EP0198936A1 - Pompe à vide multiétagée - Google Patents

Pompe à vide multiétagée Download PDF

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Publication number
EP0198936A1
EP0198936A1 EP85104947A EP85104947A EP0198936A1 EP 0198936 A1 EP0198936 A1 EP 0198936A1 EP 85104947 A EP85104947 A EP 85104947A EP 85104947 A EP85104947 A EP 85104947A EP 0198936 A1 EP0198936 A1 EP 0198936A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
rotor system
pump according
vacuum
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85104947A
Other languages
German (de)
English (en)
Other versions
EP0198936B1 (fr
Inventor
Hanns-Peter Dr. Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Leybold Heraeus GmbH filed Critical Leybold AG
Priority to DE8585104947T priority Critical patent/DE3574274D1/de
Priority to EP85104947A priority patent/EP0198936B1/fr
Priority to JP9347486A priority patent/JPS61283781A/ja
Publication of EP0198936A1 publication Critical patent/EP0198936A1/fr
Application granted granted Critical
Publication of EP0198936B1 publication Critical patent/EP0198936B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the invention relates to a multi-stage vacuum pump with a housing which has at least two housing rings, two front housing covers and at least one cutting disc to form scoops, and a rotor system which comprises at least two rotors arranged together on a shaft and bearings for the rotor system.
  • a two- or multi-stage vacuum pump practically consists of two or more single-stage vacuum pumps, which are either arranged side by side (with axes of rotation parallel to each other) or one behind the other (with a common shaft or axis of rotation).
  • the present invention relates to a multi-stage rotary piston vacuum pump of the last-mentioned type.
  • the common shaft assigned to the rotors is held in the end faces of the housing in roller or slide bearings, while the bearing of the rotor system in the partition or cutting disc is generally designed as a slide bearing.
  • This solution has the disadvantage that practically two bearings have to be arranged in the region of the cutting disc, so that the axial extent of the cutting disc and the intermediate bearing or bearings is relatively large.
  • the present invention has for its object to provide a multi-stage rotary piston vacuum pump of the type mentioned, in which storage problems are significantly reduced, particularly in the area of the partition or partition.
  • this object is achieved in that the implementation of the rotor system through the cutting disc is designed as a contact-free gap and / or labyrinth seal.
  • This measure of completely dispensing with intermediate storage has a number of sometimes surprising advantages. On the one hand, there are no longer any problems of over-determination. Furthermore, it is not necessary to supply the seal in the area of the partition with high-quality lubricants, which means that there is the possibility of separating the lubrication of the end bearings from the supply of the seal in the separating disc with a sealant. This advantage becomes particularly significant if the vacuum pump has to be operated with a sealant which has to be adapted to the process which takes place within the recipient to be evacuated.
  • Such sealants can be, for example, substances occurring in the process, such as dioctyl phthalate (DOP), which have no high-quality lubricating properties, but are sufficient to supply a gap or labyrinth seal.
  • DOP dioctyl phthalate
  • the bearings of the rotor system in the end covers can be supplied with high-quality lubricants, such as greases. It is expedient if the diameter of the fore-vacuum rotor is less than or equal to the diameter of the rotor-side part of the gap or labyrinth seal. A complete assembly of the rotor outside the housing and thus a minimization of concentricity is possible.
  • the figure shows a two-stage vacuum pump 1 in rotary vane design with a forevacuum (VV) stage 2 and a high vacuum (HV) stage 3.
  • VV forevacuum
  • HV high vacuum
  • Vacuum pump 1 includes the VV-side housing cover 4, the in this embodiment consists of the bearing ring 5 of the disc 6 and the end cover 7.
  • the partition or partition 11 connects to the HV side of the HV housing ring 12 and forms the HV suction chamber 13.
  • the bearing cover 14 forms the end of the HV side or the HV scoop space 13 to the outside.
  • the rotor system comprises the VV rotor 15 and the HV rotor 16, which are arranged on a common shaft 17.
  • the shaft 17 is rotatably supported in the bearing caps 4 and 14 by means of the bearings 18 and 19.
  • On the HV side the shaft 17 is connected via the coupling 21 to a drive motor, not shown.
  • the bearing 18 on the W side is located in the bearing ring 5.
  • the shaft 17 extends into the disk 6, in which a feed pump 22 for the sealant of the two-stage pump 1 shown is accommodated.
  • the feed pump 22 is separated from the bearing 18 of the shaft 17 by means of the radial seal 23 in the disk 6.
  • a two-stage rotary vane vacuum pump has been chosen as the exemplary embodiment.
  • the slot for a slide passing through the VV rotor is shown in dashed lines and designated by 10.
  • the use of the invention is, however, also take place in other types of two-stage vacuum pumps with one another on a shaft rotors (for example, locking slide pumps) or even in two-stage twin-screw pumps, in which on each shaft two rotors are arranged one behind the other (Roots pump, N Orthey-pump).
  • the rotor system is no longer supported in the cutting disc 11.
  • a labyrinth seal 25 is provided in the region of the cutting disc 11.
  • this comprises two grooves 26 and 27.
  • the gap width depends on the size of the parts, their materials and possible temperatures during operation in order to allow thermal expansion of the parts; furthermore, the possible play of the bearings 18, 19 must be taken into account.
  • the gap widths are on the order of a few hundredths of a millimeter.
  • the advantage of this solution is that not only a bearing but also a supply of high-quality lubricants can be dispensed with at this point.
  • the sealant of the pump which often does not have very good lubricating properties, is sufficient to seal the labyrinth or gap seal 25.
  • the bearings 18 and 19 can be supplied with a separate lubricant - preferably grease.
  • a separation of the storage rooms from the scooping rooms 9 and 13 is necessary for this purpose. This separation can be achieved by radial sealing rings 28, 29 and / or also by labyrinth or gap seals.
  • the storage space of the VV-side bearing 18 is separated from the scooping space 9 by the radial sealing ring 28.
  • a combination consisting of the labyrinth seal 31 and the radial sealing ring 29 has been selected.
  • the exemplary embodiment shown has the feed pump for the sealant of the pump already mentioned in the cutting disc 6.
  • the pump sucks the sealant from the sump 32 through the channel 33 and presses it into the channel 34, with a pressure of greater than 1 bar.
  • the sealant is used in a manner known per se to supply the scoops 9 and 13 and then returns to the pump sump 32.
  • the existing labyrinth seals 25 and 31 are to be supplied with the sealant. This is done in relation to the labyrinth seal 25 with the aid of the bore 36, which starts from the channel 34 and opens out on the VV side of the labyrinth seal 25. This creates an oil film in the labyrinth seal 25, so that it is possible to seal the opening in the partition 11, which has no bearing function, between the HV and VV stages.
  • the bore 37 is used, which leads from the channel 34 to the pressure-side end of the labyrinth seal 31.
  • the degassing channels 41 and 42 which on the HV side open into the labyrinth seals 25 and 31 - preferably at the level of the groove closest to the HV side.
  • the channels 41 and 42 connect these areas of the labyrinth seals 25 and 31 to the space 43, which in turn is connected to the suction side of the fore-vacuum stage 2, that is to say has an intermediate vacuum.
  • the degassing ensures that there is no inadmissible impairment of the final pressure of the HV stage.
  • the essential idea on which the invention is based consists in dispensing with an intermediate store in the area of the partition 11.
  • this dispense requires that the rotor system be mounted in both bearing caps 4 and 14.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP85104947A 1985-04-24 1985-04-24 Pompe à vide multiétagée Expired EP0198936B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE8585104947T DE3574274D1 (en) 1985-04-24 1985-04-24 Multistage vacuum pump
EP85104947A EP0198936B1 (fr) 1985-04-24 1985-04-24 Pompe à vide multiétagée
JP9347486A JPS61283781A (ja) 1985-04-24 1986-04-24 多段式の真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85104947A EP0198936B1 (fr) 1985-04-24 1985-04-24 Pompe à vide multiétagée

Publications (2)

Publication Number Publication Date
EP0198936A1 true EP0198936A1 (fr) 1986-10-29
EP0198936B1 EP0198936B1 (fr) 1989-11-15

Family

ID=8193462

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85104947A Expired EP0198936B1 (fr) 1985-04-24 1985-04-24 Pompe à vide multiétagée

Country Status (3)

Country Link
EP (1) EP0198936B1 (fr)
JP (1) JPS61283781A (fr)
DE (1) DE3574274D1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4439637A1 (de) * 1994-11-07 1996-05-09 Balzers Pfeiffer Gmbh Mehrstufige Drehschiebervakuumpumpe
WO2011058339A2 (fr) 2009-11-11 2011-05-19 Edwards Limited Pompe à vide
WO2014044440A3 (fr) * 2012-09-21 2014-08-07 Robert Bosch Gmbh Ensemble pompe
EP3056736A1 (fr) * 2015-02-11 2016-08-17 Flybrid Automotive Limited Système de pompe à vide
US20180142763A1 (en) * 2015-02-27 2018-05-24 Flybrid Automotive Limited Vacuum management system
CN109026707A (zh) * 2018-08-22 2018-12-18 中北大学 爪式泵与滑阀泵组合的复合泵

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL296852A (fr) * 1900-01-01
US3265292A (en) * 1965-01-13 1966-08-09 Svenska Rotor Maskiner Ab Screw rotor machine
DE1628395A1 (de) * 1968-02-02 1970-01-08 Svenska Rotor Maskiner Ab Zweistufiger aussenachsiger Drehkolbenverdichter mit innerer Verdichtung
DE1811285A1 (de) * 1968-11-27 1970-06-18 Linde Ag Maschinensatz aus mindestens zwei Maschinen mit Schraubenverdraengerlaeufern
FR2242579A1 (fr) * 1973-09-03 1975-03-28 Svenska Rotor Maskiner Ab
US4329126A (en) * 1977-11-11 1982-05-11 Kobe Steel Limited Method for preventing a leakage loss of gases in a screw compressor
DE3216990A1 (de) * 1982-05-06 1983-11-10 Sihi Gmbh & Co Kg, 2210 Itzehoe Waelzkolbenpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153307A (fr) * 1974-05-31 1975-12-10
DE3139232A1 (de) * 1981-10-02 1983-04-21 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Kupplungsanordnung fuer 2-stufige drehschieberpumpen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL296852A (fr) * 1900-01-01
US3265292A (en) * 1965-01-13 1966-08-09 Svenska Rotor Maskiner Ab Screw rotor machine
DE1628395A1 (de) * 1968-02-02 1970-01-08 Svenska Rotor Maskiner Ab Zweistufiger aussenachsiger Drehkolbenverdichter mit innerer Verdichtung
DE1811285A1 (de) * 1968-11-27 1970-06-18 Linde Ag Maschinensatz aus mindestens zwei Maschinen mit Schraubenverdraengerlaeufern
FR2242579A1 (fr) * 1973-09-03 1975-03-28 Svenska Rotor Maskiner Ab
US4329126A (en) * 1977-11-11 1982-05-11 Kobe Steel Limited Method for preventing a leakage loss of gases in a screw compressor
DE3216990A1 (de) * 1982-05-06 1983-11-10 Sihi Gmbh & Co Kg, 2210 Itzehoe Waelzkolbenpumpe

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4439637A1 (de) * 1994-11-07 1996-05-09 Balzers Pfeiffer Gmbh Mehrstufige Drehschiebervakuumpumpe
WO2011058339A2 (fr) 2009-11-11 2011-05-19 Edwards Limited Pompe à vide
WO2011058339A3 (fr) * 2009-11-11 2012-01-19 Edwards Limited Pompe à vide
CN102656368A (zh) * 2009-11-11 2012-09-05 爱德华兹有限公司 用于真空泵的抗腐蚀轴密封
EP2499374B1 (fr) 2009-11-11 2016-12-28 Edwards Limited Etancheite d'arbre résistant à la corrosion pour une pompe à vide
KR101774065B1 (ko) 2009-11-11 2017-09-01 에드워즈 리미티드 진공 펌프용 내부식 샤프트 시일 장치
WO2014044440A3 (fr) * 2012-09-21 2014-08-07 Robert Bosch Gmbh Ensemble pompe
EP3056736A1 (fr) * 2015-02-11 2016-08-17 Flybrid Automotive Limited Système de pompe à vide
US20180142763A1 (en) * 2015-02-27 2018-05-24 Flybrid Automotive Limited Vacuum management system
US10707723B2 (en) * 2015-02-27 2020-07-07 Punch Flybrid Limited Vacuum management system
CN109026707A (zh) * 2018-08-22 2018-12-18 中北大学 爪式泵与滑阀泵组合的复合泵
CN109026707B (zh) * 2018-08-22 2024-05-14 中北大学 爪式泵与滑阀泵组合的复合泵

Also Published As

Publication number Publication date
JPS61283781A (ja) 1986-12-13
EP0198936B1 (fr) 1989-11-15
DE3574274D1 (en) 1989-12-21

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