DE69131410T2 - Lawinenphotodiode - Google Patents
LawinenphotodiodeInfo
- Publication number
- DE69131410T2 DE69131410T2 DE69131410T DE69131410T DE69131410T2 DE 69131410 T2 DE69131410 T2 DE 69131410T2 DE 69131410 T DE69131410 T DE 69131410T DE 69131410 T DE69131410 T DE 69131410T DE 69131410 T2 DE69131410 T2 DE 69131410T2
- Authority
- DE
- Germany
- Prior art keywords
- avalanche photodiode
- avalanche
- photodiode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- H01L31/1075—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes in which the active layers, e.g. absorption or multiplication layers, form an heterostructure, e.g. SAM structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2102454A JP2937404B2 (ja) | 1990-04-18 | 1990-04-18 | 半導体受光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69131410D1 DE69131410D1 (de) | 1999-08-12 |
DE69131410T2 true DE69131410T2 (de) | 1999-11-18 |
Family
ID=14327919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69131410T Expired - Fee Related DE69131410T2 (de) | 1990-04-18 | 1991-04-18 | Lawinenphotodiode |
Country Status (5)
Country | Link |
---|---|
US (1) | US5187553A (de) |
EP (1) | EP0452927B1 (de) |
JP (1) | JP2937404B2 (de) |
CA (1) | CA2040767A1 (de) |
DE (1) | DE69131410T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0506127B1 (de) * | 1991-03-28 | 1999-06-09 | Nec Corporation | Halbleiterphotodetektor mit Lawinenmultiplikation |
JP2998375B2 (ja) * | 1991-12-20 | 2000-01-11 | 日本電気株式会社 | アバランシェフォトダイオード |
US5311009A (en) * | 1992-07-31 | 1994-05-10 | At&T Bell Laboratories | Quantum well device for producing localized electron states for detectors and modulators |
JPH07115184A (ja) * | 1993-08-24 | 1995-05-02 | Canon Inc | 積層型固体撮像装置及びその製造方法 |
US5583352A (en) * | 1994-04-29 | 1996-12-10 | Eg&G Limited | Low-noise, reach-through, avalanche photodiodes |
JP3018976B2 (ja) * | 1995-12-28 | 2000-03-13 | 富士ゼロックス株式会社 | 半導体受光素子 |
US5771256A (en) * | 1996-06-03 | 1998-06-23 | Bell Communications Research, Inc. | InP-based lasers with reduced blue shifts |
JP2001332759A (ja) | 2000-03-16 | 2001-11-30 | Matsushita Electric Ind Co Ltd | アバランシェフォトダイオード |
US7045833B2 (en) * | 2000-09-29 | 2006-05-16 | Board Of Regents, The University Of Texas System | Avalanche photodiodes with an impact-ionization-engineered multiplication region |
KR100424455B1 (ko) * | 2001-06-28 | 2004-03-26 | 삼성전자주식회사 | 역적층 구조를 갖는 평면형 애벌랜치 포토다이오드 |
JP2003168818A (ja) * | 2001-09-18 | 2003-06-13 | Anritsu Corp | 順メサ型アバランシェフォトダイオード及びその製造方法 |
US7348607B2 (en) * | 2002-02-01 | 2008-03-25 | Picometrix, Llc | Planar avalanche photodiode |
US8120079B2 (en) * | 2002-09-19 | 2012-02-21 | Quantum Semiconductor Llc | Light-sensing device for multi-spectral imaging |
JP5015494B2 (ja) * | 2006-05-22 | 2012-08-29 | 住友電工デバイス・イノベーション株式会社 | 半導体受光素子 |
US8239176B2 (en) * | 2008-02-13 | 2012-08-07 | Feng Ma | Simulation methods and systems for carriers having multiplications |
JP5736922B2 (ja) * | 2011-04-08 | 2015-06-17 | 住友電気工業株式会社 | 受光素子およびその製造方法 |
JP6593140B2 (ja) * | 2015-12-09 | 2019-10-23 | 住友電気工業株式会社 | フォトダイオード |
KR101959141B1 (ko) * | 2017-11-30 | 2019-03-15 | 주식회사 우리로 | 애벌란치 포토 다이오드 |
US10361243B2 (en) | 2017-12-15 | 2019-07-23 | Atomera Incorporated | Method for making CMOS image sensor including superlattice to enhance infrared light absorption |
US10355151B2 (en) | 2017-12-15 | 2019-07-16 | Atomera Incorporated | CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk |
US10276625B1 (en) * | 2017-12-15 | 2019-04-30 | Atomera Incorporated | CMOS image sensor including superlattice to enhance infrared light absorption |
US10461118B2 (en) | 2017-12-15 | 2019-10-29 | Atomera Incorporated | Method for making CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk |
US10396223B2 (en) | 2017-12-15 | 2019-08-27 | Atomera Incorporated | Method for making CMOS image sensor with buried superlattice layer to reduce crosstalk |
US10304881B1 (en) | 2017-12-15 | 2019-05-28 | Atomera Incorporated | CMOS image sensor with buried superlattice layer to reduce crosstalk |
US11056604B1 (en) * | 2020-02-18 | 2021-07-06 | National Central University | Photodiode of avalanche breakdown having mixed composite charge layer |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5861679A (ja) * | 1981-10-07 | 1983-04-12 | Kokusai Denshin Denwa Co Ltd <Kdd> | 量子井戸層付アバランシ・ホトダイオ−ド |
JPS6016474A (ja) * | 1983-07-08 | 1985-01-28 | Nec Corp | ヘテロ多重接合型光検出器 |
FR2618221B1 (fr) * | 1987-07-17 | 1991-07-19 | Thomson Csf | Detecteur d'onde electromagnetique et analyseur d'image comportant un tel detecteur. |
JPH01144687A (ja) * | 1987-11-30 | 1989-06-06 | Nec Corp | 半導体受光素子 |
JPH01194476A (ja) * | 1988-01-29 | 1989-08-04 | Nec Corp | 半導体受光素子 |
JPH0210780A (ja) * | 1988-06-28 | 1990-01-16 | Nec Corp | 半導体受光素子 |
JPH0282658A (ja) * | 1988-09-20 | 1990-03-23 | Fujitsu Ltd | 半導体受光素子 |
JP2747299B2 (ja) * | 1988-09-28 | 1998-05-06 | 株式会社日立製作所 | 半導体受光素子 |
JP2664960B2 (ja) * | 1988-10-28 | 1997-10-22 | 日本電信電話株式会社 | アバランシェフォトダイオード |
JPH02119274A (ja) * | 1988-10-28 | 1990-05-07 | Fujitsu Ltd | アバランシェフォトダイオード |
JPH0821727B2 (ja) * | 1988-11-18 | 1996-03-04 | 日本電気株式会社 | アバランシェフォトダイオード |
JPH02246381A (ja) * | 1989-03-20 | 1990-10-02 | Fujitsu Ltd | 超格子アバランシェホトダイオード |
JPH02254769A (ja) * | 1989-03-29 | 1990-10-15 | Fujitsu Ltd | 半導体受光素子 |
JPH08111541A (ja) * | 1989-12-08 | 1996-04-30 | Hitachi Ltd | 半導体装置 |
-
1990
- 1990-04-18 JP JP2102454A patent/JP2937404B2/ja not_active Expired - Fee Related
-
1991
- 1991-04-18 CA CA002040767A patent/CA2040767A1/en not_active Abandoned
- 1991-04-18 DE DE69131410T patent/DE69131410T2/de not_active Expired - Fee Related
- 1991-04-18 EP EP91106220A patent/EP0452927B1/de not_active Expired - Lifetime
- 1991-04-18 US US07/687,346 patent/US5187553A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5187553A (en) | 1993-02-16 |
JP2937404B2 (ja) | 1999-08-23 |
EP0452927B1 (de) | 1999-07-07 |
DE69131410D1 (de) | 1999-08-12 |
JPH042176A (ja) | 1992-01-07 |
EP0452927A1 (de) | 1991-10-23 |
CA2040767A1 (en) | 1991-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |