EP4253720A2 - Scroll vacuum pump and scroll vacuum pump system - Google Patents

Abstract

The invention relates, among other things, to a scroll vacuum pump with a pump system, a drive shaft which has an eccentric section for driving the pump system, and an electric drive motor for the drive shaft, at least two bearing points spaced apart along the axis of rotation of the drive shaft being provided for the rotational bearing of the drive shaft, and wherein all bearing points are located on the side of the drive motor facing the eccentric section of the drive shaft and/or between a front balancing weight and a rear balancing weight of the drive shaft.

Description

The present disclosure relates to the improvement of scroll vacuum pumps and scroll vacuum pump systems with multiple scroll vacuum pumps of different designs.

The scroll vacuum pumps each include a pump system which includes a fixed spiral component and a movable spiral component which interacts with this in a pumping effect, a drive shaft which rotates during operation about an axis of rotation with an eccentric section for driving the movable spiral component, and an electric drive motor for the drive shaft.

Scroll vacuum pumps are basically known, for example from EP 3 153 708 A2 , EP 3 617 511 A2 and EP 3 647 599 A2 .

A scroll pump is a positive displacement pump that compresses against atmospheric pressure and can be used, among other things, as a compressor. A scroll vacuum pump can be used to create a vacuum in a recipient connected to a gas inlet of the scroll vacuum pump.

Scroll vacuum pumps are also known as spiral vacuum pumps or spiral conveyors. The pumping principle underlying a scroll vacuum pump is basically known from the prior art and is therefore only briefly explained below.

The pumping system of a scroll vacuum pump has two nested or nested, for example Archimedean, spiral cylinders also simply referred to as spirals. Each spiral cylinder comprises at least one equidistant spiral wall with a, in particular plate-shaped, support provided on one end face of the spiral wall, the outer turns of the spiral cylinder, for example the two or three outermost turns of the spiral cylinder, being able to be formed by wall sections which extend from the center of the spirals each have a constant distance in the circumferential direction. Even if, strictly speaking, these wall sections do not form spiral sections but rather circular sections, in the context of the present disclosure they are attributed to the spiral and referred to as turns of the spiral.

The spiral cylinders are inserted into one another in such a way that the two spiral cylinders enclose half-moon or crescent-shaped volumes in sections. One of the two spirals is arranged immovably or stationary in the housing of the pump, whereas the other spiral together with its carrier can be moved on a circular path via the eccentric section of the drive shaft, which is why this spiral together with its carrier is also referred to as an orbiter. This movable spiral component thus carries out a so-called centrally symmetrical oscillation, which is also referred to as "orbiting" or "wobbling". A crescent-shaped volume enclosed between the spiral cylinders migrates increasingly inwards during the orbiting of the movable spiral component within the spirals, whereby, by means of the migrating volume, the process gas to be pumped moves radially inwards from a radially external gas inlet of the pump system to a gas outlet of the pump system located in particular in the middle of the spiral is promoted.

The eccentric drive, i.e. the drive shaft with the eccentric section, is located within the housing of the scroll vacuum pump on the side of the carrier facing away from the spiral of the orbiter and in practice is usually surrounded by a deformable sleeve, for example a corrugated bellows, which on the one hand Sealing the drive from the intake area and on the other hand serves as a rotation lock for the orbiter, as it could otherwise rotate around itself, i.e. without a rotation lock. In order to ensure this rotation protection, for example, the deformable sleeve can be connected to the carrier at a first end, whereas the second end of the deformable sleeve opposite the first end can be screwed to the base of the housing inside the housing by means of a plurality of fastening means.

The assembly comprising the orbiter and the deformable sleeve (e.g. corrugated bellows) can be pre-assembled as part of the pump assembly, so that this assembly can then be inserted as a unit into the pump housing, whereupon the mentioned second end of the deformable sleeve is screwed to the base of the housing with the fastening means can be.

The following aspects of the invention can be combined with one another in any way, provided they do not contradict each other. These aspects are the aspects defined in the claims as well as the further developments specified in the following description, including the description of the figures, also referred to as embodiments or exemplary embodiments.

According to a first aspect of the invention, at least two bearing points spaced apart along the axis of rotation are provided for rotary mounting of the drive shaft, with all bearing points being located on the side of the drive motor facing the eccentric section and/or between a front balancing weight and a rear balancing weight of the drive shaft.

In other words, the drive motor is located behind the bearing points, ie there is no longer any bearing point behind the drive motor. This simplifies the assembly and replacement of the drive motor or parts of the drive motor, in particular the motor rotor or a unit comprising the motor rotor. This concept represents a departure from a conventional arrangement in which a drive motor designed as an asynchronous motor is arranged between two bearing points spaced apart along the axis of rotation.

According to some developments, it can be provided that the eccentric section is connected to the front end of the drive shaft and the drive motor sits on the rear end of the drive shaft.

In some exemplary embodiments it can be provided that the drive motor is arranged at least partially, preferably completely, within the pump housing. In particular, the drive motor is surrounded by the pump housing in the circumferential direction at least over more than half of its axial length, preferably over its entire axial length.

It can be provided that the pump housing is closed at its rear end by means of a separate motor cover. If the drive motor is not completely arranged within the pump housing, the motor cover can have a receiving space with an axial depth which is dimensioned such that this receiving space can accommodate a rear end of the drive motor which projects axially backwards out of the pump housing.

According to preferred embodiments of this aspect of the invention, the electric drive motor of the scroll vacuum pump can be an asynchronous motor.

Alternatively, the electric drive motor can be a synchronous motor.

In particular, the electric drive motor can be designed as an IPM motor (IPM = Internal Permanent Magnet).

It can also be provided that the drive motor is a synchronous reluctance motor.

According to a second aspect of the invention, a balancing weight is placed on the front side of the rear end of the drive shaft.

An advantage of this arrangement of the balancing weight is that space does not have to be provided elsewhere for the balancing weight. Another advantage is that the balancing weight can take on one or more additional functions in addition to balancing the rotating system. In particular, the balancing weight placed on the front side can serve to clamp the rotor of the drive motor.

The balancing weight rotating during operation creates air turbulence in the engine compartment and can thereby have a cooling effect and at least contribute to cooling the drive motor. In this way, the arrangement of cooling fins on the motor rotor can be dispensed with, so that the resulting freed-up space in the engine compartment can be used for the balancing weight.

Here, “attached” does not necessarily mean that the balancing weight touches the drive shaft. The balancing weight is located behind the drive shaft and is connected to the drive shaft in such a way that it rotates together with the drive shaft during operation.

The balancing weight can, for example, be screwed to the drive shaft.

To screw the balancing weight to the drive shaft, a central screw can be provided, the shaft of which coincides with the axis of rotation. According to some exemplary embodiments, it can be provided that the positioning of the balancing weight in the circumferential direction relative to the drive shaft is predetermined by a positioning aid.

The positioning aid can comprise a positioning element arranged at a radial distance from the axis of rotation and a positioning receptacle for a part of the positioning element, the positioning element being arranged on the drive shaft and the positioning receptacle being formed on the balancing weight, or vice versa. The positioning element can, for example, be designed in the shape of a pin and extend parallel to the axis of rotation.

The positioning element can be inserted into a recess in the axial direction during assembly. The recess can be formed in the drive shaft. Alternatively, the recess can be formed jointly by the drive shaft on the one hand and a motor rotor of the drive motor or a radially inner sleeve element connected in a rotationally fixed manner to the motor rotor of the drive motor on the other hand.

According to some developments, it can be provided that the drive motor comprises a radially inner motor rotor and a radially outer motor stator, the motor rotor being clamped between an abutment and the balancing weight placed on the rear end of the drive shaft.

According to some exemplary embodiments, it can be provided that the drive motor comprises a radially inner motor rotor, which is pushed onto the drive shaft directly or by means of a radially inner sleeve element which is non-rotatably connected to the motor rotor, in particular with a clearance fit, with between the motor rotor and the sleeve element on the one hand and the drive shaft, on the other hand, is provided with a positive connection that is effective in the circumferential direction.

The positive connection can be formed by a positioning element of a positioning aid, through which the positioning of the balancing weight in the circumferential direction relative to the drive shaft is predetermined. The positioning element and/or the positioning aid can be the positioning element or the positioning aid described above.

According to some exemplary embodiments, it can be provided that the motor rotor of the drive motor is provided with a radially inner sleeve element which is connected to the motor rotor in a rotationally fixed manner and with which the motor rotor is pushed onto the drive shaft, in particular with a clearance fit. The sleeve element can be the sleeve element described above.

According to a third aspect of the invention, the drive motor comprises a radially inner motor rotor and a radially outer motor stator, the motor rotor being provided with a radially inner sleeve element which is non-rotatably connected to the motor rotor and with which the motor rotor is pushed onto the drive shaft, in particular with a Clearance fit.

The sleeve element is in particular the sleeve element described above.

With such a sleeve element, the inner diameter of the motor rotor can be adapted to the outer diameter of the relevant section of the drive shaft. This can be advantageous, for example, in a system with several scroll vacuum pumps of different designs, which differ from each other in terms of the inner diameter of the motor rotor. In particular, this makes it possible to use one drive shaft for different motor rotors.

The sleeve element can be made in one piece or in several parts.

The motor rotor and the sleeve element can be pressed together.

Furthermore, it can be provided that the sleeve element is provided with a circumferential shoulder against which the motor rotor rests. This shoulder can form an abutment for the motor rotor, which can be clamped between this abutment and a clamping element. The clamping element can, for example, be placed on the front side of the rear end of the drive shaft. In particular, the clamping element can be a balancing weight, in particular the balancing weight described above.

Furthermore, it can be provided that the drive shaft is provided with a circumferential shoulder against which the sleeve element rests. The shoulder of the drive shaft can form an abutment for the sleeve element when it is clamped during assembly. For example, the sleeve element can be clamped between this abutment and a clamping element placed on the front side of the rear end of the drive shaft. The clamping element can be, for example, a balancing weight, in particular the balancing weight described above.

According to a fourth aspect of the invention, which relates to a scroll vacuum pump system with several scroll vacuum pumps of different designs, the drive shafts of the different scroll vacuum pumps are identical.

This results in an advantageous reduction in the number of different components, since the same drive shaft can be used for the different scroll vacuum pumps.

For example, the scroll vacuum pumps can differ from one another with regard to the inner diameter of a radially inner motor rotor of the drive motor, with sleeve elements with different wall thicknesses being provided in order to adapt the drive shafts to the different inner diameters, which are each arranged between the drive shaft and the motor rotor.

It can be provided that the motor rotors are each connected to the sleeve element in a rotationally fixed manner and are pushed onto the drive shaft with the sleeve element, in particular with a clearance fit.

It can be provided that the motor rotor and the sleeve element are pressed together.

According to a fifth aspect of the invention, the drive shaft is provided with a front balancing weight and a rear balancing weight, the front balancing weight and the rear balancing weight being different from each other in the material from which they are made.

The concept of using different materials for the balancing weights creates an additional parameter that can be varied in order to adapt the balancing weights to the respective circumstances.

In a system of scroll vacuum pumps of different designs, for example, due to pump systems of different sizes, the installation space available for a balancing weight can be different, but this does not necessarily mean that a smaller balancing mass is also required with a smaller installation space, since the required balancing mass depends on the properties of the entire rotating system. In other words, with such a scroll vacuum pump system it may be necessary to accommodate a comparatively large balancing mass in a comparatively small installation space, in order to meet the respective balancing requirements while avoiding or at least minimizing design adjustments.

By choosing a higher density material for one of the balancing weights, its mass can be increased without requiring a larger installation space for this balancing weight.

Advantageous developments can therefore provide that the material of one balancing weight has a greater density than the material of the other balancing weight. In particular, it can be provided that it is the front balancing weight whose material has a greater density. This means that pump systems of different sizes can be compensated for by balancing weights of different densities while the remaining rotating system has the same dimensions.

In particular, it can be provided that the front balancing weight is made of brass and the rear balancing weight is made of steel.

According to a sixth aspect of the invention, which relates to a scroll vacuum pump system with a plurality of scroll vacuum pumps of different types, the scroll vacuum pumps differ in terms of the pumping system, the drive shaft being provided with a front balancing weight and a rear balancing weight, and the scroll vacuum pumps differing in terms of the front Differentiate between the balancing weight and/or the rear balancing weight.

According to a seventh aspect of the invention, the drive shaft is provided with at least one balancing weight, the balancing weight comprising a plurality of consecutive balancing sections along a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft, each of which has a partial ring shape have and include them with their opening pointing towards the drive shaft, and the balancing sections differ from one another in terms of the width of their openings.

With a balancing weight having such different balancing sections, the available installation space can be optimally utilized.

The balancing weight having the different balancing sections can be the front balancing weight of the drive shaft, which also has a rear balancing weight.

In some exemplary embodiments it can be provided that in the installed state the opening widths of the balancing sections increase in the direction of the pump system.

Furthermore, it can be provided that in the installed state a balancing section is arranged in relation to the axis of rotation of the drive shaft at the level of the eccentric section of the drive shaft.

The opening of each balancing section can be defined in a plane perpendicular to the longitudinal axis by a partial circle with a constant radius along the longitudinal axis, the openings of the balancing sections differing from one another in terms of the size of the radii.

Preferably the partial circles are not arranged concentrically.

The partial circles can each comprise an angle in the range of 120° to 180°, in particular in the range of 150° and 170°.

The balancing weight can be made in one piece. This makes it possible to produce the balancing weight from a single starting workpiece by machining.

Furthermore, it can be provided that the centers of all partial circles of at least two point sections, in particular of all point sections, lie in a plane in which the bisectors of the angles encompassed by the partial circles also lie.

According to an eighth aspect of the invention, the drive shaft is provided with at least one balancing weight, which comprises at least one balancing section which widens radially outwardly conically in a plane perpendicular to a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft.

With regard to series production of scroll vacuum pumps and the resulting need for a correspondingly large number of balancing weights, the conical shape of the balancing weight enables material and cost optimization. The cone shape enables an imaginary rosette-like arrangement of several balancing sections around a central axis, which means that the circular surface and thus the material of a circular disc-shaped starting workpiece can be optimally used, so to speak a high packing density of balancing weights can be achieved in the workpiece. The proportion of material unused for the production of the balancing weights can thus be minimized.

The longitudinal axis can coincide with the axis of rotation. It can be provided that the balancing section expands in a V-shape and thus defines an opening angle in the range of 10° to 30°, in particular in the range of 15° to 25°.

In a projection along the axis of rotation, the outline of the balancing section can be delimited by two V-shaped straight lines diverging radially outwards, a radially inner circular section and a radially outer circular section. The radially inner circle section can have a smaller radius than the radially outer circle section. An imaginary circle on which the radially inner circle section lies and whose center preferably lies on the longitudinal axis can lie completely within the outline of the balancing section. Alternatively or additionally, an imaginary circle on which the radially outer circle section lies can completely contain the outline of the balancing section.

Such configurations of the balancing section can further increase the material yield.

According to some exemplary embodiments, it can be provided that the balancing weight comprises a plurality of balancing sections that follow one another along a longitudinal axis, which in the installed state runs parallel to the axis of rotation of the drive shaft, wherein in a projection along the longitudinal axis, the outline of the entire balancing weight differs from the outline of the balancing weight extending radially outwards conically expanding balancing section is formed. This can ensure that the additional balancing section(s) does not affect the material yield.

At least one further balancing section can be provided, which is shortened in the radial direction compared to the balancing section which widens conically radially outwards and, apart from this, is designed to be congruent and overlapping. The production of the balancing weight can thereby be further simplified.

The balancing weight can have a circular cylinder section which forms the front end of the balancing weight along the longitudinal axis and its central axis coincides with the longitudinal axis. In particular, it can be provided that the thickness of the circular cylinder section measured along the longitudinal axis is smaller than the thickness of each balancing section.

The circular cylinder section can be used, for example, to center the balancing weight during assembly. In particular, the balancing weight with the circular cylinder section can be inserted into a sleeve element, in particular in those exemplary embodiments in which the balancing weight is placed on the front end of the drive shaft, with a motor rotor connected in a rotationally fixed manner to the sleeve element and pushed onto the drive shaft with the sleeve element is.

The balancing weight can be placed on the front side with the circular cylinder section on the rear end of the drive shaft.

The balancing weight can have its greatest thickness measured along the longitudinal axis in the extension of the drive shaft.

In particular, it can be provided that the balancing weight is made in one piece. The one-piece design allows the production of the balancing weight to be further simplified.

According to a ninth aspect of the invention, which relates to a system with a plurality of scroll vacuum pumps of different designs, each vacuum pump comprises a pump housing and an electronics housing, the pump system, the drive shaft and the drive motor being accommodated in the pump housing and the electronics housing being a separate component from the pump housing which is connected to the pump housing, in particular releasably, the electronics housing comprising a housing part and electronic equipment, the scroll vacuum pumps differing from one another with regard to the electronic equipment, and the housing parts of the different scroll vacuum pumps are identical.

Different electronic equipment can result, for example, from the fact that the scroll vacuum pumps are equipped with different drive motors. Different drive motors may require different electronic, electrical and/or electromechanical components and/or a different number of such components.

The use of a housing part for different electronic equipment is equivalent to a modular system for the different scroll vacuum pumps, which simplifies production and thus reduces costs.

The housing parts can each be designed as a cast part.

The fact that the housing parts of the different scroll vacuum pumps are identical in construction does not exclude the possibility that, according to advantageous developments, the housing parts of the different scroll vacuum pumps differ from one another with regard to post-processing to adapt to the respective electronic equipment. The post-processing can, for example, consist of adapting one or more openings to the geometry of plugs or cables of the electronic equipment, which are to be received on the housing part or passed through a wall of the housing part. Post-processing can also consist, for example, of walls present within the housing part being completely or partially removed by milling in order to adapt the available installation space to the respective space requirements of the electronic equipment.

According to a tenth aspect of the invention, the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor has a front end face and a rear end face, and only one of the two end faces is provided with cooling projections projecting in the axial direction.

This means a departure from a conventional design, which is characterized by the fact that such cooling projections are present on both end faces of the motor rotor. According to this aspect of the invention, the fact that the cooling projections are only present on one end face advantageously saves axial installation space. It was surprisingly found that only cooling projections provided on one side can ensure a sufficient cooling effect.

In some exemplary embodiments it can be provided that at least some of the cooling projections are designed and arranged in such a way that they each act as a balancing weight. These balancing weights can together form an effective balancing mass with respect to the axis of rotation. It was surprisingly found that both a sufficient cooling effect and a sufficient balancing effect can be achieved by arranging these projections on one side only.

It can be provided that it is the rear end face of the motor rotor that is provided with the cooling projections. The front end face of the motor rotor, which is not provided with such projections, can therefore be arranged further inwards than in a motor rotor which is provided with such projections on its front end face.

The cooling projections can be rib-shaped or plate-shaped.

It can be provided that the cooling projections have at least two different sides that differ from each other in terms of their width, the cooling projections being arranged in such a way that the wider side is at least essentially in the circumferential direction and the narrower side at least essentially in the radial direction. As a result, the cooling projections can generate comparatively strong air movements in the manner of blades, ie they can provide a comparatively large "whisking or stirring effect", which promotes heat dissipation and thus the cooling effect. The cooling projections can be curved in such a way that they have a concavely shaped side pointing at least substantially in the circumferential direction, namely in the direction of rotation of the motor rotor. As a result, a blade effect of the cooling projections can be further increased.

According to an eleventh aspect of the invention, the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a carrier for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the carrier being formed in the carrier, and wherein in the carrier additionally At least two bypass channels are formed in relation to the outlet channel, each of which leads from a bypass opening formed in the spiral base to an outlet of the carrier and in each of which at least one pressure relief valve is arranged.

The provision of a bypass channel with one or more pressure relief valves in the pumping system of a scroll vacuum pump is generally known. In this way, excess pressure that arises in certain pump applications, which would lead to a particularly high power consumption of the pump, can be avoided.

It was surprisingly found that several bypass channels, each with one or more pressure relief valves, enable a further improvement in that a comparatively high suction speed is achieved with a relatively low power consumption.

In some developments it can be provided that the bypass channels each lead to the outlet channel. One or more additional outlets for the bypass channels are then not required.

Preferably exactly two bypass channels are provided. It was found that two bypass channels are enough to achieve a particularly favorable ratio of power consumption and pumping speed.

According to further exemplary embodiments, it can be provided that exactly one pressure relief valve is arranged in each bypass channel. It was found that one pressure relief valve per bypass channel is sufficient to achieve a particularly favorable ratio of power consumption and pumping speed.

The fixed spiral component is preferably formed in one piece, with the side of the carrier facing the movable spiral component forming the spiral base of the spiral arrangement.

In some exemplary embodiments it can be provided that the two bypass openings are arranged offset from one another in the circumferential direction, in particular by an angle of less than 180°, preferably by an angle between 90° and 180°.

Furthermore, it can be provided that the two bypass openings are arranged at different radial positions or at least essentially the same radial position with respect to a central axis of the fixed spiral component which runs parallel to the axis of rotation of the drive shaft.

Furthermore, it can be provided that the inlet opening of the outlet channel is arranged radially further inward than both bypass openings with respect to a central axis of the fixed spiral component that runs parallel to the axis of rotation of the drive shaft. In particular, the inlet opening of the outlet channel can be arranged at least substantially on the central axis.

According to a twelfth aspect of the invention, the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a carrier for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the carrier being formed in the carrier, and wherein in the carrier additionally At least two bypass channels are formed in relation to the outlet channel, each of which leads from a bypass opening formed in the spiral base to the outlet channel.

By having the bypass channels lead to the outlet channel, it is not necessary to provide one or more additional outlets for the bypass channels in the carrier.

It can be provided that the outlet of the carrier comprises a radial outlet opening and the outlet channel comprises a radially extending channel section leading to the radial outlet opening.

It can be provided that both bypass channels each lead to the radial channel section.

Alternatively, it can be provided that one bypass channel leads to the radial channel section and the other bypass channel leads to a further channel section of the outlet channel, which leads from the inlet opening to the radial channel section.

It can be provided that the further channel section of the outlet channel runs parallel to a central axis of the fixed spiral component which runs parallel to the axis of rotation of the drive shaft and in particular lies on the central axis.

According to some exemplary embodiments, it can be provided that at least one pressure relief valve is arranged in each of the bypass channels.

According to a thirteenth aspect of the invention, the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a support for the spiral arrangement, an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the support being formed in the support, and wherein the outlet of the support includes an axial outlet opening.

The axial outlet opening is particularly advantageous if the outlet is to be used for another function that requires additional installation space. For example, it may be desirable to integrate an additional device, for example a leak detector, into the scroll vacuum pump, which must be connected to the outlet of the carrier. With a conventional radial outlet opening, this additional function would require additional radial installation space, which is often not available. An axial installation space, on the other hand, can be implemented in many cases without disadvantages. An additional device, for example a leak detector, can therefore be connected to the axial outlet opening of the carrier without requiring additional radial installation space. The scroll vacuum pump can therefore be made slimmer.

Accordingly, in some embodiments it can be provided that a vacuum device can be connected or is connected to the axial outlet opening, wherein the vacuum device can in particular be a leak detector.

The outlet channel can comprise a radially extending channel section and at least one further channel section which leads from the radially extending channel section to the axial outlet opening.

The further channel section can run parallel to a central axis of the fixed spiral component that runs parallel to the axis of rotation.

In some exemplary embodiments it can be provided that the outlet of the carrier comprises a radial outlet opening in addition to the axial outlet opening, the two outlet openings being selectively closable so that the carrier can be operated with only a single outlet opening. This allows the scroll vacuum pump to be operated flexibly. The outlet opening that is not required can be closed, for example, using a plug. To insert and remove such a plug, an opening can be formed in surrounding components, for example a hood, through which the respective outlet opening or a plug that momentarily closes it is accessible.

The outlet channel can comprise a radially extending channel section which leads to the radial outlet opening, with a further channel section leading to the axial outlet opening from a branch point of the radial channel section located between the inlet opening and the radial outlet opening. It can be provided that a channel section leads to a confluence point, in particular between the inlet opening and the branch point leading to the axial outlet opening, which starts from a bypass opening formed in the spiral base.

The axial outlet opening can be formed on a radially outer region of the carrier. In particular, for the radial position Ra of the axial outlet opening Ra > 0.5 * r, especially Ra > 0.7 * r, especially Ra > 0.8 * r, apply when r is the radius of the beam.

According to a fourteenth aspect of the invention, the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves delimited by them and the spiral base forming the bottom thereof, as well as a support for the spiral arrangement cooperating with the eccentric section of the drive shaft, and the fixed spiral component comprises a spiral arrangement with spiral walls delimited by them Spiral grooves and the spiral base forming their bottom and a support for the spiral arrangement, the spiral grooves having a groove depth which is measured from the tip of the spiral walls to the spiral base along a central axis of the movable spiral component which runs parallel to the axis of rotation of the drive shaft, and a groove width measured perpendicular to the central axis have, and wherein in the movable spiral component and / or in the fixed spiral component the ratio of groove depth to groove width in a range from 3.7 to 4.2, in particular from 3.8 to 4.1, particularly preferably from 3.85 to 4.0 and/or where the ratio of groove depth to groove width is greater than 3.8, in particular greater than 3.85, or less than 4.0.

With such dimensions of the spiral grooves, the pump system can achieve a comparatively high pumping speed.

Preferably, the ratio of groove depth to groove width is constant over the entire spiral arrangement.

The groove depth can be 50 mm, for example. Alternatively, the groove depth can be 52 mm. This results in even higher ratios of groove depth to groove width, for example in the range of 4.0 and 4.2, with the same groove width.

According to a fifteenth aspect of the invention, the movable spiral component comprises a spiral arrangement with spiral walls, spiral grooves delimited by these and the bottom forming the spiral base, and a support for the spiral arrangement which cooperates with the eccentric section of the drive shaft, and the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a Carrier for the spiral arrangement, wherein in the movable spiral component and / or in the fixed spiral component one or more radially outer spiral walls have a thickness that is greater than the thickness of radially inner spiral walls.

Due to the greater thickness, the radially outer spiral wall or the radially outer spiral walls can be given greater stability. This is particularly advantageous if the spiral wall in question is interrupted in the circumferential direction.

According to some exemplary embodiments, it can be provided that the carrier is provided with a gas inlet in a radially outer region, in the region of which the spiral wall or the spiral walls are interrupted in the circumferential direction, with at least one, preferably each, of the spiral walls interrupted in the circumferential direction having the larger one Thickness is provided.

The gas inlet can comprise a recess extending from the outer edge of the carrier, preferably extending radially inwards in a V-shape, or can be formed by such a recess.

According to some exemplary embodiments, it can be provided that the or each spiral wall of greater thickness lies on a circle.

Furthermore, it can be provided that several, in particular two, radially outermost spiral walls of greater thickness lie on concentric circles, in the area of one gas inlet formed in the carrier are interrupted in the circumferential direction and delimit a parallel pumping structure made up of parallel pumping circular or circular segment-shaped channels which merge into a helical pumping channel which is delimited by at least one helically extending spiral wall of smaller thickness.

According to a sixteenth aspect of the invention, the movable spiral component comprises a spiral arrangement with spiral walls, spiral base forming delimited by these spiral grooves and the bottom thereof, and a support for the spiral arrangement which cooperates with the eccentric section of the drive shaft, the fixed spiral component comprising a spiral arrangement with spiral walls and spiral base and a support for the spiral arrangement, wherein the spiral walls of the movable spiral component and / or the spiral walls of the fixed spiral component are provided with a sealing element at their end facing away from the spiral base, and at least in the case of a spiral wall, the sealing element extends to the end of the which reaches a gas inlet of the pump system Spiral wall is guided.

For manufacturing reasons, it has so far been avoided to make such sealing elements so long that they can be guided to this end of the spiral wall. For example, until now an end section of the spiral wall comprising an angular range of approximately 180° remained without a sealing element. It was surprisingly found that there is a relevant improvement in the pumping speed of the scroll vacuum pump if the sealing element is guided to the end of the spiral wall.

In some embodiments it can be provided that the sealing element is of elongated shape and extends continuously from a radially outer end to a radially inner end.

It can be provided that the sealing element has a length of more than 150 cm, in particular approximately 160 cm.

The sealing element can consist of a thermoplastic material, in particular PTFE (polytetrafluoroethylene), or include such a material.

The sealing element is preferably accommodated in a groove in the respective spiral wall.

The gas inlet of the pumping system may include a recess formed on the support of the movable scroll member. In particular, it can be provided that the recess starts from the outer edge of the carrier and preferably extends radially inwards in a V-shape.

Fig. 1a und 1b

ein Ausführungsbeispiel einer erfindungsgemäßen Scrollvakuumpumpe einer ersten Bauart mit einem dreiphasigen Asynchronmotor,

Fig. 2a und 2b

ein Ausführungsbeispiel einer erfindungsgemäßen Scrollvakuumpumpe einer zweiten Bauart mit einem dreiphasigen Asynchronmotor,

Fig. 3a und 3b

ein Ausführungsbeispiel einer erfindungsgemäßen Scrollvakuumpumpe einer dritten Bauart mit einem IPM-Motor,

Fig. 3c, 3d und 3e

verschiedene Ansichten zur Erläuterung von Ausführungsbeispielen eines erfindungsgemäßen Wuchtsystems in Verbindung mit der Scrollvakuumpumpe nach Fig. 3a und 3b,

Fig. 4

einen das Auswuchten des Motorrotors betreffenden Aspekt der Erfindung am Beispiel der Scrollvakuumpumpe nach Fig. 1a und 1b,

Fig. 5a und 5b

jeweils das Elektronikgehäuse einer erfindungsgemäßen Scrollvakuumpumpe, und zwar Fig. 5a das Elektronikgehäuse einer Scrollvakuumpumpe nach Fig. 3a und 3b, und Fig. 5b das Elektronikgehäuse einer Scrollvakuumpumpe nach Fig. 1a und 1b oder Fig. 2a und 2b,

Fig. 6a, 6b und 6c

verschiedene Ansichten eines Ausführungsbeispiels eines feststehenden Spiralbauteils einer erfindungsgemäßen Scrollvakuumpumpe,

Fig. 7a und 7b

ein Ausführungsbeispiel eines beweglichen Spiralbauteils für das feststehende Spiralbauteil der Fig. 6a, 6b und 6c,

Fig. 8a, 8b, 8c und 8d

verschiedene Ansichten zur Erläuterung des Pumpsystems mit dem feststehenden Spiralbauteil nach Fig. 6a, 6b und 6c und dem beweglichen Spiralbauteil nach Fig. 7a und 7b,

Fig. 9

eine schematische Darstellung zur Erläuterung der Relativanordnung zwischen feststehendem Spiralbauteil und beweglichem Spiralbauteil in unterschiedlichen Zuständen eines Ausführungsbeispiels einer erfindungsgemäßen Scrollvakuumpumpe, und

Fig. 10

verschiedene Außenansichten einer erfindungsgemäßen Scrollvakuumpumpe nach Fig. 2a und 2b oder Fig. 3a und 3b.

The invention is described below by way of example with reference to the drawing. Show it:

Figs. 1a and 1b

an embodiment of a scroll vacuum pump according to the invention of a first type with a three-phase asynchronous motor,

Figs. 2a and 2b

an embodiment of a scroll vacuum pump according to the invention of a second type with a three-phase asynchronous motor,

3a and 3b

an embodiment of a scroll vacuum pump according to the invention of a third type with an IPM motor,

Figs. 3c, 3d and 3e

various views to explain exemplary embodiments of a balancing system according to the invention in connection with the scroll vacuum pump Fig. 3a and 3b ,

Fig. 4

an aspect of the invention relating to the balancing of the motor rotor using the example of the scroll vacuum pump Fig. 1a and 1b ,

5a and 5b

each the electronics housing of a scroll vacuum pump according to the invention, namely Fig. 5a the electronics housing of a scroll vacuum pump Fig. 3a and 3b , and Fig. 5b the electronics housing of a scroll vacuum pump Fig. 1a and 1b or Fig. 2a and 2 B ,

6a, 6b and 6c

different views of an exemplary embodiment of a fixed spiral component of a scroll vacuum pump according to the invention,

7a and 7b

an embodiment of a movable spiral component for the fixed spiral component Fig. 6a , 6b and 6c ,

8a, 8b, 8c and 8d

various views to explain the pump system with the fixed spiral component Fig. 6a , 6b and 6c and the movable spiral component Fig. 7a and 7b ,

Fig. 9

a schematic representation to explain the relative arrangement between the fixed spiral component and the movable spiral component in different states of an exemplary embodiment of a scroll vacuum pump according to the invention, and

Fig. 10

various external views of a scroll vacuum pump according to the invention Fig. 2a and 2 B or Fig. 3a and 3b .

In the Fig. 1a and 1b , Fig. 2a and 2 B as well as Fig. 3a and 3b Scroll vacuum pumps according to the invention shown belong to a scroll vacuum pump system with several scroll vacuum pumps of different designs. The scroll vacuum pumps in this system differ from each other in several ways, but have the same basic structure, which is described below.

Each scroll vacuum pump comprises a pumping system with a fixed scroll component 11 and a movable scroll component 13, which work together to pump effectively during operation. Furthermore, each scroll vacuum pump comprises a drive shaft 16 which rotates during operation about an axis of rotation 15 and has an eccentric section 19 for driving the movable spiral component 13. Furthermore, each scroll vacuum pump is provided with an electric drive motor 21, 23, which serves to rotate the drive shaft 17 about the axis of rotation 15 to move. The electric drive motor includes a radially inner motor rotor 21 and a radially outer motor stator 23.

The drive shaft 17 is rotatably mounted on the pump housing 41 at two bearing points 25, 27 spaced apart in the axial direction in each scroll vacuum pump. The front rolling bearing 25 is designed as a fixed bearing, while the rear rolling bearing 27 is designed as a floating bearing.

A special feature provided for all scroll vacuum pumps of the system is that an arrangement also known as the cantilever concept is provided, according to which the two bearing points 25, 27 are located on the side of the drive motor 21, 23 facing the eccentric section 19 of the drive shaft 17. All bearing points 25, 27 are therefore located within the pump housing 41 in front of the drive motor 21, 23. The eccentric section 19 is connected in one piece to the front end of the drive shaft 17 and the drive motor 21, 23 sits on the rear end of the drive shaft 17.

With this basic structure, the drive motor 21, 23 can be pushed onto the rear end of the drive shaft 17, which simplifies the assembly and replacement of the drive motor or parts of the drive motor.

The balancing concept for balancing the rotating system comprising, among other things, the drive shaft 17 and the movable spiral component 13 includes, in each scroll vacuum pump disclosed here, a front balancing weight 29 fastened to the drive shaft 17 by means of a screw 38 and a rear balancing weight 31. The front balancing weight 29 is in each case arranged in the area of the front end of the drive shaft 17 and the eccentric section 19. Check the pump Fig. 1a and 1b The rear balancing weight 31 is located in front of the rear bearing point 27 and thus in front of the drive motor. For the scroll vacuum pumps Fig. 2a and 2 B as well as Fig. 3a and 3b According to one aspect of the scroll vacuum pumps of this type, it is provided that the rear balancing weight 31 is formed by a pressure element which is placed on the front end of the drive shaft 17. Also with the scroll vacuum pump Fig. 1a and 1b is placed on the front end of the drive shaft 17 Pressure element 87 ( Fig. 1b ) is provided, but is designed to be rotationally symmetrical and therefore does not serve as a balancing weight.

The pressure elements 87 and 31 are each connected to the drive shaft 17 with a central screw 83. As a result, the motor rotor 21 is clamped between the rotationally symmetrical pressure element 87 or the pressure element 31, which is simultaneously designed as a balancing weight, on the one hand, and an abutment, this abutment being formed by a shoulder 17a formed on the drive shaft 17.

Another special feature of the scroll vacuum pump system according to the invention is that the drive shafts 17 of the different scroll vacuum pumps are identical. Despite different motor sizes within the system, only one drive shaft 17 is required for the system. The drive motors of the scroll vacuum pumps of different designs differ, among other things, in terms of the inner diameter of the radially inner motor rotor 21. This is shown, for example, by the comparison of Fig. 2b and Fig. 3b . To adapt the identical drive shafts 17 to the different inner diameters of the motor rotors 21, sleeve elements 33 with different wall thicknesses are provided, which are each arranged between the drive shaft 17 and the motor rotor 21. For the scroll vacuum pump Fig. 2b Such a sleeve element 33 is provided, whereas the scroll vacuum pump Fig. 3b does not have such a sleeve element. In those scroll vacuum pumps that have such a sleeve element 33, this is connected in a rotationally fixed manner to the relevant motor rotor 21, this connection between the motor rotor 21 and sleeve element 33 being produced by pressing. Thus, the unit of motor rotor 21 and sleeve element 33 pressed together can be pushed onto the rear end of the drive shaft 17 during assembly. There is a clearance fit between the sleeve element 33 and the drive shaft 17.

In the area of the shoulder 17a mentioned, a wave spring is arranged between the sleeve element 33 and the floating bearing 27.

A pin-shaped positioning element 85 serves as a positioning aid for the respective pressure element 87 or 31, as an anti-rotation device when tightening the central screw 83 and as a positive connection effective in the circumferential direction between the motor rotor 21 or the sleeve element 33 on the one hand and the drive shaft 17 on the other hand. This positioning pin 85 extends is parallel to the axis of rotation 15 of the drive shaft 17 and is arranged at a radial distance from the axis of rotation 15. During assembly, the positioning pin 85 can be inserted in the axial direction into a recess which is formed jointly by the drive shaft 17 on the one hand and the motor rotor 21 or the sleeve element 33 which is non-rotatably connected to the motor rotor 21. In the assembled state, the positioning pin 85 projects axially backwards and its rear end is accommodated in a positioning receptacle which is designed as a blind hole on the side of the pressure element 87 or 31 facing the rear end of the drive shaft 17.

The mentioned clamping of the motor rotor 21 by means of the pressure element 87 or 31 takes place in that the pressure element 87 or 31 is connected to the axially rear end of the sleeve element 33 (cf. Fig. 1a and 1b as well as Fig. 2a and 2 B ) or with the motor rotor 21 (cf. Fig. 3a and 3b ) interacts.

As an assembly aid when pressing the sleeve element 33 into the motor rotor 21, a radial recess 101 is provided at the front end of the motor rotor 21 in the assembled state, which serves as a mark for the fitter and thus indicates the installation orientation of the motor rotor 21.

For the scroll vacuum pumps Fig. 2a and 2 B as well as Fig. 3a and 3b the drive motor is arranged completely within the pump housing 41, ie The drive motor is surrounded over its entire axial length by the pump housing 41 in the circumferential direction. At its rear end, the pump housing 41 is closed by a separate motor cover 103. A special feature of the scroll vacuum pumps Fig. 2a and 2 B as well as Fig. 3a and 3b is that the engine covers 103 are identical despite different engine sizes. For the scroll vacuum pump Fig. 3a and 3b The drive motor is smaller than that of the scroll vacuum pump Fig. 2a and 2 B . The pump housing 41 accordingly has a greater radial wall thickness in this area. For both pump types, the identical motor cover 103 can be screwed onto the front end of the motor housing 41.

Another special feature is that the engine cover 103 is provided with a laser engraving (not shown). This makes variable design easier than printing.

For the scroll vacuum pump Fig. 1a and 1b the drive motor is not completely arranged within the pump housing 41. The motor cover 103 has a receiving space which has an axial depth which is dimensioned such that the rear end of the drive motor, which projects axially backwards out of the pump housing 41, is accommodated in this receiving space.

In this scroll vacuum pump it is also provided that the motor rotor 21 is provided on its rear end face with cooling projections 47 which project in the axial direction. A special feature here is that these cooling projections 47 are only arranged on this rear end face of the motor rotor 21 and the front end face of the motor rotor 21 does not have any such cooling projections. This can advantageously save axial installation space. The cooling projections 47 are designed in such a way that they each act as a balancing weight.

This aspect of the invention will be discussed again elsewhere.

At the front end of the pump housing 41 is the pump system with the fixed spiral component 11 and the movable spiral component 13. The fixed spiral component 11, also known as a spiral housing, is screwed onto the front end of the pump housing 41 and is surrounded by a hood 105 which is also attached to the pump housing 41 , which also houses a fan 95.

A special feature of the scroll vacuum pump system is that a set of fans 95 of different performance is provided, but they have the same dimensions. Not only fans 95 with a supply voltage of 24V, but also those with a supply voltage of, for example, 48V or 230V are provided. This increases the variability of the system.

The movable spiral component 13 is connected to the eccentric section 19 via a flange bearing 91 designed as a rolling bearing. There is a pressure washer 93 axially between the movable spiral component 13 and the eccentric section 19. There is a shim 94 between a circumferential shoulder of the drive shaft 17 at the transition into the eccentric section 19 and the flange bearing 91. The correct alignment in the circumferential direction between the fixed spiral component 11 and the pump housing 41 is ensured by a positioning pin 97.

In each scroll vacuum pump of the system, the pump housing 41 is supported on a base which is formed by an electronics housing 43. The electronics housing 43 comprises a housing part 43a, which is provided on its underside with feet 107 made of rubber, which are accommodated in recesses formed on the underside and are therefore arranged recessed.

The electronics housings 43 of the different scroll vacuum pumps differ, among other things, with regard to a housing cover 43b which forms the lower cover of the housing part 43a. This will be discussed in more detail elsewhere.

Electronic equipment 45 is housed in each electronics housing 43, which includes electronic, electrical and electromechanical components that serve, among other things, to power and control the respective scroll vacuum pump. The scroll vacuum pumps of the scroll vacuum pump system according to the invention also differ from one another with regard to the electronic equipment 45.

A special feature of the scroll vacuum pump system according to the invention is that the housing parts 43a of the different scroll vacuum pumps are identical in construction. The housing parts 43a are each designed as a cast part. Despite different electronic equipment 45 for the individual scroll vacuum pumps, only one housing part 43a is therefore required.

This modular principle reduces effort and costs in the manufacture of scroll vacuum pumps. The housing parts 43a differ slightly in terms of post-processing to adapt to the respective electronic equipment 45. Such post-processing is used, for example, to adapt openings to the geometry of plugs or lines of the electronic equipment 45, which must be accommodated on the housing part or passed through a wall of the housing part . Furthermore, post-processing can consist of the inner walls of a respective housing part 43a being partially or completely removed by milling in order to adapt the installation space available in the housing part 43a to the respective space requirements of the electronic equipment 45.

The pump housing 41 is screwed to the electronics housing 43.

In the Fig. 1a , 2a and 3a The area of the scroll vacuum pump on which a gas ballast valve is arranged is shown in a section BB at the bottom center. The gas ballast valves 79 are designed differently for the individual scroll vacuum pumps. For the scroll vacuum pump Fig. 1a and 1b the gas ballast valve 79 is provided with a closure cover 81. For the scroll vacuum pumps Fig. 2a and 2 B and 3a and 3b, the gas ballast valve 79 each has a rotary knob 82 for making settings.

The illustrations at the top right in the Fig. 1a , 2a and 3a , each of which shows a view of the scroll vacuum pump on the hood 105, the arrangement of an inlet flange 77 and the arrangement of an outlet flange 78 can be seen.

The gas to be pumped enters the pump system comprising the two spiral components 11, 13 via the inlet flange 77 and is expelled via the outlet flange 78.

The two scroll vacuum pumps Fig. 1a and 1b and 2a and 2b are each provided with a three-phase asynchronous motor 21, 23 for driving the drive shaft 17. The two scroll vacuum pumps differ in terms of their size, among other things. The pump system with the two spiral components 11, 13 and the asynchronous motor with rotor 21 and stator 23 have the following in the scroll vacuum pump Fig. 1a and 1b a smaller diameter than the scroll vacuum pump Fig. 2a and 2 B , whereby - as already mentioned - the two drive shafts 17 are identical in construction and therefore have the same size. The diameter of the drive shaft 17 in the area of the sleeve element 33 is 24 mm in this exemplary embodiment. To adjust the diameter of the drive shaft 17 in this area on the respective inner diameter of the motor rotor 21 serves - as already mentioned - the correspondingly sized sleeve element 33 pressed with the motor rotor 21.

For the scroll vacuum pump Fig. 3a and 3b The pump system also has a diameter that is larger than the pump system of the scroll vacuum pump Fig. 1a and 1b . However, it is not an asynchronous motor that serves as the rotary drive for the drive shaft 17, but rather a single-phase IPM motor (IPM = Internal Permanent Magnet).

However, the scroll vacuum pump system according to the invention is not limited to these electric drive motors. For example, a synchronous reluctance motor can also be provided as a rotary drive for the drive shaft 17.

The choice of a respective drive motor is made with regard to the desired performance, the desired energy consumption as well as customer requirements and application conditions.

The modular principle provided according to the invention is of particular advantage with regard to this variability desired in practice due to its versatile adaptability.

As already mentioned, the balancing system for balancing the rotating system, which includes in particular the drive shaft 17 and the movable spiral component 13 of the pump system, each includes a front balancing weight 29 and a rear balancing weight 31. In the scroll vacuum pump Fig. 1a and 1b The rear balancing weight 31 is located in front of the rear bearing point 27. The pressure element 87 for clamping the motor rotor 21 is designed here to be rotationally symmetrical.

For the scroll vacuum pumps Fig. 2a and 2 B as well as Fig. 3a and 3b The pressure element placed on the front end of the drive shaft 17 simultaneously forms the rear balancing weight 31. Since in these two scroll vacuum pumps - as mentioned - the pump system has a larger diameter, there is a comparatively limited amount available in the area of the eccentric section 19 of the drive shaft 17 Installation space, the front balancing weight 29 is made of a material that has a greater density than the material of the rear balancing weight 31. According to one aspect of the invention, it is accordingly provided that the front balancing weight 29 is made of brass and the rear balancing weight 31 is made of steel. For the scroll vacuum pump Fig. 1a and 1b On the other hand, the two balancing weights 29, 31 are made of the same material, namely steel.

As already mentioned in the introductory part, the eccentric drive formed by the drive shaft 17 with the eccentric section 19 is located inside the pump housing 41 and is surrounded by a deformable sleeve in the form of a corrugated bellows 89. The corrugated bellows 89 serves, on the one hand, to seal the eccentric drive from the suction area of the scroll vacuum pump and, on the other hand, as a rotation lock for the movable spiral component 13. For this purpose, the corrugated bellows 89 is attached to the side of the movable spiral component 13 facing the drive. The rear end of the corrugated bellows 89 is attached within the pump housing 41 to a housing base by means of screws.

The balancing concept of the scroll vacuum pumps according to the invention is explained in more detail below, using the example of the scroll vacuum pump Fig. 3a and 3b . These explanations also apply to the scroll vacuum pump Fig. 2a and 2 B as well as with regard to the front balancing weight 29 also for the scroll vacuum pump Fig. 1a and 1b .

Fig. 3c shows in sections perpendicular to the axis of rotation 15 of the scroll vacuum pump Fig. 3a and 3b in the left representation (section BB in Fig. 3b ) a view of the rear balancing weight 31 and in the right illustration (section AA in Fig. 3b ) the arrangement of a balancing section of the front balancing weight 39 in relation to the corrugated bellows 89, the flange bearing 91 and the eccentric section 19 of the drive shaft 17.

The specific design of the balancing weights 31, 29 will be discussed below in connection with Fig. 3d and 3e discussed in more detail.

The left representation in Fig. 3c shows that the rear balancing weight, which is screwed to the drive shaft 17 by means of the central screw 83 and clamps the motor rotor 21 in the manner explained above, expands conically radially outwards. While maintaining the basic geometry of this rear balancing weight 31, optimal adaptation to different drive motors can be achieved comparatively easily during its production.

As the illustration on the right shows, the balancing section of the front balancing weight 29 shown in section is partially ring-shaped in such a way that the inner radius is adapted to the outer radius of the flange bearing 91. This makes optimal use of the available installation space.

In the left illustration below, the rear balancing weight 31 is shown in a side view. Among other things, the holes 39a for the central screw 83 and the blind hole 39b for receiving the positioning pin 85 are shown.

Fig. 3d shows in the two illustrations on the left the structure of the front balancing weight 39, which is designed in one piece and - as mentioned above - can be made from different materials, in particular from materials of different densities such as brass on the one hand and steel on the other.

The illustration on the right Fig. 3d shows an enlarged section of the Fig. 3b the arrangement of the front balancing weight 29 in the area of the eccentric section 19 of the drive shaft 17 and the flange bearing 91.

The balancing weight 29 comprises three balancing sections 35, which follow one another along the axis of rotation 15 of the drive shaft 17 when installed. Each balancing section 35 has a partial ring shape, with each balancing section having its opening 37 facing the drive shaft 17 and encompassing it when installed.

A special feature is that the balancing sections 35 differ from one another in terms of the width of their openings 37. This is in both the perspective view at the top left Fig. 3d as well as the top view at the bottom left Fig. 3d refer to.

A further special feature of this front balancing weight 29 is that the opening 37 of each balancing section 35 is defined in a plane E perpendicular to the axis of rotation 15 (in the installed state) by a partial circle with a constant radius along the central axis. When installed, a balancing section 35 with a radius R1 comprises a section 17b of the drive shaft 17, which lies directly behind the eccentric section 19. The adjacent balancing section 35 with the radius R2 includes the flange bearing 91. The third balancing section 35 is located in an axial region on which heads of fastening screws for attaching the flange bearing 91 to the movable spiral component 13 are arranged. The radius of this balancing section 35 is therefore significantly larger than the radii R1, R2 of the other two balancing sections.

A special feature is that the two radii R1, R2 are not the same size and, moreover, the two partial circles are not arranged concentrically, as in particular the illustration at the bottom left Fig. 3d can be removed. In the exemplary embodiment shown here, R1 = 22 mm and R2 = 28.3 mm, whereby the centers of the two partial circles are offset from one another, but lie in the plane E in which the bisectors of the angles encompassed by the partial circles lie. In the exemplary embodiment shown here, these angles are each 180°. The center of the rear balancing section 35 when installed lies on the axis of rotation 15, since this balancing section includes the central section 17b of the drive shaft 17. The other center of the partial circle with the larger radius R2 is accordingly outside the openings 37 of the balancing sections 35.

This structure of the balancing weight 29 has the advantage that, without increasing the outer diameter, the center of gravity of the central balancing section 35 comprising the flange bearing 91 can be placed further radially outwards than would be the case if the two centers coincided. In other words, a higher eccentric mass can be realized for this central balancing section 35 without increasing the external dimensions of the balancing weight 29.

This advantageously ensures that the available installation space is optimally utilized and a sufficiently high balancing effect can be achieved.

Fig. 3e On the left shows three views of the rear balancing weight 31, which illustrate its structure. The balancing weight 31 is made in one piece.

The balancing weight 31 comprises two balancing sections 39 which expand conically radially outwards. The balancing sections 39 each expand in a V-shape, defining an opening angle of approximately 20°.

Furthermore, the balancing weight 31 includes a circular cylinder section 40, the central axis of which coincides with the axis of rotation 15 of the drive shaft 17 when installed. The thickness of this circular cylinder section 40 measured along the axis of rotation 15 is significantly smaller than the thickness of each balancing section 39. Such as, for example Fig. 3b can be removed, the balancing weight 31 with its circular cylinder section 40 faces the rear end of the drive shaft 17 when installed. Following the example of the scroll vacuum pump Fig. 2a and 2 B It can be seen that the balancing weight 31 is inserted with its circular cylinder section 40 into the sleeve element 33.

The balancing section 39 located between the circular cylinder section 40 and the outer balancing section 39 is shortened in the radial direction compared to the outer balancing section 39, but apart from this is designed to be congruent and aligned overlappingly. Both balancing sections 39 expand in a V-shape, i.e. in a projection along the axis of rotation 15, the outlines of the two balancing sections 39 are delimited by two V-shaped straight lines that diverge radially outwards. In addition, the two outlines of the balancing sections 39 are delimited by a radially inner circular section which has a smaller radius than a respective radially outer circular section which forms the radially outer boundary of the respective outline.

This structure of the rear balancing weight 31 enables simple and cost-effective production as well as easy adaptation to the respective drive motor. However, an adjustment is not absolutely necessary in every case. The rear balancing weight 31 can be designed in such a way that it can be used with the asynchronous motor of a scroll vacuum pump Fig. 2a and 2 B , in particular with the sleeve element 33, as well as with the IPM motor of a scroll vacuum pump Fig. 3a and 3b can work together.

In the representations of the Fig. 3e The hole 39a for the central screw 83 and the blind hole 39b for the positioning pin 85 can also be seen.

As far as the production of the rear balancing weight 31 is concerned, the conical shape enables the material requirements to be minimized. Right in Fig. 3e For illustrative purposes, a manufacturing arrangement 109 is shown, in which several balancing weights 31 are arranged in a rosette-like manner on a circle. This illustrates that a plurality of balancing weights 31 can be produced by cutting from a flat material disk and subsequent individual processing.

Fig. 4 shows a view of the rear end of a scroll vacuum pump Fig. 1a and 1b with the motor cover 103 removed. This allows the rear end face of the motor rotor 21 to be seen, which is surrounded by part of the motor stator 23.

As already mentioned elsewhere, a special feature here is that the motor rotor 21 is only provided with cooling projections 47 projecting in the axial direction on this rear end face. These cooling projections 47 are designed and arranged in such a way that they act as balancing weights. The balancing concept of the scroll vacuum pump Fig. 1a and 1b not only includes the front balancing weight 91 and the rear balancing weight 31 arranged in front of the second bearing point 27, but also the balancing weights 47 arranged on the rear end face of the motor rotor 21, which also serve for cooling. These balancing weights or cooling projections 47 are plate-shaped and arranged in such a way that their wider side points in the circumferential direction. As a result, the cooling projections 47 can generate comparatively strong air movements in the manner of blades during operation in order to promote heat dissipation.

The Fig. 5a shows the electronics housing 43 of the scroll vacuum pump Fig. 3a and 3b , whose drive motor is a single-phase IPM motor with an operating voltage of 24V/DC. The electronic equipment 45 includes a Sub-D connector, a stand-by switch, an on and off switch and USB ports.

Fig. 5b shows the electronics housing 43 of the scroll vacuum pumps Fig. 1a and 1b as well as Fig. 2a and 2 B , each of which has a three-phase asynchronous motor as a drive motor. These asynchronous motors can be operated with an operating voltage of up to 480V/AC.

The three-phase asynchronous motors require a higher protection class (especially IP44) than the single-phase IPM motor, for which a lower protection class (especially IP40) is sufficient. These different protection classes result in different concepts for sealing the electronics housing 43.

In the electronics housing 43 for the scroll vacuum pump with a single-phase IPM motor according to Fig. 5a A housing cover 43b made, for example, of aluminum without its own seal is sufficient as a cover. Here, a recessed arrangement is provided for the housing cover 43b in the housing part 43a, with surfaces set back inwards relative to the underside of a circumferential outer wall serving as a support for the housing cover 43b and each being provided with a sealing material. Due to its recessed arrangement, the housing cover 43b cannot be seen from the side.

This is different with the electronics housing 43 for the scroll vacuum pumps with three-phase asynchronous motors. The housing cover 43b, made for example from aluminum, is placed here on the underside of the housing part 43a. The underside is - like the recessed contact surfaces in the housing part 43a Fig. 5a - provided with a sealing material, in addition the inside of the housing cover 43b is completely covered with a sealing material made of cellular rubber, for example.

This results in a particularly effective sealing of the electronics housing 43 in order to meet the requirements of the higher protection class.

As already mentioned elsewhere, the electronics housings 43 also differ in the respective electronics equipment 45. For example, the electronics housing 43 is according to Fig. 5a provided with a connection for a cold device plug 44, to which a power supply can be connected to supply power to the scroll vacuum pump. In contrast, the electronics housing 43 is in accordance Fig. 5b provided with another power plug 44, for example a Harting type power plug.

In addition, the electronics housing 43 differs accordingly Fig. 5b from the electronics housing 43 according to Fig. 5a due to the lack of the Sub-D plug, the stand-by switch, the on/off switch and the USB ports. The openings provided for this in the housing component 43a are covered, for example with a film. This allows for the electronics housing 43 according to Fig. 5b an IP protection class can be made possible.

Fig. 6a shows an overview of various views of a fixed spiral component 11 of a scroll vacuum pump according to the invention, also known as a spiral housing. The three top representations in Fig. 6a are enlarged in Fig. 6b shown, whereas the three lower representations of the Fig. 6a enlarged in Fig. 6c are shown.

Shows accordingly Fig. 7a an overview with various representations of a movable spiral component 13, also known as an orbiter, for the spiral casing 11 according to Fig. 6a , 6b and 6c .

The interaction of spiral housing 11 and orbiter 13 in the pumping system of a scroll vacuum pump according to the invention as well as the arrangement of the gas channels in the pumping system are shown Fig. 8a , 8b , 8c and 8d .

The fixed spiral component 11 comprises a spiral arrangement with spiral walls 49 and spiral base 51 as well as a carrier 53 for the spiral arrangement. The two radially outer spiral walls 49 lie on concentric circles and are interrupted in the circumferential direction. This creates a parallel pumping structure made up of parallel pumping channels formed by the relevant spiral grooves 50, which merge into a helical pump channel which is formed by a helically extending spiral groove 50 and is delimited by a helically extending spiral wall 49.

The second part-circular spiral wall 49, viewed from the radial outside, has a greater thickness WD2 than the spiral spiral wall 49, which has a wall thickness WD1 in its radially inner course. In this exemplary embodiment, WD2 = 3.71 mm and WD1 = 3.47 mm. The stability of the circumferentially interrupted circular spiral wall 49 is increased by this increased thickness WD2.

The spiral walls 49 are each provided at their end facing away from the spiral base 51 with an elongated sealing element 75, which is also referred to as a tip seal. The sealing element 75 for the most radially outer spiral wall 49 has a comparatively long length, since it is continued to the further radially inner, spiral-shaped spiral wall 49 and to the radially inner end of this spiral wall 49, located in the area of the central axis of the spiral housing 11 suffices. A special feature of this long sealing element 75 is that it is located radially on the outside in the part-circular shape Spiral wall 49 is guided to the end 76 of this spiral wall 49, which extends to a gas inlet 67 (cf. Fig. 7a and 7b ) of the pump system.

The gas pumped from radially outside to radially inside along the spiral grooves 50 can pass from the spiral grooves 50 via a central inlet opening 55 and via two bypass openings 61a, 63a into a channel system of the fixed spiral component 11, described in more detail below. These openings 55, 61a, 63a are each formed in the spiral base 51. The two bypass openings 61a, 63a are arranged offset from one another in the circumferential direction and are located on the same radius with respect to a central axis of the spiral housing 11.

Aligned with these openings 55, 61a, 63a are openings 56a, 61c, 63c formed on the side of the carrier 53 facing away from the spiral arrangement. These openings 56a, 61c, 63c serve to accommodate valves, which will be discussed in more detail elsewhere.

Furthermore, in this side of the carrier 53 facing away from the spiral arrangement, an axial outlet opening 65 is formed radially further out, which can either be closed or form an axial gas outlet of the spiral housing 11 and thus of the pumping system of the scroll vacuum pump.

The openings mentioned communicate with a channel system of the spiral casing 11, which is shown on the left and right in the illustrations Fig. 6c is shown.

The central inlet opening 55 leads to an outlet channel 59 designed as a straight bore, which opens at the radial outlet 57 of the spiral housing 11. The one bypass opening 63a leads directly to this outlet channel 59. The channel section leading from there to the radial outlet 57 is therefore not only a section of the outlet channel 59, but also forms a bypass channel 63 for gas originating from the bypass opening 63a.

Another bypass channel 61 (see the right illustration in Fig. 6c ) leads from the further bypass opening 61c to the outlet channel 59. This bypass channel 61 is part of a straight bore 64, which is introduced to produce the bypass channel 61. This bore 64 and the outlet channel 69 run at an angle to one another, which corresponds to the angular offset of the two bypass openings 61c, 63c in the circumferential direction.

Another special feature of the pump system according to the invention, which is evident both in the spiral casing 11 and in the orbiter 13, is that the groove depth NT is comparatively large. In the exemplary embodiment shown here, the groove depth is 50 mm. This results in comparatively large values for the ratio of groove depth NT to groove width NB. With a groove width NB1 = 12.71 mm for the spiral-shaped spiral groove 50 and with a groove width NB2 = 12.92 mm for a radially further outward and circular spiral groove 50, the ratios are 3.93 and 3.87, respectively. Alternatively, a groove depth of 52 mm can be provided. This then results in even larger ratios of groove depth to groove width.

The movable spiral component 13 according to Fig. 7a and 7b also includes a spiral arrangement with spiral walls 69 and spiral base 71 as well as a plate-shaped support 73 for the spiral arrangement. The two radially outer spiral walls 69 run on concentric circles and are interrupted in the circumferential direction in the area of a gas inlet 67. A radially inner spiral wall 69 runs spirally. The spiral walls 69 are in turn provided with a sealing element 75 (tip seal) at their end facing away from the spiral base 71.

In order to increase the stability of the two spiral walls 69 located radially on the outside and interrupted in the circumferential direction, these spiral walls 69 have a thickness WD2, which is greater than the thickness WD1 of the spiral spiral wall 69. In this exemplary embodiment, WD2 = 3.71 mm and WD1 = 3.46 mm.

As shown on the right Fig. 7b As can be seen, the radially outer spiral groove 70 between the two part-circular spiral walls 69 has a groove width NB2, while the spiral-shaped spiral groove 70 delimited by the spiral spiral wall 69 has a groove width NB1. In this exemplary embodiment, NB2 = 12.92 mm and NB1 = 12.58 mm. With the comparatively large groove depth NT = 50 mm, this results in comparatively large ratios of groove depth to groove width, namely 3.87 or 3.97. Alternatively, a groove depth of 52 mm can be provided. This then results in even larger ratios of groove depth to groove width.

Fig. 8a shows an overview of various views of the spiral casing Fig. 6a , 6b and 6c and the orbiter from Fig. 7a and 7b comprehensive pumping system of the scroll vacuum pump Fig. 3a and 3b . The pumping system of the scroll vacuum pumps Fig. 1a and 1b as well as Fig. 2a and 2 B is trained accordingly.

Fig. 8b shows an enlarged view at the top left (section AA) of Fig. 8a .

Fig. 8c shows an enlarged view at the top right (section BB) of Fig. 8a .

Fig. 8d shows an enlarged view at the bottom right (section CC) of Fig. 8a .

In Fig. 8b the interaction of the nested spiral walls 49, 69 can be seen, which partially enclose crescent or sickle-shaped volumes. During operation, gas flows through the gas inlet 67, which is in Fig. 8b is only indicated with regard to its position (cf. for example Fig. 7b ), inflowing gas to the center of the pump system and via the inlet opening 55 into the outlet channel 59 when the outlet valve 56 (cf. e.g Fig. 8d ) opens at sufficiently high pressure. The pumped gas arrives via the outlet channel 59 to the radial outlet 57 and thus to the outlet flange 78, if - as in Fig. 8d shown - the axial outlet opening 65 is closed by means of a plug 66.

As mentioned in the introductory part, in an alternative configuration, the radial outlet 57 can be closed and the plug 66 removed, thereby creating an axial outlet from the pumping system.

If excess pressure arises in the pump system during operation, this can be reduced by the pressure relief valves 61b, 63b in order to avoid an excessively high power consumption of the scroll vacuum pump. A special feature of this arrangement is that several - here two - bypass channels 61, 63 are provided, each with exactly one pressure relief valve 61b or 63b. This ensures that the scroll vacuum pumps according to the invention have a relatively high pumping speed with a comparatively low power consumption.

Fig. 9 Fig. 12 shows a concept referred to as a tapered gap design that may be incorporated into the scroll vacuum pumps of the present disclosure in the region where the helical scroll wall 49 of the fixed scroll member cooperates with the helical scroll wall 69 of the movable scroll member.

For each of three states I, II and III of the scroll vacuum pump, the course of the movable spiral wall 69 in the pumping direction P relative to the fixed spiral walls 49 is shown in a development. The upper fixed spiral wall 49 is located radially further out than the lower fixed spiral wall 49, which is indicated by the arrow r (radial direction).

The numerical values indicate the radial distance (in mm) between the wall surfaces facing each other, i.e. the size of the radial gap between the wall surfaces.

In state I, the scroll vacuum pump is not in operation, i.e. the drive shaft does not rotate and the orbiter and thus its spiral wall 69 are stationary. The volute and orbiter are at ambient temperature.

The special feature described here is that in this initial state the movable spiral wall 69 is arranged in such a way that the gaps between the movable spiral wall 69 and the fixed spiral walls 49 each have a conical course in the pumping direction P.

The course of the movable spiral wall 69 is selected such that when the scroll vacuum pump is running, i.e. during operation, according to state II, the deformation of the movable spiral wall 69 reduces the conicity of the gap, as can be seen from the distance values. In state II, the movable spiral wall 69 runs almost parallel to the two fixed spiral walls 49. The deformation of the movable spiral wall 69 results from the higher temperatures and the movement of the orbiter.

At an even higher speed, for example at a speed of the drive shaft of 1,800 revolutions per minute, according to state III, the centrifugal forces cause the movable spiral wall 69 to approach the radially outer fixed spiral wall 49, which leads to a very small radial gap there.

Fig. 10 shows various external views of a scroll vacuum pump Fig. 3a and 3b .

As already explained, the pump housing 41 sits on the electronics housing 43 and is closed on the motor side by the motor cover 103 and on the opposite side by the hood 105. The outlet flange 78 and the inlet flange 77 are also shown.

The special feature of this pump housing 41 is that the inlet flange 77, also known as the suction flange, is set back from the highest point of the pump housing 41 at this axial position. This saves overall height. This is particularly advantageous when an alternative flange, not shown, which is formed by an angle flange is used.

Such a recessed arrangement of the inlet flange 77 is also the case with the scroll vacuum pump Fig. 2a and 2 B intended.

Reference symbol list

11

fixed spiral component, spiral casing

13

movable spiral component, orbiter

15

Axis of rotation

17

drive shaft

17a

shoulder

19

Eccentric section

21

Motor rotor

23

Motor stator

25

front bearing point (fixed bearing)

27

rear bearing point (floating bearing)

29

front balancing weight

31

rear balancing weight

33

Sleeve element

35

Balancing section of the front balancing weight

36

drilling

37

Opening of the balancing section

38

screw

39

Balancing section of the rear balancing weight

39a

drilling

39b

blind hole

40

Circular cylinder section

41

Pump housing

43

Electronics housing

43a

Housing part

43b

Housing cover

44

Plug

45

Electronic equipment

47

Cooling projection

49

Spiral wall of the fixed spiral component

50

Spiral groove

51

Spiral ground

53

carrier

55

Entry opening

56

outlet valve

56a

opening

57

outlet

59

Exhaust channel

61

Bypass channel

61a

Bypass opening

61b

Pressure relief valve

61c

opening

62

Plug

63

Bypass channel

63a

Bypass opening

63b

Pressure relief valve

63c

opening

64

drilling

65

axial outlet opening

66

Plug

67

Gas inlet of the pumping system

69

Spiral wall of the movable spiral component

70

Spiral groove

71

Spiral ground

73

carrier

75

Sealing element

76

End of the spiral wall

77

inlet flange

78

outlet flange

79

Gas ballast valve

81

Gas ballast valve cap

82

Rotary knob

83

central screw

85

Positioning element, positioning pin

87

Printing element

89

Corrugated bellows

91

flange bearing

93

pressure washer

94

shim

95

Fan

97

Positioning pin

99

Wave spring

101

radial puncture as a marking

103

Engine cover

105

Hood

107

Foot

109

Manufacturing arrangement

NT

groove depth

NB1

groove width

NB2

groove width

WD1

Thickness of the spiral wall

WD2

Thickness of the spiral wall

E

level

P

Pump direction

r

radial direction

Claims (16)

Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein at least two bearing points (25, 27) spaced apart from one another along the axis of rotation (15) are provided for rotary mounting of the drive shaft (17), and wherein all bearing points (25, 27) are located on the side of the drive motor (21, 23) facing the eccentric section (19) and/or between a front balancing weight (29) and a rear balancing weight (31) of the drive shaft (17). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), a balancing weight (31) is placed on the front end of the drive shaft (17). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a movable spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the drive motor (21, 23) comprises a radially inner motor rotor (21) and a radially outer motor stator (23), and wherein the motor rotor (21) is provided with a radially inner sleeve element (33) which is connected to the motor rotor (21). connected in a rotationally fixed manner and with which the motor rotor (21) is pushed onto the drive shaft (17), in particular with a clearance fit. Scroll vacuum pump system with several scroll vacuum pumps of different designs, each scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component, and - an electric drive motor (21, 23) for the drive shaft (17), whereby the drive shafts (17) of the different scroll vacuum pumps are identical. Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the drive shaft (17) is provided with a front balancing weight (29) and a rear balancing weight (31), and wherein the front balancing weight (29) and the rear balancing weight (31) differ from each other in terms of the material from which they are made. Scroll vacuum pump system with several scroll vacuum pumps of different designs, each scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the scroll vacuum pumps differ from each other with regard to the pump system (11, 13), wherein the drive shaft (17) is provided with a front balancing weight (29) and a rear balancing weight (31), and wherein the scroll vacuum pumps differ from each other with regard to the front balancing weight (29) and/or the rear balancing weight (31). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the drive shaft (17) is provided with at least one balancing weight (29), wherein the balancing weight (29) comprises several consecutive balancing sections (35) along a longitudinal axis which, when installed, runs parallel to the axis of rotation (15) of the drive shaft (17), each of which has a partial ring shape and with its opening (37) facing the drive shaft ( 17) indicating these include, and wherein the balancing sections (35) differ from one another in terms of the width of their openings (37). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the drive shaft (17) is provided with at least one balancing weight (31) which comprises at least one balancing section (39) which is in a plane perpendicular to a longitudinal axis which is parallel in the installed state runs to the axis of rotation (15) of the drive shaft (17), in particular coincides with the axis of rotation (15), and expands conically radially outwards. Scroll vacuum pump system with several scroll vacuum pumps of different designs, each scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein each scroll vacuum pump comprises a pump housing (41) and an electronics housing (43), the pump system (11, 13), the drive shaft (17) and the drive motor (21, 23) being housed in the pump housing (41) and the electronics housing ( 43) is a component that is separate from the pump housing (41) and is connected to the pump housing, in particular releasably, wherein the electronics housing (43) comprises a housing part (43a) and electronic equipment (45), whereby the scroll vacuum pumps differ from each other in terms of electronic equipment (45), and wherein the housing parts (43a) of the different scroll vacuum pumps are identical. Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the drive motor (21, 23) comprises a radially inner motor rotor (21) and a radially outer motor stator (23), the motor rotor (21) having a front end face and a rear end face, and only one of the two end faces being in axial In the direction of protruding cooling projections (47). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the fixed spiral component (11) comprises a spiral arrangement with spiral walls (49) and spiral base (51) as well as a support (53) for the spiral arrangement, wherein an outlet channel (59) leading from an inlet opening (55) formed in the spiral base (51) to an outlet (57) of the carrier is formed in the carrier (53), and wherein in the carrier (53) in addition to the outlet channel (59), at least two bypass channels (61, 63) are formed, each of which is formed by one in the spiral base (51) formed bypass opening (61a, 63a) lead to an outlet (57, 65) of the carrier (53) and in each of which at least one pressure relief valve (61b, 63b) is arranged. Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the fixed spiral component (11) comprises a spiral arrangement with spiral walls (49) and spiral base (51) as well as a support (53) for the spiral arrangement, wherein an outlet channel (59) leading from an inlet opening (55) formed in the spiral base (51) to an outlet (57) of the carrier (53) is formed in the carrier (53), and wherein in the carrier (53) in addition to the outlet channel (59), at least two bypass channels (61, 63) are formed, each of which runs from a bypass opening (61a, 63a) formed in the spiral base (51) to the outlet channel (59). lead. Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), the fixed spiral component (11) comprising a spiral arrangement with spiral walls (49) and spiral base (51) and a carrier (53) for the spiral arrangement, wherein an outlet channel (59) leading from an inlet opening (55) formed in the spiral base (51) to an outlet (57) of the carrier (53) is formed in the carrier (53), and wherein the outlet (57) of the carrier (53 ) comprises an axial outlet opening (65). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the movable spiral component (13) has a spiral arrangement with spiral walls (69), spiral base (71) delimited by these spiral grooves (70) and the bottom thereof, and a carrier (73) which cooperates with the eccentric section (19) of the drive shaft (17) for the Spiral arrangement includes, wherein the fixed spiral component (11) comprises a spiral arrangement with spiral walls (49), spiral base (51) delimited by these spiral grooves (50) and the bottom thereof, and a support (53) for the spiral arrangement, wherein the spiral grooves (70, 50) have a groove depth (NT) that extends from the tip of the spiral walls (69, 49) to the spiral base (71, 51) along a central axis of the spiral component that runs parallel to the axis of rotation (15) of the drive shaft (17). (13, 11) is measured, and one measured perpendicular to the central axis Have groove width (NB), and wherein in the movable spiral component (13) and/or in the fixed spiral component (11) the ratio of groove depth (NT) to groove width (NB) is in a range from 3.7 to 4.2, in particular from 3.8 to 4, 1, particularly preferably from 3.85 to 4.0 and/or where the ratio of groove depth (NT) to groove width (NB) is greater than 3.8, in particular greater than 3.85, or less than 4.0. Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), the movable spiral component (13) having a spiral arrangement with spiral walls (69), spiral base (71) delimited by these spiral grooves (70) and the bottom thereof, and a spiral base (71) with the The eccentric section (19) of the drive shaft (17) comprises a cooperating carrier (73) for the spiral arrangement, wherein the fixed spiral component (11) comprises a spiral arrangement with spiral walls (49) and spiral base (51) as well as a support (53) for the spiral arrangement, and wherein in the movable spiral component (13) and/or in the fixed spiral component (11), one or more radially outer spiral walls (69, 49) have a thickness (WD) which is greater than the thickness (WD) from radially further inside lying spiral walls (69, 49). Scroll vacuum pump with - a pump system (11, 13), which comprises a fixed spiral component (11) and a spiral component (13) which interacts with this in a pumping effect, - a drive shaft (17) rotating during operation about an axis of rotation (15) with an eccentric section (19) for driving the movable spiral component (13), and - an electric drive motor (21, 23) for the drive shaft (17), wherein the movable spiral component (13) has a spiral arrangement with spiral walls (69), spiral base (51) delimited by these spiral grooves (70) and the bottom thereof, and a carrier (73) which cooperates with the eccentric section (19) of the drive shaft (17) for the Spiral arrangement includes, wherein the fixed spiral component (11) comprises a spiral arrangement with spiral walls (49) and spiral base (51) as well as a support (53) for the spiral arrangement, wherein the spiral walls of the movable spiral component (13) and/or the spiral walls of the fixed spiral component are provided with a sealing element (75) at their end facing away from the spiral base (51), and wherein at least in the case of a spiral wall, the sealing element (75) is guided up to the end of the spiral wall that reaches a gas inlet of the pump system (11, 13).

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