DE69130265T2 - Positive arbeitende Photolackzusammensetzung - Google Patents
Positive arbeitende PhotolackzusammensetzungInfo
- Publication number
- DE69130265T2 DE69130265T2 DE1991630265 DE69130265T DE69130265T2 DE 69130265 T2 DE69130265 T2 DE 69130265T2 DE 1991630265 DE1991630265 DE 1991630265 DE 69130265 T DE69130265 T DE 69130265T DE 69130265 T2 DE69130265 T2 DE 69130265T2
- Authority
- DE
- Germany
- Prior art keywords
- photoresist composition
- positive working
- working photoresist
- positive
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3929990A JPH03242650A (ja) | 1990-02-20 | 1990-02-20 | ポジ型フオトレジスト組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69130265D1 DE69130265D1 (de) | 1998-11-05 |
DE69130265T2 true DE69130265T2 (de) | 1999-05-12 |
Family
ID=12549253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991630265 Expired - Fee Related DE69130265T2 (de) | 1990-02-20 | 1991-02-19 | Positive arbeitende Photolackzusammensetzung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0443533B1 (de) |
JP (1) | JPH03242650A (de) |
DE (1) | DE69130265T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5305269A (en) | 1991-05-31 | 1994-04-19 | Thunderbird Technologies, Inc. | Differential latching inverter and random access memory using same |
JPH0643636A (ja) * | 1992-07-22 | 1994-02-18 | Fuji Photo Film Co Ltd | 感光性平版印刷版 |
EP0644460B1 (de) * | 1993-09-20 | 1999-12-08 | Fuji Photo Film Co., Ltd. | Positiv arbeitende Photoresistzusammensetzung |
DE69604114T2 (de) * | 1995-04-10 | 2000-03-02 | Shipley Co | Gemische von photoaktiven Zusammensetzungen enthaltendes Fotoresist |
US6905809B2 (en) | 2003-04-01 | 2005-06-14 | Clariant Finance (Bvi) Limited | Photoresist compositions |
US6790582B1 (en) | 2003-04-01 | 2004-09-14 | Clariant Finance Bvi Limited | Photoresist compositions |
PL1748767T3 (pl) | 2004-05-28 | 2012-08-31 | Unigen Inc | 1-(3-metylo-2,4-dimetoksyfenylo)-3-(2',4'-dihydroksyfenylo)-propan jako silny inhibitor tyrozynazy |
JP2011528719A (ja) * | 2008-07-21 | 2011-11-24 | ユニジェン・インコーポレーテッド | スキンホワイトニング(色を薄くする)化合物系列 |
KR102113823B1 (ko) | 2011-03-24 | 2020-05-21 | 유니젠, 인크. | 디아릴프로판의 제조를 위한 화합물 및 방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562444A (en) * | 1978-11-02 | 1980-05-10 | Konishiroku Photo Ind Co Ltd | Photosensitive composition |
JPS61118744A (ja) * | 1984-11-15 | 1986-06-06 | Tokyo Ohka Kogyo Co Ltd | ポジ型ホトレジスト組成物 |
JPH0648382B2 (ja) * | 1986-05-29 | 1994-06-22 | 日本合成ゴム株式会社 | 半導体デバイス製造用ポジ型感放射線性樹脂組成物 |
JPS63161449A (ja) * | 1986-12-24 | 1988-07-05 | Sumitomo Chem Co Ltd | 高コントラストなフオトレジスト組成物 |
JPS63178228A (ja) * | 1987-01-20 | 1988-07-22 | Fuji Photo Film Co Ltd | ポジ型フオトレジスト組成物 |
DE3727443A1 (de) * | 1987-08-18 | 1989-03-02 | Hoechst Ag | Lichtempfindliches gemisch auf basis von 1,2-naphthochinondiaziden und hiermit hergestelltes kopiermaterial |
JP2552891B2 (ja) * | 1988-01-26 | 1996-11-13 | 富士写真フイルム株式会社 | ポジ型フオトレジスト組成物 |
JPH02205850A (ja) * | 1989-02-04 | 1990-08-15 | Tosoh Corp | ポジ型フォトレジスト組成物 |
-
1990
- 1990-02-20 JP JP3929990A patent/JPH03242650A/ja active Pending
-
1991
- 1991-02-19 DE DE1991630265 patent/DE69130265T2/de not_active Expired - Fee Related
- 1991-02-19 EP EP19910102371 patent/EP0443533B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0443533A2 (de) | 1991-08-28 |
JPH03242650A (ja) | 1991-10-29 |
EP0443533A3 (en) | 1991-12-11 |
DE69130265D1 (de) | 1998-11-05 |
EP0443533B1 (de) | 1998-09-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP |
|
8339 | Ceased/non-payment of the annual fee |