EP3371458B1 - Pompe à vide sèche - Google Patents

Pompe à vide sèche Download PDF

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Publication number
EP3371458B1
EP3371458B1 EP16790952.2A EP16790952A EP3371458B1 EP 3371458 B1 EP3371458 B1 EP 3371458B1 EP 16790952 A EP16790952 A EP 16790952A EP 3371458 B1 EP3371458 B1 EP 3371458B1
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EP
European Patent Office
Prior art keywords
pump
side bearing
vacuum pump
suction chamber
dry vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16790952.2A
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German (de)
English (en)
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EP3371458A1 (fr
Inventor
Peter Birch
Robert Jenkins
Clive Tunna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold GmbH
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Filing date
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Publication of EP3371458A1 publication Critical patent/EP3371458A1/fr
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Publication of EP3371458B1 publication Critical patent/EP3371458B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings

Definitions

  • the invention relates to a dry vacuum pump for generating a vacuum.
  • Known dry vacuum pumps have a rotor element which is connected to a rotatably mounted and driven by an electric motor rotor shaft.
  • the rotor element is arranged in a pump chamber, which is formed by a pump housing.
  • the pump housing has an inlet and an outlet, wherein a pumping medium is conveyed from the inlet to the outlet by the rotation of the rotor element.
  • the dry vacuum pump for this purpose has a plurality, preferably two rotor elements in a suction chamber, which cooperate for conveying the pumping medium.
  • a high vacuum dry vacuum pumps are formed in multiple stages, so that a plurality of pump chambers are formed in a pump housing, in each of which at least one rotor element is arranged.
  • the individual pump chambers are fluidly connected to one another by suitable connecting channels, so that the pumping medium is conveyed from the inlet through each pumping chamber to the outlet.
  • pressures of less than 1 mbar to less than 0.0001 mbar are generated.
  • the rotor shaft is supported relative to the pump housing by bearings, which are in particular rolling bearings. Due to the high rotational speed of the rotor shaft, these bearings must have lubrication.
  • the lubricants used for lubrication must be adapted to the prevailing vacuum in the bearing to avoid outgassing of the lubricant. This restricts the selection of possible lubricants for the bearings. Since lubrication and bearings in dry vacuum pumps must be coordinated, thus the usable bearings are limited, which usually leads to increased costs, since special bearings are required.
  • the object of the invention is to provide a dry vacuum pump in which cheaper bearings can be used.
  • the dry vacuum pump according to the invention has a pump housing. Through the pump housing several Schöpfschreib are formed. Rotor elements are arranged in the pump chamber for conveying a pumping medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each pumping chamber. Preferably, two rotor elements are arranged in at least one pump chamber, which cooperate suitably for conveying the pumping medium from the inlet to the outlet.
  • the rotor elements are connected to a rotor shaft. If more than one rotor element is provided per pumping chamber, then there are individual ones Rotor elements each connected to a rotor shaft. At least one rotor shaft is driven, preferably by an electric motor.
  • the rotor shaft is supported by bearings according to the invention, wherein a high-vacuum side bearing is arranged in a recess.
  • the bearing is referred to as a high-vacuum side bearing, which is arranged in the longitudinal direction of the rotor shaft further in the direction of the high vacuum.
  • the high-vacuum side bearing is not necessarily arranged at the high-vacuum end of the rotor shaft. However, this is possible and is covered by the definition of the high-vacuum side bearing.
  • there is an outlet-side bearing which is arranged in the longitudinal direction of the rotor shaft in the direction of the high vacuum in front of the high-vacuum-side bearing.
  • the recess according to the invention is preferably formed by the housing and is open in particular in the direction of the rotor shaft. Since the high vacuum side bearing is arranged according to the invention in the recess, the recess is formed at the location of the high vacuum side bearing.
  • a sealing device is arranged between the high vacuum-side bearing and at least one in the high-vacuum-side bearing, in particular immediately adjacent suction chamber. Furthermore, the recess in which the high-vacuum-side bearing is arranged is connected via a first channel to a region of the dry vacuum pump in which a higher pressure prevails than in the at least one pump chamber adjacent to the high-vacuum side bearing. It is ensured by the first channel that a higher pressure prevails in the recess than in the at least one pump chamber adjacent to the high-vacuum side bearing. In this case, the sealing device prevents compensation of this pressure difference between the recess and the pump chamber adjacent to the high-vacuum side bearing.
  • the high vacuum side bearing is exposed to a pressure which is lower than in the at least one high vacuum side bearing adjacent pump chamber.
  • This makes it possible to use other lubricants and thus also to use cheaper bearings, as they must meet lower requirements for high vacuum compatibility.
  • the problem of outgassing of the lubricant is reduced.
  • the dry vacuum pump is a claw pump, a Roots pump or a screw pump.
  • a pressure of less than 1 mbar, preferably less than 0.001 mbar and particularly preferably less than 0.0001 mbar is generated by the dry vacuum pump.
  • the high vacuum side bearing is a grease-lubricated bearing.
  • the pressure in the recess is higher than in the at least one pump chamber adjacent to the high-vacuum side bearing.
  • Grease for lubricating a bearing is particularly prone to outgass under vacuum and thereby lose its lubricating properties. Only by providing the first channel, through which the pressure in the recess and thus also on the high-vacuum side bearing can be increased, it is even possible to use as a high-vacuum side bearing a grease-lubricated bearing.
  • For grease-lubricated bearings are u. a. to standard bearings, so that the cost of the bearings used can be further reduced.
  • the sealing device is a dry seal. Oil has the considerable disadvantage that this due to its low viscosity by the Sealing device can enter the suction chamber, so that connected to the dry vacuum pump devices can be contaminated by oily air. If there is no oil, neither in the recess nor in the sealing device, this problem is easily prevented. Also, no grease or other sealant is present in the sealing device.
  • the sealing device is preferably designed as a dry seal, that a sealing material can be used, which does not have to be additionally wetted with oil.
  • a sealing material can be used, which does not have to be additionally wetted with oil.
  • it is a contactless shaft seal with a very small sealing gap.
  • the sealing device has at least one lip seal, wherein the at least one lip seal is in particular a PTFE lip seal.
  • Lip seals are a standard product that can be easily manufactured and inexpensively sourced. This further reduces the cost of the dry vacuum pump.
  • the lip seal is not burned by the rapid rotation of the rotor shaft or wears too fast. Due to the controllable pressure difference, the contact pressure of the lip seal can be controlled.
  • the sealing device has at least two lip seals, wherein an intermediate chamber between the at least two lip seals is connected via a second channel to a region of the dry vacuum pump in which a pressure prevails which is higher than the pressure in the at least one pump chamber adjacent to the high vacuum side bearing , but at the same time lower than the pressure in the recess.
  • a pressure prevails which is higher than the pressure in the at least one pump chamber adjacent to the high vacuum side bearing , but at the same time lower than the pressure in the recess.
  • the adjustment of this pressure difference is preferably carried out stepwise over the intermediate chamber.
  • an increased pressure difference between the recess and the suction space adjacent to the high-vacuum side bearing can be achieved.
  • a higher pressure applied whereby the requirement for the bearings and the lubricant of the bearing are reduced with respect to the high vacuum compatibility.
  • more than two lip seals may be provided, more preferably between each two lip seals an intermediate chamber is provided. None, one, a plurality or all intermediate chambers can be connected via channels to suitable areas of the dry vacuum pump, so that the pressures in the intermediate chambers can be selected exactly, so that the properties of the lip seals can be taken into account.
  • a pressure of 1000 mbar to 0.1 mbar preferably prevails in the at least one pump chamber adjacent to the high-vacuum side bearing.
  • the recess prevails a pressure which is lower than the ambient pressure or atmospheric pressure of the dry vacuum pump.
  • a pressure which is lower than the ambient pressure or atmospheric pressure of the dry vacuum pump.
  • ambient pressure it is not necessary that ambient pressure is applied to the bearing.
  • the pressure difference between the recess and the high vacuum side bearing adjacent pump chamber can be kept as small as possible, whereby in particular the sealing device can be easily configured.
  • the pressure prevails in the recess of more than 100 mbar, preferably more than 400 mbar and particularly preferably more than 500 mbar.
  • the first channel has two connection points, with which the first channel is connected to the recess, wherein in each case one connection point is arranged on one side of the high vacuum side bearing, so that there is no pressure difference between the sides of the high vacuum side bearing.
  • bearings are not designed to compensate for a pressure differential. The provision of two connection points of the first channel ensures that there is no pressure difference across the high vacuum side bearing.
  • the dry vacuum pump is a multi-stage pump.
  • two pump chambers are connected by a connecting channel for fluidically connecting the pump chambers.
  • the pumping medium can pass from a pumping chamber via the connecting channel into the adjoining pumping chamber.
  • the first channel pump and / or the second channel is connected to a respective connecting channel.
  • the high-vacuum side bearing is arranged in the end region of the rotor shaft.
  • no further element possibly with the exception of a sealing element, is connected to the shaft.
  • the end region is the area of the outer 5 cm, in particular the outer 3 cm of the shaft.
  • the at least one pump chamber adjacent to the high-vacuum side bearing is connected to the inlet.
  • the dry vacuum pump has at least a first pumping chamber, a central pumping chamber and a last pumping chamber, wherein the first pumping chamber is arranged in particular immediately adjacent to the high vacuum side bearing.
  • the inlet is connected to the middle pumping chamber and the outlet to the last pumping chamber.
  • the pumping medium is conveyed from the middle pumping chamber to the first pumping chamber and then the pumping medium is conveyed from the first pumping chamber to the last pumping chamber.
  • the middle pumping space which is connected to the inlet, the lowest pressure.
  • the first pumping chamber Immediately adjacent to the high-vacuum side bearing, however, is the first pumping chamber, in which there is already a higher pressure than in the middle pumping chamber.
  • the pressure difference between the pump chamber adjacent to the high-vacuum side bearing and the recess in which the high-vacuum side bearing is arranged is reduced. If the inlet were connected directly to the first pumping chamber, the first pumping chamber would have the lowest pressure, so that a larger pressure difference would have to be bridged by the sealing device.
  • two pump chambers are separated by a partition wall, wherein the connection channel is arranged in the partition wall.
  • the first and / or the second channel is directly connected to a respective suction chamber.
  • the pump housing has a parting plane extending in the longitudinal direction of the rotor shaft.
  • the pump housing is formed in two parts.
  • the structure of the pump housing is simplified.
  • this makes it possible to use a one-piece rotor shaft.
  • the parts of the pump housing preferably have contact surfaces through which the parting plane runs.
  • the first channel and / or the second channel is formed as a groove in one of the contact surfaces.
  • the course of the first and / or second channel can be formed in a simple manner.
  • the dry vacuum pump according to the invention has a plurality of pump stages arranged axially one behind the other.
  • a pump housing 10 a plurality of pump chambers 12 are arranged.
  • first rotor elements 14 and second rotor elements 16 are arranged in the pump chambers 12 .
  • the first rotor elements 14 are connected to a first rotor shaft 18 and the second rotor elements 16 to a second rotor shaft 20.
  • First rotor elements 14 and second rotor elements 16 cooperate in such a way to convey a pumping medium from the inlet 22 to an outlet 24.
  • the individual pumping stages via connection channels 26, which in the partitions 28 which separate the pump chambers 12 from each other, arranged.
  • the rotor shafts 18 and 20 are rotatably supported by fore-vacuum side bearings 30 and high vacuum side bearings 32.
  • the high-vacuum-side bearing 32 in the end region of the respective shaft 18, 20 is arranged in the illustrated example.
  • a first pumping chamber 34 is in this case immediately adjacent to the high-vacuum-side bearing 32.
  • the inlet is connected to the first pumping chamber 34 so that a low pressure prevails in the first pumping chamber 34.
  • a sealing device 36 is arranged, which in detail in FIG. 2 is shown.
  • the sealing device 36 has a first lip seal 38 and a second lip seal 40. These are separated by a spacer 43. Both the first lip seal 38 and the second lip seal 40 abuts against the rotor shaft 18.
  • the high vacuum side bearing 32 is arranged in a recess 42. With the recess 42, a first channel 44 is connected.
  • the first channel 44 has two connection points 48, which are connected to the recess 42 on each side of the high-vacuum-side bearing 32. This ensures that above the high-vacuum side bearing no pressure difference is applied, which would have to be compensated by the bearing. This would lead to increased wear or reduced performance of the bearing.
  • the first channel 44 is connected to a connection channel 26. In the in the FIG. 1 the example shown, the first channel 44 is connected to the connecting channel between the last pumping chamber 50 and the penultimate pumping chamber 52. At this point, there is already a relatively high pressure of preferably up to 500 mbar.
  • this pressure is in any case less than the ambient pressure surrounding the vacuum pump.
  • the first channel 44 ensures that in the recess 42, the same pressure is applied, as in the connecting channel between the last pumping chamber 50 and the penultimate pumping chamber 52. If in this area, for example, the pressure 500 mbar, so is the high-vacuum side bearing in a pressure of 500 mbar arranged. This makes it possible to use a variety of other lubricant for the high-vacuum side bearing 32. In particular, the high-vacuum-side bearing 32 can thereby be a grease-lubricated bearing.
  • the second channel 56 it is advisable, for example, to connect the second channel 56 to a connecting channel 26 which lies in the flow direction in front of the connecting channel 26 to which the first channel 44 is connected.
  • FIG. 1 the illustrated dry vacuum pump is shown in section, wherein the sectional plane coincides with the parting plane of the pump housing 10. Shown is the lower pump housing half, which has a contact surface 58, with which the lower half of the pump housing 10 with an upper Half of the pump housing 10 is joined together.
  • the first channel 44 and the second channel 56 are formed as a groove in the contact surface 58.
  • FIG. 3 Another embodiment is in FIG. 3 shown, wherein like elements are identified by identical reference numerals.
  • dry vacuum pump is an inlet 60 connected to a central pumping chamber 62.
  • the pumping medium is conveyed via connection channels 26 through the rotor elements 14 into a first pumping chamber 34.
  • the pressure difference between the recess 42, in which the high-vacuum-side bearing 32 is arranged and the first pumping chamber 34 is thus reduced, so that simplifies the construction of the sealing device 36 in the first pumping chamber 34 can be.
  • Via a connecting channel (not shown) the pumping medium passes from the first pumping chamber via possibly further pumping stages into a last pumping chamber 50 and from there to the outlet 24.
  • the requirement for the sealing device 36 can be reduced in a simple manner, so that a higher pressure is achieved in the recess 42.
  • a grease-lubricated bearing as the high vacuum side bearing 32.
  • neither embodiment is it necessary to actively cool the lip seals. It is still necessary to provide oil in the region of the sealing device 36 in order to achieve a suitable sealing effect of the lip seals 38, 40.
  • sealing devices 36 are provided in particular on both high-vacuum side bearings.
  • the sealing devices 36 are formed identically.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (15)

  1. Pompe à vide sèche comportant
    un carter de pompe (10) formant plusieurs espaces en godet (12),
    des éléments de rotor (14, 16) disposés dans les espaces en godet (12) et destinés à transporter un fluide de pompe depuis une admission (22, 60) côté vide poussé vers une sortie (24), au moins un élément de rotor (14, 16) étant disposé dans chaque espace en godet (12),
    un arbre de rotor (18, 20) relié aux éléments de rotor (14, 16), et
    des paliers (30, 32) portant l'arbre de rotor (18, 20), un palier côté vide poussé (32) étant disposé dans un évidement (42),
    où un dispositif d'étanchéité (36) est disposé entre le palier côté vide poussé (32) et au moins un espace en godet (34) adjacent au palier côté vide poussé (32),
    caractérisée en ce que
    l'évidement (42) est relié par un premier canal (44) à une zone de la pompe à vide sèche dans laquelle règne une pression supérieure à celle dans au moins un espace en godet (34) adjacent au palier côté vide poussé (32).
  2. Pompe à vide sèche selon la revendication 1, caractérisée en ce qu'il s'agit, concernant le palier côté vide poussé (32), d'un palier graissé à la graisse.
  3. Pompe à vide sèche selon la revendication 1 ou 2, caractérisée en ce que de l'huile n'est présente ni dans l'évidement (42) ni dans le dispositif d'étanchéité (36).
  4. Pompe à vide sèche selon l'une des revendications 1 à 3, caractérisée en ce que le dispositif d'étanchéité (36) présente au moins un joint à lèvre (38, 40), et en ce qu'il s'agit, concernant le joint à lèvre (38, 40), de préférence d'un joint à lèvre en PTFE.
  5. Pompe à vide sèche selon l'une des revendications 1 à 4, caractérisée en ce que le dispositif d'étanchéité (36) présente au moins deux joints à lèvres (38, 40) et en ce qu'une chambre intermédiaire (54) entre lesdits au moins deux joints à lèvres (38, 40) est reliée via un second canal (56) à une zone de la pompe à vide sèche dans laquelle règne une pression qui est supérieure à la pression dans ledit au moins un espace en godet (12) adjacent au palier côté vide poussé (32) et inférieure à la pression dans l'évidemment (42).
  6. Pompe à vide sèche selon l'une des revendications 1 à 5, caractérisée en ce que règne dans ledit au moins un espace en godet (34) adjacent au palier côté vide poussé (32) une pression inférieure à 0,01 mbar et/ou en ce que règne dans l'évidement (42) une pression qui est inférieure à la pression environnante de la pompe à vide sèche.
  7. Pompe à vide sèche selon l'une des revendications 1 à 6, caractérisée en ce que règne dans l'évidement (42) une pression de plus de 100 mbar et de préférence de plus de 400 mbar, et de façon particulièrement préférée de plus de 500 mbar.
  8. Pompe à vide sèche selon l'une des revendications 1 à 7, caractérisée en ce que la différence de pression entre ledit au moins un espace en godet (12) adjacent au palier côté vide poussé (32) et l'évidement (42) est inférieure à 300 mbar, de préférence inférieure à 200 mbar, et de façon particulièrement préférée inférieure à 50 mbar.
  9. Pompe à vide sèche selon l'une des revendications 1 à 8, caractérisée en ce que le premier canal (44) présente deux points de raccordement (48) avec l'évidement (42), un point de raccordement (48) étant respectivement disposé sur respectivement un côté du palier côté vide poussé (32), si bien qu'il n'existe pas de différence de pression entre les côtés du palier côté vide poussé (32).
  10. Pompe à vide sèche selon l'une des revendications 1 à 9, caractérisée en ce que deux espaces en godet (12) sont reliés par un canal de liaison (26) pour une liaison fluidique des espaces en godet (12), et en ce que le premier canal (44) et/ou le second canal (56) sont reliés à un canal de liaison (26) respectif.
  11. Pompe à vide sèche selon l'une des revendications 1 à 10, caractérisée en ce que le palier côté vide poussé (32) est disposé dans la zone d'extrémité de l'arbre de rotor (18, 20).
  12. Pompe à vide sèche selon l'une des revendications 1 à 11, caractérisée par au moins un premier espace en godet (34), un espace en godet intermédiaire (62) et un dernier espace en godet (50), le premier espace en godet (34) étant disposé de façon adjacente au palier côté vide poussé (32), l'admission (60) étant reliée à l'espace en godet intermédiaire (62), la sortie (24) étant reliée au dernier espace en godet (50) et le fluide de pompe étant transporté depuis l'espace en godet intermédiaire (62) vers le premier espace en godet (34), et le fluide de pompe étant transporté depuis le premier espace en godet (34) vers le dernier espace en godet (50).
  13. Pompe à vide sèche selon l'une des revendications 1 à 11, caractérisée en ce que deux espaces en godet (12) sont séparés l'un de l'autre par une paroi de séparation (28) et en ce que le canal de liaison (26) est disposé dans la paroi de séparation (28).
  14. Pompe à vide sèche selon l'une des revendications 1 à 13, caractérisée en ce que le premier et/ou le second canal (44, 56) sont reliés directement à un espace en godet (12) respectif.
  15. Pompe à vide sèche selon l'une des revendications 1 à 14, caractérisée en ce qu'un plan de séparation du carter de pompe s'étend dans la direction longitudinale de l'arbre de rotor (18, 20) et/ou en ce que le carter de pompe (10) est formé en deux parties.
EP16790952.2A 2015-11-03 2016-10-31 Pompe à vide sèche Active EP3371458B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202015007606.8U DE202015007606U1 (de) 2015-11-03 2015-11-03 Trockenvakuumpumpe
PCT/EP2016/076223 WO2017076803A1 (fr) 2015-11-03 2016-10-31 Pompe à vide sèche

Publications (2)

Publication Number Publication Date
EP3371458A1 EP3371458A1 (fr) 2018-09-12
EP3371458B1 true EP3371458B1 (fr) 2019-12-04

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EP16790952.2A Active EP3371458B1 (fr) 2015-11-03 2016-10-31 Pompe à vide sèche

Country Status (8)

Country Link
US (1) US10851783B2 (fr)
EP (1) EP3371458B1 (fr)
JP (1) JP2018532943A (fr)
KR (1) KR20180070704A (fr)
CN (1) CN108431422B (fr)
DE (1) DE202015007606U1 (fr)
MY (1) MY193264A (fr)
WO (1) WO2017076803A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3079886B1 (fr) * 2018-04-05 2020-04-24 Pfeiffer Vacuum Pompe a vide de type seche
FR3087504B1 (fr) * 2018-10-17 2020-10-30 Pfeiffer Vacuum Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees
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CN108431422A (zh) 2018-08-21
JP2018532943A (ja) 2018-11-08
CN108431422B (zh) 2019-07-23
WO2017076803A1 (fr) 2017-05-11
US20180340535A1 (en) 2018-11-29
EP3371458A1 (fr) 2018-09-12
KR20180070704A (ko) 2018-06-26
MY193264A (en) 2022-09-29
US10851783B2 (en) 2020-12-01
DE202015007606U1 (de) 2017-02-06

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