CN114109831B - Water circulation control device for vacuum pump set - Google Patents
Water circulation control device for vacuum pump set Download PDFInfo
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- CN114109831B CN114109831B CN202111318207.XA CN202111318207A CN114109831B CN 114109831 B CN114109831 B CN 114109831B CN 202111318207 A CN202111318207 A CN 202111318207A CN 114109831 B CN114109831 B CN 114109831B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
- F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
The application provides a hydrologic cycle controlling means for vacuum pump package belongs to and observes and controls technical field, and the device has played cooling cycle and accurate control two parts function, and industrial control computer is according to the water flow signal of real-time collection flow sensor group output and the water pressure signal of pressure sensor output to according to preset program automatic control water pump, valve, cooling tower work. The pressure sensor acquires the pressure of the outlet water of the vacuum pump set in real time before pressurization; the water pump pressurizes and transmits water; the pipeline control valve controls the opening and closing of the whole pipeline, and the pressure sensor displays the pressure after the pressurization of the water pump; the cooling tower reduces the water temperature, and adopts an air cooling mode to carry out cold-heat exchange and volatilize to take away heat so as to achieve the heat dissipation purpose; the water tank is used for intermediate storage in the water circulation process, the water output of the vacuum pump is prevented from being lower than the water supply amount of the water tower, the water inlet position of the water tank is lower than the water outlet of the pump set, and water can naturally flow into the water tank conveniently.
Description
Technical Field
The application belongs to the technical field of measurement and control, and particularly relates to a water circulation control device for a vacuum pump set.
Background
The water ring vacuum pump is the most common one in liquid ring vacuum pumps, and the working medium and the cooling medium are water, so that the water is thrown to the pump shell through the rotation of the eccentric rotor to form a vacuum liquid ring concentric with the pump shell, and the ultimate vacuum degree of 2000 Pa-4000 Pa is obtained. When the vacuum pump works normally, a large amount of water is needed, on one hand, the continuous circulation of the water can play a role in cooling equipment, so that the service life of the equipment is prolonged, and on the other hand, the continuous circulation of the water can provide a certain vacuum for the vacuum pump, so that stronger air extraction capacity is realized.
When the cabin pressure control system of the centering type early warning command machine is used for ground test, more than 2 water ring vacuum pumps are needed to be used simultaneously, and the maximum water consumption reaches 125m 3 And/h, which is 1.78 times of the water supply amount in the prior environment. The water supply amount is small, when a plurality of water ring vacuum pumps work for a long time simultaneously, the phenomenon of insufficient water supply amount and idle pumping occurs, and the water supply amount is large, so that when the water ring vacuum pumps work, water cannot be timely discharged to the water outlet pipe, an overflow phenomenon is caused, water is wasted, and therefore circulating water cannot be realized. It is therefore necessary to study a water circulation control method for a vacuum pump set to maximize the economical efficiency of the vacuum pump set.
Disclosure of Invention
In order to solve the problem that the circulating water flow can not be accurately and automatically controlled and the water circulation can be automatically controlled in the prior art, the application provides a water circulation control device for a vacuum pump set, and the technical scheme is as follows:
the application provides a hydrologic cycle controlling means for vacuum pump package, vacuum pump package includes a roots pump and five water ring pumps, the device includes: a cooling circulation assembly, a control assembly and an industrial control computer,
the cooling cycle assembly includes: the device comprises a pre-pressurization pressure gauge, a water pump, a pipeline control valve, a post-pressurization pressure gauge, a cooling tower, a water tank and a waterway control valve group, wherein a water inlet of the water pump is connected with a water outlet of a vacuum pump unit, the pre-pressurization pressure gauge is positioned between the water pump and the vacuum pump unit, a water outlet of the water pump is connected with the water inlet of the cooling tower through a pipeline, the pipeline control valve is positioned on the pipeline between the water pump and the cooling tower, the post-pressurization pressure gauge is positioned between the pipeline control valve and the cooling tower, a water outlet of the cooling tower is connected with the water inlet of the water tank, a water outlet of the water tank is connected with the water inlet of the vacuum pump unit through a pipeline, and the waterway control valve group is positioned between the water tank and the vacuum pump unit; the cooling circulation assembly is used for introducing water generated after the vacuum pump set works and runs into the vacuum pump set after being pressurized and cooled;
the control assembly includes: the flow sensor, the pneumatic valve and the electromagnetic valve are arranged on each water ring pump correspondingly, the electromagnetic valve is arranged on the five water ring pumps, the flow sensor, the two pneumatic valves and the electromagnetic valve are arranged on the Roots pump correspondingly,
the industrial control computer is used for:
determining a target vacuum pump according to preset requirements;
performing a water circulation control operation, the performing a water circulation control operation comprising:
upon detecting that the water ring pump and the Roots pump are free of water, the target vacuum pump includes at least one water ring pump;
controlling the pneumatic valve and the electromagnetic valve corresponding to the target vacuum pump to be opened;
controlling the cooling circulation assembly to be started;
when receiving flow overflow information sent by a flow sensor corresponding to a first target vacuum pump, controlling a pneumatic valve corresponding to the first target vacuum pump to be closed, wherein the flow overflow information is used for indicating water in the target vacuum pump to overflow, and the first target vacuum pump is any one of all the target vacuum pumps;
and when all the target vacuum pumps are detected to overflow according to the flow sensor, controlling the electromagnetic valve to be closed, and controlling the cooling circulation assembly to be closed until the water circulation control operation is executed again when the vacuum pump assembly is detected to be lack of water.
Optionally, the industrial control computer is configured to:
determining a target flying height of a measured object;
and when the names and the numbers of the target vacuum pumps corresponding to the target flying heights exist in the height corresponding relation, determining the names and the numbers of the target vacuum pumps corresponding to the target flying heights as target results, wherein the height corresponding relation is used for recording the corresponding relation between the flying heights of the tested objects and the names and the numbers of the vacuum pumps.
Optionally, the industrial control computer is configured to:
and establishing the height corresponding relation according to the pressure and the air supply flow of the tested object in the flight process.
Optionally, the target vacuum pump comprises a water ring pump, or a water ring pump and a Roots pump, or a plurality of water ring pumps and a Roots pump.
Alternatively, the tank 6 has a capacity of 2 cubic meters.
Optionally, the apparatus comprises: the display screen is provided with a display screen,
the industrial control computer is further configured to:
and controlling the display screen to display the working state information of the water circulation control device.
Alternatively, the process may be carried out in a single-stage,
the industrial control computer is further configured to:
and controlling the air storage tank to supply 0.1 megapascal of compressed air to the pneumatic valve corresponding to each water ring pump and the pneumatic valve of the Roots pump.
The utility model provides a hydrologic cycle controlling means for vacuum pump package has overcome a great deal of not enough that exists among the prior art, compares with prior art, mainly has following several advantages:
(1) The device can automatically match the number of Roots pumps and water ring pumps according to the simulated test flying height of the cabin pressure control system, so that the work of the vacuum pump set is optimal, the time and labor consumption of manually starting the vacuum pump set in the prior art are avoided, meanwhile, the unnecessary water ring pump water quantity of multiple starting is avoided, and water resources and electricity consumption are saved to a certain extent;
(2) The device can control the water pumping quantity of the water ring more accurately, so that when the water ring pump works, the phenomenon of empty pumping caused by less water quantity is avoided, the phenomenon of overflow caused by larger water quantity is avoided, water resources are saved, the service life of the vacuum pump set is prolonged, and the cost is reduced;
(3) The device can automatically realize the start and stop of circulating water according to the working requirement, avoids the uncontrollable water circulation in the prior art, and reduces the cost.
Drawings
FIG. 1 is a schematic diagram of a water circulation control device for a vacuum pump set according to the present application;
wherein: the device comprises a 1-industrial control computer, a 2-pressure sensor before pressurization, a 3-water pump, a 4-pipeline control valve, a 5-pressure sensor after pressurization, a 6-cooling tower, a 7-water tank, an 8-1 water ring pump waterway control valve, a 9-2 water ring pump waterway control valve, a 10-3 water ring pump waterway control valve, an 11-4 water ring pump waterway control valve, a 12-5 water ring pump waterway control valve, a 13-1 water ring pump flow sensor, a 14-2 water ring pump flow sensor, a 15-3 water ring pump flow sensor, a 16-4 water ring pump flow sensor and a 17-5 water ring pump flow sensor.
Detailed Description
The present application is described in further detail below with reference to the following detailed description of the invention and the accompanying drawings.
The present application provides a water circulation control device for a vacuum pump unit, as shown in fig. 1, the vacuum pump unit includes a roots pump and five water ring pumps, the device includes: a cooling circulation assembly, a control assembly and an industrial control computer,
the cooling cycle assembly includes: the water pump comprises a pre-pressurization pressure gauge 1, a water pump 2, a pipeline control valve 3, a post-pressurization pressure gauge 4, a cooling tower 5, a water tank 6 and a waterway control valve group 7, wherein a water inlet of the water pump 2 is connected with a water outlet of a vacuum pump group, the pre-pressurization pressure gauge 1 is positioned between the water pump 2 and the vacuum pump group, a water outlet of the water pump 2 is connected with a water inlet of the cooling tower 5 through a pipeline, the pipeline control valve 3 is positioned on a pipeline between the water pump 2 and the cooling tower 5, the post-pressurization pressure gauge 4 is positioned between the pipeline control valve 3 and the cooling tower 5, a water outlet of the cooling tower 5 is connected with a water inlet of the water tank 6, a water outlet of the water tank 6 is connected with a water inlet of the vacuum pump group through a pipeline, and the waterway control valve group 7 is positioned between the water tank 6 and the vacuum pump group; the cooling circulation assembly is used for introducing water generated after the vacuum pump set works and runs into the vacuum pump set after being pressurized and cooled;
the control assembly includes: the flow sensor 8, the pneumatic valve 9 and the solenoid valve 10, every water ring pump corresponds to set up a flow sensor and a pneumatic valve, and five water ring pumps set up a solenoid valve, and the roots pump corresponds to set up a flow sensor, two pneumatic valves and a solenoid valve.
The industrial control computer is used for:
determining a target vacuum pump according to preset requirements;
performing a water circulation control operation, the performing a water circulation control operation comprising:
upon detecting that the water ring pump and the Roots pump are free of water, the target vacuum pump includes at least one water ring pump;
controlling the pneumatic valve and the electromagnetic valve corresponding to the target vacuum pump to be opened;
controlling the cooling circulation assembly to be started;
when receiving flow overflow information sent by a flow sensor corresponding to a first target vacuum pump, controlling a pneumatic valve corresponding to the first target vacuum pump to be closed, wherein the flow overflow information is used for indicating water in the target vacuum pump to overflow, and the first target vacuum pump is any one of all the target vacuum pumps;
and when water overflows from all the target vacuum pumps according to the detection of the flow sensor, controlling the electromagnetic valve to be closed and controlling the cooling circulation assembly to be closed until the water circulation control operation is executed again when the water shortage of the vacuum pump assembly is detected.
Specifically, the industrial control computer is for:
determining a target flying height of a measured object;
and when the names and the numbers of the target vacuum pumps corresponding to the target flying heights exist in the height corresponding relation, determining the names and the numbers of the target vacuum pumps corresponding to the target flying heights as target results, wherein the height corresponding relation is used for recording the corresponding relation between the flying heights of the tested objects and the names and the numbers of the vacuum pumps.
Specifically, the industrial control computer is for: and establishing a height corresponding relation according to the pressure and the air supply flow of the tested object in the flying process. According to a calculation formula, according to the pressure and the air supply flow of a tested object in the flying process, establishing a corresponding relation between the height and the pumping speed, wherein the height calculation formula is as follows:
wherein: s-volume flow (L/S); m-gas mass (kg/hr); r-molar gas constant (J/mol.K); t—gas thermodynamic temperature (K); p-gas inlet pressure (Pa); m-molar mass of gas (Kg/mol); u-conductance (L/S); d (D) N -pipe diameter (m); l-pipe length (m); p (P) 1 -inlet pressure (Pa); p (P) 2 -outlet pressure (Pa); s is S p Effective pumping speed (L/s)
Illustratively, the target vacuum pump comprises one water ring pump, or one water ring pump and one Roots pump, or a plurality of water ring pumps and one Roots pump.
Alternatively, the tank has a capacity of 2 cubic meters.
Further, the apparatus may further include: the display screen is provided with a display screen,
the industrial control computer is also for:
and the control display screen displays the working state information of the water circulation control device.
Further, the industrial control computer is further configured to:
and controlling the air storage tank to supply 0.1 megapascal of compressed air to the pneumatic valve corresponding to each water ring pump and the pneumatic valve of the Roots pump.
In this embodiment, a preset configuration relationship of the vacuum pump set is set in the software in the industrial control computer, and the configuration relationship is obtained according to the relationship between the working height of the cabin pressure control system and the corresponding external atmospheric pressure, and the working flow of the cabin air entraining system. When the system works, the name and the number of the target vacuum pumps are selected according to the configuration relation of the vacuum pump sets and the experimental simulation flight height of the pressure control system of the detected cabin, and the height corresponding relation is used for recording the corresponding relation between the flight height of the detected object and the name and the number of the vacuum pumps. The vacuum pump set configuration is shown in table 1.
Table 1 table of vacuum pump set configuration relationships
After the target vacuum pump is determined, the system automatically starts the corresponding vacuum pump waterway control valve to a certain opening degree, and starts the pipeline control valve 4, then starts the corresponding vacuum pump, at the moment, the target vacuum pump starts to work, the water pressure drops, the system automatically starts the water pump 3 and the cooling tower 6 according to the monitored pressure of the pressurized water, circulating water starts to work, the flow sensor automatically monitors the water flow of the output port of the target vacuum pump, when the water flow is too small, the system automatically increases the opening degree of the pipeline control valve, when the water flow is too large, the system automatically reduces the opening degree of the pipeline control valve, the system continuously adjusts the valve according to the water flow collected in real time, when the air suction gradually reaches the target point, and when a plurality of water ring pumps are not required to be started, the system automatically closes the rest water ring pumps and the pipeline control valves thereof, only one water ring pump is reserved, and the water ring pumps sequentially reciprocate to realize automatic control.
The foregoing has outlined only the embodiments of the present application, which have been described in some detail and are not to be construed as limiting the scope of the invention. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application.
Claims (8)
1. A water circulation control device for a vacuum pump assembly, the vacuum pump assembly comprising a roots pump and five water ring pumps, the device comprising: a cooling circulation assembly, a control assembly and an industrial control computer,
the cooling cycle assembly includes: the device comprises a pre-pressurization pressure gauge, a water pump, a pipeline control valve, a post-pressurization pressure gauge, a cooling tower, a water tank and a waterway control valve group, wherein a water inlet of the water pump is connected with a water outlet of a vacuum pump unit, the pre-pressurization pressure gauge is positioned between the water pump and the vacuum pump unit, a water outlet of the water pump is connected with the water inlet of the cooling tower through a pipeline, the pipeline control valve is positioned on the pipeline between the water pump and the cooling tower, the post-pressurization pressure gauge is positioned between the pipeline control valve and the cooling tower, a water outlet of the cooling tower is connected with the water inlet of the water tank, a water outlet of the water tank is connected with the water inlet of the vacuum pump unit through a pipeline, and the waterway control valve group is positioned between the water tank and the vacuum pump unit; the cooling circulation assembly is used for introducing water generated after the vacuum pump set works and runs into the vacuum pump set after being pressurized and cooled;
the control assembly includes: the flow sensor, the pneumatic valve and the electromagnetic valve are arranged on each water ring pump correspondingly, the electromagnetic valve is arranged on the five water ring pumps, the flow sensor, the two pneumatic valves and the electromagnetic valve are arranged on the Roots pump correspondingly,
the industrial control computer is used for:
determining a target vacuum pump according to preset requirements;
performing a water circulation control operation, the performing a water circulation control operation comprising:
upon detecting that the water ring pump and the Roots pump are free of water, the target vacuum pump includes at least one water ring pump;
controlling the pneumatic valve and the electromagnetic valve corresponding to the target vacuum pump to be opened;
controlling the cooling circulation assembly to be started;
when receiving flow overflow information sent by a flow sensor corresponding to a first target vacuum pump, controlling a pneumatic valve corresponding to the first target vacuum pump to be closed, wherein the flow overflow information is used for indicating water in the target vacuum pump to overflow, and the first target vacuum pump is any one of all the target vacuum pumps;
and when all the target vacuum pumps are detected to overflow according to the flow sensor, controlling the electromagnetic valve to be closed, and controlling the cooling circulation assembly to be closed until the water circulation control operation is executed again when the vacuum pump assembly is detected to be lack of water.
2. The apparatus of claim 1, wherein the device comprises a plurality of sensors,
the industrial control computer is used for:
determining a target flying height of a measured object;
and when the names and the numbers of the target vacuum pumps corresponding to the target flying heights exist in the height corresponding relation, determining the names and the numbers of the target vacuum pumps corresponding to the target flying heights as target results, wherein the height corresponding relation is used for recording the corresponding relation between the flying heights of the tested objects and the names and the numbers of the vacuum pumps.
3. The apparatus of claim 2, wherein the device comprises a plurality of sensors,
the industrial control computer is used for:
and establishing the height corresponding relation according to the pressure and the air supply flow of the tested object in the flight process.
4. The apparatus of claim 1, wherein the device comprises a plurality of sensors,
the target vacuum pump comprises a water ring pump, or a water ring pump and a Roots pump, or a plurality of water ring pumps and a Roots pump.
5. The device according to claim 1, characterized in that the capacity of the tank 6 is 2 cubic meters.
6. The apparatus according to claim 1, characterized in that the apparatus comprises: the display screen is provided with a display screen,
the industrial control computer is further configured to:
and controlling the display screen to display the working state information of the water circulation control device.
7. The apparatus of claim 1, wherein the industrial control computer is further configured to:
and collecting the pressure output by the pressure sensor in real time.
8. The apparatus of claim 1, wherein the industrial control computer is further configured to:
and controlling the air storage tank to supply 0.1 megapascal of compressed air to the pneumatic valve corresponding to each water ring pump and the pneumatic valve of the Roots pump.
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CN202111318207.XA CN114109831B (en) | 2021-11-08 | 2021-11-08 | Water circulation control device for vacuum pump set |
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CN202111318207.XA CN114109831B (en) | 2021-11-08 | 2021-11-08 | Water circulation control device for vacuum pump set |
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CN114109831B true CN114109831B (en) | 2023-05-23 |
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CN205559284U (en) * | 2016-04-11 | 2016-09-07 | 山东圣瑞佳电力设备有限公司 | Roots's water ring pump evacuating device |
JP2018062872A (en) * | 2016-10-11 | 2018-04-19 | 株式会社荏原製作所 | Vacuum pump, chiller of vacuum pump, cooling method of vacuum pump, vacuum evacuation system, and maintenance method of vacuum pump |
CN208059608U (en) * | 2018-02-02 | 2018-11-06 | 苏州艾嘉亚真空科技有限公司 | Cryogenic heat exchanger water ring pumped vacuum systems |
CN109340114A (en) * | 2018-12-07 | 2019-02-15 | 江苏方天电力技术有限公司 | Steam turbine Roots-water ring vacuum pump frequency control extract system and its control method |
CN209724661U (en) * | 2019-04-29 | 2019-12-03 | 山东精工泵业有限公司 | Roots Vacuum Pump Units |
CN214403980U (en) * | 2020-12-31 | 2021-10-15 | 江苏岑途工程技术有限公司 | Vacuum system |
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2021
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JP2002285992A (en) * | 2001-03-27 | 2002-10-03 | Boc Edwards Technologies Ltd | Vacuum pump |
CN201193610Y (en) * | 2008-04-29 | 2009-02-11 | 无锡市四方真空设备有限公司 | Closed circulation roots pump and water-ring pump vacuum unit |
DE202011105535U1 (en) * | 2011-09-10 | 2011-12-13 | Klaus-Peter Schmidt | Device for providing dissolved gases of free heating water for closed heating systems |
CN105649970A (en) * | 2014-11-10 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Pulse water-cooling system used for multi-level dry vacuum pump |
CN205559284U (en) * | 2016-04-11 | 2016-09-07 | 山东圣瑞佳电力设备有限公司 | Roots's water ring pump evacuating device |
JP2018062872A (en) * | 2016-10-11 | 2018-04-19 | 株式会社荏原製作所 | Vacuum pump, chiller of vacuum pump, cooling method of vacuum pump, vacuum evacuation system, and maintenance method of vacuum pump |
CN208059608U (en) * | 2018-02-02 | 2018-11-06 | 苏州艾嘉亚真空科技有限公司 | Cryogenic heat exchanger water ring pumped vacuum systems |
CN109340114A (en) * | 2018-12-07 | 2019-02-15 | 江苏方天电力技术有限公司 | Steam turbine Roots-water ring vacuum pump frequency control extract system and its control method |
CN209724661U (en) * | 2019-04-29 | 2019-12-03 | 山东精工泵业有限公司 | Roots Vacuum Pump Units |
CN214403980U (en) * | 2020-12-31 | 2021-10-15 | 江苏岑途工程技术有限公司 | Vacuum system |
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