EA201290385A1 - Раствор электролита и способы электролитической полировки - Google Patents

Раствор электролита и способы электролитической полировки

Info

Publication number
EA201290385A1
EA201290385A1 EA201290385A EA201290385A EA201290385A1 EA 201290385 A1 EA201290385 A1 EA 201290385A1 EA 201290385 A EA201290385 A EA 201290385A EA 201290385 A EA201290385 A EA 201290385A EA 201290385 A1 EA201290385 A1 EA 201290385A1
Authority
EA
Eurasian Patent Office
Prior art keywords
bath
electrolyte solution
range
concentration
power source
Prior art date
Application number
EA201290385A
Other languages
English (en)
Other versions
EA021898B1 (ru
Inventor
Джеймс Л. Класкуин
Томас Дж. Кристенсен
Original Assignee
МЕТКОН, ЭлЭлСи
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by МЕТКОН, ЭлЭлСи filed Critical МЕТКОН, ЭлЭлСи
Publication of EA201290385A1 publication Critical patent/EA201290385A1/ru
Publication of EA021898B1 publication Critical patent/EA021898B1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/04—Etching of light metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C25F1/02—Pickling; Descaling
    • C25F1/04—Pickling; Descaling in solution
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/08—Etching of refractory metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C25F3/22—Polishing of heavy metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C25F3/22—Polishing of heavy metals
    • C25F3/26—Polishing of heavy metals of refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • ing And Chemical Polishing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Водный раствор электролита, имеющий концентрацию лимонной кислоты в диапазоне от примерно 1,6 г/л до примерно 982 г/л и эффективную концентрацию гидродифторида аммония (ГФА) и практически не содержащий сильной кислоты. Способы микрополировки поверхности заготовки из цветного металла, включающий в себя подвергание поверхности воздействию ванны с водным раствором электролита, имеющим концентрацию лимонной кислоты в диапазоне от примерно 1,6 г/л до примерно 780 г/л и концентрацию гидродифторида аммония в диапазоне от примерно 2 г/л до примерно 120 г/л и содержащим не более примерно 3,35 г/л сильной кислоты, регулирование температуры ванны так, чтобы она была между точкой замерзания и точкой кипения раствора, подключение заготовки к анодному электроду источника питания постоянного тока и погружение катодного электрода источника питания постоянного тока в ванну, и подачу тока через ванну.
EA201290385A 2009-11-23 2010-11-22 Применение водного раствора электролита для электрохимической обработки поверхности металлической заготовки, являющейся анодом, и соответствующие способы EA021898B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26360609P 2009-11-23 2009-11-23
PCT/US2010/057672 WO2011063353A2 (en) 2009-11-23 2010-11-22 Electrolyte solution and electropolishing methods

Publications (2)

Publication Number Publication Date
EA201290385A1 true EA201290385A1 (ru) 2013-02-28
EA021898B1 EA021898B1 (ru) 2015-09-30

Family

ID=44060399

Family Applications (2)

Application Number Title Priority Date Filing Date
EA201290385A EA021898B1 (ru) 2009-11-23 2010-11-22 Применение водного раствора электролита для электрохимической обработки поверхности металлической заготовки, являющейся анодом, и соответствующие способы
EA201500017A EA201500017A1 (ru) 2009-11-23 2010-11-22 Раствор электролита и способы электролитической полировки

Family Applications After (1)

Application Number Title Priority Date Filing Date
EA201500017A EA201500017A1 (ru) 2009-11-23 2010-11-22 Раствор электролита и способы электролитической полировки

Country Status (17)

Country Link
US (2) US8357287B2 (ru)
EP (1) EP2504469B1 (ru)
JP (2) JP5973351B2 (ru)
KR (1) KR101719606B1 (ru)
CN (2) CN105420805B (ru)
AU (1) AU2010321725B2 (ru)
BR (1) BR112012012250B8 (ru)
CA (1) CA2781613C (ru)
DK (1) DK2504469T3 (ru)
EA (2) EA021898B1 (ru)
ES (1) ES2690200T3 (ru)
MX (1) MX2012005909A (ru)
PL (1) PL2504469T3 (ru)
SI (1) SI2504469T1 (ru)
TR (1) TR201815028T4 (ru)
UA (1) UA109537C2 (ru)
WO (1) WO2011063353A2 (ru)

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Also Published As

Publication number Publication date
UA109537C2 (uk) 2015-09-10
DK2504469T3 (en) 2018-10-08
EP2504469B1 (en) 2018-07-11
PL2504469T3 (pl) 2018-12-31
BR112012012250B8 (pt) 2022-10-18
US8357287B2 (en) 2013-01-22
EA201500017A1 (ru) 2015-07-30
KR20120124395A (ko) 2012-11-13
CN105420805B (zh) 2018-10-23
BR112012012250B1 (pt) 2021-01-26
CN102686786A (zh) 2012-09-19
BR112012012250A2 (pt) 2020-06-23
TR201815028T4 (tr) 2018-11-21
CN105420805A (zh) 2016-03-23
JP2013511624A (ja) 2013-04-04
US20110120883A1 (en) 2011-05-26
JP5973351B2 (ja) 2016-08-23
AU2010321725A1 (en) 2012-06-14
EP2504469A2 (en) 2012-10-03
AU2010321725B2 (en) 2015-11-05
CN102686786B (zh) 2016-01-06
MX2012005909A (es) 2012-11-12
EA021898B1 (ru) 2015-09-30
KR101719606B1 (ko) 2017-03-24
WO2011063353A2 (en) 2011-05-26
ES2690200T3 (es) 2018-11-19
CA2781613C (en) 2017-11-14
US20120267254A1 (en) 2012-10-25
SI2504469T1 (sl) 2018-11-30
JP2016074986A (ja) 2016-05-12
EP2504469A4 (en) 2016-06-29
CA2781613A1 (en) 2011-05-26
WO2011063353A3 (en) 2011-11-24

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