DE69309769D1 - Positivarbeitende Resistzusammensetzung - Google Patents

Positivarbeitende Resistzusammensetzung

Info

Publication number
DE69309769D1
DE69309769D1 DE69309769T DE69309769T DE69309769D1 DE 69309769 D1 DE69309769 D1 DE 69309769D1 DE 69309769 T DE69309769 T DE 69309769T DE 69309769 T DE69309769 T DE 69309769T DE 69309769 D1 DE69309769 D1 DE 69309769D1
Authority
DE
Germany
Prior art keywords
resist composition
positive working
working resist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309769T
Other languages
English (en)
Other versions
DE69309769T2 (de
Inventor
Yasunori Uetani
Jun Tomioka
Hirotoshi Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Application granted granted Critical
Publication of DE69309769D1 publication Critical patent/DE69309769D1/de
Publication of DE69309769T2 publication Critical patent/DE69309769T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69309769T 1992-05-18 1993-05-17 Positivarbeitende Resistzusammensetzung Expired - Fee Related DE69309769T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04124536A JP3094652B2 (ja) 1992-05-18 1992-05-18 ポジ型レジスト組成物

Publications (2)

Publication Number Publication Date
DE69309769D1 true DE69309769D1 (de) 1997-05-22
DE69309769T2 DE69309769T2 (de) 1997-07-31

Family

ID=14887906

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309769T Expired - Fee Related DE69309769T2 (de) 1992-05-18 1993-05-17 Positivarbeitende Resistzusammensetzung

Country Status (8)

Country Link
US (1) US5407778A (de)
EP (1) EP0570884B1 (de)
JP (1) JP3094652B2 (de)
KR (1) KR100255880B1 (de)
CA (1) CA2095107A1 (de)
DE (1) DE69309769T2 (de)
MX (1) MX9302826A (de)
TW (1) TW312754B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0886183A1 (de) * 1993-12-17 1998-12-23 Fuji Photo Film Co., Ltd. Positiv-arbeitende Fotolackzusammensetzung
JP3224115B2 (ja) * 1994-03-17 2001-10-29 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
EP0695740B1 (de) 1994-08-05 2000-11-22 Sumitomo Chemical Company Limited Sulfonsäurechinondiazidester und diese enthaltende positiv-arbeitende Fotolackzusammensetzungen
EP0706090B1 (de) * 1994-10-05 2001-01-03 JSR Corporation Strahlungsempfindliche Harzzusammensetzung
JP3278306B2 (ja) 1994-10-31 2002-04-30 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
US5541033A (en) * 1995-02-01 1996-07-30 Ocg Microelectronic Materials, Inc. Selected o-quinonediazide sulfonic acid esters of phenolic compounds and their use in radiation-sensitive compositions
JP3501422B2 (ja) * 1995-03-17 2004-03-02 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
US5750310A (en) * 1995-04-27 1998-05-12 Fuji Photo Film Co., Ltd. Positive photoresist composition
JP3427562B2 (ja) * 1995-05-09 2003-07-22 住友化学工業株式会社 ポジ型レジスト組成物
EP0769485B1 (de) * 1995-10-18 2002-03-13 Sumitomo Chemical Company, Limited Positiv arbeitende Photolockzusammensetzung und Photosensibilisatoren
JP3485139B2 (ja) * 1996-01-30 2004-01-13 東京応化工業株式会社 ポジ型ホトレジスト組成物
US5821345A (en) * 1996-03-12 1998-10-13 Shipley Company, L.L.C. Thermodynamically stable photoactive compound
US5919597A (en) * 1997-10-30 1999-07-06 Ibm Corporation Of Armonk Methods for preparing photoresist compositions
JP4219435B2 (ja) * 1997-12-15 2009-02-04 東京応化工業株式会社 ポリフェノールジエステル化物の製造方法およびポジ型感光性組成物
KR100323831B1 (ko) * 1999-03-30 2002-02-07 윤종용 포토레지스트 조성물, 이의 제조 방법 및 이를 사용한 패턴의 형성방법
KR100374014B1 (ko) * 1999-04-02 2003-02-26 김수택 합성수지 형광 착색사로된 가림망

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4529682A (en) * 1981-06-22 1985-07-16 Philip A. Hunt Chemical Corporation Positive photoresist composition with cresol-formaldehyde novolak resins
JPS58134631A (ja) * 1982-01-08 1983-08-10 Konishiroku Photo Ind Co Ltd 感光性組成物
GB8505402D0 (en) * 1985-03-02 1985-04-03 Ciba Geigy Ag Modified phenolic resins
JPS6210646A (ja) * 1985-07-09 1987-01-19 Kanto Kagaku Kk ポジ型フオトレジスト組成物
JP2715480B2 (ja) * 1988-10-13 1998-02-18 住友化学工業株式会社 ポジ型レジスト用組成物
US5178986A (en) * 1988-10-17 1993-01-12 Shipley Company Inc. Positive photoresist composition with naphthoquinonediazidesulfonate of oligomeric phenol
US4957846A (en) * 1988-12-27 1990-09-18 Olin Hunt Specialty Products Inc. Radiation sensitive compound and mixtures with trinuclear novolak oligomer with o-naphthoquinone diazide sulfonyl group
JP2700918B2 (ja) * 1989-04-26 1998-01-21 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
JP2741243B2 (ja) * 1989-05-11 1998-04-15 日本ゼオン株式会社 ポジ型レジスト組成物
JP2761786B2 (ja) * 1990-02-01 1998-06-04 富士写真フイルム株式会社 ポジ型フオトレジスト組成物

Also Published As

Publication number Publication date
JPH05323597A (ja) 1993-12-07
CA2095107A1 (en) 1993-11-19
KR100255880B1 (ko) 2000-06-01
EP0570884B1 (de) 1997-04-16
JP3094652B2 (ja) 2000-10-03
DE69309769T2 (de) 1997-07-31
EP0570884A2 (de) 1993-11-24
KR930023769A (ko) 1993-12-21
MX9302826A (es) 1994-02-28
US5407778A (en) 1995-04-18
TW312754B (de) 1997-08-11
EP0570884A3 (de) 1995-06-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee