DE69117090D1 - Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung - Google Patents

Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung

Info

Publication number
DE69117090D1
DE69117090D1 DE69117090T DE69117090T DE69117090D1 DE 69117090 D1 DE69117090 D1 DE 69117090D1 DE 69117090 T DE69117090 T DE 69117090T DE 69117090 T DE69117090 T DE 69117090T DE 69117090 D1 DE69117090 D1 DE 69117090D1
Authority
DE
Germany
Prior art keywords
production
sintered body
thermally conductive
aluminum nitride
nitride sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69117090T
Other languages
English (en)
Other versions
DE69117090T2 (de
Inventor
Kouhei Shimoda
Takao Maeda
Kouichi Sogabe
Masaya Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69117090D1 publication Critical patent/DE69117090D1/de
Publication of DE69117090T2 publication Critical patent/DE69117090T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Products (AREA)
DE69117090T 1990-04-17 1991-04-16 Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung Expired - Lifetime DE69117090T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2101396A JP2567491B2 (ja) 1990-04-17 1990-04-17 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69117090D1 true DE69117090D1 (de) 1996-03-28
DE69117090T2 DE69117090T2 (de) 1996-07-25

Family

ID=14299577

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117090T Expired - Lifetime DE69117090T2 (de) 1990-04-17 1991-04-16 Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5294388A (de)
EP (1) EP0452871B1 (de)
JP (1) JP2567491B2 (de)
DE (1) DE69117090T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2943275B2 (ja) * 1990-08-07 1999-08-30 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US5273700A (en) * 1990-10-29 1993-12-28 Sumitomo Electric Industries Ltd. Aluminum nitride sintered body and process for producing the same
CA2113451A1 (en) * 1991-09-12 1993-03-18 Yi-Hung Chiao Method of making co-fired, multilayer substrates
JPH06227868A (ja) * 1993-02-01 1994-08-16 Sumitomo Kinzoku Ceramics:Kk グリーンシート成形用窒化アルミニウム粉末及びその製造方法
EP0626359B1 (de) * 1993-05-21 2001-07-18 Kabushiki Kaisha Toshiba Sinterkörper aus Aluminiumnitriol und Verfahren zu seiner Herstellung
US5668524A (en) * 1994-02-09 1997-09-16 Kyocera Corporation Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase
DE4405652A1 (de) * 1994-02-22 1995-09-07 Hoechst Ag Verfahren zur Herstellung von nichtoxidischer Keramik mit definierter Wärmeleitfähigkeit
KR100361113B1 (ko) * 1994-08-18 2003-02-05 닛뽕도구슈우도오교오가부시끼가이샤 세라믹 히터용 알루미나기 소결재료
KR100248035B1 (ko) * 1994-09-29 2000-03-15 니시무로 타이죠 반도체 패키지
US5688450A (en) * 1994-12-21 1997-11-18 Hughes Aircraft Company Method of making an electronic package structure utilizing aluminum nitride/aluminum composite material
US5639568A (en) * 1995-10-16 1997-06-17 Aer Energy Resources, Inc. Split anode for a dual air electrode cell
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
US5843534A (en) * 1997-01-24 1998-12-01 Industrial Technology Research Institute Screen printing of surface layers
JP3820706B2 (ja) * 1997-10-30 2006-09-13 住友電気工業株式会社 窒化アルミニウムヒーター
US6383962B1 (en) * 1999-03-17 2002-05-07 Asahi Techno Glass Corporation Aluminum nitride sintered product
US6900149B1 (en) * 1999-09-06 2005-05-31 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor
JP4447750B2 (ja) * 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
US20040222211A1 (en) * 1999-12-28 2004-11-11 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered body, and ceramic substrate for a semiconductor producing/examining device
TWI259099B (en) 2003-11-06 2006-08-01 Tanren Co Ltd Training machine
CN100545082C (zh) * 2004-03-29 2009-09-30 电气化学工业株式会社 氮化铝粉末及氮化铝烧结体
JP5180034B2 (ja) * 2008-11-21 2013-04-10 日本碍子株式会社 窒化アルミニウム焼結体、その製法及びそれを用いた静電チャック

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
US4533645A (en) * 1983-08-01 1985-08-06 General Electric Company High thermal conductivity aluminum nitride ceramic body
JPS60186479A (ja) * 1984-03-07 1985-09-21 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4877760A (en) 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
EP0207465B1 (de) 1985-06-28 1992-04-15 Kabushiki Kaisha Toshiba Aluminiumnitridsinterkörper und Verfahren zu seiner Herstellung
JPH0717454B2 (ja) * 1985-06-28 1995-03-01 株式会社東芝 窒化アルミニウム焼結体およびその製造方法
JPS6252181A (ja) * 1985-08-31 1987-03-06 京セラ株式会社 窒化アルミニウム焼結体の製造方法
JPH0717453B2 (ja) * 1985-11-28 1995-03-01 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
JPS6311563A (ja) 1986-07-02 1988-01-19 株式会社トクヤマ 青色焼結体
JPH075378B2 (ja) * 1986-11-13 1995-01-25 株式会社住友金属セラミックス 黒色窒化アルミニウム焼結体とその製造方法
JPS63162576A (ja) * 1986-12-25 1988-07-06 株式会社住友金属セラミックス 黒色窒化アルミニウム焼結体およびその製造方法
JPS63310772A (ja) * 1987-06-10 1988-12-19 Shinko Electric Ind Co Ltd 窒化アルミニウム焼結体
JPH01172272A (ja) * 1987-12-25 1989-07-07 Murata Mfg Co Ltd ＡｌＮセラミックの製造方法
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
KR920003226B1 (ko) 1988-05-16 1992-04-24 스미도모덴기고오교오 가부시기가이샤 질화알루미늄소결체와 그것을 사용한 회로기판 및 반도체패키지
JP2654108B2 (ja) * 1988-07-27 1997-09-17 電気化学工業株式会社 窒化アルミニウム焼結体の製造方法
BR8907633A (pt) 1988-09-02 1991-07-30 Dow Chemical Co Processo para produzir um artigo de nitreto de aluminio denso que possui uma alta condutividade termica e artigo de nitreto de aluminio denso
JPH0283266A (ja) * 1988-09-20 1990-03-23 Murata Mfg Co Ltd ＡｌＮ焼結体の製造方法
JPH02172868A (ja) * 1988-12-26 1990-07-04 Hitachi Metals Ltd 窒化アルミニウム焼結体並びにそれを用いた電子部品
JPH02275770A (ja) * 1989-04-17 1990-11-09 Kawasaki Steel Corp 窒化アルミニウム焼結体の製造方法
JPH03257071A (ja) * 1989-11-30 1991-11-15 Toshiba Corp 遮光性窒化アルミニウム焼結体及びその製造方法
JPH03290371A (ja) * 1990-02-05 1991-12-20 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
JP2943275B2 (ja) * 1990-08-07 1999-08-30 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
DE69117090T2 (de) 1996-07-25
JP2567491B2 (ja) 1996-12-25
EP0452871B1 (de) 1996-02-14
EP0452871A1 (de) 1991-10-23
JPH042663A (ja) 1992-01-07
US5306679A (en) 1994-04-26
US5294388A (en) 1994-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN