DE69102590T2 - Trägheitssensoren. - Google Patents

Trägheitssensoren.

Info

Publication number
DE69102590T2
DE69102590T2 DE69102590T DE69102590T DE69102590T2 DE 69102590 T2 DE69102590 T2 DE 69102590T2 DE 69102590 T DE69102590 T DE 69102590T DE 69102590 T DE69102590 T DE 69102590T DE 69102590 T2 DE69102590 T2 DE 69102590T2
Authority
DE
Germany
Prior art keywords
inertial sensors
inertial
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69102590T
Other languages
English (en)
Other versions
DE69102590D1 (de
Inventor
M P Varnham
T S Norris
D Hodgins
H D Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlantic Inertial Systems Ltd
Original Assignee
British Aerospace PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26297097&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69102590(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB909011185A external-priority patent/GB9011185D0/en
Application filed by British Aerospace PLC filed Critical British Aerospace PLC
Application granted granted Critical
Publication of DE69102590D1 publication Critical patent/DE69102590D1/de
Publication of DE69102590T2 publication Critical patent/DE69102590T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H2009/02346—Anchors for ring resonators
    • H03H2009/02354—Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring
DE69102590T 1990-05-18 1991-05-14 Trägheitssensoren. Expired - Lifetime DE69102590T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB909011185A GB9011185D0 (en) 1990-05-18 1990-05-18 Solid state gyroscope
GB919105060A GB9105060D0 (en) 1990-05-18 1991-03-11 Sensors

Publications (2)

Publication Number Publication Date
DE69102590D1 DE69102590D1 (de) 1994-07-28
DE69102590T2 true DE69102590T2 (de) 1994-10-06

Family

ID=26297097

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102590T Expired - Lifetime DE69102590T2 (de) 1990-05-18 1991-05-14 Trägheitssensoren.

Country Status (5)

Country Link
US (1) US5226321A (de)
EP (1) EP0461761B1 (de)
JP (1) JP2766743B2 (de)
DE (1) DE69102590T2 (de)
ES (1) ES2056580T3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19982627C2 (de) * 1998-06-22 2003-04-17 Tokai Rika Co Ltd Zweiachsiger Giersensor und Verfahren zu dessen Herstellung

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JP2766743B2 (ja) 1998-06-18
US5226321A (en) 1993-07-13
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EP0461761B1 (de) 1994-06-22
ES2056580T3 (es) 1994-10-01
JPH0642971A (ja) 1994-02-18

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