FR3087504B1 - Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees - Google Patents

Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees Download PDF

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Publication number
FR3087504B1
FR3087504B1 FR1859617A FR1859617A FR3087504B1 FR 3087504 B1 FR3087504 B1 FR 3087504B1 FR 1859617 A FR1859617 A FR 1859617A FR 1859617 A FR1859617 A FR 1859617A FR 3087504 B1 FR3087504 B1 FR 3087504B1
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FR
France
Prior art keywords
vacuum pump
temperature
controlling
pumping
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1859617A
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English (en)
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FR3087504A1 (fr
Inventor
Yannick Grenier
Paul Decorde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=65244325&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR3087504(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR1859617A priority Critical patent/FR3087504B1/fr
Priority to TW108132800A priority patent/TWI798487B/zh
Priority to US17/285,679 priority patent/US20210404476A1/en
Priority to EP19773440.3A priority patent/EP3867531B1/fr
Priority to PCT/EP2019/076111 priority patent/WO2020078689A1/fr
Priority to JP2021521152A priority patent/JP2022505202A/ja
Priority to KR1020217014736A priority patent/KR20210074368A/ko
Priority to CN201980066007.4A priority patent/CN112805472B/zh
Publication of FR3087504A1 publication Critical patent/FR3087504A1/fr
Publication of FR3087504B1 publication Critical patent/FR3087504B1/fr
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0666—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump a sensor is integrated into the pump/motor design
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/01—Load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F04C2270/195—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

L'invention concerne un procédé de contrôle de la température d'une pompe à vide (2) de type sèche soumise à des charges de pompage variables, dans lequel on contrôle la température de la pompe à vide (2) au moyen d'au moins un élément refroidisseur (11a, 11b) couplé au stator (5) en fonction d'une consigne de température et d'une mesure de la température du stator (5), caractérisé en ce qu'on surveille si la valeur d'un paramètre représentatif de la charge de pompage choisi parmi un courant consommé ou une puissance consommée par la pompe à vide (2) est inférieure à un seuil de charge et, si la valeur du paramètre représentatif de la charge de pompage est inférieure au seuil de charge alors on augmente la consigne de température. L'invention concerne également une pompe à vide de type sèche et une installation.
FR1859617A 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees Active FR3087504B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1859617A FR3087504B1 (fr) 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees
TW108132800A TWI798487B (zh) 2018-10-17 2019-09-11 用於控制真空泵的溫度之方法及相關的真空泵和設備
PCT/EP2019/076111 WO2020078689A1 (fr) 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées
EP19773440.3A EP3867531B1 (fr) 2018-10-17 2019-09-26 Procédé de contrôle de la température d'une pompe à vide, pompe à vide et installation associées
US17/285,679 US20210404476A1 (en) 2018-10-17 2019-09-26 Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation
JP2021521152A JP2022505202A (ja) 2018-10-17 2019-09-26 真空ポンプの温度制御方法、並びに関連する真空ポンプおよびその設備
KR1020217014736A KR20210074368A (ko) 2018-10-17 2019-09-26 진공 펌프의 온도를 제어하는 방법, 및 관련 진공 펌프 및 설비
CN201980066007.4A CN112805472B (zh) 2018-10-17 2019-09-26 用于控制真空泵的温度的方法以及相关的真空泵和设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1859617A FR3087504B1 (fr) 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees

Publications (2)

Publication Number Publication Date
FR3087504A1 FR3087504A1 (fr) 2020-04-24
FR3087504B1 true FR3087504B1 (fr) 2020-10-30

Family

ID=65244325

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1859617A Active FR3087504B1 (fr) 2018-10-17 2018-10-17 Procede de controle de la temperature d’une pompe a vide, pompe a vide et installation associees

Country Status (8)

Country Link
US (1) US20210404476A1 (fr)
EP (1) EP3867531B1 (fr)
JP (1) JP2022505202A (fr)
KR (1) KR20210074368A (fr)
CN (1) CN112805472B (fr)
FR (1) FR3087504B1 (fr)
TW (1) TWI798487B (fr)
WO (1) WO2020078689A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI815109B (zh) * 2021-04-28 2023-09-11 華碩電腦股份有限公司 散熱檢測方法以及電子裝置
FR3128745A1 (fr) * 2021-10-29 2023-05-05 Pfeiffer Vacuum Pompe à vide sèche
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2637655B1 (fr) * 1988-10-07 1994-01-28 Alcatel Cit Machine rotative du type pompe a vis
CN1103872C (zh) * 1995-11-29 2003-03-26 日本真空技术株式会社 油密封旋转式真空泵的冷却装置
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
JP2003083273A (ja) * 2001-09-12 2003-03-19 Ebara Corp ドライ真空ポンプ
GB0326061D0 (en) * 2003-11-10 2003-12-10 Boc Group Plc Improvements in screw pumps
JP4673011B2 (ja) * 2004-07-05 2011-04-20 株式会社島津製作所 ターボ分子ポンプの温度制御装置
KR100497982B1 (ko) * 2004-10-01 2005-07-01 (주)엘오티베큠 루츠형 로터와 스크루형 로터를 지닌 복합 드라이 진공펌프
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0510892D0 (en) * 2005-05-27 2005-07-06 Boc Group Plc Vacuum pump
TW200905079A (en) * 2007-07-18 2009-02-01 Shanorm Tech Co Ltd Dry vacuum pump device and cooling method thereof
DE102009053268A1 (de) * 2009-11-13 2011-05-26 Bayerische Motoren Werke Aktiengesellschaft Klimaanlage für Kraftfahrzeuge
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
JP6097067B2 (ja) * 2012-12-19 2017-03-15 株式会社荏原製作所 ドライポンプ装置
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
KR101712962B1 (ko) * 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
US10590955B2 (en) * 2017-02-23 2020-03-17 Shimadzu Corporation Turbo-molecular pump

Also Published As

Publication number Publication date
TW202018186A (zh) 2020-05-16
CN112805472B (zh) 2023-01-24
JP2022505202A (ja) 2022-01-14
TWI798487B (zh) 2023-04-11
US20210404476A1 (en) 2021-12-30
KR20210074368A (ko) 2021-06-21
EP3867531B1 (fr) 2022-06-01
CN112805472A (zh) 2021-05-14
WO2020078689A1 (fr) 2020-04-23
FR3087504A1 (fr) 2020-04-24
EP3867531A1 (fr) 2021-08-25

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