DE69504800T2 - Verfahren zur Herstellung von bordotierten Diamantschichten - Google Patents
Verfahren zur Herstellung von bordotierten DiamantschichtenInfo
- Publication number
- DE69504800T2 DE69504800T2 DE69504800T DE69504800T DE69504800T2 DE 69504800 T2 DE69504800 T2 DE 69504800T2 DE 69504800 T DE69504800 T DE 69504800T DE 69504800 T DE69504800 T DE 69504800T DE 69504800 T2 DE69504800 T2 DE 69504800T2
- Authority
- DE
- Germany
- Prior art keywords
- boron
- production
- doped diamond
- diamond layers
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9414612A FR2727433B1 (fr) | 1994-11-30 | 1994-11-30 | Procede pour la fabrication de couches de diamant dope au bore |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69504800D1 DE69504800D1 (de) | 1998-10-22 |
DE69504800T2 true DE69504800T2 (de) | 1999-05-20 |
Family
ID=9469491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69504800T Expired - Fee Related DE69504800T2 (de) | 1994-11-30 | 1995-11-15 | Verfahren zur Herstellung von bordotierten Diamantschichten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5591484A (de) |
EP (1) | EP0714997B1 (de) |
JP (1) | JPH08225395A (de) |
DE (1) | DE69504800T2 (de) |
FR (1) | FR2727433B1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT525593A1 (de) * | 2021-10-22 | 2023-05-15 | Carboncompetence Gmbh | Vorrichtung und Verfahren zur Herstellung dotierter Diamantschichten |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5677372A (en) * | 1993-04-06 | 1997-10-14 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material |
US5551761A (en) * | 1994-12-09 | 1996-09-03 | Eaton Corporation | Vehicle wheel and brake assembly with enhanced convective heat transfer |
JP3737221B2 (ja) * | 1996-09-06 | 2006-01-18 | 英樹 松村 | 薄膜作成方法及び薄膜作成装置 |
GB9616043D0 (en) * | 1996-07-31 | 1996-09-11 | De Beers Ind Diamond | Diamond |
DE19842396A1 (de) * | 1998-09-16 | 2000-04-13 | Fraunhofer Ges Forschung | Elektrode für elektrochemische Prozesse |
US6274837B1 (en) * | 1999-06-16 | 2001-08-14 | Saint-Gobain Industrial Ceramics, Inc. | Method and apparatus for in-situ solid state doping of CVD diamonds and diamonds so made |
DE19948184C2 (de) * | 1999-10-06 | 2001-08-09 | Fraunhofer Ges Forschung | Elektrochemische Herstellung von Peroxo-dischwefelsäure unter Einsatz von diamantbeschichteten Elektroden |
US6605352B1 (en) | 2000-01-06 | 2003-08-12 | Saint-Gobain Ceramics & Plastics, Inc. | Corrosion and erosion resistant thin film diamond coating and applications therefor |
AT7522U1 (de) * | 2004-04-29 | 2005-04-25 | Plansee Ag | Wärmesenke aus borhaltigem diamant-kupfer-verbundwerkstoff |
JP2007238989A (ja) * | 2006-03-07 | 2007-09-20 | Ebara Corp | ダイヤモンド電極の製造方法 |
DE102008044028A1 (de) * | 2008-11-24 | 2010-08-12 | Cemecon Ag | Vorrichtung und Verfahren zum Beschichten eines Substrats mittels CVD |
DE102008044025A1 (de) | 2008-11-24 | 2010-08-05 | Cemecon Ag | Vorrichtung und Verfahren zum Beschichten eines Substrats mittels CVD |
WO2010093344A1 (en) * | 2009-02-10 | 2010-08-19 | Utc Power Corporation | Boron-doped diamond coated catalyst support |
CN102127751B (zh) * | 2011-01-11 | 2012-12-26 | 大连理工大学 | 一种柱状阵列结构硼掺杂金刚石微纳米材料及其制备方法 |
JP7023477B2 (ja) * | 2016-07-19 | 2022-02-22 | 国立研究開発法人産業技術総合研究所 | ホウ素ドープダイヤモンド |
CN109722647A (zh) * | 2018-12-29 | 2019-05-07 | 中国地质大学(北京) | 一种bdd电极及其用于在线监测水体中重金属离子的用途 |
CN113981411B (zh) * | 2021-10-26 | 2023-12-05 | 山东省科学院新材料研究所 | 一种表面具有纳米锥尖结构的自支撑掺硼金刚石膜及其制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60221395A (ja) * | 1984-04-19 | 1985-11-06 | Yoshio Imai | ダイヤモンド薄膜の製造方法 |
US5106452A (en) * | 1989-06-05 | 1992-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Method of depositing diamond and diamond light emitting device |
EP0509875A1 (de) * | 1991-04-19 | 1992-10-21 | Société dite CARBIONIC SYSTEME | Verfahren zum Beschichten auf mindestens einem Werkstoff, insbesondere einem metallischen Werkstoff, eine Hartschicht aus pseudodiamantischem Kohlenstoff und ein so beschichteter Werkstoff |
-
1994
- 1994-11-30 FR FR9414612A patent/FR2727433B1/fr not_active Expired - Fee Related
-
1995
- 1995-10-02 US US08/537,483 patent/US5591484A/en not_active Expired - Fee Related
- 1995-11-15 DE DE69504800T patent/DE69504800T2/de not_active Expired - Fee Related
- 1995-11-15 EP EP95420312A patent/EP0714997B1/de not_active Expired - Lifetime
- 1995-11-29 JP JP7332535A patent/JPH08225395A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT525593A1 (de) * | 2021-10-22 | 2023-05-15 | Carboncompetence Gmbh | Vorrichtung und Verfahren zur Herstellung dotierter Diamantschichten |
Also Published As
Publication number | Publication date |
---|---|
JPH08225395A (ja) | 1996-09-03 |
EP0714997B1 (de) | 1998-09-16 |
EP0714997A1 (de) | 1996-06-05 |
DE69504800D1 (de) | 1998-10-22 |
FR2727433B1 (fr) | 1997-01-03 |
FR2727433A1 (fr) | 1996-05-31 |
US5591484A (en) | 1997-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |