DE69517140D1 - Halbleiterbauelement mit Bipolartransistor mit isolierter Gateelektrode und dessen Herstellungsverfahren - Google Patents
Halbleiterbauelement mit Bipolartransistor mit isolierter Gateelektrode und dessen HerstellungsverfahrenInfo
- Publication number
- DE69517140D1 DE69517140D1 DE69517140T DE69517140T DE69517140D1 DE 69517140 D1 DE69517140 D1 DE 69517140D1 DE 69517140 T DE69517140 T DE 69517140T DE 69517140 T DE69517140 T DE 69517140T DE 69517140 D1 DE69517140 D1 DE 69517140D1
- Authority
- DE
- Germany
- Prior art keywords
- gate electrode
- production process
- bipolar transistor
- insulated gate
- semiconductor component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7394—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET on an insulating layer or substrate, e.g. thin film device or device isolated from the bulk substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0623—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
- Bipolar Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31878594 | 1994-12-21 | ||
JP7121842A JPH08227999A (ja) | 1994-12-21 | 1995-05-19 | 絶縁ゲート型バイポーラトランジスタ及びその製造方法並びに半導体集積回路及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69517140D1 true DE69517140D1 (de) | 2000-06-29 |
DE69517140T2 DE69517140T2 (de) | 2001-02-01 |
Family
ID=26459110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69517140T Expired - Fee Related DE69517140T2 (de) | 1994-12-21 | 1995-12-06 | Halbleiterbauelement mit Bipolartransistor mit isolierter Gateelektrode und dessen Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5654561A (de) |
EP (1) | EP0718892B1 (de) |
JP (1) | JPH08227999A (de) |
DE (1) | DE69517140T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0817274B1 (de) * | 1996-07-05 | 2004-02-11 | STMicroelectronics S.r.l. | Asymmetrische MOS-Technologie-Leistungsanordnung |
US6271061B1 (en) | 1997-12-03 | 2001-08-07 | Stmicroelectronics S.R.L. | Fabrication of insulated gate bipolar devices |
WO2000035021A1 (de) * | 1998-12-04 | 2000-06-15 | Infineon Technologies Ag | Leistungshalbleiterschalter |
US6023090A (en) * | 1998-12-07 | 2000-02-08 | Philips Electronics North America, Corporation | Lateral thin-film Silicon-On-Insulator (SOI) device having multiple zones in the drift region |
SE9901575L (sv) * | 1999-05-03 | 2000-11-04 | Eklund Klas Haakan | Halvledarelement |
JP2001085463A (ja) * | 1999-09-09 | 2001-03-30 | Rohm Co Ltd | 半導体チップおよびそれを用いた半導体装置 |
US6191453B1 (en) * | 1999-12-13 | 2001-02-20 | Philips Electronics North America Corporation | Lateral insulated-gate bipolar transistor (LIGBT) device in silicon-on-insulator (SOI) technology |
JP3647802B2 (ja) | 2001-01-25 | 2005-05-18 | 株式会社東芝 | 横型半導体装置 |
JP3783156B2 (ja) * | 2001-10-17 | 2006-06-07 | 株式会社日立製作所 | 半導体装置 |
JP5135666B2 (ja) * | 2005-04-14 | 2013-02-06 | 株式会社日立製作所 | 電力変換装置 |
JP2007194575A (ja) * | 2005-12-21 | 2007-08-02 | Mitsubishi Electric Corp | 半導体装置 |
CN1988156B (zh) * | 2005-12-21 | 2010-05-19 | 三菱电机株式会社 | 半导体装置 |
JP2007207862A (ja) * | 2006-01-31 | 2007-08-16 | Mitsubishi Electric Corp | 半導体装置 |
JP2006287250A (ja) * | 2006-05-29 | 2006-10-19 | Rohm Co Ltd | 二重拡散型mosfetおよびこれを用いた半導体装置 |
JP5036234B2 (ja) * | 2006-07-07 | 2012-09-26 | 三菱電機株式会社 | 半導体装置 |
US7531888B2 (en) * | 2006-11-30 | 2009-05-12 | Fairchild Semiconductor Corporation | Integrated latch-up free insulated gate bipolar transistor |
JP2008147318A (ja) * | 2006-12-08 | 2008-06-26 | Matsushita Electric Ind Co Ltd | 高耐圧半導体装置及びその製造方法 |
KR100847306B1 (ko) * | 2007-02-14 | 2008-07-21 | 삼성전자주식회사 | 반도체 장치 및 이의 제조 방법 |
JP2010092978A (ja) * | 2008-10-06 | 2010-04-22 | Nec Electronics Corp | 絶縁ゲートバイポーラトランジスタ |
JP5407398B2 (ja) * | 2009-02-12 | 2014-02-05 | 富士電機株式会社 | 半導体装置 |
JP5124533B2 (ja) * | 2009-06-30 | 2013-01-23 | 株式会社日立製作所 | 半導体装置、それを用いたプラズマディスプレイ駆動用半導体集積回路装置、及びプラズマディスプレイ装置 |
CN103650147B (zh) * | 2011-07-05 | 2016-07-06 | 三菱电机株式会社 | 半导体装置 |
JP6001309B2 (ja) * | 2012-04-17 | 2016-10-05 | エスアイアイ・セミコンダクタ株式会社 | 半導体装置 |
CN104882476B (zh) * | 2015-05-25 | 2018-09-25 | 上海先进半导体制造股份有限公司 | 横向igbt及其制作方法 |
CN108321195B (zh) * | 2018-02-05 | 2020-05-22 | 电子科技大学 | 一种具有阳极夹断槽的短路阳极soi ligbt |
CN110034176B (zh) * | 2019-04-22 | 2022-02-11 | 东南大学 | 解决反向恢复失效的逆导型横向绝缘栅双极型晶体管 |
CN112768517B (zh) * | 2019-11-04 | 2022-06-21 | 东南大学 | 绝缘栅双极型晶体管 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4618872A (en) * | 1983-12-05 | 1986-10-21 | General Electric Company | Integrated power switching semiconductor devices including IGT and MOSFET structures |
US4672407A (en) * | 1984-05-30 | 1987-06-09 | Kabushiki Kaisha Toshiba | Conductivity modulated MOSFET |
US4963951A (en) * | 1985-11-29 | 1990-10-16 | General Electric Company | Lateral insulated gate bipolar transistors with improved latch-up immunity |
US5512774A (en) * | 1988-02-08 | 1996-04-30 | Kabushiki Kaisha Toshiba | Dielectrically isolated substrate and semiconductor device using the same |
JPH04320377A (ja) * | 1991-04-19 | 1992-11-11 | Fuji Electric Co Ltd | 絶縁ゲート型バイポーラトランジスタ |
JP2918399B2 (ja) * | 1992-08-05 | 1999-07-12 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JPH06112494A (ja) * | 1992-09-29 | 1994-04-22 | Fuji Electric Co Ltd | 絶縁ゲート型バイポーラトランジスタ |
JP3203814B2 (ja) * | 1992-10-19 | 2001-08-27 | 富士電機株式会社 | 半導体装置 |
-
1995
- 1995-05-19 JP JP7121842A patent/JPH08227999A/ja active Pending
- 1995-11-22 US US08/562,002 patent/US5654561A/en not_active Expired - Fee Related
- 1995-12-06 EP EP95119249A patent/EP0718892B1/de not_active Expired - Lifetime
- 1995-12-06 DE DE69517140T patent/DE69517140T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0718892A2 (de) | 1996-06-26 |
EP0718892A3 (de) | 1996-12-04 |
EP0718892B1 (de) | 2000-05-24 |
DE69517140T2 (de) | 2001-02-01 |
US5654561A (en) | 1997-08-05 |
JPH08227999A (ja) | 1996-09-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |