MX9303080A - Composicion de capa protectora positiva. - Google Patents

Composicion de capa protectora positiva.

Info

Publication number
MX9303080A
MX9303080A MX9303080A MX9303080A MX9303080A MX 9303080 A MX9303080 A MX 9303080A MX 9303080 A MX9303080 A MX 9303080A MX 9303080 A MX9303080 A MX 9303080A MX 9303080 A MX9303080 A MX 9303080A
Authority
MX
Mexico
Prior art keywords
protective layer
positive protective
composition
layer composition
positive
Prior art date
Application number
MX9303080A
Other languages
English (en)
Inventor
Kyoko Nagase
Haruyoshi Osaki
Hiroshi Moriuma
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of MX9303080A publication Critical patent/MX9303080A/es

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Optical Filters (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

Se describe una composición de capa protectora positiva que comprende un compuesto de quinonadiazida y una resina soluble en álcali (A) obtenible por medio de una reacción de condensación de por lo menos un compuesto representado por la fórmula general (I). Esta composición de capa protectora positiva es excelente en propiedades tales como perfil, resolución, resistencia al calor, etc.
MX9303080A 1992-05-27 1993-05-26 Composicion de capa protectora positiva. MX9303080A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4134863A JPH05323605A (ja) 1992-05-27 1992-05-27 ポジ型レジスト組成物

Publications (1)

Publication Number Publication Date
MX9303080A true MX9303080A (es) 1994-02-28

Family

ID=15138238

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9303080A MX9303080A (es) 1992-05-27 1993-05-26 Composicion de capa protectora positiva.

Country Status (8)

Country Link
US (1) US5451484A (es)
EP (1) EP0571989B1 (es)
JP (1) JPH05323605A (es)
KR (1) KR100255879B1 (es)
CA (1) CA2096317A1 (es)
DE (1) DE69308634T2 (es)
MX (1) MX9303080A (es)
TW (1) TW275670B (es)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3424341B2 (ja) * 1994-04-11 2003-07-07 住友化学工業株式会社 感光性樹脂組成物
EP0706090B1 (en) * 1994-10-05 2001-01-03 JSR Corporation Radiation sensitive resin composition
EP0831370A4 (en) * 1995-01-17 1999-08-18 Nippon Zeon Co POSITIVELY WORKING PHOTO PAINT COMPOSITION
JP3427562B2 (ja) * 1995-05-09 2003-07-22 住友化学工業株式会社 ポジ型レジスト組成物
US6191197B1 (en) * 1996-09-23 2001-02-20 Bridgestone Corporation Extended polymer compostion derived from blends of elastomers and syndiotactic polystyrene
JP3666839B2 (ja) * 1998-01-23 2005-06-29 東京応化工業株式会社 ポジ型ホトレジスト組成物およびその製造方法
JP5535869B2 (ja) * 2010-10-21 2014-07-02 明和化成株式会社 ノボラック型フェノール樹脂およびこれを含むフォトレジスト組成物
JP2013195497A (ja) * 2012-03-16 2013-09-30 Sumitomo Bakelite Co Ltd フォトレジスト用樹脂組成物
US8822123B2 (en) 2012-07-13 2014-09-02 Momentive Specialty Chemicals Inc. Polymeric materials and methods for making the polymeric materials
WO2017069063A1 (ja) * 2015-10-19 2017-04-27 日産化学工業株式会社 長鎖アルキル基含有ノボラックを含むレジスト下層膜形成組成物

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5238774A (en) * 1985-08-07 1993-08-24 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive composition containing 1,2-quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent
JPH0654384B2 (ja) * 1985-08-09 1994-07-20 東京応化工業株式会社 ポジ型ホトレジスト組成物
JP2577908B2 (ja) * 1987-04-20 1997-02-05 日本ゼオン株式会社 ポジ型フオトレジスト組成物
NO891063L (no) * 1988-03-31 1989-10-02 Thiokol Morton Inc Novolakharpikser av blandede aldehyder og positive fotoresistmaterialer fremstilt fra slike harpikser.
DE68928823T2 (de) * 1988-07-07 1999-02-25 Sumitomo Chemical Co Strahlungsempfindliche, positiv arbeitende Resistzusammensetzung
CA2024312A1 (en) * 1989-09-05 1991-03-06 Haruyoshi Osaki Radiation-sensitive positive resist composition
JP2814721B2 (ja) * 1989-09-05 1998-10-27 住友化学工業株式会社 ポジ型感放射線性レジスト組成物
US5215856A (en) * 1989-09-19 1993-06-01 Ocg Microelectronic Materials, Inc. Tris-(hydroxyphenyl) lower alkane compounds as sensitivity enhancers for o-quinonediazide containing radiation-sensitive compositions and elements
JP2567282B2 (ja) * 1989-10-02 1996-12-25 日本ゼオン株式会社 ポジ型レジスト組成物
JPH061377B2 (ja) * 1989-12-28 1994-01-05 日本ゼオン株式会社 ポジ型レジスト組成物

Also Published As

Publication number Publication date
DE69308634D1 (de) 1997-04-17
EP0571989A3 (en) 1994-11-02
US5451484A (en) 1995-09-19
KR100255879B1 (ko) 2000-06-01
JPH05323605A (ja) 1993-12-07
DE69308634T2 (de) 1997-07-10
EP0571989B1 (en) 1997-03-12
EP0571989A2 (en) 1993-12-01
TW275670B (es) 1996-05-11
KR930023767A (ko) 1993-12-21
CA2096317A1 (en) 1993-11-28

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Legal Events

Date Code Title Description
FG Grant or registration
MM Annulment or lapse due to non-payment of fees