CN104278320A - 一种用于测量直拉硅单晶炉中硅熔体液面位置的装置 - Google Patents
一种用于测量直拉硅单晶炉中硅熔体液面位置的装置 Download PDFInfo
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108823634A (zh) * | 2018-06-01 | 2018-11-16 | 上海汉虹精密机械有限公司 | 半导体单晶炉液面位置控制装置及方法 |
CN113403680A (zh) * | 2021-06-18 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | 一种监测熔体液面位置的方法、系统及计算机存储介质 |
CN114543728A (zh) * | 2022-01-26 | 2022-05-27 | 弘元新材料(包头)有限公司 | 一种新型液口距校准方法 |
CN116288662A (zh) * | 2023-05-18 | 2023-06-23 | 内蒙古中环领先半导体材料有限公司 | 一种控制直拉单晶液面距的方法 |
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CN102677157A (zh) * | 2012-06-04 | 2012-09-19 | 曾泽斌 | 一种直拉硅单晶炉的硅熔体液面相对位置的测量方法 |
CN202898594U (zh) * | 2012-11-09 | 2013-04-24 | 英利能源(中国)有限公司 | 一种晶硅熔炉用熔硅液面测距组件以及一种晶硅熔炉 |
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- 2013-07-04 CN CN201310278208.5A patent/CN104278320A/zh active Pending
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JPS60186498A (ja) * | 1984-03-05 | 1985-09-21 | Toshiba Ceramics Co Ltd | 半導体単結晶の製造方法 |
EP0444628A1 (en) * | 1990-02-28 | 1991-09-04 | Shin-Etsu Handotai Company Limited | Method of automatic control of growing neck portion of a single crystal by the CZ method |
CN1272146A (zh) * | 1997-09-30 | 2000-11-01 | Memc电子材料有限公司 | 拉晶炉用热屏蔽 |
US6458203B1 (en) * | 1999-04-28 | 2002-10-01 | Tadayuki Hanamoto | System for manufacturing a single-crystal ingot employing czochralski technique, and method of controlling the system |
CN1417386A (zh) * | 2001-11-01 | 2003-05-14 | 北京有色金属研究总院 | 直拉硅单晶炉热屏方法及热屏蔽器 |
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CN202202016U (zh) * | 2011-07-07 | 2012-04-25 | 杭州慧翔电液技术开发有限公司 | 能够测量熔硅液面与导流筒之间距离的单晶炉热场装置 |
CN102677157A (zh) * | 2012-06-04 | 2012-09-19 | 曾泽斌 | 一种直拉硅单晶炉的硅熔体液面相对位置的测量方法 |
CN202898594U (zh) * | 2012-11-09 | 2013-04-24 | 英利能源(中国)有限公司 | 一种晶硅熔炉用熔硅液面测距组件以及一种晶硅熔炉 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108823634A (zh) * | 2018-06-01 | 2018-11-16 | 上海汉虹精密机械有限公司 | 半导体单晶炉液面位置控制装置及方法 |
CN113403680A (zh) * | 2021-06-18 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | 一种监测熔体液面位置的方法、系统及计算机存储介质 |
CN114543728A (zh) * | 2022-01-26 | 2022-05-27 | 弘元新材料(包头)有限公司 | 一种新型液口距校准方法 |
CN116288662A (zh) * | 2023-05-18 | 2023-06-23 | 内蒙古中环领先半导体材料有限公司 | 一种控制直拉单晶液面距的方法 |
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