DE69009231T2 - Positiv arbeitende Photoresistzusammensetzung. - Google Patents

Positiv arbeitende Photoresistzusammensetzung.

Info

Publication number
DE69009231T2
DE69009231T2 DE69009231T DE69009231T DE69009231T2 DE 69009231 T2 DE69009231 T2 DE 69009231T2 DE 69009231 T DE69009231 T DE 69009231T DE 69009231 T DE69009231 T DE 69009231T DE 69009231 T2 DE69009231 T2 DE 69009231T2
Authority
DE
Germany
Prior art keywords
photoresist composition
positive working
working photoresist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009231T
Other languages
English (en)
Other versions
DE69009231D1 (de
Inventor
Yasumasa Kawabe
Tadayoshi Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Application granted granted Critical
Publication of DE69009231D1 publication Critical patent/DE69009231D1/de
Publication of DE69009231T2 publication Critical patent/DE69009231T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
DE69009231T 1989-02-28 1990-02-28 Positiv arbeitende Photoresistzusammensetzung. Expired - Lifetime DE69009231T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1046848A JP2640137B2 (ja) 1989-02-28 1989-02-28 ポジ型フオトレジスト組成物

Publications (2)

Publication Number Publication Date
DE69009231D1 DE69009231D1 (de) 1994-07-07
DE69009231T2 true DE69009231T2 (de) 1995-01-05

Family

ID=12758762

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009231T Expired - Lifetime DE69009231T2 (de) 1989-02-28 1990-02-28 Positiv arbeitende Photoresistzusammensetzung.

Country Status (4)

Country Link
US (1) US5130224A (de)
EP (1) EP0385442B1 (de)
JP (1) JP2640137B2 (de)
DE (1) DE69009231T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0152497B1 (ko) * 1995-08-31 1998-10-01 박홍기 감광성 조성물
US5994430A (en) * 1997-04-30 1999-11-30 Clariant Finance Bvi) Limited Antireflective coating compositions for photoresist compositions and use thereof
US6682659B1 (en) * 1999-11-08 2004-01-27 Taiwan Semiconductor Manufacturing Company Method for forming corrosion inhibited conductor layer
JP4312946B2 (ja) 2000-10-31 2009-08-12 Ａｚエレクトロニックマテリアルズ株式会社 感光性樹脂組成物
TWI297809B (de) * 2001-10-24 2008-06-11 Toyo Boseki
SE0300893D0 (sv) * 2003-03-28 2003-03-28 Saab Ab Anordning, användning, system och lagringsmedium angående beslutstöd för eller styrning av en entitets agerande
US7358035B2 (en) * 2005-06-23 2008-04-15 International Business Machines Corporation Topcoat compositions and methods of use thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3666473A (en) * 1970-10-06 1972-05-30 Ibm Positive photoresists for projection exposure
JPS5536838A (en) * 1978-09-08 1980-03-14 Tokyo Ohka Kogyo Co Ltd Novel light absorber and photoresist composition containing this
JPS5536837A (en) * 1978-09-08 1980-03-14 Ushio Inc Toner fixing method
JPS5536836A (en) * 1978-09-08 1980-03-14 Ushio Inc Toner fixing method
DE3144499A1 (de) * 1981-11-09 1983-05-19 Hoechst Ag, 6230 Frankfurt Lichtempfindliches gemisch und daraus hergestelltes lichtempfindliches kopiermaterial
JPS59142536A (ja) * 1983-02-02 1984-08-15 Ricoh Co Ltd 原稿照明装置
JPS59142537A (ja) * 1983-02-03 1984-08-15 Hiroo Mizuta 立体写真法
JPS59142538A (ja) * 1983-02-04 1984-08-15 Tokyo Ohka Kogyo Co Ltd 感光性組成物
US4828960A (en) * 1985-01-07 1989-05-09 Honeywell Inc. Reflection limiting photoresist composition with two azo dyes
US4672021A (en) * 1985-06-03 1987-06-09 Fairmount Chemical Company Contrast enhancement layer composition with naphthoquinone diazide, indicator dye and polymeric binder
US4626492A (en) * 1985-06-04 1986-12-02 Olin Hunt Specialty Products, Inc. Positive-working o-quinone diazide photoresist composition containing a dye and a trihydroxybenzophenone compound
JP2614847B2 (ja) * 1986-06-16 1997-05-28 東京応化工業 株式会社 ポジ型感光性組成物
JPH0738075B2 (ja) * 1986-12-23 1995-04-26 住友化学工業株式会社 新規なフオトレジスト組成物
JPH0812421B2 (ja) * 1987-01-13 1996-02-07 三菱化学株式会社 ポジ型フオトレジスト組成物
JP2563799B2 (ja) * 1987-06-03 1996-12-18 日本ゼオン株式会社 ポジ型フォトレジスト組成物
JP2534872B2 (ja) * 1987-06-25 1996-09-18 住友化学工業株式会社 フォトレジスト組成物
JPH01109343A (ja) * 1987-10-23 1989-04-26 Nagase Denshi Kagaku Kk フオトレジスト組成物及びフオトレジストパターンの形成方法
JPH02151863A (ja) * 1988-12-03 1990-06-11 Oki Electric Ind Co Ltd レジスト材料

Also Published As

Publication number Publication date
JP2640137B2 (ja) 1997-08-13
EP0385442A1 (de) 1990-09-05
JPH02226250A (ja) 1990-09-07
US5130224A (en) 1992-07-14
EP0385442B1 (de) 1994-06-01
DE69009231D1 (de) 1994-07-07

Similar Documents

Publication Publication Date Title
DE69019706D1 (de) Positiv-arbeitende Photolackzusammensetzung.
DE69027099D1 (de) Positiv arbeitende Photolackzusammensetzung
DE69126834D1 (de) Positiv arbeitende Photoresistzusammensetzung
DE69033212D1 (de) Positiv arbeitende Photolack-Zusammensetzung
DE68926019T2 (de) Positiv arbeitende hochempfindliche Photolack-Zusammensetzung
DE3879516T2 (de) Positiv arbeitende Photolack-Zusammensetzung.
DE69329408D1 (de) Positiv arbeitende Photolackzusammensetzung
DE69130125D1 (de) Positiv arbeitende Photolackzusammensetzung
DE69014913T2 (de) Lichtempfindliche Zusammensetzung.
DE69421982T2 (de) Positiv arbeitende Photoresistzusammensetzung
DE69012475D1 (de) Lichtempfindliche Zusammensetzungen.
DE69028476D1 (de) Positive arbeitende Fotolackzusammensetzungen
DE69424884T2 (de) Positiv arbeitende Photoresistzusammensetzung
DE3854364D1 (de) Positiv arbeitende lichtempfindliche Harzzusammensetzung.
DE69301273T2 (de) Positiv arbeitende Photolackzusammensetzung
DE69121001T2 (de) Positiv arbeitende Fotolackzusammensetzung
DE69032204T2 (de) Positiv arbeitende photoresistzusammensetzung
DE69308634D1 (de) Positiv arbeitende Photolackzusammensetzung
DE69132694D1 (de) Positiv arbeitende Photolackzusammensetzung
DE69009231T2 (de) Positiv arbeitende Photoresistzusammensetzung.
DE69130265T2 (de) Positive arbeitende Photolackzusammensetzung
DE59000074D1 (de) Druckmittelbetaetigbarer arbeitszylinder.
DE69114211T2 (de) Positiv arbeitende Photoresistzusammensetzung.
DE69023605T2 (de) Positive Fotolackzusammensetzung.
DE69303650D1 (de) Positiv arbeitende Fotolackzusammensetzung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BARZ, P., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 80803 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP