EP3499039B1 - Pompe à vide à vis - Google Patents

Pompe à vide à vis Download PDF

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Publication number
EP3499039B1
EP3499039B1 EP17207576.4A EP17207576A EP3499039B1 EP 3499039 B1 EP3499039 B1 EP 3499039B1 EP 17207576 A EP17207576 A EP 17207576A EP 3499039 B1 EP3499039 B1 EP 3499039B1
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EP
European Patent Office
Prior art keywords
screw
vacuum pump
pump
accordance
screw vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17207576.4A
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German (de)
English (en)
Other versions
EP3499039A1 (fr
Inventor
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17207576.4A priority Critical patent/EP3499039B1/fr
Priority to JP2018232381A priority patent/JP7221672B2/ja
Publication of EP3499039A1 publication Critical patent/EP3499039A1/fr
Application granted granted Critical
Publication of EP3499039B1 publication Critical patent/EP3499039B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control

Definitions

  • the present invention relates to a screw vacuum pump with a housing, two screw rotors arranged in the housing and engaging with one another which, for conveying a process gas in cooperation with the housing, repeatedly form closed conveying volumes of the process gas and convey them in the direction of an outlet.
  • the vacuum performance of screw vacuum pumps is to a large extent dependent on the size and number of gaps in the active pumping area, in particular between screw rotors that are in engagement and between a respective screw rotor and an enclosing housing wall. These gaps change during operation or in comparison to standstill due to heat-dependent changes in shape, in particular expansion, of the components involved.
  • By controlling the generation of heat and limiting or reducing high temperatures in the screw pump the influence of the temperature on gaps and thus on the vacuum performance of the screw pump can be improved.
  • heat basically corresponds to losses, so that a reduction in heat production can improve the efficiency of the screw vacuum pump.
  • a screw vacuum pump according to the preamble of claim 1 disclose DE 197 45 615 A1 , the DE 197 45 616 A1 and the DE 101 56 179 A1 .
  • a screw vacuum pump with a housing, two screw rotors arranged in the housing and engaging with one another, which repeatedly form closed delivery volumes of the process gas in cooperation with the housing for delivering a process gas and deliver in the direction of an outlet, the screw vacuum pump at least one of the features described below.
  • a motor can be provided which is designed as a direct drive for one of the screw rotors. Since the motor is designed as a direct drive, there is no need to provide a coupling between the motor and the relevant screw rotor. Since a clutch generally generates heat during operation, a heat source is completely avoided. In addition, the corresponding mechanical losses in the coupling are avoided, which improves the energy efficiency of the pump.
  • Active liquid cooling can be provided.
  • the term “active cooling” relates to externally operated cooling, that is to say in particular liquid cooling with a pump.
  • a separate pump can be provided or a water pressure that is already provided on a house connection can be used.
  • the active cooling can include water cooling. The active cooling ensures rapid heat dissipation and thus helps to limit the temperatures in the screw pump
  • Active liquid cooling can be provided both for the screw rotors and for the motor.
  • the temperatures are limited both in the area of the motor and in the area of the screw rotors, i.e. on Locations in the pump where particularly high levels of heat are expected.
  • the term “for” encompasses both active cooling in the area of the element in question, that is to say, for example, in the area of the screw rotors or the motor, as well as an implementation directly in the element in question.
  • active liquid cooling can be provided in or on the housing for the screw rotors in an area, in particular an axial area, in which the screw rotors are arranged.
  • a single active liquid cooling system can be provided both for the motor and for the screw rotors, or several active liquid cooling systems can also be provided.
  • the directly driven screw rotor forms a rotor of the motor. This means that no additional storage is required for a screw rotor, which further reduces mechanical losses and corresponding heat production.
  • the motor can be designed, for example, as a permanent magnet synchronous machine, in particular with internal magnets or as an IPMSM. In this way, the efficiency can be increased further, especially since a particularly high degree of efficiency can be achieved with an IPMSM.
  • an, in particular external, frequency converter is provided for the motor.
  • this also helps to reduce mechanical losses.
  • no transmission gear has to be provided between the motor and the relevant screw rotor. Since a transmission gear always generates heat during operation, another heat source is completely avoided.
  • the corresponding mechanical losses in the transmission gear are avoided, as a result of which the energy efficiency of the pump is further improved.
  • a synchronization gear can be provided between the screw rotors, for example.
  • the screw rotors each have at least two adjacent sections along the screw axis, the screw rotors each having an at least substantially constant or increasing gradient in a first section closer to an inlet and a lower gradient than in a second section in the first section, and wherein, with respect to the screw axis, the first section is longer than a closed delivery volume in the first section, in particular longer than 360 ° or one revolution of the screw profile.
  • a gap length between a compressing area and an inlet of the pump is increased, as a result of which the corresponding sealing effect is improved.
  • the pump can thus be made more efficient.
  • a necessary processing quality of a closing surface for the screw rotors in the inlet area can be reduced as a result. This reduces the manufacturing cost of the pump.
  • a pressure relief valve is provided in the area of an internal compression of the pump, which is connected to an outlet of the pump or forms an outlet.
  • the pressure in this area which is in any case not useful, can be released if it exceeds the pressure prevailing at the outlet, that is to say usually atmospheric pressure.
  • the internal compression is thus limited to atmospheric pressure, which makes the drive power necessary for further compression unnecessary and accordingly avoids further compression heat. This leads to a decrease in temperature.
  • the pump can have a control device which is designed and / or set up to operate the pump at least in a normal operating mode at a rotor speed of approximately 120 Hz or less, in particular of approximately 120 Hz or less and of approximately 80 Hz or more .
  • a control device which is designed and / or set up to operate the pump at least in a normal operating mode at a rotor speed of approximately 120 Hz or less, in particular of approximately 120 Hz or less and of approximately 80 Hz or more .
  • a control device which is designed and / or set up to operate the pump at least in a normal operating mode at a rotor speed of approximately 120 Hz or less, in particular of approximately 120 Hz or less and of approximately 80 Hz or more .
  • the rotor and housing temperature as well as the outlet gas temperature are kept low.
  • control device is designed and / or set up to operate the pump temporarily at least in a boost operating mode in which the rotor speed is higher than in the normal operating mode.
  • boost operating mode in which the rotor speed is higher than in the normal operating mode.
  • the power can then be selectively increased if necessary, while, however, the low power consumption or the low heat production continues to be maintained in the normal operating mode.
  • An overall efficient pump is thus made available, which can, however, be used flexibly.
  • This embodiment is, for example, particularly advantageous for use with, in particular frequently, repeated evacuation, since here power can be switched on as required at the beginning of the evacuation, with the power consumption and heat production remaining relatively low on average.
  • a small motor can be sufficient to operate the screw vacuum pump.
  • a further development is characterized in that a contactless seal, in particular a piston ring, is provided for at least one of the screw rotors.
  • a lubricant discharge device for example a deflector, particularly adjacent to a seal, may be provided.
  • This can support a seal for a screw rotor in that a particularly large part of the lubricant, e.g. oil, does not even reach the seal, but is drained away beforehand. In particular, this can improve the sealing effect of a contactless seal.
  • the screw rotors can be coupled, for example, via a synchronization gear, the synchronization gear having straight teeth. When engaged, this has a small contact area, in particular in comparison to helical teeth. The heat production in the area of engagement of an appropriately designed gear is correspondingly low.
  • the pump is designed in such a way that at least one heat source, such as, for example, an internal compression, a motor or a gearbox, is arranged in the vicinity of at least one heat sink, such as, for example, a liquid cooling system. This ensures particularly effective heat dissipation.
  • at least one heat source such as, for example, an internal compression, a motor or a gearbox
  • the pump is designed in such a way that a shield is arranged between at least one heat source and at least one heat-sensitive area, for example a heat-sensitive component and / or an oil-lubricated area.
  • the shield is formed by a waist of the housing.
  • the waist limits a possible heat flow and thus ensures effective insulation. At the same time, a waist can be easily produced and, in particular, no additional insulation is necessary.
  • the waist acts to a certain extent as a heat collection point for the active cooling, so that the heat essentially does not or hardly passes through the waist, but is largely supplied to the active cooling.
  • the shield can in particular be provided between an outlet and a bearing section for the screw rotors.
  • a lubricant provided in the bearing section can be protected from high heat input from the outlet area, since lubricants are often temperature-sensitive or are more expensive to purchase for higher temperatures.
  • the shield can also be designed as insulation, for example as an insulation layer, in particular with a poorly thermally conductive material, for example a foamed material or a gas such as air.
  • a bearing section in particular a bearing plate, can be designed as a sandwich component, in particular with an insulation layer.
  • the liquid cooling is designed in such a way that it forms a turbulent flow in the area of a heat source. This ensures particularly good heat transfer in this area.
  • it can be advantageous to have a small volume, that is to say in particular Provide a small line cross-section and / or a small total amount of liquid for a cooling circuit and / or a high flow rate of the cooling fluid. This allows particularly good heat transfer, in particular due to the formation of turbulent flow conditions. Turbulence can also be generated, for example, by local narrowing of a cooling line or by abrupt changes in its inner surfaces.
  • cooling lines for active cooling can comprise aluminum or another material of high thermal conductivity, can be formed in a cast aluminum body and / or can be formed as cooling lines, in particular, pressed into housing grooves. Cooling lines are arranged in particular close to a heat source and / or follow their contour at the smallest possible distance.
  • cooling circuits can also be divided up and / or suitably connected to cool different heat sources.
  • a section of the cooling circuit can be provided completely for a particularly warm or heat-sensitive area, in particular a particularly warm or heat-sensitive component, while, for example, other sections of the cooling circuit for other areas or components that are less sensitive or produce less heat, in Can be connected in series.
  • heat sources in the pump in a group, adjacent and / or close to one another.
  • local cooling can be sufficient to cool several heat sources together. Heat generated in a concentrated manner can be dissipated particularly well.
  • the outlet in particular represents a heat source itself.
  • the heat can be dissipated particularly effectively locally here.
  • an immersion cooler can be provided, which in particular comprises aluminum.
  • the immersion cooler can be arranged, for example, in a bath of a lubricant of the vacuum pump, in particular a synchronization gear, in particular an oil bath.
  • a lubricant of the vacuum pump in particular a synchronization gear, in particular an oil bath.
  • the temperature of a sensitive lubricant can be controlled particularly well or local cooling can be provided in this temperature-sensitive area, while other areas may have to be cooled less strongly.
  • the screw rotors of the screw vacuum pump can in particular be formed by a cycloid profile or have such a profile and / or be designed with two threads.
  • a screw pitch of the screw rotors can, for example, be constant in sections, i.e. the pitch changes along a screw axis only in transition areas between the sections, with one transition area being in particular smaller than one section, in particular all transition areas being smaller than all sections.
  • an outlet of the pump can be directed downwards.
  • an inlet of the pump can be directed upwards.
  • the screw vacuum pump can, for example, have an internal compression with a compression ratio of less than 5 to 1, in particular less than 4 to 1, in particular less than 3.5 to 1, and / or greater than 2 to 1, in particular greater than 3 to 1.
  • a respective screw profile can, for example, simultaneously form or convey more than 7, in particular more than 10, in particular more than 12, in particular 13 closed conveying volumes.
  • a respective screw rotor can in particular have a ratio of the length of its screw profile to its Have a diameter of at least 2.0, in particular at least 2.5, in particular at least 3.0 and / or at most 5.0, in particular at most 4.0.
  • a vacuum chamber is evacuated repeatedly, in particular frequently, in particular several times a day, in particular several times an hour, in particular a Roots pump connected upstream of the screw pump is provided, wherein in particular the Roots pump has a pumping speed which is at most three times, in particular at most or approximately twice, as great as a pumping speed of the screw vacuum pump.
  • the aforementioned advantageous pumping speed ratio and / or a low compression ratio means that only a low compression output is applied must and only a small amount of compression heat is generated, which is easy to dissipate. This enables particularly efficient operation of the vacuum system.
  • a vacuum chamber is operated essentially permanently at a final pressure, in particular a Roots pump connected upstream of the screw pump being provided, the Roots pump in particular having a pumping speed which is at least five times, in particular at least seven times, as great as a pumping speed of the screw vacuum pump.
  • a screw vacuum pump 10 which has a motor 12, a gear box 14, a housing 16, a bearing plate 18 and a cover 20.
  • the screw vacuum pump 10 conveys a process gas from an inlet 22 to a downwardly directed, in Fig. 3 visible outlet 24.
  • Active liquid cooling which emerges from a housing of the motor 12, is provided for the motor 12.
  • active liquid cooling is also provided, which has two cooling lines which are shown in FIG Fig. 1 are not shown, but their course is indicated by corresponding grooves 32 of the housing 16 into which the cooling lines are pressed.
  • active liquid cooling systems are provided in the gear box 14 and in the cover 20 and are each designed here as an immersion cooler 34, which are shown below with reference to FIG Fig. 5 are explained in more detail.
  • the housing 16 of the screw vacuum pump 10 has a waist 36.
  • the waist 36 is arranged in the area of the outlet 24.
  • Fig. 4 the screw vacuum pump 10 is shown in a sectional view, the sectional plane of the line AA in FIG Fig. 3 corresponds to.
  • Two screw rotors 28 and 30 are visible, each having two-thread, interlocking screw profiles 38 and 40, which are generated with the aid of a cycloid profile and have a cylindrical envelope contour and a cylindrical basic shape of the screw base.
  • the screw profiles 38 and 40 in cooperation with the housing 16, form an active pumping area of the screw vacuum pump 10 and repeatedly convey closed volumes of the process gas from the inlet 22 to the outlet 24, in Fig. 4 so from left to right.
  • the pumping power of the screw vacuum pump 10 depends on the size and shape of various gaps in the active pumping area, which are unavoidable due to the relative movement of rotors 28, 30 and housing 16, but must be kept small and as constant as possible for the purpose of good pumping power. Changes in temperature in the components involved lead to their shape change. The measures described herein for avoiding, dissipating and generally controlling heat in the pump 10 thus result in the smallest possible change in shape and consequently the most manageable gaps possible. The gaps can therefore be designed more precisely, which improves the pump performance and its efficiency.
  • the screw rotor 28 is driven directly by the motor 12, that is to say without an interposed coupling.
  • the screw rotor 30, is driven via a synchronization gear 42 with gears 43 in a defined angular relationship to the screw rotor 28.
  • the motor 12 comprises a housing 44, which is made, for example, of aluminum and in which cooling lines 26 are formed for active liquid cooling.
  • the motor 12 also comprises a wound stator 46 which, together with a magnet carrier 48 attached to a shaft end of the screw rotor 28, forms an electric motor and a direct drive for the screw rotor 28.
  • the screw rotor 28 forms a rotor of the motor 12.
  • the magnet carrier 48 comprises a plurality of permanent magnets.
  • the motor 12 thus forms a permanent magnet synchronous machine with internal magnets, which is also referred to as IPMSM.
  • the stator 46 is arranged in a potting body 50, which insulates electrical conductors (not shown in greater detail) at the stator 46 and leads them to a circuit board 52 in an insulated manner.
  • the potting body 50 forms here, in conjunction with the circuit board 52, a vacuum-tight connection of the motor 12 to a connection which is atmospheric in an area Control electronics provided for pressure.
  • an external frequency converter can be provided for the motor 12.
  • at least part of an electronic control system for the motor 12 can be provided on the circuit board 52.
  • the synchronization gear 42 is arranged in the gear box 14.
  • oil is also provided as a lubricant, which is distributed by splash disks 54 via the synchronization gear 42 and adjacent bearings 56.
  • the waist 36 forms a shield or a thermal barrier, in particular for heat that is produced in the area of the screw rotors 28, 30 during the pumping operation. Because a small material cross-section remains, and because a heat path is lengthened as a result of the change in shape, the heat from the screw rotor, which otherwise spreads in the housing 16, is prevented from reaching the areas on the other side. In particular, the oil in the gear box 14 and the bearings 56 are protected from excessively high temperatures.
  • the immersion cooler 34 arranged in the gear box 14 also contributes to the temperature reduction. This is arranged in an oil bath, not shown, of the gear box 14 and thus cools the oil directly.
  • a lubricant discharge device designed as a deflector 58 is provided adjacent to the bearings 56, which here form a fixed bearing.
  • a respective deflector 58 forms a barrier for the oil in the gear box so that it does not get into a pump-active area or a vacuum area, here in particular an outlet area.
  • the deflector 58 comprises a throw-off edge, not shown in detail, for the oil. Opposite the throwing-off edge, a drainage groove is formed in the housing 16, which takes up thrown-off oil and returns it in the gear box 14 or in an oil bath there. The oil, which is conveyed or distributed by the splash disks 54 to the gears 42 and bearings 56, is thus carried away again from the rotors 28 and 30 by the deflectors 58.
  • Piston rings are provided on a piston ring carrier 60 as a dynamic fluid seal. These form a contactless seal and thus avoid frictional heat.
  • the deflectors 58 return as much oil as possible to the gear box 14 so that as little oil as possible is already present on the piston rings. In this way, an overall reliable sealing effect is achieved with particularly low heat production.
  • the screw rotors 28 and 30 have three sections of different pitch in their respective screw profile 38 and 40, respectively.
  • the first section 62 is longer in relation to a screw axis 63, which runs along a respective rotor 28 or 30, than a closed delivery volume in the first section.
  • a second section 64 has a plurality of subsections, which are not referenced in any more detail, with different but constant slopes in the screw profile 38 or 40, the slopes being lower than in the first section.
  • the second section 64 here forms the longest section.
  • a third section 66 with an even lower slope forms an ejection section. In the third section there is again a constant slope.
  • the reduced slope along the pumping direction brings about an internal compression that compresses the process gas even before it is ejected.
  • the rotors 28, 30 or the screw profiles 38, 40 can be designed and manufactured particularly easily by providing the constant sections. How it is based on Fig. 4 As can be seen, an elongated first section 62 leads to correspondingly elongated gaps between the screw profiles 28, 30 and the Housing 16, so that the path or the gap from the inner compression at the transition of the sections 62 and 64 to a suction chamber or suction area 67 is longer. The sealing effect of the gaps is correspondingly increased, which leads to an improved sealing of the inner compression with respect to the suction area 67, particularly at high differential pressures.
  • the screw vacuum pump 10 thus has an internal compression.
  • the size of a delivery volume is determined by a cross section of a screw profile 38, 40 and its pitch.
  • the size of a delivery volume on the inlet side or in section 62 determines a theoretical pumping speed of the screw pump 10.
  • the slope of the screw profile 38, 40 is constant on the inlet side over section 62 so that the delivery volume is only compressed after completion by the internal compression. If a respective rotor 28, 30 closes a respective delivery volume too early or too late or the internal compression begins too early, the theoretical pumping speed of the pump drops.
  • the size of a respective delivery volume on the outlet side or in section 66 determines the power consumption of the pump during operation at an achievable final pressure.
  • the ratio of the sizes of the delivery volume on the inlet side and outlet side or in sections 62 and 66 corresponds to the ratio of the internal compression of the pump.
  • section 66 the slope is constant over several revolutions of the screw profile 38, 40.
  • the slope corresponds approximately to the minimum of the slope that can be achieved by a specific machining tool and is therefore, in particular under cost consideration, due to manufacturing technology. Because several revolutions, that is to say several closed delivery volumes, are provided in section 66, a backflow due to a pressure difference between the gaps is compensated for.
  • the entire gradient along the rotors 28, 30 and the size of the gaps formed between the rotors 28, 30 and between rotors 28, 30 and the housing 16 determine the vacuum performance data of the pump, i.e. in particular the pumping speed and an achievable final pressure.
  • the screw profiles 38, 40 have a particularly low imbalance due to their two-thread design. For example, no compensation elements, such as compensation weights, which require additional installation space, and / or compensation bores in which material can be deposited are necessary.
  • the pump can be operated with the double-thread cycloid screw profiles 38, 40 in a wide speed range, in particular with speed control, and / or, for example, in a stand-by mode.
  • the compression of the process gas generally generates heat which, in the case of the screw pump 10, is primarily dissipated by a liquid cooling system.
  • a liquid cooling system In Fig. 4 the grooves 32 provided for this purpose are visible. Cooling lines of the liquid cooling extend here and preferably in the longitudinal direction over a wide area of the screw profiles, in particular over at least half the length of the screw profiles. In particular, the liquid cooling is arranged in the area or in the vicinity of an internal compression.
  • the end shield 18 is attached to an inlet-side end of the housing 16. This carries, among other things, a further bearing with bearings 68, which form a floating bearing.
  • a further bearing with bearings 68 which form a floating bearing.
  • the bearing plate 68 is formed as a separate component, but can also be formed integrally.
  • injection disks 54, deflectors 58 and a piston ring carrier 60 with a plurality of piston rings are also provided, which operate in accordance with the arrangement on the outlet side.
  • a further, separately designed oil bath is provided in the cover 20.
  • An immersion cooler 34 is also provided for this oil bath.
  • a cooling line can also be provided, in particular encapsulated, in a wall of the bearing plate 14 and / or the cover 20
  • the pressure at the inlet 22 is usually essentially the same as at the outlet. During the pumping-out, however, the pressure at the inlet 22 drops to an end pressure which is essentially zero in terms of the resulting forces.
  • the pressure at the outlet 24 thus exerts a force on the rotors 28, 30 that is different than at the beginning of the pumping-out process.
  • a pretensioning device in particular a spring, can be provided, for example, which is provided in particular in the case of a floating bearing of the rotor and / or on the inlet side.
  • the preloading device can, for example, also absorb forces acting on the rotors by means of helically toothed gears and / or generally guarantee a design-appropriate preloading of the bearings regardless of the operating state with changing pressures or pressure conditions.
  • FIG. 5 an immersion cooler 34 is shown as it is arranged in the gear box 14 or in the cover 20 of the screw vacuum pump 10.
  • the immersion coolers 34 are designed identically, which leads to a low number of parts and low manufacturing costs.
  • the immersion cooler 34 has a cooling line 72 which runs through a heat sink 74.
  • the heat sink has a structure to increase the surface area of the heat sink in order to optimize the heat transfer.
  • the immersion cooler 34 also has a flange 76 with which the immersion cooler 34 is fastened.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (14)

  1. Pompe à vide à vis (10), comprenant
    un boîtier (16),
    deux rotors à vis (28, 30) disposés dans le boîtier (16) et en engagement l'un avec l'autre, qui, pour refouler un gaz de traitement, forment des volumes de refoulement de gaz de traitement refermés de manière répétitive en coopération avec le boîtier (16), et les refoulent vers une sortie (24), et un moteur (12) qui est réalisé sous forme d'entraînement direct pour l'un des rotors à vis (28),
    un refroidissement actif par liquide étant prévu aussi bien pour les rotors à vis (28, 30) que pour le moteur (12),
    caractérisée en ce que
    une protection est disposée entre au moins une source de chaleur et une zone thermosensible, protection qui est réalisée sous forme de rétrécissement (36) du boîtier (16).
  2. Pompe à vide à vis (10) selon la revendication 1,
    caractérisée en ce que
    le rotor à vis (28) entraîné directement forme un rotor du moteur (12).
  3. Pompe à vide à vis (10) selon la revendication 1 ou 2,
    caractérisée en ce que
    le moteur (12) est réalisé sous forme de machine synchrone à aimants permanents, en particulier à aimants internes.
  4. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    un convertisseur de fréquence est prévu pour le moteur (12).
  5. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les rotors à vis (28, 30) comprennent chacun au moins deux portions (62, 64) adjacentes le long de l'axe de la vis (63),
    dans une première portion (62) située plus proche d'une entrée (22), les rotors à vis (28, 30) présentent chacun un pas au moins sensiblement constant, et dans une deuxième portion (64) ils présentent un pas plus faible que celui dans la première portion (62), et
    par rapport à l'axe de vis (63), la première portion (62) est plus longue qu'un volume de refoulement refermé dans la première portion (62).
  6. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    une soupape de surpression est prévue dans la zone d'une compression interne de la pompe (10), soupape qui est reliée à une sortie (24) de la pompe (10) ou qui forme une sortie (24).
  7. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la pompe (10) comprend un dispositif de commande réalisé et/ou conçu pour faire fonctionner la pompe (10) au moins dans un mode de fonctionnement normal à une vitesse de rotor d'environ 120 Hz ou moins, en particulier d'environ 120 Hz ou moins et d'environ 80 Hz ou plus.
  8. Pompe à vide à vis (10) selon la revendication 7,
    caractérisée en ce que
    le dispositif de commande est réalisé et/ou conçu pour faire fonctionner la pompe (10) temporairement au moins dans un mode de fonctionnement de suralimentation dans lequel la vitesse du rotor est plus élevée que dans le mode de fonctionnement normal.
  9. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    un joint sans contact, en particulier au moins un segment de piston, est prévu pour l'un au moins des rotors à vis (28, 30).
  10. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les rotors à vis (28, 30) sont couplés par l'intermédiaire d'un engrenage de synchronisation (42), l'engrenage de synchronisation (42) ayant une denture droite.
  11. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la pompe (10) est réalisée de telle sorte qu'au moins une source de chaleur est disposée à proximité d'au moins un dissipateur de chaleur.
  12. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le rétrécissement (36) est prévu entre une sortie (24) et une portion de montage (58) pour les rotors à vis (28, 30).
  13. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le refroidissement par liquide est réalisé de manière à former un écoulement turbulent dans la zone d'une source de chaleur.
  14. Pompe à vide à vis (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les rotors à vis sont formés par un profil cycloïdal en particulier à filet double.
EP17207576.4A 2017-12-15 2017-12-15 Pompe à vide à vis Active EP3499039B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17207576.4A EP3499039B1 (fr) 2017-12-15 2017-12-15 Pompe à vide à vis
JP2018232381A JP7221672B2 (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17207576.4A EP3499039B1 (fr) 2017-12-15 2017-12-15 Pompe à vide à vis

Publications (2)

Publication Number Publication Date
EP3499039A1 EP3499039A1 (fr) 2019-06-19
EP3499039B1 true EP3499039B1 (fr) 2021-03-31

Family

ID=60673648

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17207576.4A Active EP3499039B1 (fr) 2017-12-15 2017-12-15 Pompe à vide à vis

Country Status (2)

Country Link
EP (1) EP3499039B1 (fr)
JP (1) JP7221672B2 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09308183A (ja) * 1996-05-16 1997-11-28 Matsushita Electric Ind Co Ltd 液冷式電動機フレーム
DE19745616A1 (de) 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19745615A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoren
DE10156179A1 (de) 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2004350466A (ja) 2003-05-26 2004-12-09 Kobe Steel Ltd 液冷式モータ
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
JP2008038764A (ja) * 2006-08-07 2008-02-21 Shimadzu Corp ターボ分子ポンプおよびそのための電源装置
DE102010061202A1 (de) * 2010-12-14 2012-06-14 Gebr. Becker Gmbh Vakuumpumpe
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP3499039A1 (fr) 2019-06-19
JP7221672B2 (ja) 2023-02-14
JP2019113064A (ja) 2019-07-11

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