DE69637582D1 - Dünnschichtkondensator, ESD-geschützte Dünnschichtkondensatorstruktur und entsprechende Herstellungsverfahren - Google Patents

Dünnschichtkondensator, ESD-geschützte Dünnschichtkondensatorstruktur und entsprechende Herstellungsverfahren

Info

Publication number
DE69637582D1
DE69637582D1 DE69637582T DE69637582T DE69637582D1 DE 69637582 D1 DE69637582 D1 DE 69637582D1 DE 69637582 T DE69637582 T DE 69637582T DE 69637582 T DE69637582 T DE 69637582T DE 69637582 D1 DE69637582 D1 DE 69637582D1
Authority
DE
Germany
Prior art keywords
film capacitor
thin
esd
corresponding manufacturing
protected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69637582T
Other languages
English (en)
Inventor
Jeffrey C Kalb
Bhasker B Rao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Micro Devices Corp
Original Assignee
California Micro Devices Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Micro Devices Corp filed Critical California Micro Devices Corp
Application granted granted Critical
Publication of DE69637582D1 publication Critical patent/DE69637582D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/94—Metal-insulator-semiconductors, e.g. MOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE69637582T 1995-11-28 1996-11-01 Dünnschichtkondensator, ESD-geschützte Dünnschichtkondensatorstruktur und entsprechende Herstellungsverfahren Expired - Lifetime DE69637582D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/564,878 US5706163A (en) 1995-11-28 1995-11-28 ESD-protected thin film capacitor structures
PCT/US1996/017406 WO1997020338A1 (en) 1995-11-28 1996-11-01 Esd-protected thin film capacitor structures

Publications (1)

Publication Number Publication Date
DE69637582D1 true DE69637582D1 (de) 2008-08-14

Family

ID=24256265

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69637582T Expired - Lifetime DE69637582D1 (de) 1995-11-28 1996-11-01 Dünnschichtkondensator, ESD-geschützte Dünnschichtkondensatorstruktur und entsprechende Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5706163A (de)
EP (1) EP0870321B1 (de)
DE (1) DE69637582D1 (de)
WO (1) WO1997020338A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6597227B1 (en) * 2000-01-21 2003-07-22 Atheros Communications, Inc. System for providing electrostatic discharge protection for high-speed integrated circuits
US7151036B1 (en) * 2002-07-29 2006-12-19 Vishay-Siliconix Precision high-frequency capacitor formed on semiconductor substrate
US6538300B1 (en) * 2000-09-14 2003-03-25 Vishay Intertechnology, Inc. Precision high-frequency capacitor formed on semiconductor substrate
US6633063B2 (en) 2001-05-04 2003-10-14 Semiconductor Components Industries Llc Low voltage transient voltage suppressor and method of making
US6953980B2 (en) * 2002-06-11 2005-10-11 Semiconductor Components Industries, Llc Semiconductor filter circuit and method
FR2841058A1 (fr) * 2002-06-14 2003-12-19 St Microelectronics Sa Dispositif electrique comprenant deux supports et une borne de connexion reliee a un condensateur serie et a un limiteur de tension
CA2564021C (en) 2005-10-14 2010-12-07 Research In Motion Limited Mobile device with a smart battery
JP2009512035A (ja) 2005-10-14 2009-03-19 リサーチ イン モーション リミテッド モバイルデバイスのためのバッテリーパックの認証
CA2564029C (en) 2005-10-14 2013-07-09 Research In Motion Limited Interface and communication protocol for a mobile device with a smart battery
US7420793B2 (en) * 2006-01-12 2008-09-02 Taiwan Semiconductor Manufacturing Co., Ltd. Circuit system for protecting thin dielectric devices from ESD induced damages
US7666751B2 (en) * 2007-09-21 2010-02-23 Semiconductor Components Industries, Llc Method of forming a high capacitance diode and structure therefor
US7579632B2 (en) * 2007-09-21 2009-08-25 Semiconductor Components Industries, L.L.C. Multi-channel ESD device and method therefor
US7538395B2 (en) * 2007-09-21 2009-05-26 Semiconductor Components Industries, L.L.C. Method of forming low capacitance ESD device and structure therefor
US7842969B2 (en) * 2008-07-10 2010-11-30 Semiconductor Components Industries, Llc Low clamp voltage ESD device and method therefor
US7955941B2 (en) * 2008-09-11 2011-06-07 Semiconductor Components Industries, Llc Method of forming an integrated semiconductor device and structure therefor
US7812367B2 (en) * 2008-10-15 2010-10-12 Semiconductor Components Industries, Llc Two terminal low capacitance multi-channel ESD device
US8089095B2 (en) 2008-10-15 2012-01-03 Semiconductor Components Industries, Llc Two terminal multi-channel ESD device and method therefor
WO2015151786A1 (ja) * 2014-04-03 2015-10-08 株式会社村田製作所 可変容量デバイスおよびその製造方法
US20220209750A1 (en) * 2020-12-29 2022-06-30 Texas Instruments Incorporated Quality factor of a parasitic capacitance

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775838A (en) * 1972-04-24 1973-12-04 Olivetti & Co Spa Integrated circuit package and construction technique
JPS5685848A (en) * 1979-12-15 1981-07-13 Toshiba Corp Manufacture of bipolar integrated circuit
JPS62154661A (ja) * 1985-12-26 1987-07-09 Toshiba Corp 半導体装置
US4758873A (en) * 1986-05-16 1988-07-19 National Semiconductor Corporation Balanced MOS capacitor with low stray capacitance and high ESD survival
US4736271A (en) * 1987-06-23 1988-04-05 Signetics Corporation Protection device utilizing one or more subsurface diodes and associated method of manufacture
US4937660A (en) * 1988-12-21 1990-06-26 At&T Bell Laboratories Silicon-based mounting structure for semiconductor optical devices
JP2786652B2 (ja) * 1989-02-28 1998-08-13 株式会社東芝 半導体装置
JPH02280621A (ja) * 1989-03-16 1990-11-16 Siemens Ag トランジスタ回路
JP2740038B2 (ja) * 1990-06-18 1998-04-15 株式会社東芝 Ｍｏｓ（ｍｉｓ）型コンデンサー
US5246872A (en) * 1991-01-30 1993-09-21 National Semiconductor Corporation Electrostatic discharge protection device and a method for simultaneously forming MOS devices with both lightly doped and non lightly doped source and drain regions
US5264723A (en) * 1992-04-09 1993-11-23 At&T Bell Laboratories Integrated circuit with MOS capacitor for improved ESD protection
US5514612A (en) * 1993-03-03 1996-05-07 California Micro Devices, Inc. Method of making a semiconductor device with integrated RC network and schottky diode
US5355014A (en) * 1993-03-03 1994-10-11 Bhasker Rao Semiconductor device with integrated RC network and Schottky diode
US5370766A (en) * 1993-08-16 1994-12-06 California Micro Devices Methods for fabrication of thin film inductors, inductor networks and integration with other passive and active devices
KR970009101B1 (ko) * 1993-08-18 1997-06-05 엘지반도체 주식회사 정전기(esd) 보호회로의 제조 방법

Also Published As

Publication number Publication date
US5706163A (en) 1998-01-06
EP0870321B1 (de) 2008-07-02
EP0870321A1 (de) 1998-10-14
WO1997020338A1 (en) 1997-06-05
EP0870321A4 (de) 2000-10-11
US6121669A (en) 2000-09-19

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