DE69619197T2 - Poliersuspension - Google Patents
PoliersuspensionInfo
- Publication number
- DE69619197T2 DE69619197T2 DE69619197T DE69619197T DE69619197T2 DE 69619197 T2 DE69619197 T2 DE 69619197T2 DE 69619197 T DE69619197 T DE 69619197T DE 69619197 T DE69619197 T DE 69619197T DE 69619197 T2 DE69619197 T2 DE 69619197T2
- Authority
- DE
- Germany
- Prior art keywords
- polishing suspension
- polishing
- suspension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title 1
- 239000000725 suspension Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31705495 | 1995-11-13 | ||
JP11057596A JP3514908B2 (ja) | 1995-11-13 | 1996-04-08 | 研磨剤 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69619197D1 DE69619197D1 (de) | 2002-03-21 |
DE69619197T2 true DE69619197T2 (de) | 2002-09-26 |
Family
ID=26450180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69619197T Expired - Lifetime DE69619197T2 (de) | 1995-11-13 | 1996-11-13 | Poliersuspension |
Country Status (7)
Country | Link |
---|---|
US (1) | US5861054A (de) |
EP (1) | EP0773269B1 (de) |
JP (1) | JP3514908B2 (de) |
KR (1) | KR100259936B1 (de) |
CN (1) | CN1072699C (de) |
DE (1) | DE69619197T2 (de) |
TW (1) | TW438871B (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0786504A3 (de) * | 1996-01-29 | 1998-05-20 | Fujimi Incorporated | Politurzusammensetzung |
US5827781A (en) * | 1996-07-17 | 1998-10-27 | Micron Technology, Inc. | Planarization slurry including a dispersant and method of using same |
US5916819A (en) | 1996-07-17 | 1999-06-29 | Micron Technology, Inc. | Planarization fluid composition chelating agents and planarization method using same |
US6152976A (en) * | 1996-08-30 | 2000-11-28 | Showa Denko Kabushiki Kaisha | Abrasive composition for disc substrate, and process for polishing disc substrate |
US20090075083A1 (en) * | 1997-07-21 | 2009-03-19 | Nanogram Corporation | Nanoparticle production and corresponding structures |
US20090255189A1 (en) * | 1998-08-19 | 2009-10-15 | Nanogram Corporation | Aluminum oxide particles |
US20060147369A1 (en) * | 1997-07-21 | 2006-07-06 | Neophotonics Corporation | Nanoparticle production and corresponding structures |
US6114248A (en) * | 1998-01-15 | 2000-09-05 | International Business Machines Corporation | Process to reduce localized polish stop erosion |
TW510917B (en) | 1998-02-24 | 2002-11-21 | Showa Denko Kk | Abrasive composition for polishing semiconductor device and method for manufacturing semiconductor device using same |
US6468909B1 (en) | 1998-09-03 | 2002-10-22 | Micron Technology, Inc. | Isolation and/or removal of ionic contaminants from planarization fluid compositions using macrocyclic polyethers and methods of using such compositions |
EP1566421B1 (de) * | 1998-12-25 | 2014-12-10 | Hitachi Chemical Company, Ltd. | CMP Poliermittel, flüssiger Zusatz für CMP Poliermittel und Verfahren zum Polieren eines Substrates |
US6375693B1 (en) | 1999-05-07 | 2002-04-23 | International Business Machines Corporation | Chemical-mechanical planarization of barriers or liners for copper metallurgy |
US6478837B1 (en) * | 1999-06-28 | 2002-11-12 | Showa Denko K.K. | Abrasive composition substrate for magnetic recording disks and process for producing substrates for magnetic recording disk |
TWI227726B (en) | 1999-07-08 | 2005-02-11 | Eternal Chemical Co Ltd | Chemical-mechanical abrasive composition and method |
US6221119B1 (en) * | 1999-07-14 | 2001-04-24 | Komag, Inc. | Slurry composition for polishing a glass ceramic substrate |
TWI265567B (en) | 1999-08-26 | 2006-11-01 | Hitachi Chemical Co Ltd | Polishing medium for chemical-mechanical polishing, and polishing method |
WO2001032799A1 (en) * | 1999-11-04 | 2001-05-10 | Nanogram Corporation | Particle dispersions |
US6527817B1 (en) | 1999-11-15 | 2003-03-04 | Cabot Microelectronics Corporation | Composition and method for planarizing surfaces |
US6293848B1 (en) * | 1999-11-15 | 2001-09-25 | Cabot Microelectronics Corporation | Composition and method for planarizing surfaces |
US6461958B1 (en) | 2000-02-04 | 2002-10-08 | Seagate Technology Llc | Polishing memory disk substrates with reclaim slurry |
DE10048477B4 (de) | 2000-09-29 | 2008-07-03 | Qimonda Ag | Verfahren zum chemisch-mechanischen Polieren von Schichten aus Metallen der Platingruppe |
JP2003068751A (ja) * | 2001-08-27 | 2003-03-07 | Nec Yamagata Ltd | 半導体装置及びその製造方法 |
KR100499403B1 (ko) * | 2002-03-06 | 2005-07-07 | 주식회사 하이닉스반도체 | 슬러리 제조 방법 |
KR100474537B1 (ko) * | 2002-07-16 | 2005-03-10 | 주식회사 하이닉스반도체 | 산화막용 cmp 슬러리 조성물 및 이를 이용한 반도체소자의 제조 방법 |
TWI256971B (en) * | 2002-08-09 | 2006-06-21 | Hitachi Chemical Co Ltd | CMP abrasive and method for polishing substrate |
US20040216388A1 (en) * | 2003-03-17 | 2004-11-04 | Sharad Mathur | Slurry compositions for use in a chemical-mechanical planarization process |
JP4698144B2 (ja) * | 2003-07-31 | 2011-06-08 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
JP4954462B2 (ja) * | 2004-10-19 | 2012-06-13 | 株式会社フジミインコーポレーテッド | 窒化シリコン膜選択的研磨用組成物およびそれを用いる研磨方法 |
KR100697293B1 (ko) * | 2005-10-04 | 2007-03-20 | 삼성전자주식회사 | 화학기계적 연마용 연마제 및 이를 이용한 화학기계적연마방법 |
JP2007160496A (ja) * | 2005-11-15 | 2007-06-28 | Shinshu Univ | ワーク研磨装置およびワーク研磨方法 |
JP2007234784A (ja) * | 2006-02-28 | 2007-09-13 | Fujimi Inc | 研磨用組成物 |
JP2008117807A (ja) * | 2006-10-31 | 2008-05-22 | Fujimi Inc | 研磨用組成物及び研磨方法 |
JP2008130988A (ja) * | 2006-11-24 | 2008-06-05 | Fujimi Inc | 研磨用組成物及び研磨方法 |
JP6196589B2 (ja) * | 2014-07-25 | 2017-09-13 | 東芝メモリ株式会社 | 半導体装置の製造方法および半導体製造装置 |
JP6669331B2 (ja) * | 2015-05-19 | 2020-03-18 | 昭和電工株式会社 | 研磨組成物、及びその研磨組成物を用いた研磨方法 |
CN106048323A (zh) * | 2016-07-13 | 2016-10-26 | 安徽祈艾特电子科技股份有限公司 | 一种汽车电子封装用纳米氮化硅增强铝镁合金材料及其制备方法 |
WO2018119101A1 (en) | 2016-12-22 | 2018-06-28 | Illumina, Inc. | Flow cell package and method for making the same |
CN108682650B (zh) * | 2018-04-02 | 2019-06-14 | 长江存储科技有限责任公司 | 表面平坦化方法及半导体多层互连结构 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61271376A (ja) * | 1985-05-27 | 1986-12-01 | Toshiba Corp | ラツピング用スラリ− |
US4690693A (en) * | 1985-12-05 | 1987-09-01 | Gte Products Corporation | High purity silicon nitride polishing compound |
US4735679A (en) * | 1987-03-30 | 1988-04-05 | International Business Machines Corporation | Method of improving silicon-on-insulator uniformity |
JPH01187930A (ja) * | 1988-01-22 | 1989-07-27 | Nippon Telegr & Teleph Corp <Ntt> | 研磨剤及び研磨方法 |
JPH02109332A (ja) * | 1988-10-19 | 1990-04-23 | Canon Inc | 半導体基板の製造方法 |
US5084071A (en) * | 1989-03-07 | 1992-01-28 | International Business Machines Corporation | Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
US4954142A (en) * | 1989-03-07 | 1990-09-04 | International Business Machines Corporation | Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
US5032202A (en) * | 1989-10-03 | 1991-07-16 | Martin Marietta Energy Systems, Inc. | Plasma generating apparatus for large area plasma processing |
JP2689706B2 (ja) * | 1990-08-08 | 1997-12-10 | 上村工業株式会社 | 研磨方法 |
US5482695A (en) * | 1991-07-03 | 1996-01-09 | Anatoly Mikhailovich Staver | Carbon composition production process |
US5376222A (en) * | 1991-09-04 | 1994-12-27 | Fujitsu Limited | Polishing method for polycrystalline silicon |
US5225034A (en) * | 1992-06-04 | 1993-07-06 | Micron Technology, Inc. | Method of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processing |
US5213591A (en) * | 1992-07-28 | 1993-05-25 | Ahmet Celikkaya | Abrasive grain, method of making same and abrasive products |
US5607718A (en) * | 1993-03-26 | 1997-03-04 | Kabushiki Kaisha Toshiba | Polishing method and polishing apparatus |
US5603739A (en) * | 1995-06-09 | 1997-02-18 | Diamond Scientific, Inc. | Abrasive suspension system |
-
1996
- 1996-04-08 JP JP11057596A patent/JP3514908B2/ja not_active Expired - Fee Related
- 1996-10-02 TW TW085112029A patent/TW438871B/zh not_active IP Right Cessation
- 1996-11-12 US US08/747,382 patent/US5861054A/en not_active Expired - Lifetime
- 1996-11-13 CN CN96121008A patent/CN1072699C/zh not_active Expired - Fee Related
- 1996-11-13 EP EP96118201A patent/EP0773269B1/de not_active Expired - Lifetime
- 1996-11-13 KR KR1019960053381A patent/KR100259936B1/ko not_active IP Right Cessation
- 1996-11-13 DE DE69619197T patent/DE69619197T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1161998A (zh) | 1997-10-15 |
DE69619197D1 (de) | 2002-03-21 |
CN1072699C (zh) | 2001-10-10 |
EP0773269A3 (de) | 1997-10-08 |
EP0773269A2 (de) | 1997-05-14 |
KR100259936B1 (ko) | 2000-06-15 |
US5861054A (en) | 1999-01-19 |
JPH09194823A (ja) | 1997-07-29 |
JP3514908B2 (ja) | 2004-04-05 |
TW438871B (en) | 2001-06-07 |
KR970030440A (ko) | 1997-06-26 |
EP0773269B1 (de) | 2002-02-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |