DE69104517T2 - Verfahren zur automatischen Steuerung der Züchtung des Halsteiles eines Einkristalles nach dem Czochralski-Verfahren. - Google Patents

Verfahren zur automatischen Steuerung der Züchtung des Halsteiles eines Einkristalles nach dem Czochralski-Verfahren.

Info

Publication number
DE69104517T2
DE69104517T2 DE69104517T DE69104517T DE69104517T2 DE 69104517 T2 DE69104517 T2 DE 69104517T2 DE 69104517 T DE69104517 T DE 69104517T DE 69104517 T DE69104517 T DE 69104517T DE 69104517 T2 DE69104517 T2 DE 69104517T2
Authority
DE
Germany
Prior art keywords
growth
single crystal
automatic control
crystal according
neck part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69104517T
Other languages
English (en)
Other versions
DE69104517D1 (de
Inventor
Masahiko Baba
Hiroshi Ohtsuna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69104517D1 publication Critical patent/DE69104517D1/de
Publication of DE69104517T2 publication Critical patent/DE69104517T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE69104517T 1990-02-28 1991-02-27 Verfahren zur automatischen Steuerung der Züchtung des Halsteiles eines Einkristalles nach dem Czochralski-Verfahren. Expired - Fee Related DE69104517T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2048934A JPH06102590B2 (ja) 1990-02-28 1990-02-28 Ｃｚ法による単結晶ネック部育成自動制御方法

Publications (2)

Publication Number Publication Date
DE69104517D1 DE69104517D1 (de) 1994-11-17
DE69104517T2 true DE69104517T2 (de) 1995-03-09

Family

ID=12817092

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104517T Expired - Fee Related DE69104517T2 (de) 1990-02-28 1991-02-27 Verfahren zur automatischen Steuerung der Züchtung des Halsteiles eines Einkristalles nach dem Czochralski-Verfahren.

Country Status (4)

Country Link
US (1) US5183528A (de)
EP (1) EP0444628B1 (de)
JP (1) JPH06102590B2 (de)
DE (1) DE69104517T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19548845B4 (de) * 1995-12-27 2008-04-10 Crystal Growing Systems Gmbh Vorrichtung und Verfahren zum Ziehen von Einkristallen nach dem Czochralski-Verfahren

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JPH0717475B2 (ja) * 1991-02-14 1995-03-01 信越半導体株式会社 単結晶ネック部育成自動制御方法
JP2966322B2 (ja) * 1995-02-27 1999-10-25 三菱マテリアルシリコン株式会社 シリコン単結晶インゴット及びその製造方法
US5653799A (en) * 1995-06-02 1997-08-05 Memc Electronic Materials, Inc. Method for controlling growth of a silicon crystal
US5578284A (en) * 1995-06-07 1996-11-26 Memc Electronic Materials, Inc. Silicon single crystal having eliminated dislocation in its neck
US5888299A (en) * 1995-12-27 1999-03-30 Shin-Etsu Handotai Co., Ltd. Apparatus for adjusting initial position of melt surface
JP2937115B2 (ja) * 1996-03-15 1999-08-23 住友金属工業株式会社 単結晶引き上げ方法
US6093244A (en) * 1997-04-10 2000-07-25 Ebara Solar, Inc. Silicon ribbon growth dendrite thickness control system
US6045610A (en) * 1997-02-13 2000-04-04 Samsung Electronics Co., Ltd. Methods of manufacturing monocrystalline silicon ingots and wafers by controlling pull rate profiles in a hot zone furnance
SG64470A1 (en) 1997-02-13 1999-04-27 Samsung Electronics Co Ltd Methods of manufacturing monocrystalline silicon ingots and wafers by controlling pull rate profiles in a hot zone furnace and ingots and wafers manufactured thereby
US6503594B2 (en) 1997-02-13 2003-01-07 Samsung Electronics Co., Ltd. Silicon wafers having controlled distribution of defects and slip
US6485807B1 (en) 1997-02-13 2002-11-26 Samsung Electronics Co., Ltd. Silicon wafers having controlled distribution of defects, and methods of preparing the same
US5846318A (en) * 1997-07-17 1998-12-08 Memc Electric Materials, Inc. Method and system for controlling growth of a silicon crystal
US5882402A (en) * 1997-09-30 1999-03-16 Memc Electronic Materials, Inc. Method for controlling growth of a silicon crystal
US5922127A (en) * 1997-09-30 1999-07-13 Memc Electronic Materials, Inc. Heat shield for crystal puller
US6340392B1 (en) 1997-10-24 2002-01-22 Samsung Electronics Co., Ltd. Pulling methods for manufacturing monocrystalline silicone ingots by controlling temperature at the center and edge of an ingot-melt interface
EP1125009B1 (de) * 1998-10-14 2002-12-18 MEMC Electronic Materials, Inc. Verfahren zur genauen ziehung eines kristalles
US6171391B1 (en) 1998-10-14 2001-01-09 Memc Electronic Materials, Inc. Method and system for controlling growth of a silicon crystal
EP1196646B1 (de) * 1999-02-02 2007-08-15 Ebara Corporation Vorrichtung zur reglung der schichtdicke eines dendrits während der züchtung eines siliziumbandes
US6197111B1 (en) 1999-02-26 2001-03-06 Memc Electronic Materials, Inc. Heat shield assembly for crystal puller
US6776840B1 (en) * 1999-03-22 2004-08-17 Memc Electronic Materials, Inc. Method and apparatus for controlling diameter of a silicon crystal in a locked seed lift growth process
CN1396965A (zh) 2000-02-01 2003-02-12 Memc电子材料有限公司 用于控制硅晶体生长使生长速率和直径的偏差减至最小的方法
US6869477B2 (en) * 2000-02-22 2005-03-22 Memc Electronic Materials, Inc. Controlled neck growth process for single crystal silicon
US6482263B1 (en) 2000-10-06 2002-11-19 Memc Electronic Materials, Inc. Heat shield assembly for crystal pulling apparatus
US6514337B2 (en) 2001-02-07 2003-02-04 Seh America, Inc. Method of growing large-diameter dislocation-free<110> crystalline ingots
FR2859033B1 (fr) * 2003-08-20 2006-03-03 Total France Procede et dispositif pour le pilotage en continu d'un processus de cristallisation dans un milieu reactionnel
JP4561513B2 (ja) * 2005-07-22 2010-10-13 株式会社Ｓｕｍｃｏ 単結晶引き上げ装置の液面位置調整機構及び液面位置調整方法並びに単結晶引き上げ装置の液面位置合わせ機構及び液面位置合わせ方法
US20100319612A1 (en) * 2009-06-22 2010-12-23 Sumco Corporation Method of producing silicon single crystal
JP5182234B2 (ja) * 2009-06-22 2013-04-17 株式会社Ｓｕｍｃｏ シリコン単結晶の製造方法
KR101218847B1 (ko) 2010-12-13 2013-01-21 주식회사 엘지실트론 단결정 잉곳 직경 제어시스템 및 이를 포함하는 단결정 잉곳 성장장치
CN104278320A (zh) * 2013-07-04 2015-01-14 有研新材料股份有限公司 一种用于测量直拉硅单晶炉中硅熔体液面位置的装置
CN104562194B (zh) * 2013-10-24 2017-05-31 西门子工厂自动化工程有限公司 多晶硅生产过程的温度控制方法
CN103575734B (zh) * 2013-11-22 2016-06-08 晶格码（青岛）智能科技有限公司 晶体三维晶面生长动力学的立体成像测定系统及方法
KR101623641B1 (ko) * 2014-08-04 2016-05-23 주식회사 엘지실트론 잉곳성장장치
CN105780111B (zh) * 2016-05-16 2018-08-31 西安创联新能源设备有限公司 多晶硅铸锭炉长晶速度自动测量装置
CN106801250B (zh) * 2017-01-13 2019-05-07 中山大学 反馈晶体生长状态的方法、晶体生长控制方法及控制系统
CN110344109A (zh) * 2019-07-26 2019-10-18 浙江晶盛机电股份有限公司 一种单晶炉ccd双目液位测控装置和方法
TWI758058B (zh) * 2021-01-08 2022-03-11 環球晶圓股份有限公司 矽晶棒的製造方法

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NL6512921A (de) * 1965-10-06 1967-04-07
US3621213A (en) * 1969-11-26 1971-11-16 Ibm Programmed digital-computer-controlled system for automatic growth of semiconductor crystals
DE2446293C2 (de) * 1974-04-03 1986-01-30 National Research Development Corp., London Vorrichtung zur Regelung des Stabquerschnitts beim Czochralski-Ziehen
US4207293A (en) * 1974-06-14 1980-06-10 Varian Associates, Inc. Circumferential error signal apparatus for crystal rod pulling
US3958129A (en) * 1974-08-05 1976-05-18 Motorola, Inc. Automatic crystal diameter control for growth of semiconductor crystals
US4058429A (en) * 1975-12-04 1977-11-15 Westinghouse Electric Corporation Infrared temperature control of Czochralski crystal growth
EP0097676A4 (de) * 1982-01-04 1985-11-11 Commw Of Australia Steuerung des diameters im czochralski-kristallwachstum.
JPS59102896A (ja) * 1982-11-30 1984-06-14 Toshiba Corp 単結晶の形状制御方法
JPH0631194B2 (ja) * 1984-02-22 1994-04-27 株式会社東芝 単結晶の製造方法
JPH0649631B2 (ja) * 1986-10-29 1994-06-29 信越半導体株式会社 結晶径測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19548845B4 (de) * 1995-12-27 2008-04-10 Crystal Growing Systems Gmbh Vorrichtung und Verfahren zum Ziehen von Einkristallen nach dem Czochralski-Verfahren

Also Published As

Publication number Publication date
EP0444628B1 (de) 1994-10-12
US5183528A (en) 1993-02-02
EP0444628A1 (de) 1991-09-04
JPH06102590B2 (ja) 1994-12-14
JPH03252388A (ja) 1991-11-11
DE69104517D1 (de) 1994-11-17

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee