EP3754200A2 - Pompe à vide, pompe à spirales et procédé de fabrication de telles pompes - Google Patents

Pompe à vide, pompe à spirales et procédé de fabrication de telles pompes Download PDF

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Publication number
EP3754200A2
EP3754200A2 EP20200624.3A EP20200624A EP3754200A2 EP 3754200 A2 EP3754200 A2 EP 3754200A2 EP 20200624 A EP20200624 A EP 20200624A EP 3754200 A2 EP3754200 A2 EP 3754200A2
Authority
EP
European Patent Office
Prior art keywords
pump
scroll pump
component
scroll
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20200624.3A
Other languages
German (de)
English (en)
Other versions
EP3754200B1 (fr
EP3754200A3 (fr
Inventor
Michael Willig
Jan Hofmann
Jonas Becker
Gernot Bernhardt
Verena Wangorsch
Stefan Kallenborn
Wolfgang Söhngen
Heiko Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP20200624.3A priority Critical patent/EP3754200B1/fr
Publication of EP3754200A2 publication Critical patent/EP3754200A2/fr
Publication of EP3754200A3 publication Critical patent/EP3754200A3/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/605—Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/805—Fastening means, e.g. bolts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Definitions

  • the present application relates to the improvement of vacuum pumps, in particular scroll pumps, and manufacturing processes for the same.
  • a vacuum pump in particular a scroll pump, with an electronics housing is assumed in which one or more electronic components are arranged. It is an object of the invention to provide good heat dissipation from the electronic components or good cooling. This object is achieved by a vacuum pump according to claim 1, and in particular in that a separate chamber, in which the electronic component is encapsulated, is provided within the electronics housing for at least one electronic component.
  • the chamber also shields the electronic components, in particular from heat radiation and electromagnetic influences.
  • the separate chamber enables relatively little potting material to be used, which is often expensive.
  • the electronics housing can preferably be made of metal.
  • the potting material used for potting is designed in particular to be thermally conductive and / or electrically insulating.
  • several separate chambers can also be provided.
  • At least one electronic component is cast in each of the several chambers.
  • an electronics housing can, for example, be designed identically for different pumps, in particular a series, with separate chambers being provided for different electronic components which are or are not built into the chambers depending on the type of pump.
  • a kind of modular system can thus be implemented, which enables considerable cost advantages in production.
  • a scroll pump is assumed.
  • One task is to simplify the use of the scroll pump in a vacuum system.
  • This object is achieved by a scroll pump according to claim 3 and in particular in that the pump comprises an integrated pressure sensor.
  • a vacuum system usually already includes a pressure sensor, for example in a vacuum chamber.
  • a pressure sensor for example in a vacuum chamber.
  • the integrated pressure sensor enables the scroll pump to monitor itself and this does not have to be carried out using a complex process control system.
  • a wear state of the pump can be monitored as a function of a measured pressure.
  • the integrated pressure sensor can also ensure increased operational reliability. For example, if the pressure in the scroll pump is too high, the high vacuum pump can be switched off and / or interposed valves can be closed or similar measures can be taken. The high vacuum pump can thus be reliably protected against operation at too high a pressure.
  • the pressure sensor can preferably be integrated into a controller for the scroll pump and / or a vacuum system.
  • the scroll pump or the vacuum system can thus be better controlled or regulated, on the basis of the now known pressure in the scroll pump.
  • the pressure sensor is provided for measuring a suction pressure of the pump or a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section. Both allow an even more precise monitoring of the pumping process and a wear condition of the pump, in particular a sealing element such as a tip seal, or the spiral walls.
  • the pressure sensor is screwed into a component of the scroll pump.
  • a blind plug can simply be provided, for example, if no integrated pressure sensor is absolutely necessary for the user's process.
  • an integrated pressure sensor can easily be retrofitted in this case.
  • the component into which the pressure sensor is screwed can be, for example, a housing element and / or a fixed spiral component.
  • the pressure sensor can be screwed axially into a fixed spiral component.
  • the pressure sensor is arranged in a cooling air flow of a cooling device, for example a fan, of the pump.
  • the pressure sensor can thus advantageously be cooled directly, which improves its service life and measuring accuracy.
  • the pressure sensor can preferably be arranged at least essentially at the start of the cooling air flow, namely adjacent to a fan and / or within an air guide hood.
  • the starting point is a method for assembling a scroll pump which comprises an eccentric shaft for eccentrically exciting a movable spiral component of the pump, in which a plurality of counterweights of different types are provided for fastening to an eccentric shaft of a scroll pump of a certain type . It is a task to be able to carry out the assembly particularly reliably.
  • This object is achieved by a method according to claim 5, and in particular in that the eccentric shaft, the counterweights and / or a further component of the pump, for example a pump housing, are dimensioned so that only a certain type of counterweight at a certain fastening position can be mounted on the eccentric shaft.
  • not mountable includes that a counterweight can be attached, but further mounting, for example inserting the shaft into a pump housing, is not completely possible. So the fitter realizes that something is wrong because he cannot complete the assembly. Correct assembly is thereby ensured in a particularly simple manner. “Not mountable” can also mean that the balance weight cannot lie flat against the eccentric shaft with a contact surface provided on the balance weight, for example because this is prevented by a shoulder on the shaft. In general, for example, a counterweight of the wrong type cannot be brought into full contact with the eccentric shaft. In general, for example, an eccentric shaft with an installed counterweight of the wrong type cannot be completely inserted into a pump housing of the pump.
  • the eccentric shaft and / or the further component collide with counterweights of at least one first type when an attempt is made to assemble it.
  • the first type is a wrong type for the eccentric shaft in question.
  • the eccentric shaft and / or the further component has a protrusion and / or shoulder that collides with counterweights of at least one first type when an attempt is made to assemble them. This prevents incorrect assembly in a particularly simple manner.
  • a fourth aspect of the invention is based on a vacuum pump, in particular a scroll pump, with a pump body, the inside of which delimits a pump chamber and on the outside of which a valve for controlling the supply of a ballast gas to the pump chamber is arranged, the valve having an operating handle which is rotatably connected via at least one fastening screw with a static element of the valve and / or with a rotatable element of the valve, the fastening screw through a hole in the operating handle is screwed into the static element or the rotatable element. It is an object of the invention to extend the service life and / or a maintenance interval of the valve and / or at least one of its components. This object is achieved by a vacuum pump according to claim 7, and in particular in that a cover is provided which closes the bore.
  • the cover prevents or at least reduces the penetration of dirt into the bore and ultimately into function-sensitive areas.
  • the valve can, for example, have an, in particular axially, compressed O-ring as a sealing means.
  • O-ring As a sealing means.
  • the pump body can be, for example, a static spiral component and / or a housing component.
  • the cover can be inserted into the operating handle, for example.
  • the cover can be inserted into the or into a bore.
  • the cover can be held by an interference fit on the actuating handle, in particular in the bore.
  • the cover can, for example, have one or more projections, for example in the form of a pin.
  • the cover is inserted into at least two bores and / or that the cover closes at least one bore into which it is not inserted.
  • the actuating handle has a base element made of metal and a plastic section at least in an area that can be gripped for manual actuation. This ensures good corrosion resistance and, at the same time, low manufacturing costs. Furthermore, the plastic section remains cooler and can be operated better because of the restricted heat conduction compared to metal.
  • the base element can be made of stainless steel, for example. This can be encapsulated with plastic, for example.
  • the base element can e.g. comprise a check valve and / or a connecting thread.
  • a check valve can be arranged integrated.
  • the gas ballast valve can be designed in particular in two stages.
  • an inlet and / or a connection for the ballast gas can be provided in the actuating handle.
  • a fifth aspect of the invention is based on a vacuum pump, in particular a scroll pump, with a fan whose speed is controllable for cooling the pump. It is a task to design the cooling to be particularly needs-based and / or to reduce the noise emission of the fan.
  • This object is achieved by a vacuum pump according to claim 9, and in particular in that it has a temperature sensor and a control device which is designed to regulate the speed of the fan as a function of a power consumption of a drive of the pump and a temperature measured by the temperature sensor .
  • the measured temperature can preferably be a temperature in the pump, for example a pump component and / or a space in the pump, for example a suction or pumping space.
  • the regulation is performed as a function of a temperature of a motor, a motor winding, a drive or power electronics, a pump body and / or a housing of the pump takes place.
  • these temperature values can be measured by several temperature sensors, for example, or several temperature sensors can generally be provided.
  • a first threshold value of the temperature is defined, with the regulation only taking place at a measured temperature above the first threshold value and / or with the speed of the fan being kept constant at zero or a minimum speed below the first threshold value.
  • the sound emission of the fan can be kept low when the need for cooling is low, namely when the measured temperature is low.
  • this allows the pump to warm up quickly to the desired operating temperature after it has been switched on. This is advantageous, for example, because the gap dimensions between the spirals depend on the thermal expansion of the components and are therefore only optimal within certain operating temperature ranges.
  • the embodiment thus enables an advantageous pump performance to be achieved quickly.
  • a rapid increase in temperature improves compatibility with condensing media.
  • the first threshold value can preferably be at least 40 ° C. and / or at most 60 ° C., in particular about 50 ° C.
  • the minimum speed is generally lower than a maximum speed, in particular significantly lower, in particular less than 30%, in particular less than 20%, in particular less than 10% of the maximum speed.
  • a second threshold value for the temperature is defined, the fan speed being kept constant at a maximum speed at a measured temperature above the second threshold value. This ensures in a simple way at high temperatures that the maximum cooling capacity is achieved. The cooling can thus be carried out in a simple manner as required.
  • the embodiment with the second threshold value is independent of the embodiment with the first threshold value and vice versa. However, these can advantageously be combined.
  • the designation “second” threshold value is only chosen for ease of reference and does not require that a “first” threshold value is also defined.
  • the threshold values described above can be different for the case that several temperature sensors are provided, for example for the several temperature sensors.
  • the control device can, for example, be designed to reduce a drive power of the pump as a function of a temperature of the vacuum pump measured by a temperature sensor. This function can also be referred to as "derating”. It can be provided, for example, that the fan is set to its maximum speed when a derating condition is met and / or when the pump is in a derating state, that is, when the drive power is reduced.
  • the speed of the fan can preferably be controlled by means of pulse width modulation (PWM).
  • PWM pulse width modulation
  • a maximum speed of the fan can, for example, be adjustable. For example, in order to increase water vapor tolerance, it can be advantageous to reduce the maximum speed of the fan.
  • a sixth aspect of the invention is based on a vacuum pump, preferably scroll pump, comprising an electrically driven fan and an air guide hood. It is an object of the invention to provide an electrical connection of the fan to a supply connection particularly reliably, in particular for reliable for a long time. This object is achieved by a vacuum pump according to claim 12, and in particular in that a conductor, preferably a cable, leads from the fan, preferably through the air guide hood, to a supply connection for the fan, the conductor via a, preferably detachable, electrical connector , preferably a plug, is connected to the supply connection, the connector being separated from an air flow path defined by the air guiding hood by means of a partition.
  • the connector can preferably be arranged at least partially within the air guide hood.
  • the partition can, for example, be connected in one piece to the air guide hood.
  • Ambient air which can also contain dirt and dust, is sucked in via the fan and guided along a defined air flow path.
  • the partition wall prevents the sucked-in impurities or dust from being able to penetrate the connector and, in particular, subsequently not penetrate into an electronics housing of the pump. Rather, the partition has the effect that the sucked-in air is merely guided past the connector at a distance.
  • the fan can preferably be arranged on the air guide hood, in particular fastened to it.
  • the connector can preferably be designed to be detachable.
  • the conductor in particular the cable, is led from the connector through a recess in the partition.
  • the recess can, for example, be a notch, which can preferably be V-shaped.
  • Another embodiment provides that the recess is arranged offset in the circumferential direction relative to the connector. As a result, a path from the recess to the connector is lengthened, so that through the recess Contaminants have to travel a longer distance to the connector and thus the likelihood of them reaching the connector is reduced. In this way, a labyrinth effect is realized in a simple manner.
  • a seventh aspect of the invention is based on a scroll pump comprising a spiral component which is stationary during operation and which is detachably connected to a housing element of the pump. It is an object of the invention to simplify detachment of the spiral component from the housing element. This object is achieved by a scroll pump according to claim 14, and in particular in that at least one forcing thread is provided on the spiral component and / or on the housing element for releasing the spiral component from the housing element, preferably with two forcing threads arranged radially opposite one another.
  • the spiral component By means of the forcing thread, the spiral component can be pushed off the housing element in a simple and defined manner and thus released.
  • a flat surface or a countersink of the other component can preferably rest on the forcing thread or be assigned to it.
  • forcing threads can also be provided, which are preferably distributed uniformly over the circumference and / or can be arranged radially opposite one another. This allows the spiral component to be released particularly evenly. For example, tilting can be avoided, as could occur, for example, without a forcing thread when loosening a spiral component which is in contact with the housing element with a transition fit. Any sealants present could also tilt or block. Due to the, in particular several, forcing threads, these Problems of uneven loading can be avoided or at least reduced.
  • a component adjacent to the spiral component and / or the housing element is designed in such a way that it would collide with a screw head of a forcing screw possibly screwed into the forcing thread, so that the component would not be completely mountable. In this way, incorrect assembly can be avoided in a simple manner, since it is ensured that no screw is screwed into the forcing thread which, for example, could prevent the spiral component from resting correctly on the housing element.
  • the component can in particular be an air guide hood.
  • a projection and / or a dome, for example, can be provided for collision with the screw head.
  • the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
  • This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
  • the second housing element 24 thus forms a stationary spiral component of the scroll pump 20.
  • the spiral wall 26 acts with a spiral wall 28 a movable spiral component 30 together, the movable spiral component 30 being eccentrically excited via an eccentric shaft 32 to generate a pumping action.
  • a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
  • the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • On the movable spiral component 30 is also an in Fig. 1 attached to the left-hand end of a corrugated bellows 42, the right-hand end of which is attached to the first housing element 22.
  • the left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
  • the scroll pump 20 comprises a fan 44 for generating a flow of cooling air.
  • an air guide hood 46 is provided, to which the fan 44 is also attached.
  • the air guide hood 46 and the housing elements 22 and 24 are shaped such that the cooling air flow essentially flows around the entire pump housing and thus achieves a good cooling performance.
  • the scroll pump 20 further comprises an electronics housing 48 in which a control device and power electronics components for driving the motor 34 are arranged.
  • the electronics housing 48 also forms a base for the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible through which an air flow generated by the fan 44 is guided along the first housing element 22 and also the electronics housing 48, so that both are effectively cooled will.
  • the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be encapsulated in these chambers 52 and are therefore advantageously shielded. Preferably, the smallest possible amount of potting material can be used when potting the electronic components. For example, the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
  • the chambers 52 can preferably be designed in such a way that different variants of the electronic components, in particular different assembly variants of a circuit board, can be arranged in the electronics housing 48 and / or can be encapsulated. For certain variants, individual chambers 52 can also remain empty, that is to say have no electronic components. A so-called modular system for different types of pumps can be implemented in a simple manner.
  • the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
  • a plurality of walls or ribs 54 are formed on the rear side of the electronics housing 48 which define a plurality of channels 50 for guiding a flow of cooling air.
  • the chambers 52 also allow particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
  • FIG. 3 the scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden so that in particular the fixed spiral component 24 and the fan 44 are visible.
  • a plurality of recesses 56 arranged in a star shape are provided on the stationary spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
  • the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus particularly cools the stationary spiral component 24 effective.
  • the cooling air flow first flows around the stationary spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the active pumping area of the pump 20 generates a lot of heat due to the compression during operation and is therefore primarily cooled here .
  • the pump 20 comprises a pressure sensor 60 integrated into it. This is arranged within the air guide hood 46 and screwed into the stationary spiral component 24.
  • the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection, which is only partially shown.
  • the pressure sensor 60 is integrated into the control of the scroll pump 20.
  • the motor 34 shown in Fig. 1 is visible, can be controlled as a function of a pressure measured by the pressure sensor 60.
  • the high vacuum pump can only be switched on when the pressure sensor 60 measures a sufficiently low pressure. In this way, the high vacuum pump can be protected from damage.
  • Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional view.
  • a channel 62 is provided for the pressure sensor 60, which in this case opens into a non-pumping external area between the spiral walls 26 and 28 of the stationary or movable spiral components 24 and 30.
  • the pressure sensor thus measures a suction pressure of the pump.
  • a pressure between the spiral walls 26 and 28 can also be measured in an active pumping area.
  • intermediate pressures can also be measured, for example.
  • the pressure sensor 60 allows, for example via the determination of a compression, in particular a recognition of a wear state of the pump-active components, in particular a sealing element 64 also referred to as a tip seal.
  • the measured suction pressure can also be used to regulate the pump (e.g. pump speed).
  • a suction pressure can be specified on the software side and a suction pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, an increase in pressure caused by wear can be compensated for by increasing the speed. This means that a tip seal change can be postponed or longer change intervals can be implemented.
  • the data of the pressure sensor 60 can therefore generally e.g. can be used to determine wear, for situational control of the pump, for process control, etc.
  • the pressure sensor 60 can, for example, be provided optionally. Instead of the pressure sensor 60, for example, a blind plug can be provided to close the channel 62. A pressure sensor 60 can then be retrofitted, for example, if necessary. Particularly with regard to retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
  • the pressure sensor 60 is arranged in the cooling air flow of the fan 44. It is also advantageously cooled as a result. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently an inexpensive sensor can be used.
  • the pressure sensor 60 is arranged in particular such that the external dimensions of the pump 20 are not increased by it and the pump 20 consequently remains compact.
  • the movable spiral component 30 is shown in different views.
  • the spiral structure of the spiral wall 28 is particularly clearly visible.
  • the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
  • FIG Fig. 6 A side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
  • the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the bellows 42, which are shown in FIG Fig. 1 are visible.
  • three holding projections 68 are provided which are spaced around the circumference of the base plate 66 and are evenly distributed over the circumference.
  • the holding projections 68 extend radially outward.
  • the holding projections 68 all have the same radial height.
  • a first intermediate section 70 of the circumference of the base plate 66 extends between two of the holding projections 68.
  • This first intermediate section 70 has a greater radial height than a second intermediate section 72 and than a third intermediate section 74.
  • the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
  • the base plate 66 and the spiral wall 28 are preferably manufactured from a solid material so as to be tensioned together, ie. H. the spiral wall 28 and the base plate 66 are formed in one piece.
  • the spiral component 30 can be clamped directly on the retaining projections 68.
  • the in Fig. 6 The side shown of the base plate 66 are machined, in particular the fastening recesses are introduced will.
  • the spiral wall 28 can also be produced from the solid material by cutting within the framework of this clamping.
  • the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
  • a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three retaining projections 68.
  • the clamping device 76 has a continuous recess 80 through which a tool access to the spiral component 30, in particular to the in Fig. 6 shown side of the same, is enabled. Machining operations can thus take place from both sides during a clamping, in particular at least one finishing machining of the spiral wall 28 and the introduction of fastening recesses.
  • the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected so that no critical deformations of the spiral component 30 take place.
  • the three holding projections 68 are preferably selected such that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not increased. Thus, on the one hand, material and, on the other hand, cutting volume can be saved.
  • the holding projections 68 are in particular designed and / or arranged in such an angular position that the screw connection of the corrugated bellows 42 is accessible.
  • the number of screwing points of the corrugated bellows 42 is preferably not the same as the number of retaining projections 68 on the movable spiral component 30.
  • FIG. 9 A similar image section is in Fig. 9 shown for another scroll pump, which is preferably the same series of pump 20 of the Fig. 1 listened to.
  • the the Fig. 9 The underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
  • the eccentric shafts 32, the balance weights 82 and the housing elements 22 are dimensioned in such a way that only one particular type of the two types of balance weights 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown.
  • the balance weights 82 are in the Figures 8 and 9 dimensioned together with certain dimensions of the space provided for them in order to make it clear that the balance weight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the specified dimensions are given purely by way of example.
  • the balance weight 82 of the Fig. 8 is made shorter in the corresponding direction, namely 9 mm long, so it can be installed without any problems.
  • the balance weight 82 of the Fig. 9 each measured from the mounting hole has a longitudinal extension of 11 mm.
  • the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 of the Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted installation or since the balance weight 82 of the Fig. 9 not completely in contact with the eccentric shaft 82 of the Fig. 8 can be brought. Because the balance weight 82 of the Fig.
  • a distance in the longitudinal direction between the fastening bore 84 and a housing shoulder 88 is 17.5 mm.
  • the balance weight 82 of the Fig. 8 with its extension of 21.3 mm when the eccentric shaft 32 is inserted, the Fig. 9 collide with the housing shoulder 88 so that complete assembly would not be possible. Incorrect assembly is initially possible, but is reliably detected.
  • the counterweight 82 is mounted rotated about the axis of the fastening bore 84 Fig. 8 on the eccentric shaft 32 of the Fig. 9 the extension of 21.3 mm would collide with the shaft shoulder 86, which is only arranged at a distance of 13.7 mm from the fastening bore 84.
  • the balancing weights 82 are generally designed in such a way that the balancing weight cannot be confused with those of other sizes during assembly and / or during servicing.
  • the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed, in particular, in such a way that the incorrect counterweight is prevented from being installed due to adjacent shoulders on the shaft, the positions of the thread and through-hole of the counterweight and shoulders within the housing.
  • a gas ballast valve 90 of the scroll pump 20 is shown. This is also shown in the overall illustration of the pump 20 in FIG Fig. 3 visible and arranged on the fixed spiral component 24.
  • the gas ballast valve 90 comprises an actuating handle 92. This comprises a plastic body 94 and a base element 96, which is preferably made of stainless steel is made.
  • the base element 96 comprises a through bore 98 which is provided on the one hand for connecting and introducing a ballast gas and on the other hand comprises a check valve 100.
  • the bore 98 is also closed by means of a plug 102 in the illustrations.
  • a filter can also be provided, the ballast gas preferably being air and in particular entering the valve 90 directly via the filter.
  • the operating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
  • the rotatable element 106 is rotatably fastened to the second housing element 24 by a fastening screw (not shown) that extends through a bore 110.
  • valve 90 To actuate the valve 90, a torque applied manually to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated. Thus, the bore 98 comes into communication with an interior of the housing.
  • Three switching positions are provided for the valve 90, namely those in Fig. 10 shown, which is a locking position, and each a right and left rotated position in which the bore 98 is in communication with different areas of the interior of the housing.
  • the bores 108 and 110 are closed by a cover 112.
  • the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When the valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, gets to the surface of an O-ring, this harbors the risk of premature failure.
  • the cover 112 prevents dirt and the like from penetrating the screws of the handle 92.
  • This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin, not shown, for each bore 108, with which the cover 112 is held in the bore 108.
  • the bores 108 and 110 as well as the fastening screws arranged therein are thus protected from contamination.
  • the fastening screw (not shown) which is arranged in the bore 110 and which allows a rotary movement, the entry of contamination into the valve mechanism can thus be effectively minimized and the service life of the valve can be improved.
  • the plastic handle with an overmolded stainless steel base ensures good corrosion resistance and low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
  • a speed control is preferably provided for the fan 44.
  • the fan is controlled by means of PWM depending on the power consumption and temperature of the power module, which is accommodated in the electronics housing 48, for example.
  • the speed is set in the same way as the power consumption. However, the control is only permitted from a module temperature of 50 ° C. If the pump comes into a temperature range of possible derating (temperature-related power reduction), the max. Fan speed controlled.
  • This control enables a minimum noise level to be achieved when the pump is cold, that there is a lower noise level - corresponding to the pump noise - in the final pressure or at low load, that optimal cooling of the pump is achieved with a low noise level, and that before a temperature-related power reduction the max. Cooling performance is ensured.
  • the maximum fan speed can be adaptable, in particular depending on the situation. For example, for a high level of water vapor tolerance, it can be expedient to reduce the maximum fan speed.
  • Fig. 12 is the movable scroll member 30 partial and opposite Fig. 5 shown enlarged.
  • the spiral wall 28 has at its end facing away from the base plate 66 and facing a base plate of the fixed spiral component 24, not shown here, a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
  • a sealing element 64 also not shown here, namely a so-called tip seal.
  • the arrangement in the operating state is for example in Fig. 4 clearly visible.
  • the groove 114 is delimited outwardly and inwardly by two opposite side walls, namely by an inner side wall 116 and an outer side wall 118.
  • the outer side wall 118 is made thicker than the inner side wall 116 in the first spiral section 120 and thicker than both side walls 116 and 118 in another, second spiral section 122.
  • the first spiral portion 120 extends from in Fig. 12 indicated location to the outer end of the spiral wall 28, as it is for example also in Fig. 5 is indicated.
  • the first spiral section 120 extends here, for example, over approximately 163 °.
  • the first spiral section 120 forms an outer end section of the spiral wall 28.
  • the first spiral section 120 is arranged at least partially, in particular completely, in a non-pumping area of the spiral wall 28.
  • Especially the first spiral section 120 can at least substantially completely fill the non-pumping active area of the spiral wall 28.
  • the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70.
  • the movable spiral component should generally preferably have a low dead weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is, for example, 0.17 at most. Due to the tip seal groove, however, the spiral wall tip is very sensitive to impacts during handling, such as during assembly or when changing the tip seal. Light bumps, e.g. B. Also during transport, the side wall of the groove can be pushed inwards so that the tip seal can no longer be fitted.
  • the groove has an asymmetrical wall thickness, in particular an outwardly local thickening of the spiral wall.
  • This area is preferably not pump-active and can therefore be manufactured with a greater tolerance.
  • a thickening of the spiral wall is preferably not necessary at other points on the component, since the wall is protected by protruding elements of the component.
  • the air guide hood 46 shown defines an air stream as indicated by a dashed arrow 124.
  • the fan 44 is connected to a control device in the electronics housing 48 via a cable (not shown) which runs through the air guide hood 46 and via a plug connection.
  • This comprises a socket 126 and a plug 128.
  • the socket 126 is mounted on the electronics housing 48 and / or fastened to a circuit board arranged in the electronics housing 48.
  • the socket 126 is for example also in the Fig. 2 and 3 visible.
  • the plug 128 is connected to the fan 44 via the cable (not shown).
  • the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
  • the air flow 124 which may contain dust or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
  • the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the contamination through the opening provided for the socket 126 in the electronics housing 48 gets into this and to the control device and / or power electronics.
  • the air baffle 46 is in Fig. 14 shown separately and in perspective. Among other things, the partition 130 with the space defined behind it and provided for the plug 128 is visible.
  • the partition wall 130 comprises a recess 132, designed here as a V-shaped notch, for the passage of a cable from the plug 128 to the fan 44.
  • the partition 130 ensures that the sucked in air does not reach the electronics via the opening in the plug-in connector 126, 128.
  • the cable of the fan is led through the V-shaped notch 132 laterally through the partition wall 130.
  • the notch 132 has a lateral offset to the connector 126, 128, whereby a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 can be achieved.
  • a partition 130 within the air guide hood 46 also improves the air flow in the channel 50 between the electronics housing 48 and the pump housing 22. There is less turbulence and counter pressure for the fan 44.
  • the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional illustration.
  • the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134. Sealing by means of an O-ring 136 is provided.
  • the transition fit 134 is also used, for example, to center the second housing element 24 with respect to the first housing element 22.
  • the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It can happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
  • a forcing thread 138 is provided to solve this problem.
  • a second forcing thread can preferably also be provided at least essentially radially opposite. For loosening the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of this and comes into contact with the first housing element 22. By screwing in further, the housing elements 22 and 24 are pressed away from one another.
  • the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing off, as they are, for example, in FIGS Fig. 1 and 3 are designated.
  • the forcing thread 138 preferably has the same thread type on, as provided for the fastening screws 142 fastening threads.
  • a countersink 140 is provided on the second housing element 22, which is assigned to the forcing thread 138. If abrasion particles are carried out when the screw is screwed into the forcing thread 138, these collect in the depression 140. This prevents such abrasion particles from preventing, for example, the housing elements 22 and 24 from completely resting against one another.
  • the air guide hood 46 has at least one, in particular additional, in Fig. 14 The dome 144 shown, which enables the air guide hood 46 to be mounted only when the screws used for pressing, in particular the fastening screws 142, have been removed again.
  • the air guide hood 46 with the dome 144 is designed in such a way that it would collide with a screw head of a jack screw possibly screwed into the forcing thread 138, so that the air guide hood 46 could not be fully assembled.
  • the air guide hood 46 can only be installed with the jacking screws completely removed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP20200624.3A 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage Active EP3754200B1 (fr)

Priority Applications (1)

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EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage

Applications Claiming Priority (2)

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EP19201749.9A EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP20200624.3A EP3754200B1 (fr) 2019-10-07 2019-10-07 Pompe à vide à spirales et procédé de montage

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EP19201749.9A Division-Into EP3647599B1 (fr) 2019-10-07 2019-10-07 Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes

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EP4219947A3 (fr) 2023-06-15 2024-02-07 Pfeiffer Vacuum Technology AG Pompe à spirales à géométrie hélicoïdale optimisée
EP4234932A3 (fr) 2023-06-15 2024-01-17 Pfeiffer Vacuum Technology AG Pompe à spirales avec accès amélioré à la zone d'aspiration à des fins de montage
EP4253720A3 (fr) 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

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Publication number Publication date
EP3647599A3 (fr) 2020-07-22
EP3647599A2 (fr) 2020-05-06
EP3754200B1 (fr) 2021-12-08
EP3754200A3 (fr) 2021-02-17
EP3647599B1 (fr) 2021-12-22

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