of the balance weight with those of other sizes is avoided during assembly and / or during servicing.
  • the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed in such a way that the wrong counterweight is prevented from being installed due to adjacent shoulders on the shaft, the positions of the thread and through-hole of the counterweight and shoulders within the housing.
  • a gas ballast valve 90 of the scroll pump 20 is shown. This is also shown in the overall illustration of the pump 20 in FIG Fig. 3 visible and arranged on the fixed spiral component 24.
  • the gas ballast valve 90 comprises an actuating handle 92. This comprises a plastic body 94 and a base element 96, which is preferably made of stainless steel.
  • the base element 96 comprises a through bore 98 which is provided on the one hand for connecting and introducing a ballast gas and on the other hand comprises a check valve 100.
  • the bore 98 is also closed by means of a plug 102 in the illustrations.
  • plug 102 For example, a filter can also be provided, the ballast gas preferably being air and in particular entering the valve 90 directly via the filter.
  • the operating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 with a fastening screw (not shown) that extends through a bore 110.
  • valve 90 To actuate the valve 90, a torque applied manually to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated. Thus, the bore 98 comes into communication with an interior of the housing.
  • Three switching positions are provided for the valve 90, namely those in Fig. 10 shown, which is a locking position, and each a right and left rotated position in which the bore 98 is in communication with different areas of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112.
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When the valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, gets to the surface of an O-ring, this harbors the risk of premature failure.
  • the cover 112 prevents dirt and the like from penetrating the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin, not shown, for each bore 108, with which the cover 112 is held in the bores 108.
  • the bores 108 and 110 and those arranged therein Fastening screws are thus protected from contamination.
  • the fastening screw (not shown) which is arranged in the bore 110 and which allows a rotary movement, the entry of contamination into the valve mechanism can thus be effectively minimized and the service life of the valve can be improved.
  • the plastic handle with an overmolded stainless steel base part ensures good corrosion resistance and low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • a speed control is preferably provided.
  • the fan is controlled by means of PWM as a function of the power consumption and temperature of the power module, which is accommodated in the electronics housing 48, for example.
  • the speed is set in the same way as the power consumption. The regulation is only permitted from a module temperature of 50 ° C. If the pump comes into a temperature range of possible derating (temperature-related power reduction), the maximum fan speed is automatically activated.
  • This control enables a minimum noise level to be achieved when the pump is cold, that there is a lower noise level - corresponding to the pump noise - in the final pressure or at low load, that optimal cooling of the pump is achieved with a simultaneously low noise level, and that before a temperature-related reduction in output, the maximum cooling output is ensured.
  • the maximum fan speed can be adaptable, in particular depending on the situation. For example, in order to achieve a high level of water vapor tolerance, it can be expedient to reduce the maximum fan speed.
  • FIG. 12 the movable scroll member 30 is partial and opposite Fig. 5 shown enlarged.
  • the spiral wall 28 At its end facing away from the base plate 66 and facing a base plate of the fixed spiral component 24, not shown here, the spiral wall 28 has a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
  • a sealing element 64 also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is, for example, in Fig. 4 clearly visible.
  • the groove 114 is delimited outwardly and inwardly by two opposite side walls, namely by an inner side wall 116 and an outer side wall 118.
  • the outer side wall 118 is made thicker than the inner side wall 116 in the first spiral section 120 and thicker than both side walls 116 and 118 in a different, second spiral section 122.
  • the first spiral portion 120 extends from in Fig. 12 indicated location to the outer end of the spiral wall 28, as it is for example also in Fig. 5 is indicated.
  • the first spiral section 120 extends here, for example, over approximately 163 °.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is at least partially, in particular completely, arranged in a non-pumping area of the spiral wall 28.
  • the first spiral section 120 can at least substantially completely fill the non-pumping area of the spiral wall 28.
  • the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70.
  • the movable spiral component should generally preferably have a low dead weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is e.g. 0.17 at the most. Due to the tip seal groove, however, the spiral wall tip is very sensitive to impacts during handling, such as during assembly or when changing the tip seal. Light bumps, e.g. B. Also during transport, the side wall of the groove can be pushed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular an outwardly local thickening of the spiral wall.
  • This area is preferably not pump-active and can therefore be manufactured with a greater tolerance.
  • a thickening of the spiral wall is preferably not necessary at other points of the component, since the wall is protected by protruding elements of the component.
  • the air guide hood 46 shown defines an air flow as indicated by a dashed arrow 124.
  • the fan 44 is connected to a control device in the electronics housing 48 via a cable (not shown) which runs through the air guide hood 46 and via a plug connection.
  • the socket 126 is mounted on the electronics housing 48 and / or attached to a circuit board arranged in the electronics housing 48.
  • the socket 126 is, for example, also in the Fig. 2 and 3 visible.
  • the plug 128 is connected to the fan 44 via the cable (not shown).
  • the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
  • the air flow 124 which may contain dust or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
  • the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the dirt gets through the opening provided for the socket 126 in the electronics housing 48 into the latter and to the control device and / or power electronics.
  • the air baffle 46 is in Fig. 14 shown separately and in perspective. Among other things, the partition 130 with the space defined behind it and provided for the plug 128 is visible.
  • the partition 130 comprises a recess 132, designed here as a V-shaped notch, for the passage of a cable from the plug 128 to the fan 44.
  • the partition 130 ensures that the air that is sucked in does not reach the electronics via the opening in the plug-in connector 126, 128.
  • the fan cable is led through the V-shaped notch 132 laterally through the partition wall 130.
  • the notch 132 has a lateral offset to the connector 126, 128, as a result of which a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 can be achieved.
  • the air guidance into the channel 50 is also between Electronics housing 48 and pump housing 22 improved. There is less turbulence and back pressure for the fan 44.
  • the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional illustration.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134. Sealing by means of an O-ring 136 is provided here.
  • the transition fit 134 is also used, for example, to center the second housing element 24 with respect to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It can happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can preferably also be provided at least essentially radially opposite. To loosen the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of this and comes into contact with the first housing element 22. By screwing in further, the housing elements 22 and 24 are pressed away from one another.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing off, as they are, for example, in FIGS Fig. 1 and 3 are designated.
  • the forcing thread 138 preferably has the same thread type as the fastening thread provided for the fastening screws 142.
  • a countersink 140 is provided on the second housing element 22, which is assigned to the forcing thread 138. If abrasion particles are carried out when the screw is screwed into the forcing thread 138, these collect in the depression 140. This prevents such abrasion particles from preventing the housing elements 22 and 24 from completely abutting one another, for example.
  • the air guide hood 46 has at least one, in particular additional, in Fig. 14 The dome 144 shown, which allows the air guide hood 46 to be mounted only when the screws used for pressing, in particular the fastening screws 142, have been removed again.
  • the air guide hood 46 with the dome 144 is designed in such a way that it would collide with a screw head of a jack screw possibly screwed into the forcing thread 138, so that the air guide hood 46 could not be fully assembled.
  • the air guide hood 46 can only be installed with the jackscrews completely dismantled.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (7)

  1. Pompe à spirales (20), comprenant un composant en spirale (30) qui présente une plaque de base (66) et une paroi en spirale (28) s'étendant à partir de la plaque de base (66),
    dans laquelle
    la paroi en spirale (28) présente, à son extrémité détournée de la plaque de base (66), une rainure (114) dans laquelle est logé un élément d'étanchéité (64),
    la rainure (114) est délimitée par deux parois latérales opposées (116, 118), et
    dans une première portion en spirale (120), une première desdites parois latérales (118) est plus épaisse qu'une seconde desdites parois latérales (116), dans la première portion en spirale (120), et/ou qu'une desdites parois latérales (116, 118) ou que les deux, dans une seconde portion en spirale (122),
    caractérisée en ce que
    la première portion en spirale (120) s'étend au moins sur 100°.
  2. Pompe à spirales (20) selon la revendication 1,
    dans laquelle la première portion en spirale (120) est une portion d'extrémité extérieure de la paroi en spirale (28).
  3. Pompe à spirales (20) selon la revendication 1 ou 2,
    dans laquelle la première portion en spirale (120) est disposée à l'intérieur de la dernière demi-spire de la paroi en spirale (28).
  4. Pompe à spirales (20) selon l'une des revendications précédentes,
    dans laquelle la première portion en spirale (120) est disposée dans une zone non active en pompage de la paroi en spirale (28).
  5. Pompe à spirales (20) selon l'une des revendications précédentes,
    dans laquelle la première paroi latérale est une paroi latérale (118) radialement extérieure.
  6. Pompe à spirales (20) selon l'une des revendications précédentes,
    dans laquelle la première paroi latérale (118) est plus épaisse d'au moins 0,2 mm.
  7. Pompe à spirales (20) selon l'une des revendications précédentes,
    dans laquelle le composant en spirale (30) est mobile et peut être excité excentriquement pour engendrer un effet de pompage.
EP19201745.7A 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes Active EP3617511B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes
JP2020160698A JP7220692B2 (ja) 2019-10-07 2020-09-25 真空ポンプ、スクロールポンプ及びその製造方法
EP22199874.3A EP4095387A3 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales avec capteur de pression intégré
EP20198997.7A EP3739166B1 (fr) 2019-10-07 2020-09-29 Pompe à vide, pompe d'extraction et procédé de fabrication de telles pompes et clapet anti-retour
EP22156933.8A EP3974655B1 (fr) 2019-10-07 2020-09-29 Pompe à vide à spirales et son procédé de fabrication
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP7549634B2 (ja) 2019-10-07 2022-11-08 真空ポンプ、スクロールポンプ及びその製造方法
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes

Publications (3)

Publication Number Publication Date
EP3617511A2 EP3617511A2 (fr) 2020-03-04
EP3617511A3 EP3617511A3 (fr) 2020-07-15
EP3617511B1 true EP3617511B1 (fr) 2021-12-08

Family

ID=68172125

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Application Number Title Priority Date Filing Date
EP19201745.7A Active EP3617511B1 (fr) 2019-10-07 2019-10-07 Pompes à spirales et procédé de fabrication pour des telles pompes

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EP (1) EP3617511B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A3 (fr) 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597804A1 (fr) * 1992-11-07 1994-05-18 AGINFOR AG für industrielle Forschung Machine de déplacement de fluide du type à spirale'

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029975A (ja) * 1988-06-27 1990-01-12 Toshiba Corp スクロール型圧縮機
US6074185A (en) * 1998-11-27 2000-06-13 General Motors Corporation Scroll compressor with improved tip seal
US7963752B2 (en) * 2007-01-26 2011-06-21 Emerson Climate Technologies, Inc. Powder metal scroll hub joint
GB0914230D0 (en) * 2009-08-14 2009-09-30 Edwards Ltd Scroll pump
US9181949B2 (en) * 2012-03-23 2015-11-10 Bitzer Kuehlmaschinenbau Gmbh Compressor with oil return passage formed between motor and shell
CN103084887A (zh) * 2012-11-14 2013-05-08 柳州易舟汽车空调有限公司 涡旋盘型线加工夹具
CN206010470U (zh) * 2016-08-10 2017-03-15 鞍山新磁电子有限公司 一种可精确定位的动涡旋盘结构的工装夹具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597804A1 (fr) * 1992-11-07 1994-05-18 AGINFOR AG für industrielle Forschung Machine de déplacement de fluide du type à spirale'

Also Published As

Publication number Publication date
EP3617511A2 (fr) 2020-03-04
EP3617511A3 (fr) 2020-07-15

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