200905079 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種乾式真空幫浦裝置及 式真空幫浦的冷卻面卸提昇tS的空=控 【先前技術】 參照圖1，習知的乾式真空幫浦包含：— 40連結於該馬達10之一幫浦箱2〇、設置於兮、藉由窗輪 管⑼、經由該輸送管60連結二路=J路”〇、-輸送 制闊广與鮮職連通之液流量控 的齒下10帶動連结於s乾式真空幫浦 :二=之下，會使溫度上二 室，並從處理室中吸入詹理裔s 在製私中會連接至一處理 上需保獅，咖產品， 積附著的量增加，則轉子21“幫浦^ 鐵氟龍及其上的沉積物’造成運 量測出的溫度超過！贼ϋ 之間，若熱感測器 上升至超過靴，，上ϋίΐίϊ會發出警告；若溫度持續 空設備也停錢作，造作，=連的真 此外，幫浦箱内壁所塗佈之鐵氣龍會因·;轉ΐ磨ii浦箱内 200905079 =耗損。若耗損過多’則需重新塗佈鐵氟龍。但是塗 是4QQ°C ’如此反覆幾次高溫重I製程後， 3 20内原有的冷卻迴路220與幫浦箱2〇之間的 曰使】 冷部迴路220冷卻幫浦箱2〇的效果就會下降，使得 iHrGrpm轉速操作下，立即發生溫度過高的問題目此‘ 而要更換新的幫浦箱2〇。而因為更換幫浦箱Μ的頻率资隹的 =塗佈6次鐵氟龍之後就需要更換新的幫浦箱2Q工上㈡ 本。且幫浦箱中的冷卻迴路22〇僅為單一的上= 料浦箱20的運轉溫度的㈣效率不佳，若此單H對 立即會使整個幫浦當機。 Μ問遞’ 【發明内容】 題。本發明的實施例可解決上述及/或其他的全部或是其中—個問 馬達:】=二^^、*提供:種乾式真空幫浦，包括:-二轉子、設置於該幫浦箱内壁中之一冷 ::内二 量Ϊ制閥，設置於該幫浦箱上之以：; 一冷卻板。根據此實施例:二: 換整ί換:屬，且相較於更 -、 貝施例，提供一種可使乾式真空幫浦的冷 k仗早迴路成為多重迴路， 制乾式真空幫浦地難〜舰日加冷卩逮度、有效地控 式直空幫浦度轉她作溫度範_的方法。該乾 ί量==冷卻迴路、-冷卻液細空制閥、及連接 該~部液•里控制閥與該單—冷卻迴路钱 200905079 首先，安裝包含一前冷卻元件 式真空幫浦箱上；接著連通該乾之Γ冷卻板於該乾 冷卻板，使之成為一多重冷卻、回"、工有中之该冷卻迴路與該 料至該多重冷卻迴路中，^給=路；然後經由輸送管通入冷卻材 作溫度範圍内 、、忒乾式真空幫浦之運轉溫度在操 的溫:之:中ί:材r為任何液體 或氣體。冷卻材料 高低為準，藉由冷:§隱流量同時皆可控制。以運轉溫度 轉溫度猶高則通人較多量心fjf來控制冷卻材料的通入量（運 入較少量的冷卻材料）。料，反之，運轉溫度稍低則通 原先的單一冷卻迴路和乾^真良好，即使 使此多重冷卻迴路得到声虹二、4間的接觸惡化，依然可以 幫浦之間的接觸變差、； '人:7效果。即使冷卻板與乾式真空 重工製程重新塗真空幫浦。也就是說，因為高溫 乾式真空幫浦箱的需：冷郃效果變差’以致不得不_ 幾乎不再需要更換乾式真箱不論經過幾次高溫重工製程， 及乾式真 空幫=控ii:的確提供了較良好的乾式真空幫浦 【實施方式】 ϊ:圖來對本發明作更詳細的說明。 面圖。該艮據本發明之一實施例的乾式真空幫浦的剖 先打開冷卻if 操作方式如下··在啟動馬達iq之前，需 Γ〇上中白勺單一冷卻迴路，再輸入到設置於幫浦箱 6〇輸出;令卻材:部ί路220連通的冷卻板3〇，最後再經由輪送管 子210不！Jt枓。處理氣體從進氣管70進入幫浦箱20 ,因為轉 旋轉’不斷把處理氣體向下抽吸，最後從排氣管80排 200905079 出處理氣體。輸送管6G包含輸人管及輪奸，在 的:候輸入冷卻材料，可使幫浦箱2〇的溫度保持在摔作、:产 =穩ίΡΠί任何液？或氣體。因為水的溫度易於控 發明的貫施例中，使用水作為冷卻材料。冷 流-水量 _物的冷卻材料圍=== 纖崎編 广 ί^ΐΐο ^ 18〇C"J 2〇〇C^f' 0 10 馬、,相連接，因為齒輪數比，當啟動馬達ι〇使 ΐί、= ΐ 的轉速運轉時’會帶動轉子210以_啊的 210之間的間距僅有aimm，且轉子210 浦箱2目。的運理ΐ j速運轉的情況之下， = 里氣體產生的副產品維持在氣態，以避免 中的運轉/皿度物作關大約是在9(rc 冗範==持處理氣體產生的副產之= =高？^S箱：^2。發出警告，若溫度 間的損失。但因為冷卻板30和幫浦箱2 】 之間的接觸變得較=二以有= 在操作溫度範圍内。如此- 包含:-馬達 、人m 、人逆按之桌庸相20、在幫浦箱20上設置一 冷部板H翁流量控侧5Q、及—輸送㈣。冷卻板3〇 200905079 包含前冷卻元件與後冷卻元件，在此僅例示性地顯示立中之一。 輸送管60之一端口連接冷卻液流量控制閥5〇，另二端/口連接幫浦 箱20内的單=冷钟迴路220。冷卻板3〇係為可通入冷卻材料（例 如水）的t空元件’且冷卻板30與原本的單一冷卻迴路22〇相通， 形成多重冷卻迴路。乾式真空幫浦從原先只有單—冷卻迴路變成 多重冷卻迴路，所以可以增加冷卻面積，補償單一冷卻迴路22〇 與幫浦箱20接觸不請導致的降溫效果惡化。即使冷卻板％的 冷卻效果漸差’或是冷卻板30有損傷，導致無法姐地冷卻幫浦 箱20，只要更換冷卻板30即可，而不需要更換整個幫浦箱2〇。 :令卻板3G之材質可為任何金屬’較佳的材f為銘。因為銘的重量 輕丄I方麵運及更換冷卻板3G;且軸成本絲，即使是作為 If換的性零件’相，於原本需更換整個幫浦箱20的高價， ，疋可以即省製造成本及資源。且更換冷卻板3G的手續僅需快速 間便的拆裝步驟，對於追求高效能的目標而言，十用在 平曰就製造許多備用的冷卻板，以備不時之需。 、 本實施例，把原先只能承受大約6次高溫重 溫重工製程次數幾乎沒有限制的幫浦。且和 更換幫浦箱20的高頻率比起來，幾乎不需 ‘ 20 ’所以能大大降魅產成本。 ㈣^南相 =日聰具衫-靖點：因為安裝冷卻板3()，所 冷卻迴路22Q變成多重冷卻迴路，藉此，tL箱2〇之 ^ 積增加。因此，藉由調節流入多重冷卻 錄快，冷較果也雛，確彳_>4運可 以一直保持在操作溫度範圍内。 说轉酿度叮 箱20本】3要注意 1的是：必需保持幫浦箱20的完整，不可對幫浦 進仃任何切割、不能彳巴f浦箱20 ΜI p :咸?盘» 浦箱20上加梦細紅^ · 的奋度减潯、也不能在幫 箱20 裝其何冷卻系統。儘管切割幫_扣、減铺哺 倉相20的溫度降低復多、冷卻速度也很快，但是如而= 10 200905079 幫浦箱20的運轉溫度不能達到操作溫度範圍的下限，也就是說， 會使處理氣體產生的副產品無法保持氣態，以致固體微 附著沉積在幫浦箱20内壁之鐵氟龍塗佈上。 此 本，以上所述之細節只是為了詳細解說 之:不; 類型’所有的變異型皆包含在本“的;ί專：：修正的 【圖式簡單說明】 圖 圖 圖1為先前技術之真空乾式 圖2為先前技術之真空乾;‘淹橫剖面圖。 4為本發明之真^ 3横剖面圖。° … ㈣放大剖面 圖 3為本發明之真空乾式法，之局部放大剖面圖。 4為本發明之真空 Ζ凍横剖面圖。 圖 說明： 10 .馬達 20 30 幫浦 冷卻板 齒輪 50 60 70 80 冷卻液流量控制閥 輪送管 進氣管 排氣管 210 :轉子 220 :單一冷卻迴路200905079 IX. Description of the invention: [Technical field of the invention] The present invention relates to a dry vacuum pump device and a vacuum pump for cooling surface unloading and lifting tS. [Prior Art] Referring to Figure 1, the conventional dry type The vacuum pump includes: - 40 is connected to one of the pump 10 of the motor 10, is disposed at the crucible, is connected to the window wheel tube (9), and is connected via the duct 60 to the second road = J road" The liquid flow control of the teeth under the communication with the fresh job is connected to the s dry vacuum pump: two = below, the temperature will be in the second chamber, and the inhalation from the processing chamber will be connected to one. In the treatment, the amount of lions and coffee products to be added is increased, and the temperature of the rotor 21 "pump ^ Teflon and its deposits" causes the measured temperature to exceed! Between the thieves, if the thermal sensor rises above the boot, the upper ϋ ΐ ϋ ϊ 发出 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; Long will be due to; turn to honing ii Pu box inside 200905079 = wear and tear. If you consume too much, you need to recoat Teflon. However, the coating is 4QQ °C 'This is repeated several times after the high temperature and heavy I process, the original cooling circuit 220 between the 3 20 and the pump box 2 曰 】 】 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷It will drop, so that under the operation of iHrG rpm, the problem of excessive temperature will occur immediately. The new pump box will be replaced. And because the frequency of the replacement of the pump box = = coating 6 times Teflon, you need to replace the new pump box 2Q work (2). Moreover, the cooling circuit 22 in the pump box is only a single upper = the operating temperature of the material tank 20 is not efficient, and if the single H pair immediately causes the entire pump to be down. Μ问递' [invention content] title. The embodiment of the present invention can solve the above and/or other all or one of the motors: ???=2^,* provides: a dry vacuum pump, including: - two rotors, disposed on the inner wall of the pump box One of the cold:: inner two-quantity valve, set on the pump box to:; a cooling plate. According to this embodiment: two: change ί 换: genus, and compared to the more -, Beisi, provide a cold vacuum 仗 early loop of the dry vacuum pump into multiple loops, dry vacuum pump difficult ~ Ship day plus cold catching, effective control of the direct air pump to turn her temperature method _. The dry amount == cooling circuit, - cooling liquid fine air valve, and connecting the ~ part liquid · inner control valve and the single - cooling circuit money 200905079 First, the installation includes a front cooling element type vacuum pump box; Then, the dry cooling plate is connected to the dry cooling plate to make it a multiple cooling, returning, and the cooling circuit and the material to the multiple cooling circuit, and then to the multiple cooling circuit; The conveying pipe is connected to the cooling material for the temperature range, and the operating temperature of the dry vacuum pump is at the operating temperature: wherein: the material r is any liquid or gas. The cooling material is subject to high and low, and the cold: § hidden flow can be controlled at the same time. At the operating temperature, if the temperature is still high, a large amount of fjf is used to control the amount of cooling material (a small amount of cooling material is transported). On the contrary, if the operating temperature is slightly lower, the original single cooling circuit and the dryness are good. Even if the multiple cooling circuits are exposed to the contact between the two or four, the contact between the pumps can be deteriorated. 'People: 7 effects. Even if the cooling plate and the dry vacuum rework process repaint the vacuum pump. That is to say, because of the need of high-temperature dry vacuum pump box: the cold heading effect is worse, so that it has to be replaced _ almost no need to replace the dry box, no matter how many high-temperature rework processes, and dry vacuum help = control ii: indeed provide A better dry vacuum pump [Embodiment] The following is a more detailed description of the present invention. Surface map. The dry vacuum pump of the dry vacuum pump according to an embodiment of the present invention opens the cooling if operation mode as follows: Before starting the motor iq, it is necessary to apply a single cooling circuit in the middle and then input to the pump box. 6〇 output; let the material: the 395 road cooling plate 3 〇, and finally through the wheel 210! Jt枓. The process gas enters the pump box 20 from the intake pipe 70, because the rotary rotation continuously draws the process gas downward, and finally the process gas is discharged from the exhaust pipe 80. The conveying pipe 6G contains the input pipe and the gang rape. In the following: the cooling material is input, so that the temperature of the pump box 2 保持 can be kept, and the production is stable. Or gas. Since the temperature of the water is easy to control, water is used as the cooling material in the embodiment of the invention. Cold flow - water quantity _ material cooling material circumference === 纤崎编广 ί^ΐΐο ^ 18〇C"J 2〇〇C^f' 0 10 horse, connected, because the gear ratio, when starting the motor ι When the speed of ΐί, = 运转 is running, 'the rotor 210 will be driven to a distance of 210 between the 210 and the rotor 210 will be 2 mesh. In the case of j-speed operation, the by-products generated by the gas in the gas are maintained in a gaseous state to avoid the operation/drainage of the medium is about 9 (rc redundant == by-product produced by the processing gas) ==High?^S box: ^2. Issue a warning if there is a loss between temperatures. But because the contact between the cooling plate 30 and the pump box 2] becomes =2 to have = in the operating temperature range. So - contains: - motor, person m, person reverse pressing table mediocre 20, set a cold plate on the pump box 20 H Wen flow control side 5Q, and - transport (four). Cooling plate 3〇200905079 including pre-cooling The element and the post-cooling element are only exemplarily shown as one of the standings. One port of the conveying pipe 60 is connected to the coolant flow control valve 5〇, and the other end/port is connected to the single=cold clock circuit in the pump box 20. 220. The cooling plate 3 is a t-air element that can pass through a cooling material (for example, water) and the cooling plate 30 communicates with the original single cooling circuit 22 to form a multiple cooling circuit. The dry vacuum pump is originally only one- The cooling circuit becomes a multiple cooling circuit, so you can increase the cooling area and compensate for the single cooling. The temperature drop effect caused by the contact between the road 22 and the pump box 20 is deteriorated. Even if the cooling effect of the cooling plate is gradually deteriorated or the cooling plate 30 is damaged, the pump box 20 cannot be cooled, and the cooling plate 30 is replaced. You can replace the entire pump box 2〇. : The material of the board 3G can be any metal 'best material f'. Because the weight of the name is light and the replacement of the cooling board 3G; The shaft cost wire, even if it is an If-replaced part, the original price of the entire pump box 20 needs to be replaced, so that the manufacturing cost and resources can be saved. The procedure for replacing the cooling plate 3G only needs to be quick. In the disassembly and assembly process, for the goal of pursuing high performance, a number of spare cooling plates are used in Pingyi to prepare for the emergency. In this embodiment, the original can only withstand about 6 times of high temperature reheating. There are almost no restrictions on the number of processes, and compared with the high frequency of replacing the pump box 20, there is almost no need for '20', so it can greatly reduce the cost of the charm. (4) ^Nanxiang = 日聪衫- Jingjing: Because Install the cooling plate 3 (), the cooling circuit 22Q becomes Multiple cooling circuits, by which, the accumulation of the tL tank 2〇 is increased. Therefore, by adjusting the inflow and multiple cooling recordings, the cold is more fruitful, and the _>4 operation can be kept within the operating temperature range. Turning the capacity of the box 20] 3 to pay attention to 1 is: must maintain the integrity of the pump box 20, can not enter the cutting of the pump, can not smash the p box 20 ΜI p: salty plate » Pu box 20 On the plus dream red ^ · the degree of fatigue reduction, can not be installed in the help box 20 cooling system. Although the cutting _ buckle, the reduction of the temperature of the feeding phase 20 is more complex, cooling rate is also very fast, but For example, = 10 200905079 The operating temperature of the pump box 20 cannot reach the lower limit of the operating temperature range, that is, the by-products generated by the processing gas cannot be kept in a gaseous state, so that the solid micro-adheres to the Teflon deposited on the inner wall of the pump box 20 Coated. In this book, the above details are only for the detailed explanation: no; type 'all variants are included in this one; ί special:: modified [schematic description] Figure 1 is the vacuum of the prior art Figure 2 is a prior art vacuum drying; 'flooding cross-sectional view. 4 is a true cross-section of the present invention. 3 ... (4) Amplified cross-sectional view 3 is a partially enlarged cross-sectional view of the vacuum dry method of the present invention. The vacuum freeze cross section of the present invention. Fig. Description: 10. Motor 20 30 pump cooling plate gear 50 60 70 80 coolant flow control valve wheel feed pipe intake pipe exhaust pipe 210 : rotor 220 : single cooling circuit