EP2652332A2 - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
EP2652332A2
EP2652332A2 EP11799390.7A EP11799390A EP2652332A2 EP 2652332 A2 EP2652332 A2 EP 2652332A2 EP 11799390 A EP11799390 A EP 11799390A EP 2652332 A2 EP2652332 A2 EP 2652332A2
Authority
EP
European Patent Office
Prior art keywords
displacement body
displacement
vacuum pump
shaft
cooling liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11799390.7A
Other languages
German (de)
English (en)
Other versions
EP2652332B1 (fr
Inventor
Rudolf Bahnen
Uwe Drewes
Klaus Rofall
Markus LÖBEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gebr Becker GmbH
Original Assignee
Gebr Becker GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gebr Becker GmbH filed Critical Gebr Becker GmbH
Publication of EP2652332A2 publication Critical patent/EP2652332A2/fr
Application granted granted Critical
Publication of EP2652332B1 publication Critical patent/EP2652332B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/04—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents of internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/356—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors

Definitions

  • the invention relates to a vacuum pump, in particular a screw pump, preferably having two positive displacement body shafts driving a positive displacement body coupled to a transmission, a displacement body having an intake end and a pressure end and being internally cooled and the vacuum pump having a housing which is inserted into an engine.
  • a displacement body has an inner, extending in the direction of a geometric axis of the displacement body recess in which a tubular body extends to the passage of cooling fluid, leaving a clearance between an inner surface of the recess and a Outer surface of the body, wherein the cooling liquid from the body can enter into the free space, and the body is mounted in the displacement shaft.
  • Vacuum pumps with direct cooling of the displacer have the advantage that between the pump housing and the Verdrängerkör- Pern or the displacement body waves result in operation no significant temperature differences. Also, a heat dissipation from the displacer regardless of the delivered gas stream can be ensured. Also when operating with high pressure on the pressure side.
  • the tubular body is provided extending within the VerdrängerSystemwelle. Between an outer surface of the body and an inner surface of the displacer, a wall of the displacer shaft, which is tubular in this area, extends. The exiting from the tubular body coolant first flows into the cavity of the
  • the free space extends continuously and also more preferably free of installation from the cover part to a fastening region of the body in the displacement body shaft.
  • the attachment area is furthermore preferably provided in a region of the displacement body shaft assigned to the engine / transmission housing of the displacement body shaft.
  • the rohrf örmige body is received in a corresponding receiving recess of the displacement body shaft.
  • the receiving recess preferably has a fastening section and an enforcement section formed with a larger cross-section.
  • the penetration portion is further preferably formed displacement body side of the attachment portion.
  • the cooling liquid is injectable in the body-side attachment portion that is open in an axial direction of the attachment portion.
  • the body may be formed in particular as a conventional tubular body with a same wall thickness over its entire length.
  • radial bores are preferably formed in the passage section of the displacement body shaft, in a region of the displacement body shaft which is the motor / Gear compartment is assigned.
  • the oil or the high-temperature coolant can flow back into the engine / gear chamber.
  • the circulation of the cooling liquid is determined practically solely by the injection of the cooling liquid into the tubular body.
  • the displacement body shaft may also be mounted on the suction side by means of the displacement body. This further preferably by means of the cover part.
  • the tubular body can be designed practically alone on the passage of the cooling liquid in terms of its structural design.
  • the tubular body can also be made of a different material than the
  • Displacer or the VerdrängerEffwelle for which a steel material is preferred exist.
  • a steel material for example, from a light metal such as aluminum.
  • the displacement bodies can also be made of a different material than the displacement body shafts, for example also of aluminum.
  • FIG. 1 is a schematic cross-sectional view of a vacuum pump with internally cooled displacers. and FIG. 2 shows an enlargement of the region of the representation of FIG. 1 delimited by a dashed line.
  • a vacuum pump 1 shown in cross-section in Figure 1 which is formed in the embodiment as a screw pump.
  • the vacuum pump 1 has a first displacement body shaft 2 and a second displacement body shaft 3.
  • a displacement body shaft 2, 3 has a geometrical (longitudinal) axis A.
  • it is a dry-running pump.
  • the vacuum pump 1 further has a pump housing, which is divided into a housing part 4 relating to a working space 5 and a housing part 6, which forms a motor / gear chamber 7.
  • the housing parts 4, 6 are, in particular with regard to the housing part 6, to housing parts which are closed radially and in relation to the positive-displacement body shafts 2, 3, and are preferably integrally formed in this respect. For example, they can be (steel or aluminum) cast parts.
  • the housing part 6 is closed at the back by a closure plate 8 in which the displacement body shafts 2, 3 are mounted at the end.
  • an oil pump 9, which is also driven by the displacer body shaft 2 is arranged here, only schematically indicated, on the outside of the closure part 8.
  • the oil pump 9 provides for the oil supply in the engine / transmission chamber 7 and also, as realized by the oil, for the cooling liquid and its transport or circulation, as described in detail below.
  • a partition wall 10 is formed between the engine / gear chamber 7 and the working space 5, a partition wall 10 is formed.
  • the displacement body shafts 2, 3 are mounted by means of bearings 11.
  • the displacement body shafts 2, 3 are provided with displacers 12, 13. These act helically in the usual manner in the embodiment, but without touching.
  • the displacement bodies 12, 13 can in principle be made in one piece with the respective displacement body shaft 2, 3. In the embodiment and preferred, however, they are designed separately and with the Verdränger Eisenwellen example form gleich- and / or screw-connected.
  • the displacement bodies 12, 13 each formed with a cylindrical recess 14 are mounted in the housing 4 via a bearing 16 by means of a cover part 15 covering the recess 14.
  • the lid part 15 is directly attached to a displacement body 12, 13 and rotates with this.
  • the cover part 15 can be sealed in a simple manner by means of an O-ring 29 with respect to the displacement body shaft or the respective displacement body.
  • the displacer body shafts 2, 3 are driven by a single motor 17, which interacts with the displacer body shaft 3, and is coupled to one another via a gear mechanism 18.
  • the recess 14 formed in the displacement body 12 or 13 extends, starting at a suction-side end 19 of a displacement body 12 or 13, over a considerable part of the length of the displacement body 12 or 13, concentric with a longitudinal axis A of a displacement body shaft 2, 3 or of the displacement body 12, 13.
  • Within the recess 14 extends, also concentric with the axis A, a tubular body 20.
  • the tubular body 20 is fixed on the one hand in the cover part 15 and on the other hand in the displacement body shaft 2. It rotates correspondingly together with the displacement body shaft 2 or 3 or the displacement body 12.
  • the tubular body 20 is used for the passage of cooling liquid, which is given in the embodiment by the means of the oil pump 9 in the engine / gear chamber 7 pumped or in circulated oil fluid, to the suction end of a displacement 12th , 13.
  • the tubular body 20 in the region of the lid part 15 on outlet openings 21 for the cooling liquid.
  • the exit of the cooling liquid directly on the cover part 15 is also favorable with regard to a cooling of the bearing 16.
  • the cooling liquid is injected in detail, which is not shown separately, in the displacement body shaft 2, 3, in a motor / Gear box 7 associated area before, as seen in the direction of a displacer 12, 13, the tubular body 20 begins.
  • the recess 14 initially has, seen from the suction end of a displacement body 12 and 13, a larger diameter D and then a smaller diameter d.
  • the larger diameter D preferably corresponds to 3 to 7 times an outer diameter R of the tubular body 20.
  • the smaller diameter d preferably corresponds to 1.2 to 2 times the outer diameter R of the tubular body 20.
  • the region of the larger diameter D of the recess 14 in the displacer 12 or 13 extends over a length 1, seen from the lid member 15, which preferably one half to 4/5 of the total length L of the displacement body 12 and 13 corresponds.
  • the tubular body 20 further penetrates freely a bore 22 of the displacement body shaft 2 and 3, respectively.
  • This bore 22 is preferably formed with an equal diameter and in alignment with the bore 23 of the displacer 12 or 13 having the diameter d.
  • the bore 22 of the displacement body shaft 2 or 3 then passes into a contrast smaller diameter bore 24 of the displacement body shaft 2 and 3, in which the tubular body 20 is further arranged freely passing through.
  • the bores 22, 24 together represent an enforcement section of the displacer shaft 2, 3.
  • a retaining bore 25 of once again smaller diameter is formed in the displacer body shaft 2 or 3 in order to form a fastening section, in which end 26 in this respect the tubular body 20 is supported.
  • the end 26 is an externally reduced area with regard to the wall thickness of the tubular body 20, so that a contact shoulder 27 results on the tubular body 20 and rests against a corresponding bearing shoulder 28 of the displacement body shaft 2, 3. Due to the abutment of the abutment shoulder 27 on the bearing shoulder 28 on the one hand and the other end given conditioning of the tubular body 20 in the cover part 15, the axial position of the tubular body 20 is fixed in the composite of displacement body shaft and displacer.
  • the holder of the end 26 in the displacement body shaft 2, 3 can be achieved, for example by means of a spring element, corresponding to a groove / spring connection known for waves, by radially fixed clamping.
  • the displacement body 12, 13 has in detail following the recess 14 seen from the lid 15, a fitting bore portion 30 in which a connecting portion 31 of the displacement body shaft 2, 3 is seated. On an end face 32 of the connecting portion 31 sits a disk body 33 which is penetrated by fastening screws 34.
  • the disk body 33 has assigned to the bore 23, for the transition into this, a corresponding bore with an inflow trained 35 on the inlet side.
  • the ranges or value ranges specified above also include all intermediate values, in particular in steps of the respective ratio, on the one hand for limiting the mentioned range limits from below and / or above, alternatively or additionally but also with regard to the disclosure of one or more singular values from a particular area. All disclosed features are essential to the invention.
  • the disclosure of the application is hereby also the disclosure of the associated / attached priority under documents (copy of the prior) fully incorporated, including for the purpose of including features of these documents in claims of the present application.
  • the subclaims characterize in their optional sibling version independent inventive development of the prior art, in particular to make on the basis of these claims divisional applications.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide, en particulier une pompe à vis, comprenant de préférence deux arbres de corps de déplacement (2, 3) entraînant des corps de déplacement (12, 13) accouplés par l'intermédiaire d'une transmission, ainsi qu'un évidement (14) intérieur qui s'étend dans la direction d'un axe géométrique (A) de l'arbre de corps de déplacement (2, 3) et dans lequel s'étend un corps tubulaire (20) pour le passage de liquide de refroidissement, en laissant un espace libre entre une surface intérieure de l'évidement (14) et une surface extérieure du corps (20). L'invention vise à mettre au point une pompe à vide qui présente une configuration de structure simple et efficace en termes de puissance frigorifique. A cet effet, le corps (20) est fixé dans une partie couvercle (15) séparée montée sur l'extrémité côté aspiration du corps de déplacement (12, 13), l'espace libre est réalisé au moins en partie directement entre le corps (20) et la surface intérieure du corps de déplacement (12, 13) et s'étend de manière continue de la partie couvercle (15) à une zone de fixation du corps (20) dans l'arbre du corps de déplacement (2, 3), dans une zone de l'arbre de corps de déplacement (2, 3) associée au carter de moteur/de transmission (4) de l'arbre de corps de déplacement (2, 3).
EP11799390.7A 2010-12-14 2011-12-06 Pompe à vide Active EP2652332B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010061202A DE102010061202A1 (de) 2010-12-14 2010-12-14 Vakuumpumpe
PCT/EP2011/071882 WO2012080034A2 (fr) 2010-12-14 2011-12-06 Pompe à vide

Publications (2)

Publication Number Publication Date
EP2652332A2 true EP2652332A2 (fr) 2013-10-23
EP2652332B1 EP2652332B1 (fr) 2015-01-28

Family

ID=45390073

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11799390.7A Active EP2652332B1 (fr) 2010-12-14 2011-12-06 Pompe à vide

Country Status (7)

Country Link
US (1) US9624927B2 (fr)
EP (1) EP2652332B1 (fr)
JP (1) JP5886867B2 (fr)
KR (1) KR101873904B1 (fr)
CN (1) CN103261694B (fr)
DE (1) DE102010061202A1 (fr)
WO (1) WO2012080034A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11359632B2 (en) 2014-10-31 2022-06-14 Ingersoll-Rand Industrial U.S., Inc. Rotary screw compressor rotor having work extraction mechanism
CN106401956A (zh) * 2016-11-30 2017-02-15 南京妙策传媒有限公司 基于内部冷却处理的有油螺杆压缩机
EP3499039B1 (fr) * 2017-12-15 2021-03-31 Pfeiffer Vacuum Gmbh Pompe à vide à vis

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2410172A (en) * 1941-05-31 1946-10-29 Jarvis C Marble Rotary screw wheel apparatus
JPH10281089A (ja) * 1997-04-03 1998-10-20 Matsushita Electric Ind Co Ltd 真空ポンプ
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19963172A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
DE19963171A1 (de) 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE10039006A1 (de) * 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Zweiwellenvakuumpumpe
EP1784576B2 (fr) * 2004-09-02 2016-01-13 Edwards Limited Refroidissement de rotors de pompe
DE102005012040A1 (de) 2005-03-16 2006-09-21 Gebr. Becker Gmbh & Co Kg Rotor und Schraubenvakuumpumpe
JP2007126993A (ja) * 2005-11-01 2007-05-24 Toyota Industries Corp 真空ポンプ
DE102010064388A1 (de) 2010-02-18 2011-08-18 Steffens, Ralf, Dr. Ing., 73728 Spindel-Kompressor
WO2012055734A2 (fr) 2010-10-27 2012-05-03 Gebr. Becker Gmbh Pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2012080034A2 *

Also Published As

Publication number Publication date
CN103261694B (zh) 2016-01-20
US9624927B2 (en) 2017-04-18
WO2012080034A3 (fr) 2012-08-09
CN103261694A (zh) 2013-08-21
JP2013545932A (ja) 2013-12-26
DE102010061202A1 (de) 2012-06-14
KR101873904B1 (ko) 2018-07-03
KR20140029370A (ko) 2014-03-10
WO2012080034A2 (fr) 2012-06-21
JP5886867B2 (ja) 2016-03-16
EP2652332B1 (fr) 2015-01-28
US20130224055A1 (en) 2013-08-29

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