DE69427722T2 - Sinterkörper aus Aluminiumnitriol und Verfahren zu seiner Herstellung - Google Patents

Sinterkörper aus Aluminiumnitriol und Verfahren zu seiner Herstellung

Info

Publication number
DE69427722T2
DE69427722T2 DE69427722T DE69427722T DE69427722T2 DE 69427722 T2 DE69427722 T2 DE 69427722T2 DE 69427722 T DE69427722 T DE 69427722T DE 69427722 T DE69427722 T DE 69427722T DE 69427722 T2 DE69427722 T2 DE 69427722T2
Authority
DE
Germany
Prior art keywords
nitriol
aluminum
production
sintered body
body made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69427722T
Other languages
English (en)
Other versions
DE69427722D1 (de
Inventor
Michiyashu Komatsu
Takao Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14287193A external-priority patent/JP3742661B2/ja
Priority claimed from JP5344922A external-priority patent/JPH07172921A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69427722D1 publication Critical patent/DE69427722D1/de
Application granted granted Critical
Publication of DE69427722T2 publication Critical patent/DE69427722T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69427722T 1993-05-21 1994-05-19 Sinterkörper aus Aluminiumnitriol und Verfahren zu seiner Herstellung Expired - Lifetime DE69427722T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14287193A JP3742661B2 (ja) 1993-05-21 1993-05-21 窒化アルミニウム焼結体およびその製造方法
JP5344922A JPH07172921A (ja) 1993-12-20 1993-12-20 窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69427722D1 DE69427722D1 (de) 2001-08-23
DE69427722T2 true DE69427722T2 (de) 2002-05-08

Family

ID=26474742

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69427722T Expired - Lifetime DE69427722T2 (de) 1993-05-21 1994-05-19 Sinterkörper aus Aluminiumnitriol und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US5508240A (de)
EP (1) EP0626359B1 (de)
KR (1) KR960016070B1 (de)
DE (1) DE69427722T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
DE69522674T2 (de) * 1994-12-01 2002-06-20 Toshiba Kawasaki Kk Aluminiumnitrid sinterprodukt und verfahren zur herstellung desselben
CN1139117C (zh) * 1995-03-20 2004-02-18 株式会社东芝 氮化硅电路板
US5677253A (en) * 1995-03-30 1997-10-14 Kyocera Corporation Wafer holding member
JP3100871B2 (ja) * 1995-07-11 2000-10-23 株式会社東芝 窒化アルミニウム焼結体
EP0754661B1 (de) * 1995-07-19 1999-03-10 Tokuyama Corporation Aluminiumnitrid-Verbindungsstruktur
JP3481778B2 (ja) * 1996-06-28 2003-12-22 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
JPH10277831A (ja) * 1997-04-04 1998-10-20 Sumitomo Electric Ind Ltd フライス用切削工具
US6294275B1 (en) * 1998-05-06 2001-09-25 Sumitomo Electric Industries, Ltd. Aluminum-nitride sintered body, method for fabricating the same, and semiconductor substrate comprising the same
EP0970932A1 (de) * 1998-07-10 2000-01-12 Sumitomo Electric Industries, Ltd. Keramisches Trägermaterial
JP2001064079A (ja) * 1999-08-25 2001-03-13 Sumitomo Electric Ind Ltd 窒化アルミニウム焼結体及びその製造方法
JP4970712B2 (ja) * 2003-06-19 2012-07-11 日本碍子株式会社 窒化アルミニウム焼結体、窒化アルミニウムの製造方法、及び窒化アルミニウムの評価方法
TWI297908B (en) * 2005-03-16 2008-06-11 Ngk Insulators Ltd Processing device
KR101516990B1 (ko) * 2014-02-18 2015-05-04 한국세라믹기술원 질화알루미늄 소결체의 제조방법
CN112374896B (zh) * 2020-11-12 2022-05-27 广东工业大学 一种高性能氮化铝陶瓷基板的浆料和制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3337630A1 (de) * 1983-10-15 1985-04-25 W.C. Heraeus Gmbh, 6450 Hanau Temperaturausgleichskoerper
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
GB2213500B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
JPS63190761A (ja) * 1987-01-30 1988-08-08 京セラ株式会社 窒化アルミニウム質焼結体
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln
US4833108A (en) * 1987-03-28 1989-05-23 Narumi China Corporation Sintered body of aluminum nitride
FR2621910B1 (fr) * 1987-10-14 1992-12-31 Armines Materiau ceramique a haut pouvoir de dissipation thermique, son procede de fabrication et ses applications notamment dans l'industrie electronique
US5219803A (en) * 1988-05-16 1993-06-15 Sumitomo Electric Industries, Ltd. Sintered body of aluminum nitride
JPH02107571A (ja) * 1988-10-13 1990-04-19 Kureha Chem Ind Co Ltd 耐酸化性に優れた窒化アルミニウム焼結体とその製造方法
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
US5508240A (en) 1996-04-16
DE69427722D1 (de) 2001-08-23
EP0626359B1 (de) 2001-07-18
KR960016070B1 (ko) 1996-11-27
EP0626359A1 (de) 1994-11-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN

8320 Willingness to grant licences declared (paragraph 23)