EP3940234B1 - Pompe et procédé de fabrication d'une couche antifriction - Google Patents

Pompe et procédé de fabrication d'une couche antifriction Download PDF

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Publication number
EP3940234B1
EP3940234B1 EP21199962.8A EP21199962A EP3940234B1 EP 3940234 B1 EP3940234 B1 EP 3940234B1 EP 21199962 A EP21199962 A EP 21199962A EP 3940234 B1 EP3940234 B1 EP 3940234B1
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EP
European Patent Office
Prior art keywords
pump
sealing
oxide layer
spiral
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP21199962.8A
Other languages
German (de)
English (en)
Other versions
EP3940234A3 (fr
EP3940234A2 (fr
Inventor
Bernd Koci
Jonas Becker
Sebastian Latta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21199962.8A priority Critical patent/EP3940234B1/fr
Publication of EP3940234A2 publication Critical patent/EP3940234A2/fr
Publication of EP3940234A3 publication Critical patent/EP3940234A3/fr
Priority to JP2022139319A priority patent/JP2023050117A/ja
Priority to CN202211178055.2A priority patent/CN116085259A/zh
Application granted granted Critical
Publication of EP3940234B1 publication Critical patent/EP3940234B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
    • F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/02—Packing the free space between cylinders and pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F04B53/143—Sealing provided on the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F04B53/162—Adaptations of cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/92—Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for
    • F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/14—Self lubricating materials; Solid lubricants

Definitions

  • the present invention relates to a pump, in particular a vacuum pump, which comprises, for example, at least two conveying elements that are movable relative to one another and at least one seal arranged on one of the two conveying elements.
  • a sliding layer applied at least in certain areas to in particular at least one of the conveying elements is provided.
  • the invention relates to the use of components provided with a sliding layer and at least one seal for the production of pumps, in particular vacuum pumps, as well as a method for producing a sliding layer.
  • fluids such as fats or oils can be used to seal a pumping chamber of pumps, in particular vacuum pumps.
  • a piston pump for example, basically has a gap between the delivery chamber and the piston. In a fluid-sealed or fluid-lubricated design, this gap is filled by a fluid, usually oil or grease, during operation of the pump, with the fluid acting as a seal between the piston and the pumping chamber.
  • a fluid usually oil or grease
  • defects in the surface structure can occur. be splitting.
  • some coatings (paints, anodized layers, etc.) have defects.
  • Scroll pumps have sickle-shaped suction chambers, which are formed by a rotor with a spiral cross-section in engagement with a similar spiral-shaped stator, the rotor being set in an orbiting motion by an eccentric drive. Seals are provided on the front faces of the spiral to seal off the pumping chambers, with the front seal of the rotor rubbing against the stator and vice versa.
  • sliding or protective layers can be provided, such as those described in EP 3 153 706 A1 are described.
  • Such sliding layers can comprise an oxide layer formed by anodic oxidation in an acidic electrolyte, in particular one containing oxalic acid, sulfuric acid or mixtures thereof.
  • These overlays/protective layers also increase the corrosion and wear resistance of the base material. There are very narrow gaps (a few 0.01 mm) between the sickle-shaped suction chambers. In case of contact of both The hard sliding and protective layer ensures that the base material has a longer service life.
  • running-in period it has been found that such oxide layers, due to their porous structure, cannot achieve the required final pressures and gas tightness, or only after a longer period of time (so-called running-in period).
  • running-in period Experiments have shown that
  • the pump according to the invention is preferably a vacuum pump.
  • the pump comprises a sliding layer comprising an oxide layer and a seal formed from a fluorine-containing polymer, the oxide layer being at least partially covered by the seal and/or impregnated with the seal, the seal being a polyurethane layer formed from a polyurethane , which has perfluorinated segments and/or wherein the seal contains a fluoroalkylsiloxane and/or wherein the seal is formed from a polyurethane which has polyether segments, and/or wherein the seal is formed from a polyurethane having perfluorinated polyether segments.
  • the slipping layer as referred to herein can have several properties.
  • the sliding layer fulfills two functions: 1) Sliding layer/optimization of the tribological system. 2) protective layer; Protection of the base material from damage, wear and corrosion. Tests have shown that without a hard surface coating on scroll pumps, the base material can be damaged within a very short time.
  • the oxide layer is preferably formed by anodic oxidation, particularly in an acidic electrolyte.
  • the electrolyte preferably comprises oxalic acid and/or sulfuric acid, with sulfuric acid being even more preferred.
  • the oxide layer is preferably an anodized metal formed by electrolytic oxidation of aluminum. This oxide layer can have the above-mentioned multifunctional properties with regard to the sliding and protective effect.
  • a pump according to the invention with a sliding layer that includes an oxide layer and a seal for example in the form of a polyurethane layer or impregnation, enables lower ultimate pressures than sliding layers, such as those described in EP 3 153 706 A1 are described.
  • the hard oxide layer applied to protect against wear has pores, defects and thermally induced cracks.
  • the pores are mainly arranged perpendicularly to the bed, although there are also some branches arranged horizontally to the bed within the bed, which connect the vertical pores with each other.
  • such hard oxide layers have other defects, e.g. B. in the form of inclusions and cracks. Voids and pores represent microscopic channels through which gases can flow. Furthermore, substances such. B.
  • sealing allows the required final pressures to be reached much more quickly, while at the same time maintaining a high level of protection against wear. This can presumably be explained by the fact that in the pump according to the invention pores contained in the oxide layer are closed by the seal and gas flow within the sliding layer or outgassing from the sliding layer is prevented or at least reduced.
  • the pump in particular a vacuum pump, also comprises at least two conveying elements that are movable relative to one another and are arranged in such a way that they interact in a sealing manner to form at least one conveying chamber, at least one seal arranged on one of the two conveying elements.
  • the sliding layer is applied at least in regions to at least one of the conveying elements and interacts with the respective seal.
  • the pump is a spiral or scroll pump, in particular a spiral or scroll vacuum pump, in which the sliding layer is applied at least in regions to at least one of the spiral elements.
  • the spiral or scroll pump in particular a spiral or scroll vacuum pump, is preferably one in which the conveying elements are two spiral elements which can be moved relative to one another and which each have a wall running spirally around an axis with a free end face on a carrier and are arranged in this way are that the walls engage in one another in a sealing manner, forming pumping chambers, with the seals being arranged on the free end faces of the walls.
  • the pump is a piston pump, in particular a piston vacuum pump, with at least one cylinder with an inner cylinder wall and a piston that can be moved in the cylinder.
  • the conveying elements are the cylinder and a piston that can be moved therein, with the seal being arranged on the piston and/or on an inner wall of the cylinder.
  • the sliding layer is applied at least in regions to the inner cylinder wall and/or the piston.
  • the fluorine-containing polymer contained in the seal is a polymer that is either fully fluorinated, ie, a perfluorinated polymer, or one that has perfluorinated segments.
  • Seals which contain a fluorine-containing polyurethane, in particular a polyurethane which has perfluorinated segments have proven to be particularly suitable. It has been shown that with such polyurethanes with perfluorinated segments, low ultimate pressures and short running-in times are possible, while at the same time a high wear resistance is maintained.
  • the seal is formed from a polyurethane having polyether segments.
  • polyurethanes with polyether segments have also proven to be particularly suitable in terms of low end pressures, short run-in times and high wear resistance. Accordingly, it is even more preferred that the polyurethane layer is formed from a polyurethane which has perfluorinated polyether segments. With the perfluorinated polyether segments, particularly low ultimate pressures and short running-in times can be achieved, while at the same time offering very good wear resistance.
  • the perfluorinated polyether segments can be present in the dispersion for producing the seal as a polyol prepolymer or as a diisocyanate prepolymer.
  • the perfluorinated polyether segments can be, for example, segments based on perfluorinated polyethylene glycol or perfluorinated polypropylene glycol act, preferably based on perfluorinated polyethylene glycol.
  • the sliding layer of the pump according to the invention preferably has at least one fluorinated polymer which is different from PTFE. Due to its grain size and the associated relatively high gas permeability, PTFE is not ideal for sealing the porous oxide layer. Consequently, although PTFE may be included, in this case at least one other polymer, which differs from PTFE, should be included.
  • the seal for example in the form of a polyurethane layer, can be obtained by applying a dispersion, for example a polyurethane dispersion, to the oxide layer.
  • a dispersion for example a polyurethane dispersion
  • the seal can be applied either in the form of an aqueous dispersion or in the form of a solvent-based dispersion.
  • the solvent is preferably a C 1 to C 8 alcohol, in particular a C 3 to C 6 alcohol, for example a C 4 alcohol.
  • the seal can preferably be obtained by applying an aqueous polyurethane dispersion, in particular an aqueous ionic polyurethane dispersion, preferably an anionic polyurethane dispersion.
  • Dispersions of anionic polyurethanes based on a perfluorinated polyether (PFPE) structure have proven to be particularly advantageous.
  • Exemplary suitable anionic polyurethane dispersions are available under the tradename Fluorolink from Solvay.
  • the dispersion can be applied by spraying, dipping, knife coating or spin coating.
  • Application by spraying or dipping has proven to be advantageous in terms of ease of implementation, with spraying being particularly advantageous in terms of uniformity and the production of particularly thin layers.
  • Very uniform, thin coatings can also be produced by applying with a doctor blade or spin coating.
  • the dispersion is applied selectively, in particular to sealing surfaces.
  • the thickness of the seal e.g., in the form of a polyurethane layer
  • the thickness of the seal is not limited to any particular thickness.
  • seals with a thickness of 0.1 ⁇ m to 35 ⁇ m have proven advantageous in terms of balancing low ultimate pressure and short running-in time on the one hand and high wear resistance on the other.
  • the thickness of the seal is from 0.5 to 25 ⁇ m, even more preferably from 0.8 to 20 ⁇ m, even more preferably from 1.0 to 15 ⁇ m, most preferably from 1.5 to 10 ⁇ m. Sealing layer thicknesses of less than or equal to 5 ⁇ m are highly preferred.
  • the sealant can impregnate pores of the oxide layer without a discernible continuous layer of fluorine-containing polymer covering the oxide layer.
  • the impregnation can fill in gaps that connect the pores of the oxide layer and thus increase the gas-tightness.
  • the seal for example in the form of a polyurethane layer, covers the oxide layer substantially completely or completely. The complete or essentially complete coverage closes the pores contained in the oxide layer, so that a bypass of the conveyed medium through the overlay is prevented. In this way, particularly low final pressures can be achieved with short run-in times.
  • the sliding layer of the pump according to the invention is usually contain an adhesion promoter.
  • the adhesion promoter is usually a reactive compound that improves the bonding of the seal, preferably in the form of a polyurethane layer, to the oxide layer.
  • adhesion promoters are known to those skilled in the art. They can be, for example, epoxy compounds, siloxane compounds, aziridine-derived compounds, melamine compounds or blocked isocyanate compounds. Epoxy silanes and polyaziridines have proven to be particularly suitable adhesion promoters.
  • adhesion promoters can be in the form of a polyurethane layer and/or impregnation Sealing may be included, for example by adding a polyurethane dispersion that is used to produce the polyurethane layer.
  • the adhesion promoter may be applied to the oxide layer before the seal is applied. In this case the adhesion promoter acts as a primer on the oxide layer.
  • the pump according to the invention preferably comprises conveying elements made of a base material which is at least partially made of aluminum or an aluminum alloy and on which the sliding layer is applied.
  • the conveying elements are preferably made of aluminum or an aluminum alloy.
  • the base material is particularly preferably an aluminum alloy of the AlMgSi type.
  • Aluminum alloys of the type AIMgSiMn, AIMgSiPb or AlZnMg are also advantageous.
  • Aluminum and aluminum alloys have proven to be particularly suitable for being subjected to anodic oxidation in an acidic electrolyte and for forming a sliding layer according to the invention.
  • the electrolyte preferably has oxalic acid, sulfuric acid or a mixture thereof. More preferably, the electrolyte includes sulfuric acid.
  • the oxide layer in step A is produced on a substrate, for example a delivery element of a pump, as described above.
  • Pores and defects contained in the oxide layer are preferably closed by the seal in step b). This creates a sliding layer, in which cross-connections between the pores and imperfections of the oxide layer are blocked, thereby increasing the gas-tightness.
  • the seal used in the method according to the invention is in particular one as described above in connection with the pump according to the invention.
  • the method according to the invention is part of the production of a pump, in particular a vacuum pump, as is described here.
  • the pump according to the invention can also be a piston pump (not shown in the figures). Sealing as described herein is also preferred for sealing general coated components (e.g. static sealing to oxide layers, e.g. O-ring sealing).
  • the 1 shows a vacuum pump designed as a scroll pump 20 . This comprises a first housing element 22 and a second housing element 24, with the second housing element 24 having a pump-active structure, namely a spiral wall 26. The second housing element 24 thus forms a stationary spiral component of the scroll pump 20.
  • the spiral wall 26 interacts with a spiral wall 28 of a movable one Spiral member 30 together, wherein the movable scroll member 30 is eccentrically excited to produce a pumping action via an eccentric shaft 32.
  • a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36 . It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40 . Also mounted on the movable scroll member 30 for sealing is an in 1 left-hand end of a corrugated bellows 42 attached, the right-hand end of the first Housing member 22 is fixed. The left end of the corrugated bellows 42 follows the deflection of the movable scroll member 30.
  • the scroll pump 20 includes a fan 44 for generating a flow of cooling air.
  • a fan 44 for generating a flow of cooling air.
  • an air guide hood 46 is provided, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped in such a way that the cooling air flow essentially flows around the entire pump housing and thus achieves good cooling performance.
  • the scroll pump 20 also includes an electronics housing 48 in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base for the pump 20.
  • a channel 50 is visible between the electronics housing 48 and the first housing element 22, through which an air flow generated by the fan 44 is guided along the first housing element 22 and also along the electronics housing 48, so that both are effectively cooled become.
  • the electronics housing 48 is in 2 illustrated in more detail. It comprises a number of separate chambers 52. Electronic components can be cast in these chambers 52 and are therefore advantageously shielded.
  • the minimum possible amount of the encapsulation material can preferably be used.
  • the potting material can be introduced into the chamber 52 first and then the electronic component can be pressed in.
  • the chambers 52 can preferably be designed in such a way that different variants of the electronic components, in particular different assembly variants of a circuit board, can be arranged and/or encapsulated in the electronics housing 48 .
  • individual chambers 52 can also remain empty, ie have no electronic components.
  • a so-called modular system for different types of pumps can thus be implemented in a simple manner.
  • the Casting material can in particular be designed to be thermally conductive and/or electrically insulating.
  • a plurality of walls or ribs 54 are formed on the rear side of the electronics housing 48, which define a plurality of channels 50 for directing a flow of cooling air.
  • the chambers 52 also enable particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a thermally conductive potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • the scroll pump 20 is shown in perspective as a whole, but the air-guiding hood 46 is hidden, so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the stationary spiral component 24 and each define ribs 58 arranged between the recesses 56 .
  • the flow of cooling air generated by the fan 44 passes through the recesses 56 and past the ribs 58 and thus cools the fixed spiral component 24 particularly effectively.
  • the cooling air flow first flows around the stationary spiral component 24 and only then around the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the active pumping area of the pump 20 develops a lot of heat due to the compression during operation and is therefore primarily cooled here .
  • the pump 20 includes a pressure sensor 60 integrated into it.
  • the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection, only partially shown.
  • the pressure sensor 60 is integrated into the control of the scroll pump 20 .
  • the engine 34 which is in 1 is visible, are controlled depending on a pressure measured by the pressure sensor 60 pressure.
  • the high-vacuum pump can only be switched on when the pressure sensor 60 measures a sufficiently low pressure. In this way, the high-vacuum pump can be protected from damage.
  • FIG. 4 shows the pressure sensor 60 and its arrangement on the stationary spiral component 24 in a cross-sectional view.
  • a channel 62 is provided for the pressure sensor 60, which here opens into a non-pumping-active outer area between the spiral walls 26 and 28 of the stationary or movable spiral components 24 and 30.
  • the pressure sensor measures an intake pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in a pump-active area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 allows, for example by determining a compression, in particular a detection of a state of wear of the pump-active components, in particular a sealing element 64 also referred to as a tip seal.
  • the measured intake pressure can also be used to regulate the pump (including pump speed).
  • an intake pressure can be specified by software and an intake pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, a pressure increase caused by wear can be compensated by increasing the speed. This means that a tip seal change can be postponed or longer change intervals can be implemented.
  • the data from the pressure sensor 60 can therefore generally be used, for example, for determining wear, for situational control of the pump, for process control, etc.
  • the pressure sensor 60 can be optionally provided. Instead of the pressure sensor 60, a blind plug for closing the channel 62 can be provided, for example. A pressure sensor 60 can then be retrofitted, for example, if required. In particular with regard to retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20 .
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44 . As a result, it is also advantageously cooled. This also has the consequence that no special measures need to be taken to ensure that the pressure sensor 60 is more temperature-resistant, and consequently a more cost-effective sensor can be used.
  • the pressure sensor 60 is particularly arranged in such a way that it does not increase the external dimensions of the pump 20 and the pump 20 consequently remains compact.
  • the movable scroll member 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly visible.
  • the spiral component 30 includes a base plate 66, starting from which the spiral wall 28 extends.
  • a side of the base plate 66 facing away from the spiral wall 28 is in 6 visible.
  • the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in 1 are visible.
  • the base plate 66 On the outside of the base plate 66 are three holding projections 68 spaced apart over the circumference of the base plate 66 and distributed evenly over the circumference intended.
  • the holding projections 68 extend radially outwards.
  • the retaining projections 68 all have the same radial height.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the retaining projections 68.
  • This first intermediate section 70 has a greater radial height than a second intermediate section 72 and than a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the scroll wall 28 are preferably machined together from a solid material, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly on the holding projections 68 .
  • the in 6 shown side of the base plate 66 are edited, in particular the mounting recesses are introduced.
  • the spiral wall 28 can also be machined from the solid material as part of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three holding projections 68 .
  • the clamping device 76 has a continuous recess 80 through which tool access to the spiral component 30, in particular to the 6 shown side of the same, is enabled. Machining operations can thus take place from both sides during clamping, in particular at least one finishing machining of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected in such a way that no critical deformations of the spiral component 30 take place.
  • the three retaining projections 68 are preferably selected in such a way that the outer dimension, ie the maximum diameter of the spiral component 30, is not increased. Thus, on the one hand, material and, on the other hand, machining volume can be saved.
  • the retaining projections 68 are in particular designed and/or arranged at such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the corrugated bellows 42 is preferably unequal to the number of retaining projections 68 on the movable spiral component 30.
  • balancing weights 82 On the eccentric shaft 32 of 1 two balancing weights 82 are attached to compensate for an imbalance of the excited system.
  • the area of the in 1 right side counterweight 82 is in 8 shown enlarged.
  • the balancing weight 82 is bolted to the eccentric shaft 32 .
  • a similar image section is in 9 shown for another scroll pump, preferably the same series of pump 20 of 1 belongs.
  • the the 9 In particular, the pump on which it is based has different dimensions and therefore requires a different balancing weight 82.
  • the eccentric shafts 32, the counterweights 82 and the housing elements 22 are dimensioned such that only one specific type of the two types of counterweights 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown in each case.
  • the counterweights 82 are in the Figures 8 and 9 dimensioned together with certain dimensions of the space provided for them to make it clear that the balance weight 82 of 9 not on the eccentric shaft 32 can be mounted and vice versa. It goes without saying that the dimensions given are purely exemplary.
  • the balance weight 82 of 8 is shorter in the corresponding direction, namely 9 mm long, so it can be mounted without any problems.
  • the balance weight 82 of 9 has a length of 11 mm measured from the mounting hole.
  • the counterweight 82 is the 9 not on the eccentric shaft 32 of 8 mountable, since the shaft shoulder 86 collides with the counterweight 82 in an attempted assembly and thus the counterweight 82 of the 9 not fully in contact with the eccentric shaft 82 of 8 can be brought.
  • the fact that the counterweight 82 of 9 is greater in both dimensions than the distance between the mounting hole 84 and the shaft shoulder 86 in 8 , reverse mounting is also prevented.
  • the dimension of 21.3 mm of the counterweight 82 prevents the 8 an inverted and consequently incorrect mounting orientation of the otherwise correct counterweight 82.
  • a distance in the longitudinal direction between the fastening bore 84 and a housing shoulder 88 is 17.5 mm.
  • the balance weight 82 of 8 with its extension of 21.3 mm would when inserting the eccentric shaft 32 of 9 collide with the housing shoulder 88 so that complete assembly would not be possible. Incorrect assembly is initially possible, but is reliably detected. In a twisted about the axis of the mounting hole 84 assembly of the balance weight 82 of 8 on the eccentric shaft 32 of 9 the 21.3 mm extension would interfere with the shaft shoulder 86 which is spaced only 13.7 mm from the mounting hole 84.
  • the balancing weights 82 are generally designed in such a way that the balancing weight is prevented from being confused with those of other sizes during assembly and/or during servicing.
  • the balancing weights are preferably attached using through-bolts.
  • similar balance weights of different pump sizes are designed to prevent installation of the wrong balance weight due to adjacent ledges on the shaft, the positions of the balance weight thread and through-hole, and ledges within the housing.
  • the gas ballast valve 90 includes an actuating handle 92. This includes a plastic body 94 and a base element 96, which is preferably made of stainless steel.
  • the base element 96 includes a continuous bore 98 which is provided on the one hand for connecting and introducing a ballast gas and on the other hand includes a check valve 100 .
  • the bore 98 is also closed by means of a plug 102 in the illustrations.
  • a filter can also be provided, for example, in which case the ballast gas can preferably be air and can enter the valve 90 in particular directly via the filter.
  • the actuating handle 92 is attached to a rotatable member 106 of the valve 90 by three attachment screws 104 which are disposed in a respective bore 108 and which are shown in the selected sectional view of FIG 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 with a fastening screw (not shown) running through a bore 110 .
  • valve 90 In order to actuate the valve 90, a torque which is manually applied to the actuating handle 92 is transmitted to the rotatable element 106 and this is thus rotated. Thus, the bore 98 comes into communication with an interior of the housing. Three switching positions are provided for the valve 90, namely the in 10 1, which is a locked position, and right and left rotated positions, respectively, in which bore 98 communicates with different portions of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112 .
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When valve 90 is actuated, relative movement is applied to the O-rings. If dirt, such as particles, gets to the surface of an O-ring, there is a risk of premature failure.
  • the cover 112 prevents dirt and the like from penetrating the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin (not shown) for each bore 108 with which the cover 112 is held in the bores 108 .
  • the bores 108 and 110 and the fastening screws arranged therein are thus protected from contamination.
  • the fastening screw (not shown) which is arranged in the bore 110 and which allows a rotary movement, the ingress of dirt into the valve mechanism can be effectively minimized in this way and the service life of the valve can thus be improved.
  • the plastic handle with overmoulded stainless steel base ensures good corrosion resistance with low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • a speed control is preferably provided for the fan 44.
  • the fan is controlled by means of PWM as a function of the power consumption and temperature of the power module, which is accommodated in electronics housing 48, for example.
  • the speed is set in the same way as the power consumption. However, the control is only permitted from a module temperature of 50 °C. If the pump enters the temperature range of a possible derating (temperature-related power reduction), the maximum fan speed is automatically activated.
  • the maximum fan speed can be adaptable, in particular depending on the situation. For example, it can be expedient to reduce the maximum fan speed to achieve high water vapor tolerance.
  • the movable scroll member 30 is partial and opposite figure 5 shown enlarged.
  • a sectional view of the scroll member 30 along the line in 12 implied line A:A is in 13 shown schematically and not to scale.
  • the spiral wall 28 has at its end remote from the base plate 66 and facing a base plate of the fixed spiral component 24 not shown here a groove 114 for the insertion of a sealing element 64 also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is e.g 4 clearly visible.
  • a tip seal is provided in an embodiment of the pump according to the invention, which is in rubbing contact with the sliding layer.
  • the groove 114 is bounded outwardly and inwardly by two opposing sidewalls, namely an inner sidewall 116 and an outer sidewall 118.
  • the outer sidewall 118 is made thicker than the inner sidewall 116 in the first spiral section 120 and is thicker than both sidewalls 116 and 118 in another, second spiral section 122.
  • the first spiral section 120 extends from the in 12 indicated location to the outer end of the spiral wall 28, as is also the case, for example, in figure 5 is indicated.
  • the first spiral section 120 extends here by way of example over approximately 163°.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is arranged at least partially, in particular completely, in a region of the spiral wall 28 that is not active for pumping.
  • the first spiral section 120 can at least essentially completely fill out the region of the spiral wall 28 that is not active for pumping.
  • the first intermediate section 70 can preferably be arranged between two retaining projections 68, which has a greater radial height than other intermediate sections 72 and 74, the first spiral section 120 opposite. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70 .
  • the movable scroll component should generally preferably have a low dead weight.
  • the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal nut are particularly thin. For example, the ratio of TipSeal wall thickness to total spiral wall thickness is 0.17 or less.
  • the spiral wall tip is very sensitive to impacts during handling, such as assembly or changing the tip seal. Due to light impacts, e.g. B. also during transport, the side wall of the groove can be pressed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular a thickening of the spiral wall locally toward the outside.
  • This area is preferably not active as a pump and can therefore be manufactured with a greater tolerance. Damage is significantly reduced by the one-sided thickening on the winding, especially the last half. At other points of the component, thickening of the spiral wall is preferably not necessary, since the wall is protected by protruding elements of the component.
  • the spoiler hood 46 shown defines an air flow as indicated by a dashed arrow 124 .
  • the fan 44 is connected to a control device in the electronics housing 48 via a cable (not shown) which runs through the air-guiding hood 46 and via a plug connection.
  • This includes a socket 126 and a plug 128.
  • the socket 126 is mounted on the electronics housing 48 and/or is attached to a printed circuit board arranged in the electronics housing 48.
  • the socket 126 is, for example, in the 2 and 3 visible.
  • the plug 128 is connected to the fan 44 via the cable, which is not shown.
  • the plug connection 126, 128 is separated from the air flow 124 by a partition wall 130.
  • the air flow 124 which may contain dust or similar dirt, for example, is thus removed from the plug-in connection 126, 128 kept away.
  • the plug-in connection 126, 128 itself is protected and, on the other hand, it is prevented that the contaminants get through the opening provided for the socket 126 in the electronics housing 48 and into the latter and to the control device and/or power electronics.
  • the air guide hood 46 is in 14 shown separately and in perspective. Among other things, the partition wall 130 with the space defined behind it and intended for the plug 128 is visible. Partition wall 130 includes a recess 132, designed here as a V-shaped notch, for routing a cable from plug 128 to fan 44.
  • the partition 130 ensures that the sucked-in air does not reach the electronics via the opening in the connector 126, 128.
  • the fan cable is guided through the V-shaped notch 132 laterally through the partition 130 .
  • the notch 132 has a lateral offset to the connector 126, 128, whereby a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 can be achieved.
  • a partition wall 130 inside the air-guiding hood 46 also improves the flow of air into the duct 50 between the electronics housing 48 and the pump housing 22 . There is less turbulence and back pressure for the fan 44.
  • the 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional view.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134 .
  • a seal by means of an O-ring 136 is provided.
  • the transition fit 134 is also used, for example, to center the second housing element 24 in relation to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 must be dismantled, for example. It is possible that the transition fit 134 or the O-ring 136 will bind if the second housing member 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can also be provided at least essentially radially opposite.
  • a screw can be screwed into the forcing thread 38 until the screw protrudes from it and comes into contact with the first housing element 22 . By screwing in further, the housing elements 22 and 24 are pushed away from one another.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pushing off, as they are shown, for example, in FIGS 1 and 3 are designated.
  • the forcing thread 138 preferably has the same thread type as the fastening threads provided for the fastening screws 142 .
  • a countersink 140 is provided on the second housing element 22 and is assigned to the forcing thread 138 . If abrasion particles are discharged when the screw is screwed into the forcing thread 138, they collect in the depression 140. This prevents such abrasion particles, for example, from preventing the housing elements 22 and 24 from fully contacting one another.
  • the air guide hood 46 has at least one, in particular additional, in 14 Dom 144 shown, which allows mounting of the air guide hood 46 only when the screws used for pushing off, in particular the fastening screws 142, have been removed again.
  • the air-guiding hood 46 with the dome 144 is designed in such a way that it would collide with a screw head of a forcing screw that may have been screwed into the forcing thread 138, so that the air-guiding hood 46 would not be fully mountable.
  • the air-guiding hood 46 can only be installed when the forcing screws have been completely dismantled.
  • FIG 16 shows a schematic detail view of the spiral or scroll pump 20 according to the previous figures, in the area where the seal 150 touches the support 154 provided with the sliding layer 152, in the form of the base plate 66.
  • the spiral elements 26, 28 are arranged in such a way that the seal 150 is pressed against the carrier 154, in the form of the base plate 66.
  • the seal is pressed against the base plate via the pressure difference between the two sides of the spiral elements 26, 28.
  • the seal 150 is connected to the spiral elements 26, 28 via an interface 151.
  • the oxide layer and the sealing of the sliding layer 152 are not shown separately, since the sealing has penetrated the pores and imperfections of the oxide layer and closes them. An additional layer structure does not necessarily take place.
  • the preferably fluoropolymer-containing seal not only promotes the dry lubricating properties of the sliding layer 152 and also reduces its wear, but also improves the gas-tightness of the sliding layer 152, resulting in an improvement in the ultimate pressures that can be achieved and a reduction in the run-in time.
  • the supports 154, in the form of the base plate 66, and the spiral walls 26, 28 are each formed in one piece and consist of an aluminum alloy of the AlMgSi type.
  • the oxide layer of sliding layer 152 is an aluminum oxide layer produced by anodic oxidation in a sulfuric acid electrolyte.
  • the sliding layer 152 is applied in particular to all surfaces of the spiral components 24, 30 that face the conveying chambers.
  • the seal 150 shown (tip seals) is, for example, polytetrafluoroethylene containing polyimide particles and was produced by hot compression molding and subsequent sintering.
  • the mean particle size of the polyimide particles is 25 ⁇ m.
  • the seal is preferably a seal applied as an aqueous anionic polyurethane dispersion, the polyurethane containing perfluorinated polyether segments.
  • the perfluorinated polyether segments can be present as a polyol prepolymer or as a diisocyanate prepolymer.
  • the perfluorinated polyether segments can be, for example, segments based on perfluorinated polyethylene glycol or perfluorinated polypropylene glycol, preferably based on perfluorinated polyethylene glycol.
  • An adhesion promoter was added to the polyurethane dispersion to improve the bonding of the seal to the oxide layer.
  • An epoxy silane or a polyaziridine was added as an example.
  • adhesion promoters such as melamines or blocked isocyanates can also be added.
  • the seal can also be acrylate-based or sol-gel-based, with the use of an adhesion promoter, as described above, also being preferred in the case of acrylate-based or sol-gel-based seals.
  • the pump according to the invention can be one or more of the above with reference to the Figures 1 to 16 have the features described, it being possible for any combination of these features to be implemented in a pump according to the invention.
  • In 17 1 is an electron micrograph of a cross section showing an oxide layer 156 having a thickness of 39.08 ⁇ m deposited on a base plate 66.
  • FIG. The scale in 17 shows a length of 10 ⁇ m.
  • the oxide layer 156 has cracks 158 and defects 158 which impair the gas tightness.
  • An even more enlarged view is in 18 shown, in which the pore structure as well as the defects that connect the pores to each other can be seen.
  • the scale in 18 shows a length of 200 nm.
  • the porous structure of the oxide layer 156 can also be based on figure 19 recognize what an electron microscopic view of the oxide layer of 17 and 18 shows, the pores 160 appear as dark, vertically running stripes, and also very small imperfections 158 can be seen as dark spots that connect adjacent pores 160 to one another.
  • the scale in 18 shows a length of 200 nm. Very small pores 160 as well as larger pores 160 and cracks 158 and their ramifications can be seen. In FIGS. 17 to 19 only a few pores and imperfections are marked with reference symbols.
  • the effect of the sliding layer of the pump according to the invention is based on the in 20 shown graph recognizable.
  • the time in hours is plotted on the abscissa axis (X-axis), and the pressure in hPa is plotted on the ordinate axis.
  • a negative pressure was generated with scroll vacuum pumps under identical conditions in each case, with the development of the respective negative pressure being recorded over time.
  • a HiScroll type pump was used for all lines A to D, the only difference being that the conveying elements in line A are not coated.
  • the conveying elements In line B, the conveying elements have a, as in EP 3 153 706 A1 described coating, wherein a sulfuric acid electrolyte was used to produce the oxide layer, ie an anodically produced oxide layer.
  • Line C is a HiScroll pump, like line B, however, the coating was baked for some time before the vacuum started.
  • Line D shows the development of the vacuum with a vacuum pump according to the invention, in which the oxide layer is additionally provided with a seal.
  • Line C shows that a lower final pressure can be achieved by baking out the conveying elements, as was used for line B until the test was interrupted, but the defects contained in the oxide layer cannot be removed by baking either, so that cracks can occur , as in the Figures 17 to 19 visible, a certain backflow of the pumped medium is possible.
  • the ultimate pressures that can be achieved are better than with the unheated conveying elements.
  • the sealed conveying elements, as used in line D enable a significantly lower final pressure than in lines B (until the test was interrupted) and C, whereby the vacuum achieved is, unlike in line A, stable. In the case of lines B and C, a significantly longer run-in time is to be expected before the lower final pressures are reached.

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  • General Chemical & Material Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
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Claims (12)

  1. Pompe, en particulier pompe à vide, comprenant
    une couche de glissement (152),
    la couche de glissement (152) comprenant une couche d'oxyde, formée en particulier par oxydation anodique dans un électrolyte acide, ainsi qu'un scellement à base de polymère, et
    la couche d'oxyde étant au moins partiellement recouverte par le scellement et/ou imprégnée avec le scellement,
    caractérisée en ce que
    le scellement est une couche de polyuréthane formée d'un polyuréthane comprenant des segments perfluorés, et/ou
    en ce que le scellement contient un fluoroalkylsiloxane, et/ou en ce que le scellement est formé d'un polyuréthane comprenant des segments de polyéther, et/ou
    en ce que le scellement est formé d'un polyuréthane comprenant des segments de polyéther perfluorés.
  2. Pompe selon la revendication 1,
    la pompe étant une pompe à spirale (20), en particulier d'une pompe à vide à spirale, comprenant des éléments de refoulement (24, 30) réalisés sous forme d'éléments en spirale, la couche de glissement (152) étant appliquée au moins localement sur l'un au moins des éléments de refoulement (24, 30) réalisés sous forme d'éléments en spirale.
  3. Pompe selon la revendication 1,
    la pompe étant une pompe à piston, en particulier d'une pompe à vide à piston, comprenant au moins un cylindre avec une paroi intérieure de cylindre et un piston mobile dans le cylindre, la couche de glissement étant appliquée au moins localement sur la paroi intérieure du cylindre et/ou sur le piston.
  4. Pompe selon l'une au moins des revendications précédentes,
    dans laquelle la couche d'oxyde est poreuse, et le scellement obture au moins en partie les pores (160) et/ou les fissures (158) et/ou les défauts (158) de la couche d'oxyde.
  5. Pompe selon l'une au moins des revendications précédentes,
    dans laquelle le scellement a une épaisseur de 10 µm ou moins, en particulier de 0,5 à 5 µm.
  6. Pompe selon l'une au moins des revendications 1 à 4,
    dans laquelle le scellement a une épaisseur de 5 à 25 µm ou de 25 à 35 µm.
  7. Pompe selon l'une au moins des revendications précédentes,
    dans laquelle le scellement recouvre complètement ou sensiblement complètement la couche d'oxyde.
  8. Pompe selon l'une au moins des revendications précédentes,
    dans laquelle un agent adhésif est prévu dans le scellement et/ou comme couche de fond sur la couche d'oxyde.
  9. Pompe selon l'une au moins des revendications précédentes,
    dans laquelle les éléments de refoulement comprennent un matériau de base qui est formé au moins partiellement d'aluminium ou d'un alliage d'aluminium et sur lequel est appliquée la couche de glissement (152).
  10. Procédé de fabrication d'une pompe selon l'une au moins des revendications 1 à 9, avec réalisation d'une couche de glissement (152), comprenant les étapes suivantes consistant à :
    a) produire une couche d'oxyde, en particulier par oxydation anodique, dans un électrolyte, de préférence acide ; et
    b) revêtir la couche d'oxyde d'un scellement.
  11. Procédé selon la revendication 10,
    dans lequel le scellement est soit appliqué sous la forme d'une dispersion aqueuse, soit appliqué sous la forme d'une dispersion à base de solvant.
  12. Procédé selon la revendication 11,
    dans lequel le solvant dans la dispersion à base de solvant est un alcool en C1 à C8, en particulier un alcool en C3 à C6, par exemple un alcool en C4.
EP21199962.8A 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction Active EP3940234B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP21199962.8A EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction
JP2022139319A JP2023050117A (ja) 2021-09-29 2022-09-01 ポンプ及びスライド層を製造する方法
CN202211178055.2A CN116085259A (zh) 2021-09-29 2022-09-26 泵和用于产生滑动层的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21199962.8A EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction

Publications (3)

Publication Number Publication Date
EP3940234A2 EP3940234A2 (fr) 2022-01-19
EP3940234A3 EP3940234A3 (fr) 2022-07-13
EP3940234B1 true EP3940234B1 (fr) 2023-08-23

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EP21199962.8A Active EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction

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EP (1) EP3940234B1 (fr)
JP (1) JP2023050117A (fr)
CN (1) CN116085259A (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A3 (fr) * 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB433367A (en) * 1934-04-25 1935-08-13 Peintal S A Process for the production of anti-corrosive films on aluminium and its alloys
US4453898A (en) * 1977-08-01 1984-06-12 The Perkin-Elmer Corporation Dual-piston reciprocating pump assembly
JP3137507B2 (ja) * 1993-08-30 2001-02-26 三菱重工業株式会社 スクロ−ル型流体機械
JP3210611B2 (ja) * 1997-10-03 2001-09-17 スカイアルミニウム株式会社 樹脂塗装アルミニウム合金部材およびその製造方法
EP3153706B1 (fr) * 2015-10-06 2020-06-17 Pfeiffer Vacuum Gmbh Pompe
EP3617512B1 (fr) * 2018-08-28 2022-11-30 Pfeiffer Vacuum Gmbh Pompe à vide du distributeur rotatif

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JP2023050117A (ja) 2023-04-10
EP3940234A2 (fr) 2022-01-19
CN116085259A (zh) 2023-05-09

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