DE69505737D1 - Verfahren zur Herstellung von Schichten aus Bornitrid und danach hergestellte Schichten - Google Patents

Verfahren zur Herstellung von Schichten aus Bornitrid und danach hergestellte Schichten

Info

Publication number
DE69505737D1
DE69505737D1 DE69505737T DE69505737T DE69505737D1 DE 69505737 D1 DE69505737 D1 DE 69505737D1 DE 69505737 T DE69505737 T DE 69505737T DE 69505737 T DE69505737 T DE 69505737T DE 69505737 D1 DE69505737 D1 DE 69505737D1
Authority
DE
Germany
Prior art keywords
layers
production
boron nitride
produced thereafter
layers produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505737T
Other languages
English (en)
Other versions
DE69505737T2 (de
Inventor
Michael Alan Tamor
William Chris Vassell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Publication of DE69505737D1 publication Critical patent/DE69505737D1/de
Application granted granted Critical
Publication of DE69505737T2 publication Critical patent/DE69505737T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/342—Boron nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
DE69505737T 1994-06-16 1995-06-06 Verfahren zur Herstellung von Schichten aus Bornitrid und danach hergestellte Schichten Expired - Fee Related DE69505737T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/261,278 US5518780A (en) 1994-06-16 1994-06-16 Method of making hard, transparent amorphous hydrogenated boron nitride films

Publications (2)

Publication Number Publication Date
DE69505737D1 true DE69505737D1 (de) 1998-12-10
DE69505737T2 DE69505737T2 (de) 1999-03-25

Family

ID=22992615

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505737T Expired - Fee Related DE69505737T2 (de) 1994-06-16 1995-06-06 Verfahren zur Herstellung von Schichten aus Bornitrid und danach hergestellte Schichten

Country Status (5)

Country Link
US (1) US5518780A (de)
EP (1) EP0687748B1 (de)
JP (1) JPH0841633A (de)
CA (1) CA2151650A1 (de)
DE (1) DE69505737T2 (de)

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US5518780A (en) 1996-05-21
DE69505737T2 (de) 1999-03-25

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