DE69931334D1 - Flexibler Dünnfilmkondensator und Herstellungsverfahren - Google Patents

Flexibler Dünnfilmkondensator und Herstellungsverfahren

Info

Publication number
DE69931334D1
DE69931334D1 DE69931334T DE69931334T DE69931334D1 DE 69931334 D1 DE69931334 D1 DE 69931334D1 DE 69931334 T DE69931334 T DE 69931334T DE 69931334 T DE69931334 T DE 69931334T DE 69931334 D1 DE69931334 D1 DE 69931334D1
Authority
DE
Germany
Prior art keywords
manufacturing process
film capacitor
flexible thin
flexible
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69931334T
Other languages
English (en)
Other versions
DE69931334T2 (de
Inventor
Naoki Kohara
Masatoshi Kitagawa
Taisuke Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69931334D1 publication Critical patent/DE69931334D1/de
Application granted granted Critical
Publication of DE69931334T2 publication Critical patent/DE69931334T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0175—Inorganic, non-metallic layer, e.g. resist or dielectric for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0179—Thin film deposited insulating layer, e.g. inorganic layer for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09763—Printed component having superposed conductors, but integrated in one circuit layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Adhesives Or Adhesive Processes (AREA)
DE69931334T 1998-12-22 1999-12-21 Flexibler Dünnfilmkondensator und Herstellungsverfahren Expired - Lifetime DE69931334T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP36388198 1998-12-22
JP36388198 1998-12-22
JP10933199 1999-04-16
JP10933199 1999-04-16

Publications (2)

Publication Number Publication Date
DE69931334D1 true DE69931334D1 (de) 2006-06-22
DE69931334T2 DE69931334T2 (de) 2007-02-01

Family

ID=26449104

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69931334T Expired - Lifetime DE69931334T2 (de) 1998-12-22 1999-12-21 Flexibler Dünnfilmkondensator und Herstellungsverfahren

Country Status (4)

Country Link
US (2) US6212057B1 (de)
EP (1) EP1014399B1 (de)
KR (1) KR100355534B1 (de)
DE (1) DE69931334T2 (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1048042A1 (de) * 1998-09-02 2000-11-02 Koninklijke Philips Electronics N.V. Dünnfilmkondensator
DE19939483A1 (de) * 1999-08-20 2001-03-08 Philips Corp Intellectual Pty Passives Bauelement mit Verbundwerkstoff
US7893435B2 (en) * 2000-04-18 2011-02-22 E Ink Corporation Flexible electronic circuits and displays including a backplane comprising a patterned metal foil having a plurality of apertures extending therethrough
TW543052B (en) * 2001-03-05 2003-07-21 Nitto Denko Corp Manufacturing method of ceramic green sheet, manufacturing method of multilayer ceramic electronic components, and carrier sheet for ceramic green sheets
UA77459C2 (en) * 2001-11-03 2006-12-15 Thin-film capacitor and a method for producing the capacitor
JP2003332169A (ja) * 2002-05-15 2003-11-21 Matsushita Electric Ind Co Ltd 積層コンデンサ及びその製造方法
US6743524B2 (en) * 2002-05-23 2004-06-01 General Electric Company Barrier layer for an article and method of making said barrier layer by expanding thermal plasma
JP3995619B2 (ja) * 2003-03-12 2007-10-24 富士通株式会社 薄膜キャパシタ素子、その製造方法及び電子装置
EP1629531A2 (de) * 2003-04-02 2006-03-01 Koninklijke Philips Electronics N.V. Verfahren zur herstellung einer flexiblen elektronischen einrichtung und flexible einrichtung
US20050046312A1 (en) * 2003-09-01 2005-03-03 Fuji Photo Film Co., Ltd. Laminated structure, piezoelectric actuator and method of manufacturing the same
US7100277B2 (en) * 2004-07-01 2006-09-05 E. I. Du Pont De Nemours And Company Methods of forming printed circuit boards having embedded thick film capacitors
US7265063B2 (en) * 2004-10-22 2007-09-04 Hewlett-Packard Development Company, L.P. Method of forming a component having dielectric sub-layers
CN1841587A (zh) * 2005-04-02 2006-10-04 鸿富锦精密工业（深圳）有限公司 电极结构及其制备方法
JP3841814B1 (ja) * 2005-04-28 2006-11-08 三井金属鉱業株式会社 キャパシタ層形成材及びそのキャパシタ層形成材の製造方法
JP2009501450A (ja) * 2005-07-12 2009-01-15 ノースロップ グルマン コーポレーション 小型薄膜および高エネルギー密度結晶コンデンサ
JP4857642B2 (ja) * 2005-07-29 2012-01-18 Ｔｄｋ株式会社 薄膜電子部品の製造方法
US7646305B2 (en) * 2005-10-25 2010-01-12 Checkpoint Systems, Inc. Capacitor strap
US8414962B2 (en) 2005-10-28 2013-04-09 The Penn State Research Foundation Microcontact printed thin film capacitors
US20070231475A1 (en) * 2006-03-31 2007-10-04 Tadanori Shimoto Conductor structure on dielectric material
WO2008074165A1 (en) * 2006-12-21 2008-06-26 Abb Research Ltd Rolled film capacitor
US8293323B2 (en) * 2007-02-23 2012-10-23 The Penn State Research Foundation Thin metal film conductors and their manufacture
US8047073B2 (en) * 2007-05-14 2011-11-01 Samsung Sdi Co., Ltd. Capacitive liquid level detector for direct methanol fuel cell systems
KR100898974B1 (ko) * 2007-06-18 2009-05-25 삼성전기주식회사 박막 커패시터, 적층구조물 및 그 제조방법
TW201026347A (en) * 2008-09-10 2010-07-16 Transcu Ltd Apparatus and method to dispense HPC-based viscous liquids into porous substrates, e. g., continuous web-based process
US8407871B2 (en) * 2009-07-06 2013-04-02 Delphi Technologies, Inc. Method of manufacturing a shapeable short-resistant capacitor
US10283443B2 (en) * 2009-11-10 2019-05-07 Taiwan Semiconductor Manufacturing Co., Ltd. Chip package having integrated capacitor
US8354166B2 (en) 2011-02-28 2013-01-15 General Electric Company Coated polymer dielectric film
WO2013013050A1 (en) * 2011-07-20 2013-01-24 James Madison University Adhesion of metal thin films to polymeric substrates
CN104094678A (zh) * 2012-02-03 2014-10-08 英派尔科技开发有限公司 可印制电子基板
JP5539430B2 (ja) * 2012-03-22 2014-07-02 富士フイルム株式会社 電子機器の製造方法
US20150294793A1 (en) 2012-11-21 2015-10-15 3M Innovative Properties Company Multilayer film including first and second dielectric layers
WO2014081918A2 (en) 2012-11-21 2014-05-30 3M Innovative Properties Company Multilayer film including first and second dielectric layers
JP6191690B2 (ja) * 2013-06-17 2017-09-06 株式会社村田製作所 コンデンサ及び電子機器
KR200476896Y1 (ko) * 2013-08-22 2015-04-10 제이 터치 코퍼레이션 터치패널용 전극구조
US9280225B2 (en) 2013-09-30 2016-03-08 J Touch Corporation Electrode structure for touchscreen
KR102248388B1 (ko) * 2014-09-01 2021-05-07 (주)포인트엔지니어링 커패시터
CN106158364A (zh) * 2015-04-22 2016-11-23 陈锦棠 化学沉积法生产超级储能器的技术
CN105006362B (zh) * 2015-07-28 2018-06-19 桂林电子科技大学 一种可剥离衬底的薄膜电容器制备方法
CN108231825B (zh) * 2016-12-13 2020-10-09 华为技术有限公司 一种显示屏及移动终端
CN210925765U (zh) * 2016-12-21 2020-07-03 3M创新有限公司 柔性电容器构造
US10508364B2 (en) * 2017-03-24 2019-12-17 Zhuhai Crystal Resonance Technologies Co., Ltd. RF resonator membranes and methods of construction
US10601397B2 (en) 2017-03-24 2020-03-24 Zhuhai Crystal Resonance Technologies Co., Ltd. RF resonator electrode and membrane combinations and method of fabrication
JP6892992B2 (ja) * 2017-07-31 2021-06-23 株式会社村田製作所 薄膜コンデンサ及びその製造方法
CN110660584B (zh) * 2018-06-29 2023-06-27 浙江清华柔性电子技术研究院 柔性储能薄膜的制备方法
CN112897521A (zh) * 2021-01-15 2021-06-04 王立勇 一种石墨薄膜复合材料的制备方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4159222A (en) * 1977-01-11 1979-06-26 Pactel Corporation Method of manufacturing high density fine line printed circuitry
US4153518A (en) * 1977-11-18 1979-05-08 Tektronix, Inc. Method of making a metalized substrate having a thin film barrier layer
US4251326A (en) * 1978-12-28 1981-02-17 Western Electric Company, Inc. Fabricating an RC network utilizing alpha tantalum
US4374159A (en) * 1981-07-27 1983-02-15 Bell Telephone Laboratories, Incorporated Fabrication of film circuits having a thick film crossunder and a thin film capacitor
US4471405A (en) * 1981-12-28 1984-09-11 International Business Machines Corporation Thin film capacitor with a dual bottom electrode structure
JPS62194606A (ja) 1986-02-20 1987-08-27 ユニチカ株式会社 薄膜誘電体材料
JPS6386412A (ja) 1986-09-29 1988-04-16 ユニチカ株式会社 コンデンサ用薄膜誘電体材料の製造方法
JPS6386413A (ja) 1986-09-29 1988-04-16 ユニチカ株式会社 コンデンサ用薄膜誘電体材料の製造方法
JPS6398115A (ja) 1986-10-14 1988-04-28 ユニチカ株式会社 コンデンサ用薄膜誘電体材料の製造方法
JPH02324A (ja) * 1987-12-18 1990-01-05 Mitsui Mining & Smelting Co Ltd 導電膜回路およびその製造方法
JPH01175714A (ja) 1987-12-29 1989-07-12 Matsushita Electric Ind Co Ltd 薄膜誘電体コンデンサ
JPH01175217A (ja) 1987-12-29 1989-07-11 Onoda Cement Co Ltd コンデンサ用誘電体薄膜積層体
JPH0294507A (ja) 1988-09-30 1990-04-05 Toshiba Corp 強誘電体薄膜及びその製造方法
JPH04302117A (ja) 1991-03-29 1992-10-26 Sumitomo Chem Co Ltd 薄膜コンデンサおよびその製造方法
JPH0855967A (ja) * 1994-07-29 1996-02-27 Texas Instr Inc <Ti> 強誘電体薄膜キャパシタの製造方法
JPH0878283A (ja) 1994-09-06 1996-03-22 Toshiba Corp 薄膜キャパシタ
US5576925A (en) * 1994-12-27 1996-11-19 General Electric Company Flexible multilayer thin film capacitors
US5789323A (en) * 1995-04-25 1998-08-04 Ramtron International Corporation Fabrication of metal-ferroelectric-metal capacitors with a two step patterning sequence
JPH0917691A (ja) 1995-06-27 1997-01-17 Hitachi Aic Inc フレキシブルフィルムコンデンサ
JPH0935992A (ja) 1995-07-18 1997-02-07 Hitachi Aic Inc フレキシブルフィルムコンデンサ
KR100413649B1 (ko) * 1996-01-26 2004-04-28 마츠시타 덴끼 산교 가부시키가이샤 반도체장치의제조방법
JPH09246082A (ja) 1996-03-13 1997-09-19 Matsushita Electron Corp 容量素子およびその製造方法
JPH104030A (ja) 1996-06-18 1998-01-06 Hitachi Ltd 薄型積層コンデンサ
US6005197A (en) * 1997-08-25 1999-12-21 Lucent Technologies Inc. Embedded thin film passive components

Also Published As

Publication number Publication date
KR20000048333A (ko) 2000-07-25
US6212057B1 (en) 2001-04-03
EP1014399B1 (de) 2006-05-17
DE69931334T2 (de) 2007-02-01
KR100355534B1 (ko) 2002-10-12
EP1014399A2 (de) 2000-06-28
US6974547B1 (en) 2005-12-13
EP1014399A3 (de) 2003-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8328 Change in the person/name/address of the agent

Representative=s name: KUDLEK & GRUNERT PATENTANWAELTE PARTNERSCHAFT, 803