MX9302015A - Composicion de capa fotosensible positiva. - Google Patents

Composicion de capa fotosensible positiva.

Info

Publication number
MX9302015A
MX9302015A MX9302015A MX9302015A MX9302015A MX 9302015 A MX9302015 A MX 9302015A MX 9302015 A MX9302015 A MX 9302015A MX 9302015 A MX9302015 A MX 9302015A MX 9302015 A MX9302015 A MX 9302015A
Authority
MX
Mexico
Prior art keywords
photosensitive layer
layer composition
positive photosensitive
soluble resin
alkali soluble
Prior art date
Application number
MX9302015A
Other languages
English (en)
Inventor
Takehiro Kusumoto
Yuji Ueda
Naoki Takeyama
Hiromi Ueki
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5005793A external-priority patent/JPH05341531A/ja
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of MX9302015A publication Critical patent/MX9302015A/es

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

Esta invención proporciona una composición fotoendurecible o de capa fotosensible positiva, que comprende una resina soluble enálcali, un inhibidor de disolución y un precursor ácido fotoinducido, en donde la resina soluble en álcali es obtenible a través de una reacción de condensación de un compuesto representado por la fórmula general (I).
MX9302015A 1992-04-10 1993-04-07 Composicion de capa fotosensible positiva. MX9302015A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9077192 1992-04-10
JP5005793A JPH05341531A (ja) 1992-04-10 1993-01-18 ポジ型フォトレジスト組成物

Publications (1)

Publication Number Publication Date
MX9302015A true MX9302015A (es) 1994-03-31

Family

ID=26339796

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9302015A MX9302015A (es) 1992-04-10 1993-04-07 Composicion de capa fotosensible positiva.

Country Status (5)

Country Link
US (1) US5800966A (es)
EP (1) EP0564997B1 (es)
CA (1) CA2092774A1 (es)
DE (1) DE69303650T2 (es)
MX (1) MX9302015A (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994014892A1 (fr) * 1992-12-24 1994-07-07 Sumitomo Chemical Company, Limited Composition de resine photosensible pour filtre couleur
US5876895A (en) * 1992-12-24 1999-03-02 Sumitomo Chemical Company, Limited Photosensitive resin composition for color filter
JPH06214395A (ja) * 1993-01-18 1994-08-05 Sumitomo Chem Co Ltd ポジ型フォトレジスト組成物
JPH09166871A (ja) 1995-12-15 1997-06-24 Sumitomo Chem Co Ltd フォトレジスト組成物
JP3638086B2 (ja) * 1998-08-21 2005-04-13 東京応化工業株式会社 ポジ型レジスト組成物及びそれを用いたレジストパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371605A (en) * 1980-12-09 1983-02-01 E. I. Du Pont De Nemours And Company Photopolymerizable compositions containing N-hydroxyamide and N-hydroxyimide sulfonates
EP0388343B1 (en) * 1989-03-14 1996-07-17 International Business Machines Corporation Chemically amplified photoresist
US5120633A (en) * 1990-04-10 1992-06-09 E. I. Du Pont De Nemours And Company Resist material for use in thick film resists
EP0460416B1 (en) * 1990-06-05 1996-08-21 Sumitomo Chemical Company, Limited Positive resist composition
TW207009B (es) * 1991-01-31 1993-06-01 Sumitomo Chemical Co

Also Published As

Publication number Publication date
US5800966A (en) 1998-09-01
DE69303650T2 (de) 1996-11-28
EP0564997A2 (en) 1993-10-13
EP0564997B1 (en) 1996-07-17
CA2092774A1 (en) 1993-10-11
DE69303650D1 (de) 1996-08-22
EP0564997A3 (en) 1993-11-03

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Legal Events

Date Code Title Description
FG Grant or registration
MM Annulment or lapse due to non-payment of fees