JP2018062872A - Vacuum pump, chiller of vacuum pump, cooling method of vacuum pump, vacuum evacuation system, and maintenance method of vacuum pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the product material capture in a capture device by preventing the product material from adhesion to the exhaust pipe of a vacuum pump.SOLUTION: A vacuum pump comprises: a pump chamber having an inlet port 1121 and an exhaust port 1122; an exhaust pipe 113 connected to the exhaust port for introducing the exhaust air from the pump chamber to the outside of the vacuum pump; and a chiller 120 for cooling the exhaust pipe. The exhaust pipe includes: a first exhaust pipe portion 1131; and a second exhaust pipe portion 1132. The first exhaust pipe portion is connected to the exhaust port of the pump chamber; the second exhaust pipe portion is located at a position farther from the exhaust port of the pump chamber than the first exhaust pipe portion; and the chiller is disposed in the second exhaust pipe portion.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vacuum pump, a vacuum pump cooling device, a vacuum pump cooling method, a vacuum exhaust system, and a vacuum pump maintenance method.

  The vacuum state is currently used in a wide range of fields in industrial technology. For example, promoting the evaporation of moisture is used for vacuum drying, etc., and collisions between molecules are reduced. Used for metallurgy. Of the vacuum pumps, the rotary pump is the most common, and is assembled eccentrically on the body and sucks and discharges air by means of blades or rotors rotating along the inner wall to create a vacuum. As one type of this rotary pump, a vacuum for forming a vacuum atmosphere in a manufacturing process (for example, a CVD process) of semiconductors, liquid crystals, etc., or for forming a vacuum atmosphere up to about 0.133 Pa in other industrial technical fields. A dry vacuum pump is widely used as a pump.

  Such a dry vacuum pump is used, for example, with its suction side connected to a manufacturing device such as a semiconductor or liquid crystal, and its exhaust side connected to a detoxifying device via a supplementary device (trap). The trap is a device that captures reaction by-products (hereinafter, also simply referred to as product) contained in the process gas from the manufacturing device, and can trap the product efficiently in a predetermined temperature range according to the product. It is. The detoxifying device detoxifies the exhaust after passing through the trap by burning it.

  When the gas to be evacuated by the vacuum pump is a process gas, the process gas may contain a product having a high sublimation temperature. In such a case, if the temperature of the vacuum pump is not higher than a predetermined temperature, there is a problem that the product is solidified and adheres to the exhaust pipe of the vacuum pump. Therefore, when the temperature of the exhaust pipe is increased in order to prevent the product from adhering to the exhaust pipe, the product may not be captured by the trap installed on the exhaust side of the vacuum pump. This is presumably because the temperature of the gas flowing into the trap became higher than the temperature range suitable for capturing the product, making it difficult to deposit the product in the trap.

  As a countermeasure, cooling water may be passed through the trap body, but this countermeasure may not be adopted depending on the system specifications. For example, when the cooling water flow path of the vacuum pump is connected to the trap body and the connection port (for example, a coupler) of the cooling water flow path is provided in the trap, the required flow rate may not be ensured due to the pressure loss of the coupler.

  Therefore, in such a case, it is desirable to be able to achieve both prevention of product adhesion to the exhaust pipe of the vacuum pump and capture of the product by the trap.

  Examples of systems including conventional vacuum pumps include those described in Patent Documents 1 and 2. Patent Document 1 describes a cooling mechanism connected to the suction port of the vacuum pump in order to prevent damage due to the temperature of the vacuum pump, but reference is made to control of the temperature of the exhaust gas flowing into the trap. Not. In Patent Document 2, in order to suppress the thermal expansion of the rotor, a cooling pipe and a cooling plate are provided in the gas discharge passage of the vacuum pump, and a cooling water passage is provided in the housing adjacent to the gas discharge passage. It is described that it is provided. This vacuum pump cools not only the inside of the gas discharge channel but also the inside of the pump section, and no consideration is given to preventing the product from adhering to the gas discharge channel.

JP 2006-9686 A JP 2004-293375 A

  An object of the present invention is to solve at least a part of the problems described above.

[1] A vacuum pump according to one aspect of the present invention includes a pump chamber having a suction port and a discharge port;
An exhaust pipe connected to the exhaust port, the exhaust pipe for guiding the exhaust from the pump chamber to the outside of the vacuum pump, and a cooling device for cooling the exhaust pipe, the exhaust pipe, A first exhaust pipe portion; and a second exhaust pipe portion, wherein the first exhaust pipe portion is connected to the exhaust port of the pump chamber, and the second exhaust pipe portion is connected to the first exhaust pipe portion. Is a position far from the exhaust port of the pump chamber, and the cooling device is disposed in the second exhaust pipe portion. The first exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes. The second exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes.

  According to this vacuum pump, since the cooling device is provided in the second exhaust pipe part far from the exhaust port of the pump chamber, the gas in the second exhaust pipe part is suitable for the desired temperature (processing of the capture device in the subsequent stage, etc. Temperature) and the first exhaust pipe portion close to the exhaust port of the pump chamber is not cooled, and the temperature of the pump chamber and the first exhaust pipe portion can be suppressed or prevented from decreasing. As a result, precipitation and adhesion of products in the pump chamber and the first exhaust pipe can be suppressed or prevented, and the temperature of the gas can be adjusted to a temperature suitable for the processing of the subsequent apparatus.

[2] The vacuum pump according to [1] may further include a heat insulating member interposed between the first exhaust pipe portion and the second exhaust pipe portion.
In this case, since the first exhaust pipe portion and the second exhaust pipe portion are insulated by the heat insulating member, the influence of the cooling by the cooling device of the second exhaust pipe portion is further suppressed from extending to the first exhaust pipe portion. Can be prevented.

[3] In the vacuum pump according to [2], the heat insulating member includes a resin-made annular ring interposed between the first exhaust pipe portion and the second exhaust pipe portion, and the first exhaust pipe. It is possible to have a resin clamp that connects the portion and the second exhaust pipe portion. The annular ring is, for example, an O-ring.
In this case, heat insulation and connection between the first exhaust pipe portion and the second exhaust pipe portion can be easily and reliably performed by the resin annular ring and clamp. Moreover, a stainless steel or resin ring (inner ring, outer ring) may be provided inside and outside a resin annular ring (for example, O-ring), or only an inner ring may be provided. The inner ring and the outer ring can be made of stainless steel having lower thermal conductivity than iron, for example. The inner ring and outer ring may be made of resin. If the inner ring and outer ring are made of resin, the heat insulation can be further improved.

[4] In the vacuum pump according to [2], the heat insulating member includes a resin-made third exhaust pipe portion interposed between the first exhaust pipe portion and the second exhaust pipe portion. It is possible.
By interposing the third exhaust pipe portion made of resin between the first exhaust pipe portion and the second exhaust pipe portion, heat insulation between the first exhaust pipe portion and the second exhaust pipe portion is more reliably performed. It can be carried out. Further, if the first exhaust pipe part and / or the second exhaust pipe part and the third exhaust pipe part are connected via a resin annular ring (O-ring), the first exhaust pipe part and the second exhaust pipe are connected. The heat insulation between the pipe portions can be further improved. If the first exhaust pipe part and / or the second exhaust pipe part and the third exhaust pipe part are connected using a resin clamp, the first exhaust pipe part and the second exhaust pipe part The heat insulation between can be improved more.

[5] The vacuum pump according to any one of [1] to [4], wherein the cooling device includes a cooling jacket that is attached around the second exhaust pipe portion and distributes the cooling medium. Is possible.
By adopting the cooling jacket, a cooling device having a high cooling effect can be easily configured. It is also possible to replace the assembly of the cooling jacket and the second exhaust pipe part by removing it from the first exhaust pipe part. Alternatively, only the cooling jacket may be removed from the second exhaust pipe portion and replaced.

[6] In the vacuum pump according to [5], the cooling device may be provided with one or more partition plates inside the cooling jacket.
With the partition plate 1213 arranged in this way, the cooling water flowing in the internal space of the cooling jacket 121 can be made to approach uniformly, and the second exhaust pipe portion 1132 can be uniformly cooled.

[7] The vacuum pump according to [6], wherein the partition plate extends in a direction transverse to a direction in which the second exhaust pipe portion extends and has an opening, or the cooling jacket. One or a plurality of spiral members extending spirally between an inner wall and the second exhaust pipe portion may be provided.
When the partition plate is configured by one or a plurality of plate-like members, the partition plate can be configured simply and mounting is also simple. When the partition plate is formed of a spiral member, the flow of cooling water inside the cooling jacket can be made smooth. When the partition plate is formed of a spiral member, a continuous spiral channel can be formed by a single member.

[8] In the vacuum pump according to [7], the partition plate includes a plurality of the plate-like members, and the plate-like members are arranged so that the opening portions do not overlap in adjacent plate-like members. It is possible. For example, the plate-like members can be arranged so that the openings are staggered in adjacent plate-like members.
When the partition plate is composed of one or a plurality of plate-like members, the flow of the cooling water can be made more uniform by, for example, staggering so that the openings of adjacent plate-like members do not overlap. It is.

[9] The vacuum pump according to any one of [1] to [8], further including a housing that houses at least a part of the exhaust pipe and the pump chamber, wherein the cooling device is disposed in the housing. It is possible to be arranged.
In this case, since the cooling device is attached in the vacuum pump, it is not necessary to separately attach the cooling device when the pipe is connected. Further, it is not necessary to change the length of the pipe connected to the exhaust side capture device.

[10] The vacuum pump according to any one of [1] to [8], further including a housing that houses at least a part of the exhaust pipe and the pump chamber. It is possible to be located outside.
In this case, since the cooling device is outside the vacuum pump, it is easy to remove and replace the cooling device, or to remove and replace the cooling device together with the second exhaust pipe portion.

[11] In the vacuum pump according to any one of [1] to [10], a first cooling medium flow path for supplying a cooling medium to the second exhaust pipe portion, and the first cooling medium flow path And a first valve that controls the supply of the cooling medium to the second exhaust pipe portion.
In this case, the degree of cooling by the cooling device can be adjusted by controlling the opening / closing or opening of the first valve.

[12] The vacuum pump according to [11], wherein the second cooling medium flow path that bypasses the second exhaust pipe portion, the second cooling medium flow path that is disposed in the second cooling medium flow path, And a second valve for controlling the flow of the cooling medium.
In this case, the degree of cooling by the cooling device can be adjusted by opening / closing or opening degree control of the first valve and the second valve. Further, since the cooling medium can flow by bypassing the second exhaust pipe portion, it becomes easy to use the existing cooling medium flow path for cooling the motor, gears, and the like of the vacuum pump.

  [13] The vacuum pump according to [11] or [12], wherein the first valve is capable of adjusting a flow rate of a cooling medium supplied to the second exhaust pipe portion continuously or in a plurality of stages. It can be a valve. By using the flow control valve for the first valve, the flow rate of the cooling medium to the second exhaust pipe portion can be controlled with higher accuracy, and the temperature of the second exhaust pipe portion can be controlled with high accuracy.

[14] In the vacuum pump according to [13], in which the above [12] or [12] is cited, the second valve continuously or a plurality of flow rates of the cooling medium supplied to the second exhaust pipe portion. It can be a flow control valve adjustable in stages.
In this case, the flow rate of the second cooling medium channel (bypass channel) can be controlled with higher accuracy.

[15] The vacuum pump according to any one of [11] to [14], further including a temperature sensor provided in the exhaust pipe.
By controlling the cooling device based on the detection value of the temperature sensor, the second exhaust pipe portion can be accurately controlled within a desired temperature / temperature range.

[16] The vacuum pump according to any one of [11] to [15] may further include a flow rate sensor provided in the exhaust pipe.
By controlling the cooling device based on the detection value of the flow sensor, the supply of the cooling medium to the second exhaust pipe portion can be accurately controlled.

[17] The vacuum pump according to any one of [1] to [16], further including a control device that controls cooling of the second exhaust pipe portion by the cooling device, wherein the control device includes the vacuum pump. It is possible to control the cooling of the second exhaust pipe portion by the cooling device in accordance with the type and flow rate of the gas flowing into the gas.
Assuming the concentration of the product (product gas) and product gas based on the type and flow rate of the inflowing gas, the temperature is higher than the temperature at which the product vaporizes, and the range in which the subsequent trapping device (trap) can be processed efficiently It becomes possible to control the temperature of the second exhaust pipe portion and the gas to the temperature.

[18] In the vacuum pump according to [17], the control device acquires the type and flow rate of the gas by receiving an input from a host system or from a user.
In this case, even if the type and flow rate of the gas to be introduced into the vacuum pump are changed, the control device for the vacuum pump can change the gas type and flow rate from the host system (exhaust target device) or the user. Obtaining it makes it possible to control the temperature of the second exhaust pipe part and the gas. Here, the user includes a manufacturer of the vacuum pump, a person who maintains the vacuum pump, a person who uses the vacuum pump, and other persons.

[19] In the vacuum pump according to [18] above, the vacuum pump holds vapor pressure data including data on a temperature at which a product included in the gas flowing into the vacuum pump becomes a gas, The type and concentration of the product are determined from the type and flow rate of the gas flowing into the vacuum pump, and the target set temperature of the second exhaust pipe portion is determined from the type and concentration of the product and the vapor pressure data of the product. It is possible to do.
In this case, the target set temperature can be calculated more accurately from the type and concentration of the product (product gas) and the vapor pressure data.

[20] The vacuum pump according to any one of [1] to [19], wherein the exhaust pipe is fluidly connected to a capture device for capturing a product in the exhaust. It is possible that
In this case, it is possible to capture the product in the trapping device from the gas exhausted from the vacuum pump.

[21] In the vacuum pump according to [20], the temperature in the exhaust pipe is equal to or higher than a lower limit temperature at which a product in the exhaust does not adhere to the exhaust pipe, and the product can be captured by the capturing device. It is possible that the cooling device is controlled so that the temperature is equal to or lower than the upper limit temperature.
In this case, the product can be efficiently captured by the capturing device while suppressing or preventing the product from adhering to the exhaust pipe of the vacuum pump. Since the cooling device is attached to the second exhaust pipe portion far from the exhaust port of the pump chamber, even if the product slightly adheres to the second exhaust pipe portion due to cooling, the first exhaust pipe portion or the pump chamber The influence on the is suppressed or prevented.

  [22] A cooling device for a vacuum pump according to one aspect of the present invention includes an exhaust pipe portion with a cooling function that can be exchangeably connected to the exhaust pipe of the vacuum pump.

  According to this cooling device, the exhaust pipe portion with the cooling function can be replaced, and maintenance (maintenance work) is easy. For example, when a product accumulates in the exhaust pipe portion with the cooling function, only the exhaust pipe portion with the cooling function can be replaced and the use of the vacuum pump can be continued. Further, as compared with a configuration in which the entire exhaust pipe is cooled, it is possible to suppress or prevent a temperature drop in the portion of the exhaust pipe that is not cooled or in the pump chamber.

  [23] The cooling device according to [22], further including a heat insulating member that can be disposed between the exhaust pipe of the vacuum pump and the exhaust pipe portion with the cooling function. The heat insulating member can insulate between the exhaust pipe of the vacuum pump and the exhaust pipe portion with the cooling function, so that the cooling effect of the exhaust pipe portion with the cooling function affects the exhaust pipe and the pump chamber of the vacuum pump. This can be further suppressed.

  [24] In the cooling device according to [22] or [23], the exhaust pipe portion with a cooling function is attached to an exhaust pipe portion capable of communicating with the exhaust pipe of the vacuum pump, and around the exhaust pipe portion. A cooling jacket provided. In this case, the exhaust pipe portion with a cooling function can be easily configured. Further, only the cooling jacket may be exchanged separately from the exhaust pipe portion.

[25] The method for cooling a vacuum pump according to one aspect of the present invention cools the second exhaust pipe portion far from the pump chamber out of the first exhaust pipe portion and the second exhaust pipe portion of the exhaust pipe of the vacuum pump. To do. The first exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes. The second exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes.

  According to this cooling method, since the second exhaust pipe portion far from the pump chamber is cooled, it is possible to suppress or prevent the temperature of the first exhaust pipe portion and the pump chamber from being lowered due to the cooling of the second exhaust pipe portion.

[26] In the cooling method according to [25], the second exhaust pipe portion far from the pump chamber is cooled in a state where the first exhaust pipe portion is thermally insulated from the second exhaust pipe portion.
In this case, the cooling of the second exhaust pipe portion can further suppress or prevent the temperature of the first exhaust pipe portion and the pump chamber from decreasing.

  [27] A vacuum exhaust system according to one aspect of the present invention includes a vacuum pump and a capture device connected to an exhaust side of the vacuum pump. The vacuum pump includes a pump chamber having a suction port and a discharge port, an exhaust pipe connected to the discharge port, an exhaust pipe that guides exhaust from the pump chamber to the outside of the vacuum pump, and the exhaust pipe. A cooling device for cooling. The exhaust pipe has a first exhaust pipe portion and a second exhaust pipe portion, the first exhaust pipe portion is connected to the exhaust port of the pump chamber, and the second exhaust pipe portion is the first exhaust pipe portion. The cooling device is disposed in the second exhaust pipe portion at a position farther from the exhaust port of the pump chamber than the one exhaust pipe portion.

  According to this vacuum exhaust system, the cooling device is provided in the second exhaust pipe portion far from the exhaust port of the pump chamber of the vacuum pump. The first exhaust pipe portion close to the exhaust port of the pump chamber is not cooled, and the temperature of the pump chamber and the first exhaust pipe portion can be suppressed or prevented from decreasing. . As a result, precipitation and adhesion of products in the pump chamber and the first exhaust pipe can be suppressed or prevented, and the temperature of the gas can be adjusted to a temperature suitable for the processing of the subsequent apparatus. The first exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes. The second exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes.

  [28] According to one aspect of the present invention, a storage medium storing a program for causing a computer to execute obtains information on a type of gas used in an apparatus connected to the vacuum pump and a gas flow rate, The type of product gas and the concentration of the product gas are determined from the acquired information, and the temperature at which the product gas becomes gas is determined based on the determined type and concentration of the product gas and the vapor pressure data of the product gas. And causing the computer to set the target set temperature of the exhaust pipe of the vacuum pump to a temperature at which the generated gas becomes a gas or a temperature obtained by adding a predetermined temperature to a temperature at which the generated gas becomes a gas. The present invention relates to a storage medium storing a program for the purpose.

  According to this recording medium, even when the type and flow rate of the gas introduced into the vacuum pump are changed, the control device of the vacuum pump can receive gas from the host system (exhaust target device) or the user. It is possible to acquire the type and flow rate and control the temperature of the second exhaust pipe portion and the gas. Here, the user includes a manufacturer of the vacuum pump, a person who maintains the vacuum pump, a person who uses the vacuum pump, and other persons.

[29] In the vacuum pump maintenance method according to one aspect of the present invention, the exhaust pipe of the vacuum pump has a first exhaust pipe portion having no cooling function and a second exhaust pipe portion having a cooling function. Then, the second exhaust pipe part is removed from the first exhaust pipe part and replaced. The first exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes. The second exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes.

  According to this maintenance method, only the exhaust pipe portion with the cooling function can be replaced, and maintenance (maintenance work) is easy. For example, when a product accumulates in the exhaust pipe portion with a cooling function, only the exhaust pipe portion can be replaced and the use of the vacuum pump can be continued.

[30] In the maintenance method according to [29], a heat insulating member is disposed between the first exhaust pipe portion and the second exhaust pipe portion in the exhaust pipe, and the second exhaust pipe is provided. A part or all of the heat insulating member is exchanged together with the part. The first exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes. The second exhaust pipe portion may be constituted by an integral exhaust pipe or may be constituted by a plurality of exhaust pipes.
When the heat insulating member is disposed between the first exhaust pipe portion and the second exhaust pipe portion, the reliability of the vacuum pump can be further improved by replacing part or all of the heat insulating member. it can. When the heat insulating member is composed of a plurality of members and the replacement cycle is different for each member, the respective members may be replaced in different cycles, or all of the plurality of members may be replaced regardless of the replacement cycle.

It is a lineblock diagram of an evacuation system provided with a vacuum pump concerning one embodiment. It is a schematic longitudinal cross-sectional view of a vacuum pump. It is a schematic cross-sectional view of a vacuum pump. It is detail drawing of an exhaust pipe. It is an expanded sectional view of a center ring. It is an enlarged view of an example of the connection structure of a 1st exhaust pipe part and a 2nd exhaust pipe part. It is an enlarged view of the other example of the connection structure of a 1st exhaust pipe part and a 2nd exhaust pipe part. It is a block diagram of the fluid circuit for cooling an exhaust pipe. The control flow of the fluid circuit when using an on-off valve is shown. It is a time chart of control of the fluid circuit at the time of using an on-off valve. The control flow of the fluid circuit at the time of using a flow control valve is shown. 1 shows a configuration of a vacuum exhaust system connected to a device to be exhausted. The flow of the process which sets the target set temperature of exhaust pipe temperature is shown. It is a block diagram of an evacuation system provided with the vacuum pump which concerns on other embodiment.

  FIG. 1 is a configuration diagram of an evacuation system including a vacuum pump according to an embodiment. FIG. 2 is a schematic longitudinal sectional view of the vacuum pump. FIG. 3 is a schematic cross-sectional view of the vacuum pump.

  The evacuation system 1 is connected to an apparatus 400 (see FIG. 11) to be evacuated, and sucks and exhausts exhaust from the apparatus 400. In this example, the vacuum exhaust system 1 further has a function of capturing a product in the exhaust and a function of rendering the exhaust harmless. The apparatus 400 is, for example, a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus, and more specifically, a CVD apparatus, an etching apparatus, a sputtering apparatus, or the like.

The vacuum exhaust system 1 includes a vacuum pump 100 connected to the device 400, a trapping device (trap) 200 connected to the exhaust side of the vacuum pump 100, an abatement device 300 connected to a subsequent stage of the trapping device 200, It has.

  The vacuum pump 100 is connected to the exhaust side of the device 400 to be exhausted, and sucks and exhausts the gas in the device 400. Details of the vacuum pump 100 will be described later.

  The capture device (trap) 200 is a device that captures a product from the process gas exhausted from the vacuum pump 100. The product is generated by the reaction of the process gas introduced into the vacuum pump 100. It is necessary to control the temperature of the process gas within a range between the first predetermined temperature and the second predetermined temperature so that the product does not precipitate in the vacuum pump 100 and can be efficiently deposited by the subsequent capturing device 200. is there. Preferably, the gas temperature is kept high in the vacuum pump 100 and the gas temperature is lowered at the inlet of the capturing device 200. Therefore, in the present embodiment, as described later, a configuration is adopted in which the second exhaust pipe portion 1132 on the side far from the exhaust port 1122 of the pump chamber 10 in the exhaust pipe 113 of the vacuum pump 100 is cooled. As shown in FIG. 1, the exhaust pipe 113 includes a first exhaust pipe portion 1131 connected to the exhaust port 1121, a second exhaust pipe portion 1132 on the downstream side of the first exhaust pipe portion 1131, and both exhaust pipes. And a heat insulating member 114 for connecting the pipe portions.

  In the example of FIG. 1, the intake side of the capturing device 200 is connected to the exhaust pipe 113 of the vacuum pump 100 by a pipe 130. The capturing device 200 has, for example, a structure having a plurality of partition plates stacked at intervals. The partition plate is provided with one or a plurality of holes, and the partition plates are attached so that the positions of the holes of the adjacent partition plates do not coincide with each other. When the gas exhausted from the vacuum pump 100 passes through the holes of the partition plates, the positions of the holes of the adjacent partition plates are staggered, so that the gas contacts a wide range of the partition plates and is generated. Objects accumulate on the partition and are captured by the capture device 200.

  The abatement device 300 is fluidly connected to the capturing device 200 via a pipe 210. The detoxification device 300 is a device for detoxifying the gas that has passed through the capturing device 200 by detoxification. For the detoxification treatment, a method of burning the gas, a method of decomposing using a catalyst, a method of physically or chemically fixing the gas with a chemical, a method of filtering with a filter, capturing solids by applying water, or A method of removing by dissolving in water is included, and either method is used alone or in combination of two or more.

  In the present embodiment, as the vacuum pump 100, a roots type biaxial capacity type dry vacuum pump will be described as an example. The vacuum pump 100 is a roots type as an example, but may be of another structure such as a screw type. In this embodiment, the vacuum pump 100 is exemplified by a multistage type, but may be a single stage type.

  The vacuum pump 100 includes a pump casing 101 having a plurality of pump chambers 10 partitioned by partition walls as shown in FIGS. 1 and 2, a motor frame 102 provided on one end side of the pump casing 101, and a pump casing 101. A gear cover 103 provided on the other end side, and a casing (exterior cover) 116 for housing the pump casing 101, the motor frame 102, and the gear cover 103 are provided. Further, the vacuum pump 100 includes a control device 140. The control device 140 controls driving of the motor 20 that rotates the roots rotor 11 and cooling of the vacuum pump 100. The control device 140 is attached inside or outside the housing 116. Further, all or a part of an exhaust pipe 113 to be described later is accommodated in the housing 116.

The pump chamber 10 at one end of the plurality of pump chambers 10 is fluidly connected to the intake port 1121, and the pump chamber 10 at the other end is fluidly connected to the exhaust port 1122. The intake port 1121 is fluidly connected to the intake pipe 111. The intake pipe 111 is arranged so that one end is connected to the intake port 1121 and the other end protrudes outside the housing 116. The other end of the intake pipe 111 is fluidly connected to the apparatus 400 via a pipe 410 as shown in FIG.

  The vacuum pump 100 is a multistage vacuum pump, and a 5-stage rotor 13 is provided in a 5-stage pump chamber 10. A pair of root rotors 11 are disposed in these pump chambers 10 (only one root rotor is shown in FIG. 2). Each root rotor 11 includes a rotation shaft 12 and a rotor 13 provided on the rotation shaft 12 corresponding to each pump chamber 10. In each pump chamber 10, the pair of rotors 13 are arranged with a slight gap between the rotor chambers 13 and the wall surface of the pump chamber 10. The rotary shaft 12 is rotatably supported by bearings (not shown) near both ends. A gas passage 14 is provided on the radially outer side of each pump chamber 10, and the gas introduced from the intake port 1121 is compressed by the rotor 13 at each stage and is passed to the rotor 13 at the subsequent stage via the gas passage 14. It is to be transferred.

  A motor 20 is disposed on the motor frame 102, and the motor 20 is an electric motor. The gear cover 103 is provided with a pair of timing gears 30 (only one gear is shown in FIG. 2) that mesh with each other. The drive shaft of the motor 20 is connected to the first end of one of the pair of rotating shafts 12 and rotates the rotating shaft 12. The second ends of the pair of rotating shafts 12 opposite to the motor 20 are connected to a pair of timing gears 30 that mesh with each other. The pair of rotating shafts 12 are synchronously rotated in opposite directions by the timing gear 30. When one rotating shaft 12 is rotated by the motor 20, the other rotating shaft 12 rotates synchronously in the opposite direction, and in each pump chamber 10, the two rotors 13 rotate in opposite directions. As a result, the gas is compressed and exhausted in each pump chamber 10. In addition, the motor 20 may be connected to each rotating shaft 12, and each rotating shaft 12 may be rotated by the motor 20. Although the case where the rotation shaft 12 of the roots rotor 11 is connected to the drive shaft of the motor 20 has been described here, the rotation shaft 12 of the roots rotor 11 may be integrated with the drive shaft of the motor 20.

  When the motor 20 is driven, the pair of roots rotors 11 rotate in a non-contact manner with a slight gap maintained between the wall surface of the pump chamber 10 and the rotors 13. As the pair of roots rotors 11 rotates, the gas on the intake side is confined in a space formed between the rotor 13 and the wall surface of the pump chamber 10 and transferred to the exhaust side. Thus, the gas introduced from the intake port 1121 is compressed and transferred by the five-stage rotor 13 and discharged from the exhaust port 1122, and the gas of the apparatus 400 is exhausted by continuously performing this transfer.

The vacuum pump 100 further includes a cooling water channel 115. The cooling water flow path 115 has flow paths 115a to 115e as shown in FIG. In FIG. 1, the flow path 115e is omitted. The flow path 115 a fluidly connects an external water source (reservoir) and the inlet of the flow path 1021 of the motor housing 102. The channel 115 b fluidly connects the outlet of the channel 1021 of the motor frame 102 and the inlet of the channel 1031 of the gear case 103. The flow path 115c fluidly connects the outlet of the flow path 1031 of the gear case 103 and the inlet 1211 of the cooling device 120 of the exhaust pipe 113 described later. The flow path 115d is connected to the outlet 1212 of the cooling device 120 of the exhaust pipe 113 and recirculates the cooling water to the reservoir. The flow path 115e bypasses the cooling device 120 of the exhaust pipe 113 and fluidly connects the flow path 115c and the flow path 115d. The flow path 115c is provided with a valve 151 for controlling the flow of cooling water into the cooling device 120. The flow path 115e is provided with a valve 152 that controls the flow of the flow path 115e.
As long as there is no excess or deficiency in the cooling water flowing through the cooling water channel 115, the connection with the reservoir may be cut off and the cooling water may be circulated in a closed loop from the channel 115a to the channel 115d. In this case, a solenoid valve that opens and closes the connection between the coolant channel 115 and the reservoir, the channel 115a
A pump for pumping the cooling water that has been refluxed may be additionally provided.

  FIG. 4 is a detailed view of the exhaust pipe. FIG. 4A is an enlarged cross-sectional view of the center ring. FIG. 5 is an enlarged view of an example of a connection structure between the first exhaust pipe portion and the second exhaust pipe portion. FIG. 6 is an enlarged view of another example of the connection structure between the first exhaust pipe portion and the second exhaust pipe portion.

  As shown in FIGS. 2 and 4, the exhaust pipe 113 includes a first exhaust pipe portion 1131 and a second exhaust pipe portion 1132. The first end portion of the first exhaust pipe portion 1131 is connected to the exhaust port 1122 of the pump chamber 10, and the second end portion is connected to the first end portion of the second exhaust pipe portion 1132 via the heat insulating member 114. It is connected. A flange 1131a is provided at the first end of the first exhaust pipe portion 1131. The first exhaust pipe portion 1131 is fixed to the pump casing 101 at the flange 1131a. A cooling device 120 is attached around the second exhaust pipe portion 1132. As shown in FIG. 1, the second end of the second exhaust pipe portion 1132 is connected to the capturing device 200 via a pipe 130. In the present embodiment, the case where the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132 are each constituted by an integral exhaust pipe will be described. However, the first exhaust pipe portion 1131 and the second exhaust pipe are described. At least one of the portions 1132 may be configured by connecting a plurality of exhaust pipes.

  As shown in FIGS. 4 and 5, the heat insulating member 114 includes a center ring 1141 and a clamp 1142. As shown in FIG. 4A, the center ring 1141 includes a resin-made annular member 1141a having heat insulation properties, an inner ring 1141b, and an outer ring 1141c. The cross-sectional shape of the resin annular member 1141a is circular or elliptical. The annular member 1141a is, for example, an O-ring. In this example, the resin-made annular member 1141a is sandwiched and fixed between the inner ring 1141b and the outer ring 1141c, but the outer ring 1141c may be omitted. In other embodiments, both the inner ring 1141b and the outer ring 1141c may be omitted. For example, the inner ring 1141b and the outer ring 1141c are made of stainless steel having lower thermal conductivity than iron. The inner ring 1141b and the outer ring 1141c may be made of resin. The clamp 1142 can be made of, for example, stainless steel or resin. However, the heat insulation between the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132 can be further improved by making the clamp 1142 made of resin.

  The center ring 1141 is provided between the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132, more specifically, the flange 1131 b at the second end of the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132. It arrange | positions between the flanges 1132a of a 1st edge part, and insulates between the 1st exhaust pipe part 1131 and the 2nd exhaust pipe part 1132. The clamp 1142 is disposed around both the flanges 1131b and 1132a in a state where the flange 1131b of the first exhaust pipe portion 1131 and the flange 1132a of the second exhaust pipe portion 1132 are combined, Two exhaust pipe parts 1132 are connected. The clamp 1142 is, for example, a two-divided type, and two semicircular arc-shaped members are connected by a hinge or the like, and can be opened and closed and fixed in a closed state. The clamp 1142 is opened and disposed around the flanges 1131b and 1132a. By closing the clamp 1142, the flanges 1131b and 1132a are fixed so as to be tightened radially inward.

As shown in FIG. 4, the cooling device 120 includes a hollow cylindrical cooling jacket 121. The cooling jacket 121 is made of stainless steel, for example, and is fixed to the outer peripheral surface of the second exhaust pipe portion 1132 by welding or the like. The cooling jacket 121 has an inlet 1211 and an outlet 1212. The inlet 1211 is fluidly connected to the flow path 115c, and the outlet 1212 is fluidly connected to the flow path 115d. The cooling water introduced from the inlet 1211 circulates while cooling in contact with the outer peripheral surface of the second exhaust pipe portion 1132 as shown by the arrow in FIG. As a result, the second exhaust pipe portion 1132 is cooled by the cooling water, and accordingly, the gas flowing through the second exhaust pipe portion 1132 is cooled.

  A plurality of partition plates 1213 are arranged in the axial direction in the internal space of the cooling jacket 121. When the cross section of the internal space of the cooling jacket 121 is circular or elliptical, the partition plate 123 is, for example, a C-shaped plate member, and the opening 1213a is formed in a part of the circular or elliptical plate member. Have. The opening 1213a is formed by a notch obtained by removing a part of the outer periphery of the plate member, for example. The plurality of partition plates 1213 are arranged so that the positions of the openings 1213a of the adjacent partition plates 1213 do not match. For example, the plurality of partition plates 1213 are arranged so that the positions of the openings 1213a of the adjacent partition plates 1213 are staggered. In FIG. 4, the positions of the openings 1213 a of the adjacent partition plates 1213 are arranged above and below the second exhaust pipe portion 1132. With the partition plate 1213 arranged in this way, the cooling water flowing in the internal space of the cooling jacket 121 can be made to approach uniformly, and the second exhaust pipe portion 1132 can be uniformly cooled.

  The partition plate 1213 may be one or a plurality of spiral members that spirally extend between the inner wall of the cooling jacket 121 and the outer surface of the second exhaust pipe portion 1132. A single spiral member extending continuously in a spiral shape over the axial direction of the cooling jacket 121 may be provided, or a plurality of spiral members may be arranged. Further, when the cross section of the internal space of the cooling jacket 121 has a shape other than a circle or an ellipse, the outer shape of the partition plate (plate-like member, spiral member) may be created in accordance with the cross-sectional shape of the internal space.

  According to this configuration, the second exhaust pipe portion 1132 with the cooling device 120 can be easily attached and detached, and the cooling device 120 and the second exhaust pipe portion 1132 can be easily replaced. Further, when the cooling device 120 and the second exhaust pipe portion 1132 are replaced, a part or all of the heat insulating member 114 may be replaced together.

  A temperature sensor 122 that detects the temperature of the second exhaust pipe portion 1132 (exhaust pipe temperature) is attached to the wall surface of the second exhaust pipe portion 1132. The temperature sensor 122 is connected to the control device 140 by wire or wirelessly, and the output of the temperature sensor 122 is supplied to the control device 140. The temperature sensor 122 may be provided in another part as long as the correlation with the temperature of the exhaust gas can be confirmed.

  In the example of FIG. 6, the heat insulating member 114 includes a center ring 1141, a clamp 1142, and a heat insulating pipe 1143. The heat insulating pipe 1143 is a pipe made of a heat insulating resin. The heat insulating pipe 1143 has a flange 1143a provided at the first end and a flange 1143b provided at the second end. The heat insulating pipe 1143 is disposed between the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132 and insulates between the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132. Center rings 1141 are disposed between the first exhaust pipe portion 1131 and the heat insulation pipe 1143 and between the second exhaust pipe portion 1132 and the heat insulation pipe 1143, respectively. Therefore, the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132 are insulated by the heat insulation pipe 1143, and are also provided by the center rings 1141 and the clamps 1142 on both sides of the heat insulation pipe 1143 (particularly, when the clamp is made of resin). 6 is also insulated, so that the connection structure of FIG. 6 has higher heat insulation performance than the connection structure of FIG.

  According to this configuration, the second exhaust pipe portion 1132 with the cooling device 120 can be easily attached and detached, and the cooling device 120 and the second exhaust pipe portion 1132 can be easily replaced. Further, when the cooling device 120 and the second exhaust pipe portion 1132 are replaced, a part or all of the heat insulating member 114 (center ring 1141, clamp 1142, heat insulating pipe 1143) may be replaced together.

  The connection between the first exhaust pipe portion 1131 and the second exhaust pipe portion 1132 is performed as follows. The flanges 1131 b and 1143 a are fixed by the clamp 1142 in a state where the center ring 1141 is disposed between the flange 1131 b of the first exhaust pipe portion 1131 and the flange 1143 a of the heat insulating pipe 1143. The flanges 1132 a and 1143 b are fixed by the clamp 1142 in a state where the center ring 1141 is disposed between the flange 1132 a of the second exhaust pipe portion 1132 and the flange 1143 b of the heat insulating pipe 1143. The order of attachment of the first exhaust pipe portion 1131 and the heat insulation pipe 1143 and the order of attachment of the second exhaust pipe portion 1132 and the heat insulation pipe 1143 may be either first or attachment work may be performed simultaneously.

FIG. 7 is a configuration diagram of a fluid circuit for cooling the exhaust pipe.
As shown in FIGS. 2 and 7, the flow path 115 c is provided with a valve 151 that controls the flow of cooling water into the cooling device 120. The flow path 115e, which is a bypass flow path, is provided with a valve 152 that controls the flow of the flow path 115e. The valve 151 and the valve 152 are, for example, electromagnetic valves. The valve 151 and the valve 152 may be an on-off valve that takes two states of opening and closing, or may be a flow control valve that can adjust the opening degree. Note that a flow rate sensor 153 may be provided in the flow path 115 c on the downstream side of the valve 151 to detect the amount of cooling water flowing into the cooling device 120.

  The control device 140 is electrically connected to the motor 20, the valves 151 and 152, and the temperature sensor 122. When the flow sensor 153 is provided, the control device 140 is further connected to the flow sensor 153. The control device 140 has a control unit composed of a microprocessor or the like, and stores a program (a program for controlling a motor that drives a roots rotor, a fluid stored in a memory (not shown) provided inside or outside the control device 140, a fluid Various controls are executed by executing a program or the like for controlling the circuit in the control unit.

  FIG. 8 shows a control flow of the fluid circuit when the on-off valve is used. This control flow is repeatedly executed by the control device 140 at a predetermined control cycle. The following control flow may be executed by a control device different from the control device 140.

  In step S <b> 11, the control device 140 acquires the temperature of the second exhaust pipe portion 1132 (exhaust pipe temperature) from the temperature sensor 122.

In step S12, control device 140 determines whether or not exhaust pipe temperature T is lower than a preset lower limit value Ta. The lower limit value Ta is a preset value, and is a lower limit temperature at which the generated gas in the exhaust pipe 113 can be prevented from solidifying.
If the exhaust pipe temperature T is equal to or higher than the lower limit value Ta in step S12, the process proceeds to step S13.

In step S13, the control device 140 determines whether or not the exhaust pipe temperature T is higher than a preset upper limit value Tb. The upper limit value Tb is a preset value, and is set within a temperature range in which the capturing process by the subsequent capturing device 200 can be performed satisfactorily.
If the exhaust pipe temperature T is equal to or lower than the upper limit value Tb in step S13, the process returns to step S11 and the processing from step S11 is repeated.

On the other hand, when the exhaust pipe temperature T is lower than the lower limit Ta in step S12, the process proceeds to step S14.
In step S14, in order to raise the exhaust pipe temperature T, the valve 151 is closed and the valve 152 is opened. Thereby, all the cooling water in the flow path 115c is bypassed to the flow path 115d through the flow path 115e, and the cooling water is not supplied from the flow path 115c to the cooling device 120 of the second exhaust pipe portion 1132. As a result, the temperature of the second exhaust pipe portion 1132 increases, and the second exhaust pipe portion 11
The temperature of the gas in 32 also rises.

When the exhaust pipe temperature T is higher than the upper limit value Tb in step S13, the process proceeds to step S15.
In step S15, in order to lower the exhaust pipe temperature T, the valve 151 is opened and the valve 152 is closed. Thereby, all the cooling water of the flow path 115c flows into the cooling device 120 through the valve 151, and does not flow into the flow path 115e. As a result, the exhaust pipe temperature decreases, and the temperature of the gas in the second exhaust pipe portion 1132 also decreases.

  According to the control of the fluid circuit, the exhaust pipe temperature T in the second exhaust pipe portion 1132 can be controlled in a range between the lower limit value Ta and the upper limit value Tb. Therefore, it is possible to prevent the temperature of the gas supplied from the second exhaust pipe portion 1132 to the capture device 200 from increasing, and to perform the capture process efficiently by the capture device 200.

  In addition, since the first exhaust pipe portion 1131 is insulated from the second exhaust pipe portion 1132 by the heat insulating member 114, the first exhaust pipe portion 1132 is hardly affected even when the second exhaust pipe portion 1132 is cooled. The decrease in the temperature of 1131 can be suppressed or prevented. As a result, it is possible to suppress or prevent the temperature of the gas in the first exhaust pipe portion 1131 and the pump chamber 10 from decreasing due to the cooling of the second exhaust pipe portion 1132. Therefore, it is possible to suppress or prevent the product from adhering to the pump chamber 10, the roots rotor 11, and the first exhaust pipe portion 1131.

  FIG. 9 is a time chart for controlling the fluid circuit when the on-off valve is used.

  When the exhaust pipe temperature T becomes lower than the lower limit Ta at time t1, the valve 151 is closed and the valve 152 is opened (step S14 in FIG. 8). Thereby, all the cooling water in the flow path 115c is bypassed to the flow path 115d through the flow path 115e, and the cooling water in the flow path 115c does not flow to the cooling device 120 of the second exhaust pipe portion 1132. As a result, the exhaust pipe temperature T rises, exceeds the lower limit Ta, and is controlled to the target temperature range (Ta or higher and Tb or lower).

  When the exhaust pipe temperature T becomes higher than the upper limit value Tb at time t2, the valve 151 is opened and the valve 152 is closed. Thereby, all the cooling water of the flow path 115c flows into the cooling device 120 through the valve 151, and does not flow into the flow path 115e. As a result, the exhaust pipe temperature T decreases, falls below the upper limit value Tb, and is controlled to a target temperature range (Ta or higher and Tb or lower).

  Thereafter, at time t3, the exhaust pipe temperature T again falls below the lower limit value Ta, so that the same processing as that at time t2 is executed so that the exhaust pipe temperature T is returned to the target temperature range (Ta or higher and Tb or lower). Control.

  The above processing is repeatedly executed, the exhaust pipe temperature T is maintained in the target temperature range, and the gas temperature is also maintained in the target temperature range.

  FIG. 10 shows a control flow of the fluid circuit when the flow control valve is used. This control flow is repeatedly executed by the control device 140 at a predetermined control cycle. The following control flow may be executed by a control device different from the control device 140.

In step S 21, the exhaust pipe temperature of the second exhaust pipe portion 1132 is acquired from the temperature sensor 122.
In step S <b> 22, the control device 140 acquires the temperature of the second exhaust pipe portion 1132 (exhaust pipe temperature) from the temperature sensor 122.

In step S22, control device 140 determines whether or not exhaust pipe temperature T is lower than a preset lower limit value Ta.
If the exhaust pipe temperature T is equal to or higher than the lower limit Ta in step S22, the process proceeds to step S23.

In step S23, the control device 140 determines whether or not the exhaust pipe temperature T is higher than a preset upper limit value Tb.
If the exhaust pipe temperature T is equal to or lower than the upper limit value Tb in step S23, the process returns to step S21, and the processing from step S21 is repeated.

On the other hand, when the exhaust pipe temperature T is lower than the lower limit Ta in step S22, the process proceeds to step S24.
In S24, in order to raise the exhaust pipe temperature T, the opening degree of the valve 151 is decreased and the opening degree of the valve 152 is increased. Thereby, the flow rate of the cooling water flowing from the flow path 115c to the cooling device 120 of the second exhaust pipe portion 1132 decreases, and the flow rate of the cooling water bypassed from the flow path 115c through the flow path 115e to the flow path 115d increases. . As a result, the exhaust pipe temperature T rises and the temperature of the gas in the second exhaust pipe portion 1132 also rises. When the flow sensor 153 is provided, the opening degree of the valve 151 and / or the valve 152 may be adjusted so that the flow rate of the flow path 115c becomes a desired value based on the detection value of the flow sensor 153. Good.

When the exhaust pipe temperature T is higher than the upper limit value Tb in step S23, the process proceeds to step S25.
In step S25, in order to lower the exhaust pipe temperature T, the opening degree of the valve 151 is increased and the opening degree of the valve 152 is decreased. As a result, the flow rate of the cooling water flowing from the flow path 115c to the cooling device 120 of the second exhaust pipe portion 1132 increases, and the flow rate of the cooling water that bypasses the flow path 115c through the flow path 115e to the flow path 115d decreases. . As a result, the exhaust pipe temperature T decreases, and the temperature of the gas in the second exhaust pipe portion 1132 also decreases. When the flow sensor 153 is provided, the opening degree of the valve 151 and / or the valve 152 may be adjusted so that the flow rate of the flow path 115c becomes a desired value based on the detection value of the flow sensor 153. Good.

  The opening degree of the valve 151 and the valve 152 may be changed at a predetermined increase rate and decrease rate when the exhaust pipe temperature T is lower than the lower limit value Ta and when the exhaust pipe temperature T is higher than the upper limit value Tb. However, it may be changed at a non-linear speed.

  Even when the flow rate control valve is used, the same effect as when the on-off valve is used can be obtained. Further, when the flow control valve is used, necessary and sufficient cooling water can be supplied according to the temperature of the second exhaust pipe portion 1132, and the cooling of the second exhaust pipe portion 1132 is controlled with higher accuracy. be able to.

  In addition, although the case where the opening degree of the valve 151 and the valve 152 was controlled simultaneously was demonstrated above, it is good also as control which fixes the opening degree of the valve 152 of the flow path 115e of a bypass side by a fixed opening degree. Further, the valve 152 of the bypass-side flow path 115e may be omitted.

FIG. 11 shows a configuration of a vacuum exhaust system connected to a device to be exhausted.
The exhaust side of the apparatus 400 and the intake pipe 111 of the vacuum pump 100 are fluidly connected by a pipe 410. Moreover, the control part (not shown) of the apparatus 400 and the control apparatus 140 of the vacuum pump 100 are connected by the cable 420, and transmission / reception of data is performed between both. Although a case where data is transmitted / received via the cable 420 is shown here, data transmission / reception may be performed via wireless communication.

  FIG. 12 shows a process flow for setting the target set temperature of the exhaust pipe temperature. This control flow is performed by the control device 140 executing a program stored in a memory inside or outside the control device 140. The memory stores data in which a combination of process gases and a product gas (product) are associated with each other along with reaction rate data. In addition, vapor pressure data of the product gas is stored in the memory.

In step S31, the control device 140 of the vacuum pump 100 acquires process gas and process gas flow rate information from the exhaust target device 400 side by wire or wirelessly.
For example, when the apparatus 400 is a semiconductor manufacturing apparatus, if the process gas is “gas A” and “gas B” and each flow rate is 1 slm, the control device 140 starts the gas A (flow rate 1 slm) from the apparatus 400 side. ), Gas B (flow rate 1 slm) is acquired. The unit “slm” is a unit in which the flow rate per minute at 1 atm and 0 ° C. is expressed in liters. 1 [slm] = 1 * 10 ⁻³ [m ³ / min] = (1/60) * 10 ⁻³ [m ³ / s].

In step S32, the control device 140 determines the generated gas based on information on the type of process gas and the gas flow rate. This is performed by referring to data stored in the memory in which a combination of process gases and a product gas (product) are associated with each other and data of a reaction rate.
In the case of the above example, this data has contents such as gas A (flow rate 1 slm) + gas B (flow rate 1 slm) → gas C (1 slm). The control device 140 determines the generated gas as gas C (1 slm) based on the acquired information (gas A (flow rate 1 slm), gas B (flow rate 1 slm)).

In step S33, the controller 140 determines the concentration of the product gas.
In the case of the above example, since all of gas A and gas B react to become gas C, the flow rate of gas C is 1 slm and the ratio / concentration is determined to be 100%.

In step S34, the temperature (sublimation temperature) at which the product (product gas) becomes gas is calculated from the gas ratio / concentration and vapor pressure data.
The vapor pressure data is stored in advance in the memory. For example, the vapor pressure data of gas C is stored in the following table format.
(Gas pressure) 1 Torr 10 Torr 100 Torr 760 Torr
(Sublimation temperature) 10 ° C 20 ° C 40 ° C 60 ° C

  Since the pressure in the second exhaust pipe portion 1132 is atmospheric pressure 760 Torr, and the ratio / concentration of the gas C in the second exhaust pipe portion 1132 is 100%, the pressure of the gas C is 760 Torr. From the vapor pressure data, the temperature at which the product gas C becomes a gas can be determined to be 60 ° C.

  If the ratio / concentration of gas C is less than 100%, the pressure in second exhaust pipe portion 1132 (here, atmospheric pressure 760 Torr) is multiplied by the ratio / concentration of gas C to obtain partial pressure of gas C. And the vapor pressure data is referred to based on the partial pressure.

  In step S35, the temperature obtained by adding the first predetermined value α to the “temperature at which the generated gas becomes gas” Tsbl is set as the exhaust pipe set temperature Ts. In consideration of control stability, the temperatures obtained by adding and subtracting the second predetermined value β to the exhaust pipe set temperature Ts are set to the upper limit value Tb and the lower limit value Ta, respectively (Tb = Tsbl + α + β, Ta = Tsbl + α−β). ). Then, control is performed so that the exhaust pipe temperature T falls within the target temperature range from the lower limit value Ta to the upper limit value Tb.

The exhaust pipe set temperature Ts is a temperature obtained by adding the first predetermined value α to the “temperature at which the generated gas becomes gas” Tsbl in order to prevent the generated gas from solidifying and adhering in the exhaust pipe 113. And The first predetermined value α is obtained in advance by experiments or the like. The second predetermined value β is a width for ensuring the stability of the cooling control by the cooling device 120 and the fluid circuit, and is set in advance according to the characteristics of the cooling device 120 and the fluid circuit. The second predetermined value β is a value smaller than the first predetermined value α so that the lower limit value Ta does not become lower than the “temperature at which the generated gas becomes a gas” Tsbl. Further, the second predetermined value β is a value at which the upper limit value Tb becomes a temperature within a range where the capturing process in the capturing device 200 can be performed satisfactorily.

  The upper limit value Tb and the lower limit value Ta may be calculated by adding and subtracting mutually different values β1 and β2 to the exhaust pipe set temperature Ts (Tb = Tsbl + α + β1, Ta = Tsbl + α−β2).

  Further, as described above, the lower limit Ta is determined based on the “temperature at which the product gas becomes gas” Tsbl, and the upper limit Tb is captured separately from the “temperature at which the product gas becomes gas” Tsbl. The upper limit value of the temperature that can be captured by the apparatus 200 may be determined.

  In step S35, the temperature obtained by adding the first predetermined value α to the “temperature at which the generated gas becomes gas” Tsbl may be set as the lower limit value Ta. In this case, the upper limit value Tb is calculated by adding the third predetermined value γ to the lower limit value Ta (= exhaust pipe set temperature Ts). The third predetermined value γ is a value for ensuring control stability. The upper limit value Tb may be determined as the upper limit value of the temperature at which the product can be captured by the capturing device 200, separately from the “temperature at which the product gas becomes gas” Tsbl.

  According to the processing flow for setting the target temperature range of the exhaust pipe temperature described above, information on the type and flow rate of the process gas is acquired from the exhaust target apparatus 400, and the type, ratio / concentration of the product gas (product) By determining and calculating the sublimation temperature from the vapor pressure data, the temperature of the gas is controlled to a temperature within a range in which the product does not adhere to the vacuum pump 100 and the capturing process in the capturing device 200 can be performed efficiently. Can do.

In addition, since the data in which the combination of the process gas and the product gas (product) are associated with each other are stored in the memory together with the reaction rate data, even when the type of the process gas is changed, The type, ratio / concentration can be determined in a vacuum pump.
If the vacuum pump obtains information on the type and flow rate of the process gas from the host system such as the device to be exhausted, the type, ratio / concentration of the generated gas can be changed even if the type of the process gas is changed. It can be determined automatically in the vacuum pump.
Even when input of process gas type and flow rate information is received from a user (vacuum pump manufacturer, maintainer, user, or other human), the type, ratio / concentration of the generated gas is determined by the vacuum pump. be able to. In this case, a user interface such as a keyboard, a touch panel, or a button connected to the control device 140 is provided in the vacuum pump 100 to receive input of information from the user.
Further, since the vapor pressure data of the product gas is stored in the memory of the vacuum pump 100, the sublimation temperature of the product gas can be accurately calculated based on the type, ratio / concentration of the product gas.

FIG. 13 is a configuration diagram of an evacuation system including a vacuum pump according to another embodiment.
In the above embodiment, the case where the second exhaust pipe portion 1132 and the cooling device 120 are arranged in the housing 16 of the vacuum pump 100 has been described. However, as shown in FIG. The device 120 may be disposed outside the housing 16 of the vacuum pump 100.
In this case, since the second exhaust pipe portion 1132 and the cooling device 120 are outside the vacuum pump 100, the cooling device 120 can be removed and replaced, or the cooling device 120 can be removed and replaced together with the second exhaust pipe portion 1132. It becomes easy. On the other hand, when the second exhaust pipe portion 1132 and the cooling device 120 are arranged in the housing 16 as shown in FIG. 1, the cooling device 120 is attached in the vacuum pump 100, so that the cooling device 120 is connected when piping is connected. There is no need to install the separately. Further, it is not necessary to change the length of the pipe connected to the exhaust-side capture device 200.

  The embodiments of the present invention have been described above based on some examples. However, the above-described embodiments of the present invention are for facilitating understanding of the present invention and do not limit the present invention. . The present invention can be changed and improved without departing from the gist thereof, and the present invention naturally includes equivalents thereof. In addition, any combination or omission of each constituent element described in the claims and the specification is possible within a range where at least a part of the above-described problems can be solved or a range where at least a part of the effect is achieved. It is.

DESCRIPTION OF SYMBOLS 10 ... Pump chamber 11 ... Roots rotor 12 ... Rotating shaft 13 ... Rotor 14 ... Gas passage 16 ... Housing 20 ... Motor 30 ... Timing gear 100 ... Vacuum pump 101 ... Pump casing 102 ... Motor frame 103 ... Gear case 111 ... Intake pipe 113 ... Exhaust pipe 114 ... Heat insulation member 115 ... Cooling water flow path 116 ... Case 120 ... Cooling device 121 ... Cooling jacket 122 ... Temperature sensor 130 ... Piping 140 ... Control device 151 ... Valve 152 ... Valve 153 ... Flow sensor 200 ... Capture device 210 ... Piping 300 ... Detoxifying device 400 ... Device 410 ... Piping 420 ... Cable 1021 ... Flow path 1031 ... Flow path 1121 ... Intake port 1121 ... Exhaust port 1122 ... Exhaust port 1131 ... First exhaust pipe part 1132 ... Second exhaust pipe part 1141 ... Center ring 1142 ... Clan 1143: Insulated piping 115a ... Channel 115b ... Channel 115c ... Channel 115d ... Channel 115e ... Channel 1131b ... Flange 1132a ... Flange 1141a ... Ring member 1141b ... Inner ring 1141c ... Outer ring 1143a ... Flange 1143b ... Flange 1211 ... Inlet 1212 ... Outlet 1213 ... Partition plate 1213a ... Opening

Claims (30)

A vacuum pump,
A pump chamber having a suction port and a discharge port;
An exhaust pipe connected to the exhaust port, the exhaust pipe for guiding exhaust from the pump chamber to the outside of the vacuum pump;
A cooling device for cooling the exhaust pipe;
With
The exhaust pipe has a first exhaust pipe portion and a second exhaust pipe portion,
The first exhaust pipe portion is connected to the exhaust port of the pump chamber, and the second exhaust pipe portion is located farther from the exhaust port of the pump chamber than the first exhaust pipe portion;
The cooling device is disposed in the second exhaust pipe portion;
Vacuum pump.   The vacuum pump according to claim 1, further comprising a heat insulating member interposed between the first exhaust pipe portion and the second exhaust pipe portion. The vacuum pump according to claim 2,
The heat insulating member is made of a resin that connects the resin-made annular ring interposed between the first exhaust pipe part and the second exhaust pipe part, and the first exhaust pipe part and the second exhaust pipe part. And a vacuum pump. The vacuum pump according to claim 2,
The heat insulation member is a vacuum pump having a resin-made third exhaust pipe portion interposed between the first exhaust pipe portion and the second exhaust pipe portion. The vacuum pump according to any one of claims 1 to 4,
The said cooling device is a vacuum pump which is attached to the circumference | surroundings of the said 2nd exhaust pipe part, and has a cooling jacket which distribute | circulates a cooling medium. The vacuum pump according to claim 5,
The cooling device is a vacuum pump in which one or more partition plates are provided inside the cooling jacket. The vacuum pump according to claim 6,
The partition plate spirals between one or a plurality of plate-like members extending in a direction crossing a direction in which the second exhaust pipe portion extends and having an opening, or between the inner wall of the cooling jacket and the second exhaust pipe portion. A vacuum pump which is one or a plurality of spiral members extending in a shape.
Vacuum pump. The vacuum pump according to claim 7,
The partition plate has a plurality of the plate-like members, and the plate-like members are arranged so that the opening portions do not overlap in adjacent plate-like members. The vacuum pump according to any one of claims 1 to 8,
A housing for housing at least a part of the exhaust pipe and the pump chamber;
The cooling device is a vacuum pump disposed in the housing. The vacuum pump according to any one of claims 1 to 8,
A housing for housing at least a part of the exhaust pipe and the pump chamber;
The cooling device is a vacuum pump disposed outside the housing. The vacuum pump according to any one of claims 1 to 10,
A first cooling medium flow path for supplying a cooling medium to the second exhaust pipe portion;
A vacuum pump further comprising: a first valve disposed in the first cooling medium flow path and controlling supply of the cooling medium to the second exhaust pipe portion. The vacuum pump according to claim 11,
A second coolant flow path that bypasses the second exhaust pipe portion;
A vacuum pump further comprising a second valve disposed in the second cooling medium flow path and controlling a flow of the cooling medium in the second cooling medium flow path. The vacuum pump according to claim 11 or 12,
The first valve is a vacuum pump that is a flow rate control valve capable of adjusting a flow rate of a cooling medium supplied to the second exhaust pipe portion continuously or in a plurality of stages. A vacuum pump according to claim 12 or claim 13 dependent on claim 12,
The said 2nd valve is a vacuum pump which is a flow control valve which can adjust the flow volume of the cooling medium supplied to the said 2nd exhaust pipe part continuously or in multiple steps. The vacuum pump according to any one of claims 11 to 14,
A vacuum pump further comprising a temperature sensor provided in the exhaust pipe. The vacuum pump according to any one of claims 11 to 15,
A vacuum pump further comprising a flow sensor provided in the exhaust pipe. The vacuum pump according to any one of claims 1 to 16,
A control device for controlling cooling of the second exhaust pipe portion by the cooling device;
The said control apparatus is a vacuum pump which controls cooling of the said 2nd exhaust pipe part by the said cooling device according to the kind of gas which flows in into the said vacuum pump. The vacuum pump according to claim 17,
The said control apparatus is a vacuum pump which acquires the kind of said gas by receiving an input from a high-order system or a user. The vacuum pump according to claim 18,
The vacuum pump holds vapor pressure data including data on the temperature at which the product contained in the gas flowing into the vacuum pump becomes gas, and the product of the product is determined from the type and flow rate of the gas flowing into the vacuum pump. A vacuum pump that determines the target set temperature of the second exhaust pipe portion from the type and concentration of the product and the vapor pressure data of the product, determining the type and concentration. The vacuum pump according to any one of claims 1 to 19,
The said exhaust pipe is a vacuum pump used fluidly connected to the capture device for capturing the product in the said exhaust. The vacuum pump according to claim 20,
The cooling device is configured so that the temperature in the exhaust pipe is equal to or higher than a lower limit temperature at which a product in the exhaust does not adhere to the exhaust pipe and equal to or lower than an upper limit temperature at which the product can be captured by the capturing device. Controlled, vacuum pump. A cooling device for a vacuum pump,
A cooling device comprising an exhaust pipe portion with a cooling function that is replaceably connectable to the exhaust pipe of the vacuum pump. The cooling device according to claim 22,
The cooling device further comprising a heat insulating member that can be disposed between the exhaust pipe of the vacuum pump and the exhaust pipe portion with a cooling function. The cooling device according to claim 22 or 23,
The exhaust pipe part with cooling function is
An exhaust pipe portion capable of communicating with the exhaust pipe of the vacuum pump;
A cooling jacket attached around the exhaust pipe portion;
Having a cooling device. A cooling method for a vacuum pump,
The cooling method of cooling the 2nd exhaust pipe part far from a pump chamber among the 1st exhaust pipe part and the 2nd exhaust pipe part of the exhaust pipe of the said vacuum pump. The cooling method according to claim 25,
A cooling method, wherein the second exhaust pipe portion far from the pump chamber is cooled in a state where the first exhaust pipe portion is insulated from the second exhaust pipe portion. An evacuation system,
A vacuum pump,
A capture device connected to the exhaust side of the vacuum pump,
The vacuum pump is
A pump chamber having a suction port and a discharge port;
An exhaust pipe connected to the exhaust port, the exhaust pipe for guiding exhaust from the pump chamber to the outside of the vacuum pump;
A cooling device for cooling the exhaust pipe;
With
The exhaust pipe has a first exhaust pipe portion and a second exhaust pipe portion,
The first exhaust pipe portion is connected to the exhaust port of the pump chamber, and the second exhaust pipe portion is located farther from the exhaust port of the pump chamber than the first exhaust pipe portion;
The cooling device is disposed in the second exhaust pipe portion;
Vacuum exhaust system. A recording medium storing a program for causing a computer to execute a control method of a vacuum pump,
Acquire information on the type of gas used in the device connected to the vacuum pump and the gas flow rate;
The type of product gas and the concentration of the product gas are determined from the acquired information, and the temperature at which the product gas becomes gas is determined based on the determined type and concentration of the product gas and the vapor pressure data of the product gas. And
Setting the target set temperature of the exhaust pipe of the vacuum pump to a temperature at which the generated gas becomes a gas, or a temperature obtained by adding a predetermined temperature to a temperature at which the generated gas becomes a gas,
A storage medium storing a program for causing a computer to execute. A maintenance method for a vacuum pump,
The exhaust pipe of the vacuum pump has a first exhaust pipe part having no cooling function and a second exhaust pipe part having a cooling function, and the second exhaust pipe part is detached from the first exhaust pipe part. Replacement, maintenance method.   30. The maintenance method according to claim 29, wherein a heat insulating member is disposed between the first exhaust pipe portion and the second exhaust pipe portion in the exhaust pipe, and the heat insulation is provided together with the second exhaust pipe portion. Maintenance method that replaces parts.

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