DE69308634D1 - Positiv arbeitende Photolackzusammensetzung - Google Patents

Positiv arbeitende Photolackzusammensetzung

Info

Publication number
DE69308634D1
DE69308634D1 DE69308634T DE69308634T DE69308634D1 DE 69308634 D1 DE69308634 D1 DE 69308634D1 DE 69308634 T DE69308634 T DE 69308634T DE 69308634 T DE69308634 T DE 69308634T DE 69308634 D1 DE69308634 D1 DE 69308634D1
Authority
DE
Germany
Prior art keywords
photoresist composition
positive working
working photoresist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69308634T
Other languages
English (en)
Other versions
DE69308634T2 (de
Inventor
Kyoko Nagase
Haruyoshi Osaki
Hiroshi Moriuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Application granted granted Critical
Publication of DE69308634D1 publication Critical patent/DE69308634D1/de
Publication of DE69308634T2 publication Critical patent/DE69308634T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Optical Filters (AREA)
  • Formation Of Insulating Films (AREA)
DE69308634T 1992-05-27 1993-05-26 Positiv arbeitende Photolackzusammensetzung Expired - Fee Related DE69308634T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4134863A JPH05323605A (ja) 1992-05-27 1992-05-27 ポジ型レジスト組成物

Publications (2)

Publication Number Publication Date
DE69308634D1 true DE69308634D1 (de) 1997-04-17
DE69308634T2 DE69308634T2 (de) 1997-07-10

Family

ID=15138238

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69308634T Expired - Fee Related DE69308634T2 (de) 1992-05-27 1993-05-26 Positiv arbeitende Photolackzusammensetzung

Country Status (8)

Country Link
US (1) US5451484A (de)
EP (1) EP0571989B1 (de)
JP (1) JPH05323605A (de)
KR (1) KR100255879B1 (de)
CA (1) CA2096317A1 (de)
DE (1) DE69308634T2 (de)
MX (1) MX9303080A (de)
TW (1) TW275670B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3424341B2 (ja) * 1994-04-11 2003-07-07 住友化学工業株式会社 感光性樹脂組成物
DE69519781T2 (de) * 1994-10-05 2001-06-07 Japan Synthetic Rubber Co Ltd Strahlungsempfindliche Harzzusammensetzung
US6013407A (en) * 1995-01-17 2000-01-11 Nippon Zeon Co., Ltd. Positive resist composition
JP3427562B2 (ja) * 1995-05-09 2003-07-22 住友化学工業株式会社 ポジ型レジスト組成物
US6191197B1 (en) * 1996-09-23 2001-02-20 Bridgestone Corporation Extended polymer compostion derived from blends of elastomers and syndiotactic polystyrene
JP3666839B2 (ja) * 1998-01-23 2005-06-29 東京応化工業株式会社 ポジ型ホトレジスト組成物およびその製造方法
JP5535869B2 (ja) * 2010-10-21 2014-07-02 明和化成株式会社 ノボラック型フェノール樹脂およびこれを含むフォトレジスト組成物
JP2013195497A (ja) * 2012-03-16 2013-09-30 Sumitomo Bakelite Co Ltd フォトレジスト用樹脂組成物
US8822123B2 (en) 2012-07-13 2014-09-02 Momentive Specialty Chemicals Inc. Polymeric materials and methods for making the polymeric materials
CN108139674B (zh) * 2015-10-19 2021-09-28 日产化学工业株式会社 含有含长链烷基的酚醛清漆的抗蚀剂下层膜形成用组合物

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5238774A (en) * 1985-08-07 1993-08-24 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive composition containing 1,2-quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent
JPH0654384B2 (ja) * 1985-08-09 1994-07-20 東京応化工業株式会社 ポジ型ホトレジスト組成物
JP2577908B2 (ja) * 1987-04-20 1997-02-05 日本ゼオン株式会社 ポジ型フオトレジスト組成物
NO891063L (no) * 1988-03-31 1989-10-02 Thiokol Morton Inc Novolakharpikser av blandede aldehyder og positive fotoresistmaterialer fremstilt fra slike harpikser.
CA1337626C (en) * 1988-07-07 1995-11-28 Haruyoshi Osaki Radiation-sensitive positive resist composition
JP2814721B2 (ja) * 1989-09-05 1998-10-27 住友化学工業株式会社 ポジ型感放射線性レジスト組成物
CA2024312A1 (en) * 1989-09-05 1991-03-06 Haruyoshi Osaki Radiation-sensitive positive resist composition
US5215856A (en) * 1989-09-19 1993-06-01 Ocg Microelectronic Materials, Inc. Tris-(hydroxyphenyl) lower alkane compounds as sensitivity enhancers for o-quinonediazide containing radiation-sensitive compositions and elements
JP2567282B2 (ja) * 1989-10-02 1996-12-25 日本ゼオン株式会社 ポジ型レジスト組成物
JPH061377B2 (ja) * 1989-12-28 1994-01-05 日本ゼオン株式会社 ポジ型レジスト組成物

Also Published As

Publication number Publication date
EP0571989B1 (de) 1997-03-12
EP0571989A3 (de) 1994-11-02
KR930023767A (ko) 1993-12-21
CA2096317A1 (en) 1993-11-28
JPH05323605A (ja) 1993-12-07
KR100255879B1 (ko) 2000-06-01
US5451484A (en) 1995-09-19
MX9303080A (es) 1994-02-28
DE69308634T2 (de) 1997-07-10
EP0571989A2 (de) 1993-12-01
TW275670B (de) 1996-05-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee